I

ax. operating cycb 2 pooition single/double 600 cpm 3 PGition 180 cpm LubricationNot required lianual ovenkteNon-locking push type, Slotted lockins t/pe , Knob locking type ilounting positionFree krpacvvlbration reskiarrce-3oG/5G (8.32oooHz) Enclosqre -Dust Prool Pilot extraust-lndlvidual exhaust, common exhaust {or main valve and pilot valve Solenoid Electrical entry-G.ommet, G.ommst terminal

For Dry Air, Pilot Operated Series VQ20/30 2 Port Solenoid Valve

Series P port/Thread VV2Q22-05 1 set Manifold part No. 2 3 VQ20 VQ30 Rc3/8 NPT3/8 NPTF3/8 G3/8 VQ21M1-5G-C6 00N 00T 00F 4 sets Valve part No. (Stations 1 to 4) Stations VQ21M1-5G-C8 1 set Valve part No.

Series 10/11 -CQSX, -CQ2X Microspeed Cylinder for Clean Room Series 10-, 11-

Grease pack GR-X-005 (5g) Caution 1. Be careful of the snap ring springing out.

Air cylinder

PTFE Grease Specification Standard models -X446 Grease pack part number: GR-F-005(5g) 21 - Lubrication Caution 1) Lubrication for products using special grease Lubrication to this cylinder leads to operation failure. Otherwise, it may cause the operating failure. 2) Do not wipe off the grease on the sliding surface of the air cylinder.

CM2x-OM0230Q

PTFE X446 GR-F-005(5g) 1) 19 - 2) () 5. 5. 20 - 6. 1.

CG1-OM0227

P18, 3-2. 2. 3. 23 1. 2. 1. 2. 1. 2. 3. 1. 1. 2. P9, 2-6-2. ON ( ON) 1. 2. ON 3. 60 ON 4. OFF ( OFF 1. 2. ON 24 4. (XC85,X446) 4-1. -XC85 GR-H-010(10g) <> splash zone <> splash zone 4-2.

4/5 Port Solenoid Valve Rubber Seal Series SYJ3000 For details about certified products conforming to international standards, visit us at www.smcworld.com.

Example: SS5YJ3-20-03 1 set (Manifold base) SYJ3120-5G-M3 2 sets (Valve) SYJ3000-21-1A 1 set (Blanking plate assembly) SS5YJ3-S41-03-C4 1 set (Manifold base) SYJ3140-5LZ 2 sets (Valve) SYJ3000-21-2A 1 set (Balnking plate assembly) The asterisk denotes the symbol for assembly. Prefix it to the part nos. of the solenoid valve, etc.

3 Way, 3 Port NVF110 Series Direct Solenoid Operated

D I N 'E Terminal 'T Conduit Temlnal 'H 24' Lead hing 01 %'(AXSrd.) t M5 NOM 10-32 ilanual Overrida _Recessed, Nonlocking (Std.)

lVFl 10

D I N 'E Terminal 'T Conduit Temlnal 'H 24' Lead hing 01 %'(AXSrd.) t M5 NOM 10-32 ilanual Overrida _Recessed, Nonlocking (Std.)

3M/SMseries

) (olN cmnector] (Conduit teminal) Manifold NVF5000 # NW5F5-20 NVF3000 NW5F3-30 Type CYL port Exhaust B mount Common, lndividual o TVpe/Rubber Seal NVF3OOO SyrnUot Douuo NVF323O (B) (A) cl c2 Gompact size and llght weight _1.04inch wide Large flow capacitY -cv1.o(%) Body Ported Slngl NVF313O (B) (A) Low power consumption -1.8WDC WF333O Exhaust Conter NVF343O GNced Center (B) (A) (B) (a) 01

Body Ported), Voltage: 6 (12VDC), Electrical Entry: G (Grommet), Orifice Size: 23 (2.3mm), Port Size: 01 [Base Mount w/Sub-Plate 1/8(6A) or Body Ported 1/8(6A)], Thread Type: Rc, Body/Seal Material: Body C37, Seal FKM, Option: F (Foot Bracket)

Type: Solenoid Valves, Application: Single Unit, Mounting Orientation: Direct, Voltage: DC24V, Specification: Standard, Actuation: [Single] Single, Status at Power Off: Self-Recovery (Spring Return), Valve Positions: 2-Position Normally Closed, Pipe Port Type: [Rc (R)] Rc, Port Size: 1/8, Pressure Rating(MPa): 0 to 1.0, Driving Type: Linear Motion Poppet, Seal Type: Soft Seal, Plumbing: Direct

Type: Solenoid Valves, Application: Single Unit, Mounting Orientation: Direct, Voltage: DC24V, Specification: Standard, Actuation: [Single] Single, Status at Power Off: Self-Recovery (Spring Return), Valve Positions: 2-Position Normally Closed, Pipe Port Type: [Rc (R)] Rc, Port Size: 1/8, Pressure Rating(MPa): 0 to 1.0, Driving Type: Linear Motion Poppet, Seal Type: Soft Seal, Plumbing: Direct

Body Ported), Voltage: 5 (24VDC), Electrical Entry: G (Grommet), Orifice Size: 40 (4mm), Port Size: 01 [Base Mount w/Sub-Plate 1/8(6A) or Body Ported 1/8(6A)]

Body Ported), Voltage: 5 (24VDC), Electrical Entry: G (Grommet), Orifice Size: 16 (1.6mm), Port Size: 01 [Base Mount w/Sub-Plate 1/8(6A) or Body Ported 1/8(6A)]

2

Thread type Nil R N NPT G G Port size 01 1/8 02 1/4 03 3/8 04 1/2 INDEX 474 Series AS-FG Needle Valve/Flow-rate Characteristics AS1201FG-M5, AS1211FG-M5 AS1301FG-M5, AS1311FG-M5 AS2201FG-01, AS2211FG-01 AS2301FG-01, AS2311FG-01 AS2201FG-02, AS2211FG-02 AS2301FG-02, AS2311FG-02 600 300 Inlet pressure: 0.5 MPa Inlet pressure: 0.5 MPa Inlet pressure: 0.5 MPa 100 01, 23, 03, 04, 06, 07 01, 23

CATALOG

G33-4-01 G33-10-01 G43-2-01 G43-4-01 G43-10-01 G43-10-01 G43-4-01 G43-10-01 Accuracy + 3% (full span) Courtesy of Steven Engineering, Inc. !

Table of Contents

AS131F-M3-23 AS131F-M3-01 17.9 7.2 7.2 28.3 17.6 17.6 7.2 28.3 24.1 24 4 3.2 8.4 1/8" 28.6 17.9 26.6 24.1 24 21.5 17.9 8.4 4 ASV 12.7 7.2 5.5 5.5 10.1 21.5 10.1 26.6 18.3 12.7 M3 x 0.5 M3 x 0.5 AS131F-M3-04 AS131F-M3-03 28.6 17.9 5 18.3 4 5/32" 9.3 9.3 5 AS131F-M5-23 AS131F-M5-01 M5 x 0.8 1/8" M5 x 0.8 19.8 3.2 19.8 8.4 8.4 AK AS131F-U10/32-23 AS131F-U10/32-01 1/8" 10-32UNF 10-32UNF 12.7

Table of Contents

O.D. 1 8 1 4 1 8 1 4 3 8 1 8 1 4 3 8 1 8 1 4 3 8 1 4 3 8 1 2 1 4 3 8 1 2 1 4 3 8 1 2 1 4 3 8 1 2 21 25 22 27 38 30 32 39 31 32 37 38 44 66 38 43 65 53 53 68 51 52 67 10 17 19 17 19 20 18 21 20 18 21 20 22 21 25 22 21 25 23 22 25 23 22 25 KFL04-01 KFL04-02 KFL06-01 KFL06-02 KFL06-03 KFL08U-01 KFL08U-02 KFL08U-03 KFL08N-01 KFL08N-02 KFL08N-03 KFL10U-02 KFL10U-03 KFL10U-04 KFL10N-02 KFL10N-03

Table of Contents

13.7 35 7 61 78 8 39 23 13.7 35 7 61 B C D E F G H (Mounting hole) ZH05BS-06-01 ZH05BL-06-01 ZH07BS-06-01 ZH07BL-06-01 ZH10BS-06-01 ZH10BL-06-01 ZH13BS-08-02 ZH13BL-08-02 I J K L M N O P Model 1 8 Rc 1 8 Rc 1 8 Rc 1 8 Rc 1 8 Rc 1 8 Rc 1 4 Rc 1 4 ZH05BS-06-01 ZH05BL-06-01 ZH07BS-06-01 ZH07BL-06-01 ZH10BS-06-01 ZH10BL-06-01 ZH13BS-08-02 ZH13BL-08-02 57 12 3.2 24 Rc 5.8 2 38.5 57 12 3.2 24