REA/REB

, 250, 300, 350, 400, 450, 500, 600, 700, 800 4000 32 200, 250, 300, 350, 400, 450, 500, 600, 700, 800 40 5000 200, 250, 300, 350, 400, 450, 500, 600, 700, 800, 900, 1000 50 200, 250, 300, 350, 400, 450, 500, 600, 700, 800, 900, 1000 6000 63 200, 250, 300, 350, 400, 450, 500, 600, 700, 800, 900, 1000 Made to Order Specifications (For details, refer to page 10-21-1.)

Modular Design with Uniform Body Style

80 AC50-D/AC60-D Model E F G H Applicable size VHS20-D 28 42 17.5 40 AC20-D VHS30-D 38 53 20 53 AC30-D VHS40-D 52 71 29 70 AC40-D VHS40-06-D 52 71 29 70 AC40-06-D VHS50-D 72 90 33 90 AC50-D/AC60-D Caution on Mounting Use an air filter on the inlet side for operating protection.

Compact manifold regulator ARM5 Series

Stations L2 dimension IN IN IN 35 1 2 3 4 5 6 7 8 9 M VVQ1000-90-7 98 17 16 VVQ1000-90-8 110.5 VVQ1000-90-9 123 IN side OUT side VVQ1000-90-11 148 Fitting size VVQ1000-90-12 160.5 Straight Elbow Elbow Elbow Straight Elbow Elbow Elbow R S T U V W X Y VVQ1000-90-13 173 4, 5/32 VVQ1000-90-14 185.5 2.5 6 11 37.5 6 VVQ1000-90-15 198 3 12.5 19 37.5 3 6.5 11 38 1/4 VVQ1000-90-16 210.5 3 12.5 19

Table of Contents

Weight (g) CRBU2W10 CRBU2W15 CRBU2W20 CRBU2W30 90 CRBU2W40 90 Vane type Model (size) 90 270 180 90 270 180 180 270 180 270 180 90 270 Rotating angle Single vane Double vane 469 47.1 263 140 142 143 72 47.5 258 255 491 480 72 73 47 Body of rotary actuator Auto switch unit + 2 switches 30 50 60 46.5 30 Angle adjuster 30 90 150 203 47 90 100 90 100 90 90 100 90 100 100 Rotating angle 158 308

Environment

: 2000 mm/s2 90 50 Lead 4: LEY32C 80 Lead 4: LEY32C 40 43 Horizontal work load [kg] 70 Vertical work load [kg] Lead 8: LEY32B 60 30 40 45 50 Lead 8: LEY32B 22 Lead 16: LEY32A 20 30 11 20 10 Lead 16: LEY32A 10 0 0 0 300 200 400 100 500 600 0 300 200 400 100 500 600 Speed [mm/s] Speed [mm/s] LEY40m LEY40m for acceleration/deceleration: 2000 mm/s2 100 60 Lead 4: LEY40C Lead 4: LEY40C 90 53 Horizontal

7

Special electrical entry direction With bracket/Special electrical entry direction VXD2 to VXD2 3 A 6 D VXD2 to VXD2 3 A 6 D VXD2 to VXD2 7 E 9 G 90 Symbol Symbol Standard 180 90 180 90 90 A IN OUT Nil B IN OUT OUT IN IN OUT 180 180 180 180 270 90 270 90 B IN OUT IN OUT A C IN OUT IN OUT 270 270 270 270 1 Available for the VXD23 A to 26 D. 2 Bracket is attached as standard with the resin

Controller/Driver LEC/JXC Series <Single Axis Controllers> Step Data Input Type Page 560 Gateway Unit Page 572 Programless Type Page 576 Step Motor LEC-G Series Step Motor Servo Motor (Servo/24 VDC)/ (Servo/24 VDC)/ (24 VDC)/ LECP6 Series LE

Power supply connector, communication connector Power supply connector Operating temperature range [C] 0 to 40 (No freezing) Operating humidity range [%RH] 90 or less (No condensation) Storage temperature range [C] -10 to 60 (No freezing) Storage humidity range [%RH] 90 or less (No condensation) Weight [g] 200 (Screw mounting), 220 (DIN rail mounting) Note 1) Please note that the version

Auto Switch Guide

CS1 Auto Switch Internal Circuit C76 D-90 C85 OUT () Weight OUT () Brown Contact protection box CD-P11 CD-P12 Reed switch C95 (g) CP95 OUT ( ) D-90 D-97 Auto switch model OUT ( ) Blue Black line 5 5 0.5 NCM Lead wire length (m) 23 23 3 D-97 37 37 5 Contact protection box CD-P12 NCA Choke coil OUT (+) Brown DDimensions OUT (+) Reed switch Zener diode Zener diode -X D-90 OUT () OUT () Blue

ø 40, ø 50, ø 63, ø 80, ø 100 Series CLA2 Fine Lock Cylinder Double Acting, Single Rod

8, ) Note 1) 1 10 90 100 110 2 Different surfaces 20 90 100 110 Same surface 75 Different surfaces (n = 2, 4, 6, 8, ) Note 1) 20 + 50 (n 2) 2 (n = 4, 8, 12, 16, ) Note 2) 90 + 50 (n 4) 2 100 + 50 (n 4) 2 (n = 4, 8, 12, 16, ) Note 2) 110 + 50 (n 4) 2 (n = 4, 8, 12, 16, ) Note 2) D-B59W n Same surface 75 + 50 (n 2) (n = 2, 3, 4, ) 90 + 50 (n 2) (n = 2, 4, 6, 8, ) Note 1) 100 + 50 (n

High Vacuum Angle Valve, XL Series

Item XL -25 XL -40 XL -50 XL -63 XL -80 Rated heater voltage 90 to 125VAC 200/10 200/20 400/40 400/60 600/100 Heater power W (nominal value) In-rush/Normal (Option symbol) H1 80C (176F) 200/40 200/60 400/100 600/150 H2 100C (212F) 200/30 400/70 400/80 600/130 800/180 H3 120C (248F) Note) In-rush current will flow to the heater for approximately 30 seconds and will then subside.

XL

Item XL -25 XL -40 XL -50 XL -63 XL -80 Rated heater voltage 90 to 125VAC 200/10 200/20 400/40 400/60 600/100 Heater power W (nominal value) In-rush/Normal (Option symbol) H1 80C (176F) 200/40 200/60 400/100 600/150 H2 100C (212F) 200/30 400/70 400/80 600/130 800/180 H3 120C (248F) Note) In-rush current will flow to the heater for approximately 30 seconds and will then subside.

MGG

Dimensions 20 to 50 Front mounting flange BM R MH Y + Stroke ZZ + Stroke Front mounting flange 63 BM R MH Y + Stroke ZZ + Stroke (mm) Adjustment 0 to 25mm Adjustment 0 to 50mm Bore size (mm) Y BM R MH ZZ MH ZZ 20 25 32 40 50 63 48 164 73 189 12 86 M6 x 1 48 171 73 196 12 86 M6 x 1 50 175 75 200 12 88 M8 x 1.25 65 208 90 233 13 99 M12 x 1.75 58 227 83 252 14 M12 x 1.75 114 65 236 90 261 14

CNS

700 800 900 160 600 600 140 500 500 125 400 400 300 300 200 200 100 100 100 500 400 300 200 100 500 400 300 200 Maximum speed: V (mm/s) Maximum speed: V (mm/s) 9-8-7 8 Cylinder with Lock Double Acting, Single Rod Series CNS 125, 140, 160 How to Order 125 125 100 100 Y7BW CDNS D CNS D L Without auto switch L With auto switch Number of auto switches Built-in magnet Port thread type Courtesy

ISO Standard Hydraulic Cylinder

-125, BS5-160 BS5-180, BS5-200 When D-F5BA auto switch is shipped mounted on a cylinder, the above stainless steel screws are used.

CM2

201 to 300 301 to 400 401 to 500 1 to 50 51 to 100 101 to 150 151 to 200 201 to 300 301 to 400 401 to 500 1 to 50 51 to 100 101 to 150 151 to 200 201 to 300 301 to 400 401 to 500 Bore size (mm) 20 18.2 36 30 68 81 93 106 131 156 181 12.5 25 37.5 50 75 100 125 48 61 73 86 111 136 161 25 18.2 36 32 72 85 97 110 135 160 185 12.5 25 37.5 50 75 100 125 52 65 77 90 115 140 165 32 18.2 36 32 72

MGP

120 201 to 300st 200 200 301 to 400st 300 300 20 to 39st 29 29 40 to 124st 39 39 125 to 200st 77 77 201 to 300st 117 117 301 to 400st 167 167 20 25 20 to 400 WA WB Bore size (mm) Standard stroke (mm) 25 to 49st 24 24 24 28 28 48 50 to 124st 48 48 48 52 52 72 125 to 200st 124 124 124 128 128 148 201 to 300st 200 200 200 200 200 220 301 to 400st 300 300 300 300 300 320 25 to 49st 33 34 36 38

MB1

Moreover, due to the fact that bumpers are installed at each end of the piston, overall length is increased by 6mm for 32 and 40, 8mm for 50 and 63, and by 10mm for 80 and 100. 90 90 102 102 124 124 164 200 200 141 145 164 Width across flats Stroke range Bore size (mm) Effective thread length A D Ee11 F G H MB J K MM N P S V W ZZ C B 32 40 50 63 80 100 19.5 27 32 32 37 37 46 52 65 75 95

Rotary Actuator: Free Mount Type/Vane Style Series CRBU2

Mass (g) CRBU2W10 CRBU2W15 CRBU2W20 CRBU2W30 90 CRBU2W40 90 Model (size) Vane type 180 270 90 180 270 90 180 270 180 270 180 270 90 Rotating angle Single vane Double vane D469 47.1 47.5 47 73 72 72 143 142 263 258 491 480 140 255 Body of rotary actuator Auto switch unit + 2 switches 30 30 50 60 46.5 Angle adjuster 30 47 90 150 203 90 100 90 100 90 100 90 100 90 100 Rotating angle 158 308

Series 10-SY3000/5000/7000/9000 5 Port Solenoid Valve

Electrical entry 24, 12 VDC/ 100, 110, 200, 220 VAC 24, 12, 6, 5, 3 VDC 24, 12, 6, 5, 3 VDC/ 100, 110, 200, 220 VAC Gasket assembly part no.

CRB2/CRBU2/CRB1

180 270 90 180 270 90 180 270 90 180 270 90 180 270 90 100 180 190 270 280 90 100 180 190 270 280 90 100 180 190 270 280 90 100 180 190 270 280 90 100 90 100 90 100 90 100 90 100 90 100 90 100 90 100 90 100 10 1.2 1.5 15 2.9 3.7 20 6.1 7.9 30 15 20.2 21 25 40 31.5 41 30 32 49 51 66 68 70 73 94 97 118 121 88 93 138 143 188 193 186 197 281 292 376 387 1.0 1.1 2.6 2.7 5.6 5.7 14.4 14.5 33 34