IDG

70 0 0 40 80 120 160 200 100 200 300 Outlet air flow rate (l/min (ANR)) Outlet air flow rate (l/min (ANR)) IDG100L (Type B products group) Refer to pages 14-19-28 to 29.

C95

Standard stroke (mm) 50/100/150/200/250/300 Max. possible stroke (mm) 300 *different in % related to full span.

Table of Contents

AU200/300 Effective thread depth 6.5 4-M5 x 0.8 AU200, 300 Float type auto-drain Port size H G F E D C B A Model Port size 1 4 / 3 8 AU200 / 50 70 61 30 40.5 31.5 164 165 AU300 50 70 61 30 40.5 31.5 188.5 165 14-3-12 1 Large Flow Air Filter Series AF800/900 Standard Specifications F.R.L.

MGG

(mm) Bore size (mm) Stroke range (mm) AL AK AP AJ AI AH AG N AB M AA L K J I V B U T A O P S 63 80 100 12 14 60 180 158 250 228 100 25 66 25 180 135 117 65 108 228 192 30 M12 x 1.75 depth 23 Rc 1/4 200 72 75, 100, 125 150, 200, 250 300 16 14 70 200 178 284 262 115 27 76 30 214 160 138 75 128 262 224 M12 x 1.75 depth 28 Rc 3/8 35 230 89 16 16 80 226 200 326 300 125 30 80 32 245 190 153 85

High Rigidity Slider Type Ball Screw Drive/11-LEJS Series

Selection Example Workpiece mounting condition: Operating conditions 90 Work load: 60 [kg] Speed: 300 [mm/s] Acceleration/Deceleration: 3000 [mm/s2] Stroke: 300 [mm] Mounting orientation: Horizontal Motor type: Incremental encoder External force: 10 [N] Lead 10: LEJS63B 80 Area where the regeneration option is required. 70 W 60 Work load [kg] Lead 20: LEJS63A 50 Lead 30: LEJS63H 100

ZP

ZP2-6030W ZP2-8030W ZP2A-003 P. 69 ZP2-04S P. 70 ZP2A-S01P ZP2-B02MU ZP2-B035MU ZP2-B04MU ZP2-B05MU ZP2-B04MB ZP2-06S P. 70 ZP2A-M01P P. 69 ZP2A-S02P ZP2-B06MU ZP2-B08MU ZP2-B10MU ZP2-B15MU ZP2-B06MB ZP2-B08MB ZP2-B10MT ZP2-B15MT ZP2-08S P. 70 ZP2A-S03P ZP2A-M02 P. 69 ZP2-10S P. 70 ZP2A-S04P ZP2-15S P. 71 ZP2A-S05P ZP2-B20MT ZP2-B25MT ZP2-B30MT ZP2A-M03 P. 69 ZP2-04S P. 71 ZP2A-S11 ZP2-B06MU

MNB

Standard Stroke/ Bore size (mm) 32 40 50 63 80 100 Standard stroke (mm) 25, 50, 75, 100, 125, 150, 175, 200, 250, 300, 350, 400, 450, 500 25, 50, 75, 100, 125, 150, 175, 200, 250, 300, 350, 400, 450, 500 25, 50, 75, 100, 125, 150, 175, 200, 250, 300, 350, 400, 450, 500, 600 25, 50, 75, 100, 125, 150, 175, 200, 250, 300, 350, 400, 450, 500, 600 25, 50, 75, 100, 125, 150, 175, 200, 250, 300

MNB

Standard Stroke/ Bore size (mm) 32 40 50 63 80 100 Standard stroke (mm) 25, 50, 75, 100, 125, 150, 175, 200, 250, 300, 350, 400, 450, 500 25, 50, 75, 100, 125, 150, 175, 200, 250, 300, 350, 400, 450, 500 25, 50, 75, 100, 125, 150, 175, 200, 250, 300, 350, 400, 450, 500, 600 25, 50, 75, 100, 125, 150, 175, 200, 250, 300, 350, 400, 450, 500, 600 25, 50, 75, 100, 125, 150, 175, 200, 250, 300

Series IDG

70 0 0 20 40 60 80 100 160 40 80 120 Outlet air flow rate l/min (ANR) Outlet air flow rate l/min (ANR) IDG75L IDG60L 0 0 P1 = 0.3MPa Outlet air atmospheric pressure dew point C Outlet air atmospheric pressure dew point C P1 = 0.3MPa 10 10 20 20 P1 = 0.5MPa P1 = 0.5MPa 30 30 40 40 P1 = 0.7MPa P1 = 0.7MPa 50 50 60 60 70 70 0 0 40 80 120 160 200 100 200 300 Outlet air flow rate l/min (ANR)

CQS

45 50 55 60 65 70 30 35 40 45 50 55 60 65 70 75 Special long bolt for through hole mounting is available as an option.

Floating Joint

JAF100-27-150 JAF125-27-200 JAF160-33-200 20 25 32 32, 40 40 32, 40 50 50, 63 80 100 100 125 160 13 17 17 22 22 22 27 27 32 41 41 41 55 7 8 8 11 11 11 13.5 13.5 16 20 20 20 24 6.6 6.6 6.6 9 9 9 9 9 11 11 11 18 22 6 6 6 9 9 9 12 12 16 19 19 21 29 21 24 24 31 31 31 41 41 50 59.5 59.5 66 96 36 40 40 52 52 52 45 45 55 65 65 72 100 48 52 52 70 70 70 19 25 25 32 32 32 65 65 75 90 90 100 150 0.08

SX

B port) L plug connector (L) M plug connector (M) (Lead wire length) 300 300 (Lead wire length) 104.5 (3 position) 92 (3 position) (mm) 3 49 41 4 59.5 51.5 5 70 62 6 80.5 72.5 7 91 83 8 101.5 93.5 9 112 104 10 122.5 114.5 11 133 125 12 143.5 135.5 13 154 146 14 164.5 156.5 15 175 167 16 185.5 177.5 17 196 188 18 206.5 198.5 19 217 209 2 stations 38.5 30.5 20 stations 227.5 219.5 Stations

Non-rotating Double Power Cylinder/ Double Power Cylinder (without non-rotating mechanism) Series MGZ/MGZR ø20, ø25, ø32, ø40, ø50, ø63, ø80, ø100 1

mm 300 100 200 100 100 Load weight m (kg) Load weight m (kg) Load weight m (kg) 80 80 80 10 10 10 63 63 63 50 50 50 40 1 1 1 25 20 25 20 40 32 40 32 32 [Example w] 25 20 0.3 0.3 0.1 70 100 1000 70 100 1000 70 100 1000 Stroke (mm) Stroke (mm) Stroke (mm) 2.

MGP

83 121 171 32 46 11 7.5 Rc 1/8 38 18 38 30 104 44 118 86 106 72 48 124 200 300 84 122 172 40 48 14 9 Rc 1/4 34 21.5 47 40 130 60 146 110 130 92 124 200 300 48 86 124 174 50 14 9 Rc 1/4 39 28 55 50 130 70 158 124 142 110 52 128 200 300 50 88 124 174 63 MGPM (slide bearing)/Dimensions A, DB, E (mm) (mm) A DB E Bore size (mm) Bore size (mm) X XA XB XC XL YY YL Z 25st or less Over 175st Over

HRX-OM-Q026

HRSH250/300-A HRSH250/300-A Sets threshold detection pressure Series, Other Series, Other for Circulating fluid discharge HRSH100/150/200/250models HRSH100/150/200/250models pressure rise alarm generation.

MXS Series Air Slide Table

Model F 50 50 50 60 35 60 70 70 80 FF 40 40 40 50 35 60 70 70 80 GA 25 25 25 35 50 54 107 155 195 KA NA 2 2 2 2 2 2 4 4 4 M 83 83 83 93 108 147 200 254 306 N 4 4 4 4 6 6 6 8 8 HA 35 35 35 35 35 70 70 76 88 ZZ 97 97 97 107 122 161 214 268 320 G 15 15 15 15 15 19 37 41 19 H 45 45 45 55 35 35 35 38 44 NN 2 2 2 2 3 4 5 6 7 I 10 10 10 10 10 10 58 70 87 J 44 44 44 54 69 108 113 155 190 K 31 41

MXS

70 80 Z K 31 41 51 61 71 96 121 146 171 J 44 44 44 54 69 108 113 155 190 I 10 10 10 10 10 10 58 70 87 NN 2 2 2 2 3 4 5 6 7 NA 2 2 2 2 2 2 4 4 4 KA H 45 45 45 55 35 35 35 38 44 HA 35 35 35 35 35 70 70 76 88 G 15 15 15 15 15 19 37 41 19 GA 25 25 25 35 50 54 107 155 195 ZZ 97 97 97 107 122 161 214 268 320 N 4 4 4 4 6 6 6 8 8 FF 40 40 40 50 35 60 70 70 80 M 83 83 83 93 108 147 200 254 306 MXS20

IDU/IDF

P N M L K J I H G F E D C A B Model Port size 70 65 580 580 470 317 289 363 157 77 405 (450) 131 (85) 152 630 570 260 620 R 3/4 IDF11C/11D 70 65 580 580 470 337 309 383 207 77 405 (450) 131 (85) 175 680 620 280 620 R 1 IDF15C/15C 70 30 700 700 600 351 323 398 199 642 405 (530) 98 183 760 680 295 750 R 1 IDF22C/22C1 70 30 776 780 680 376 348 423 249 722 405 (610) 98 208 810 730 320 830 R 1

Series AP500

0.07 A 0 0.00 0.88 (22.4) 0 50 100 150 Flow rate (slpm, N2) 2 x 10-32 UNF depth 0.3 (7.6) (Mounting hole) AP1900HF 600 psig (4.1 MPa) 100 psig (0.69 MPa) Inlet pressure: 300 psig (2.1 MPa) 60 psig (0.41 MPa) 100 0.69 90 0.62 80 0.55 Delivery pressure (MPa) Delivery pressure (psig) 70 0.48 Connections inch (mm) A 60 0.41 FV4 MV4 TW4 FV6 MV6 TW6 FV8 MV8 TW8 4.30 (109.2) 50 0.34 3.46 (87.9)

Basic Type/Direct Mount Type

Standard stroke (mm) Max. stroke without switch (mm) Max. stroke with switch (mm) Bore size (mm) Symbol Specifications 300 300 6 50, 100, 150, 200 -X116 -X160 -X322 -X1468 Hydro specifications 500 500 10 50, 100, 150, 200, 250, 300 High speed specifications 50, 100, 150, 200, 250, 300 350, 400, 450, 500 Outside of cylinder tube with hard chrome plating 15 1000 750 Interchangeable specification