CP95

32 68 9 80 60 70 32 45 12 5.5 175 170 45 12 10 90 110 40 50 12 5.5 190 185 50 63 50 25 12 170 16 20 190 40 80 9 90 70 80 16 10 100 120 50 63 14 6.5 215 210 63 80 63 30 16 190 16 20 210 50 100 12 110 90 100 16 12 126 153 60 100 120 75 35 16 205 14 20 140 25 230 110 60 120 20 75 16 6.5 230 220 71 14.5 150 178 6-13-10 10 Series CP95 ISO/VDMA Cylinder: Standard Type Double Acting w/ End of Stroke

SQ1000/2000

CP (For P, J kits) VVQZ3000 SSQ1000 4 B P 1 170 For station 1 Wiring

Mechanically Jointed Rodless Cylinder MY1H Series Linear Guide Type: ø25, ø32, ø40  Piping can be connected from 4 directions on the head cover.  Allows on-site piping to suit the MY1B installation MY1H MY1H conditions. MY1B MY1M MY1C MY

500 1000 1500 100 200 300 400 500 1000 1500 100 200 300 400 500 1000 1500 100 200 300 400 500 1000 1500 Piston speed mm/s Piston speed mm/s Piston speed mm/s Piston speed mm/s Technical Data 1207 Mechanically Jointed Rodless Cylinder Linear Guide Type MY1H Series 25, 32, 40 RoHS How to Order M9BW 25 300 MY1H Z Linear guide type Linear guide type Made to Order Refer to page 1209 for details

ø 40, ø 50, ø 63, ø 80, ø 100 Series CLA2 Fine Lock Cylinder Double Acting, Single Rod

Standard Strokes [mm] Bore size [mm] Standard stroke [mm] 40 25, 50, 75, 100, 125, 150, 175, 200, 250, 300, 350, 400, 450, 500 50, 63 25, 50, 75, 100, 125, 150, 175, 200, 250, 300, 350, 400, 450, 500, 600 80, 100 25, 50, 75, 100, 125, 150, 175, 200, 250, 300, 350, 400, 450, 500, 600, 700 Note) Intermediate strokes not listed above are produced upon receipt of order.

C85

With Rod Boot (mm) Item h KK 1 to 50 AM C e f K Stroke 51 to 100 101 to 150 151 to 200 201 to 300 301 to 400 401 to 500 Bore 20 20 8 36 20 6 M8 x 1.25 71 84 96 134 159 109 25 22 10 36 20 8 M10 x 1.25 74 87 99 137 162 112 187 Item Wh I Stroke 1 to 50 51 to 100 101 to 150 151 to 200 201 to 300 301 to 400 401 to 500 1 to 50 51 to 100 101 to 150 151 to 200 201 to 300 301 to 400 401 to 500 Bore

Compact Cylinder Series CQ2 ø12, ø16, ø20, ø25, ø32, ø40, ø50, ø63, ø80, ø100, ø125, ø140, ø160, ø180, ø200 1

Double acting 125, 140 160, 180 200 Double rod CQ2W 7-6-115 10 to 300 Long Stroke 32, 40, 50 63, 80, 100 Single rod CQ2 Double acting 7-6-121 125 to 300 Anti-lateral Load Single rod CQ2S 32, 40, 50 63, 80, 100 Double acting 32 to 40/5 to 100 50 to 100/10 to 100 7-6-132 With End Lock 20, 25, 32 50, 63, 80 100 Single rod CBQ2 Double acting 20 to 63/10 to 100 80, 100/25 to 100 7-6-142 Air-hydro

AC

This symptom is normal. 1.13-5 Booster Regulator VBA1110 to 4200 Handle operated style VBA1110-02, VBA1-02 AC AV AU AF AR IR VEX AW AMR AWM AWD ITV Handle operated style VBA2100-03, VBA4100-04 VBA VE VY G AL A 300 404 Rc (PT) 1/2 Rc (PT) 3/8 B 170 207.5 C 53 96 D 118 150 E 98 130 F 46 62.8 G 43 62 H 60.5 90 J 18 17 K 15 15 L M 31 40 N Rc1/16 Model Port size VBA2100-03 VBA4100-04 VBA111 VBA2100

Electric Actuator Triple Axis P&P Unit

Triple Axis P&P Unit Dimensions (reference drawing for assembling) Stroke+40 85 66 175 Stroke+365 (Stroke+15) 90 25 Stroke+320 300 60 20 For the Z axis table dimensions, please refer to the single axis dimensions. 2 333 (For 100 to 150 strokes) Stroke+133 (For 200 to 1000 strokes) (25) 174 Stroke+15 (3) 176 110 (T-slot pitch) 170 Stroke+15 175 1 3 Select the unit specifications after confirming

Micro Mechanical Valve Series VM1000

Application Weight (g) Actuator Model Polyacetal roller 120 160 170 170 180 200 200 200 190 Basic VZM450-01-00 Mechanical operation Manual operation VM-08C VM-06CS VM-06C VM-05C VM-02CS VM-02C VM-01CS VM-01C Roller lever VZM450-01-01 VZM450-01-01S Hard steel roller VZM450-01-02 VZM450-01-02S Polyacetal roller Hard steel roller One way roller lever Straight plunger VZM450-01-05 Polyacetal

Tie-rod Type Hydraulic Cylinder

340 42 140 130 204 20 16 125 170 340 42 170 162 234 20 16 160 187.5 375 52 212 200 284 24 20 423 CHAW Series Dimensions Rod trunnion type: CHAWU Z T T Cushion adjustment screw 2 x Rc P Width across flats G Width across flats G V V TT GA Air release GA M 4 x J MM MM R (max.)

Rotary Cylinder Series MRQ Size: 32, 40 1

Size of linear motion parts Output of rotary motion parts (at 0.5 MPa) Linear motion stroke (mm) Rotating angle 100 30 75 5 10 15 20 25 40 50 80 to 100 32 1.02 Nm 170 to 190 80 to 100 1.91 Nm 40 170 to 190 A connecting port can be selected from two positions that are available on the rotation unit.

MGP

300 20 to 39st 29 29 40 to 124st 39 39 125 to 200st 77 77 201 to 300st 117 117 301 to 400st 167 167 20 25 20 to 400 WA WB Bore size (mm) Standard stroke (mm) 25 to 49st 24 24 24 28 28 48 50 to 124st 48 48 48 52 52 72 125 to 200st 124 124 124 128 128 148 201 to 300st 200 200 200 200 200 220 301 to 400st 300 300 300 300 300 320 25 to 49st 33 34 36 38 42 35 50 to 124st 45 46 48 50 54 47 125

VQZ1000/2000/3000

L n 3 58 68 87.5 98 2 42 52 75 85.5 4 74 84 112.5 123 5 90 100 125 135.5 6 106 116 137.5 148 7 122 132 162.5 173 8 138 148 175 185.5 9 154 164 187.5 198 10 170 180 200 210.5 11 186 196 225 235.5 12 202 212 237.5 248 13 218 228 250 260.5 14 234 244 275 285.5 15 250 260 287.5 298 16 266 276 300 310.5 17 282 292 312.5 323 18 298 308 337.5 348 19 314 324 350 360.5 20 330 340 362.5 373 L1 L2

CL

Up to 300 Up to 300 25 Without rod boot With rod boot Bore size (mm) H1 NA P PG PH PL PW S TA TB TC l H ZZ e f h ZZ Stroke range Rc 1/8 Rc 1/8 Rc 1/8 Rc 1/8 33 38 39 44 55 62 62 70 19.5 24 24 24 16 17 17 17 20 24 24 24 30 30 35 35 38 41 41 41 178 193 196 221 141 151 154 169 35 40 40 50 Up to 200 Up to 300 Up to 300 Up to 300 11 11 11 12 5 6 6 8 11 11 10 10 24 29 36 44 M5 x 0.8 M6 x 0.75

Slider Type Ball Screw Drive/11-LEFS Series

L Speed: V [mm/s] a1 a2 T1 = V/a1 = 300/3000 = 0.1 [s], T3 = V/a2 = 300/3000 = 0.1 [s] Time [s] T = T1 + T2 + T3 + T4 [s] L 0.5 V (T1 + T3) V T1: Acceleration time and T3: Deceleration time can be obtained by the following equation.

VZS

(External pilot port) Not machined K plug connector: VZS2150-KZ-01 L plug connector: VZS2150-L(Z)-01 (Lead wire length) With light/ surge voltage suppressor 300 (Lead wire length) 300 Other dimensions are the same as the grommet type.

VFS

Bore size Series CM Pressure 0.5 MPa Load factor 50% Stroke 300 mm Series MB Pressure 0.5 MPa Load factor 50% Stroke 500 mm Series CS1 Pressure 0.5 MPa Load factor 50% Cylinder stroke 1000 mm Average speed (mm/s) System 20 25 32 40 40 50 63 80 100 125 140 160 VK 800 700 600 500 400 300 200 100 Perpendicular, upward actuation Horizontal actuation VZ A VF 0 VFR 800 700 600 500 400 300 200 100

End Lock Cylinder Series CBM2/ø20, ø25, ø32, ø40 Series CBA1/ø40, ø50, ø63, ø80, ø100 CL MLGC CNA CB CV/MVG Maintains the cylinder’s CXW original position even if the CXS air supply is interrupted. CXT MX

300 6.8 25 102 3.2 131 400 300 34 30 37 107 30 9 14 133 142 8 10 32 32 52 36 108 116 118 40 4 40 55 20 8 21 7 4 60 75 9 10 19 450 300 300 6.8 28 102 3.2 135 450 300 40 37 41 111 30 9 14 137 146 9 10 40 40 60 40 112 120 122 47 4 40 55 20 8 25 7 4 60 75 9 10 19 450 300 300 6.8 28 104 3.2 137 450 300 40 37 41 113 30 9 14 139 148 9 10 40 40 60 40 114 122 124 47 4 40 55 20 8 25 7 4 60 75 9

MRQ

Reed switch: D-A7/A8, Series MRQ Linear motion part size Solid state switch: D-F7/J7 Output of rotating part (at 0.5MPa) Linear motion stroke (mm) Rotation angle 5 10 15 20 25 30 40 50 75 100 80 to 100 170 to 190 32 1.02N/m An air cushion is also available. 80 to 100 170 to 190 40 1.91N/m Application examples A connecting port can be selected from two positions that are available on the rotation

CLS

2000 160 250 140 Load weight: m (kg) Load weight: m (kg) 125 200 1000 1000 700 800 900 700 800 900 180 160 600 600 140 500 500 125 400 400 300 300 200 200 100 100 100 500 400 300 200 100 500 400 300 200 Maximum speed: V (mm/s) Maximum speed: V (mm/s) 9-9-7 8 Cylinder with Lock Double Acting, Single Rod Series CLS 125, 140, 160, 180, 200, 250 How to Order M9B CLS L 125 125 100 100 Without