Vacuum Unit

(Example -EP) 16 Vacuum Pump System Vacuum Unit ZK2mA Series Manifold Refer to page 16 for the vacuum pump system for the manifold.

SMC Pneumatic Clean Series

Proper auto switch mounting position (Detection at stroke end) D-C73 Auto switch 8.5 16 Approx. Hs A 26 B D-H7A1/H7B Auto switch 8.5 16 Approx.

Series SYJ500 Rubber seal 3 Port Pilot Solenoid Valve

) (Station n) (Station 1) (Station n) (Station 1) (Light/surge voltage suppressor) 54.1 [61.1] + + + + A A 19.2 9.4 38.7 21 25.5 (Pitch) P=17 21 1/8 (A port) 19.2 9.4 A A 18.5 (Pitch) P=16 16 M5 x 0.8 (A port) L plug connector (L) M plug connector (M) DIN terminal (D) M8 connector (W0) 49 49 49 49 57.2 [59.4] 36.2 67 [69.2] 52.2 58.7 76.1 Max. 10 66.1 77 Pg7 65.2 [72.2] Approx. 300 (Lead

Series 10/11 -CQSX, -CQ2X Microspeed Cylinder for Clean Room Series 10-, 11-

, 20 25, 32, 40 50, 63, 80 100 12, 16, 20 25, 32, 40 50, 63, 80 100 20, 25 32, 40 50, 63 32, 40 50, 63 80, 100 6, 10 16, 20 25, 32 10, 16 20 25, 32 12, 16 20, 25 32, 40 6, 10 15, 20 25, 32 6, 10 16 20, 25 32, 45 6, 10 16 20, 25, 32 40, 50 10, 15 25 12, 16 20, 25 Bore sizes (mm) 5 to 50mm/s 7 to 50 mm/s 5 to 50 mm/s 5 to 50mm/s Piston speed Shock absorber (optional for CX2) No rubber bumper

Rubber seal 5 Port Solenoid Valve Series SYJ5000

(DIN 22.7) 21.5 (DIN 22.7) 8.5 103.2 [107.6] 16.5 23.5 R P R R P R A A A A A 87.2 [91.6] 33 47 44.2 [46.4] 22.1 (DIN 23.3) 43.6 [45.8] B B B B B 2.5 1/8 (P, R port) (Pitch) P = 16 Manual override 21 (Station n) (Station 1) Built-in speed controller (Light/surge voltage suppressor) 48.6 [55.6] + + + + + 33.2 12 20 M5 x 0.8 (A, B port) 24 Max. 13.5 43.5 (Pitch) P = 16 23 L plug connector (

Rubber seal 5 Port Solenoid Valve Series SYJ7000

For built-in one-touch fitting One-touch fitting (A, B port) Applicable tubing O.D.: 6, 1/4" 8, 5/16" 63 (4.9) Station n L1 L2 Station 3 88 68 Station 12 272.5 252.5 4 108.5 88.5 5 129 109 6 149.5 129.5 7 170 150 8 190.5 170.5 9 211 191 10 231.5 211.5 11 252 232 67

4/5 Port Solenoid Valve Series SYJ3000/5000/7000

Station n L1 L2 Station 2 35.5 28.5 Station 20 224.5 217.5 3 46 39 4 56.5 49.5 5 67 60 6 77.5 70.5 7 88 81 8 98.5 91.5 9 109 102 10 119.5 112.5 11 130 123 12 140.5 133.5 13 151 144 14 161.5 154.5 15 172 165 16 182.5 175.5 17 193 186 18 203.5 196.5 19 214 207 16 Series SYJ3000 Type 31 Manifold: Side Ported/SS5YJ3-31Stations -M3 [ ]: AC Grommet (G) Single solenoid coil is on same side as the

4/5 Port Solenoid Valve Rubber Seal Series SYJ3000 For details about certified products conforming to international standards, visit us at www.smcworld.com.

rate: 50% Stroke 300 mm 6 10 16 20 25 32 40 Average speed (mm/s) Series 800 700 600 500 400 300 200 100 0 Perpendicular, upward actuation Horizontal actuation SYJ3140-M5 Cylinder is in extending.

SMC Electronic Switch Series Variations

SE1-ll-16, -17 I Z PFor swich type "-16" or "-17", rotating SET1 will adjust ON setting for OUT1 (Black lead wire, Red LED) and SET2 will adjust ON setting for OUT2 (White lead wire, Green LED).

Series SYJ700 Rubber seal 3 Port Pilot Solenoid Valve

(Example) SS3YJ7-20-03 . 1 set (manifold base) SYJ712-5LZ-01 . 2 sets (valve) SYJ700-10-1A . 1 set (blanking plate assembly) SS3YJ7-42R-03-01 . 1 set (manifold base) SYJ714R-5G . 2 sets (valve) SYJ700-10-2A . 1 set (blanking plate assembly) The asterisk denotes the symbol for assembly.

100

(Recommended tightening torque: 3 to 5 Nm) ZL112A-G With pressure gauge P V 56 Circuit diagram * Tighten to the recommended torque on pages 15 and 16 to mount the body.

AKH/AKB Series

Body PBT 1 Valve NBR, Aluminum alloy 2 Spring Stainless steel 3 Spacer Brass Electroless nickel plated 4 Cassette 5 Seal NBR 6 Male Connector Type: AKH 4, 6 8 x R 1/8 5/32, 1/4 5/16 x NPT 1/8 M5 type U10/32 8, 10, 12 5/16, 3/8, 1/2 Free flow Fitting Male thread Description Material Note Parts list No.

AKH/AKB Series Check Valve with One-touch Fitting

Body PBT 1 Valve NBR, Aluminum alloy 2 Spring Stainless steel 3 Spacer Brass Electroless nickel plated 4 Cassette 5 Seal NBR 6 Male Connector Type: AKH 4, 6 8 x R 1/8 5/32, 1/4 5/16 x NPT 1/8 M5 type U10/32 8, 10, 12 5/16, 3/8, 1/2 Free flow Fitting Male thread Description Material Note Parts list No.

NVJ100, NVJ300, NVJ3000 3,5 Port Solenoid Valve/Rubber Seal Type

4E)-Ms, B3r Stationsn ) 2 6 a 9 '10 ll 13 14 16 t8 19 20 L-l 1.47 (47.5)2.24 2.70 (58) (68.5)(79) (89.5)3.94 000) 4.35 (n0.5) 4.76 \121) 5.18 03I.5) 5.59 (142) 6.00 (152.5) 6.42 0631 6.A3 (173.5) 7 .24 (184) 7.66 (194.5) 4.07 (205) 4.48 (215.5) 8.90 \2?6) 9.31 (236.s) u 1.56 (39.5)1.97 (50) 2.38 (60.5)2.& (?

o

4E)-Ms, B3r Stationsn ) 2 6 a 9 '10 ll 13 14 16 t8 19 20 L-l 1.47 (47.5)2.24 2.70 (58) (68.5)(79) (89.5)3.94 000) 4.35 (n0.5) 4.76 \121) 5.18 03I.5) 5.59 (142) 6.00 (152.5) 6.42 0631 6.A3 (173.5) 7 .24 (184) 7.66 (194.5) 4.07 (205) 4.48 (215.5) 8.90 \2?6) 9.31 (236.s) u 1.56 (39.5)1.97 (50) 2.38 (60.5)2.& (?

o

4E)-Ms, B3r Stationsn ) 2 6 a 9 '10 ll 13 14 16 t8 19 20 L-l 1.47 (47.5)2.24 2.70 (58) (68.5)(79) (89.5)3.94 000) 4.35 (n0.5) 4.76 \121) 5.18 03I.5) 5.59 (142) 6.00 (152.5) 6.42 0631 6.A3 (173.5) 7 .24 (184) 7.66 (194.5) 4.07 (205) 4.48 (215.5) 8.90 \2?6) 9.31 (236.s) u 1.56 (39.5)1.97 (50) 2.38 (60.5)2.& (?

Microspeed Cylinder: Double Acting/Single Rod Series CUX ø 10, ø 16, ø 20, ø 25, ø 32 Dimensions and auto switch details are equivalent to those of the standard double acting single rod cylinder.

Proper tightening torque (Nm) (cylinder body) 10 16 20, 25 32 Hexagon socket head cap screw size (mm) Bore sizes (mm) 16 20 25 32 Piston seal: 1 pc. Rod seal: 1 pc. Gasket: 1 pc. CUX16-PS CUX20-PS M3 0.54 10% CUX25-PS M4 1.23 10% Grease pack (10g): 1 pc. CUX32-PS M5 2.55 10% Due to cylinder structure, 10mm bore size seals cannot be replaced. M6 4.02 10% 2.

ZQ-OM01401

0.15 22 20 17 32 3.2 0.25 31 29 24 46 0.35 44 39 31 60 0.45 54 48 38 74 0.05 11 11 9 16 0.15 24 22 18 33 4 0.25 34 32 27 48 0.35 46 42 35 62 0.45 57 52 44 76 0.05 12 11 9 16 0.15 25 24 20 33 6 0.25 37 34 30 47 0.35 49 45 39 63 0.45 61 56 48 77 3 39 - No.ZQ-OM01401-B 12. 12.1 12.2 0 40 - No.ZQ-OM01401-B 12.3 Assy ZQ VQ100 3 2 Assy Assy Assy () ZQA-K15LO--2 ZQA-K25LO--2 ZQA-J15LO--

Microspeed Cylinder: Double Acting/Single Rod Series CQSX ø 12, ø 16, ø 20, ø 25 Dimensions and auto switch details are equivalent to those of the standard double acting single rod cylinder.

Piston seal: 1 pc. 12 16 20 25 CQSX12-PS Rod seal: 1 pc. CQSX16-PS Tube gasket: 1 pc. CQSX20-PS Grease pack (10g): 1 pc. CQSX25-PS 2. Grease packs When maintenance requires only grease, use the following part numbers to order. Grease pack GR-L-005 (5g) GR-L-010 (10g) GR-L-150 (150g) 6

ZL3-OM00801

No 1 2)3) 4) 5)6) 6) 5)6) 7) O 8) 9) 10) 11) 12) 13) 1 2)3) 4) 14) 15) 10) 11)16) 28 No.ZL3-OM00801-A No 1 ON 10 2) 3) 4) 5) 6) 7) 8) O O 9) 10) 11) 12) 13) 14) 15) ON/OFF 16) 29 No.ZL3-OM00801-A Revision history AUKCA marking added 4-14-1, Sotokanda, Chiyoda-ku, Tokyo 101-0021 JAPAN Tel: + 81 3 5207 8249 Fax: +81 3 5298 5362 URL https://www.smcworld.com