Table of Contents

10 10 80 5 10 20 29 30 50 49 300 200 100 5 10 20 29 30 50 49 300 200 100 Stroke (mm) Stroke (mm) 8-19-16 Compact Guide Cylinder Series MGP Horizontal Mounting (Ball bushing bearing) (19) l = 50 mm, V = 400 m/s (20) l = 100 mm, V = 400 m/s MGPL12 to 25 5 MGPL12 to 25 5 25 25 25 25 25 25 MX Load weight m (kg) Load weight m (kg) MTS 20 20 20 20 20 20 MY 16 16 16 16 16 16 CY 1 1 MG Courtesy

Table of Contents

, 32 40, 50, 63 CY1S, CY1L: 6 to 40 12, 16, 20 25, 32, 40 50, 63, 80 100 12, 16, 20 25, 32, 40 50, 63, 80 100 6, 10 15, 20 25, 32 12, 16 20, 25 32, 40 20, 25 32, 40 50, 63 32, 40 50, 63 80, 100 6, 10 16, 20 25, 32 12, 16 20, 25 6, 10 16 20, 25, 32 40, 50 10, 15 25 10, 16, 20 25, 32 6, 10 16 20, 25 32, 45 Bore size (mm) 5 to 50 mm/s 7 to 50 mm/s 5 to 50 mm/s 5 to 50 mm/s Piston speed Air cushion

2

to 50 Note 3) 5 to 50 Note 3) Ambient temperature (C) 5 to 50 Note 3) 5 to 50 Note 3) Outlet air atmospheric pressure dew point (C) Standard 60 Note 4) 40 Note 4) Inlet air flow rate (L/min [ANR]) Note 5) 93 140 230 135 400 224 308 75 Outlet air flow rate (L/min [ANR]) 75 100 150 110 300 170 240 50 Purge air flow rate (L/min [ANR]) Note 6) 18 40 80 25 100 54 68 25 Inlet air pressure (MPa)

Table of Contents

63 50 40 32 25 Mounting position A 278.5 323.5 184.5 229.5 139.5 B 121.5 136.5 95.5 110.5 80.5 Operating range l Note) 5.5 5.5 5 5 5 B A MY1C (Cam follower guide type) (mm) 63 50 40 32 25 Mounting position A 97.5 157.5 127.5 278.5 323.5 B 122.5 182.5 152.5 121.5 136.5 Operating range l Note) 5 5 5 5.5 5.5 B A MY1H (High precision guide type) (mm) 40 32 25 Mounting position A 180 216 131.5

Compact Cylinder Series CQ2 ø12, ø16, ø20, ø25, ø32, ø40, ø50, ø63, ø80, ø100, ø125, ø140, ø160, ø180, ø200 1

/5 to 100 50 to 100/10 to 100 12, 16, 20, 25 32, 40, 50, 63 80, 100 RQ Double rod CQ2W 7-6-25 MU Spring return/ 12, 16, 20 25, 32, 40 50 Single acting 12 to 40/5, 10 50/10, 20 D7-6-42 Spring extend CQ2 -X Non-rotating Rod 12, 16/5 to 30 20, 25/5 to 50 32, 40/5 to 100 50, 63/10 to 100 12, 16, 20 25, 32, 40 50, 63 Single rod CQ2K 7-6-62 20Double acting Data 12, 16, 20 25, 32, 40 50, 63 12,

smcmaintenancepartslist

Grease pack part no.: GR-S-010 (10 g) 67 Compact Cylinder/Non-rotating Rod Type: Double Acting, Double Rod Series CQSKW Replacement Procedure is 12, 16 20, 25 P.290 Construction Basic style With auto switch (built-in magnet) !4 !7 !6 !5 !4 !7 !6 !5 12 12 !5 !4 !7 !6 !4 !7 !6 !5 SMC 16, 20, 25 16 !4 !7 !6 !

Table of Contents

point L (mm) Gripping point L (mm) 15 15 5 5 10 10 20 20 25 25 30 30 MHW F F MRHQ MHS3-20D MHS3-20D 40 Pressure 0.6 MPa Misc. 35 Pressure 0.6 MPa 35 30 External grip 0.5 MPa 0.5 MPa DGripping force (N) Gripping force (N) 30 25 25 20 20 15 15 0.4 MPa 0.4 MPa F 200.3 MPa 0.3 MPa 0.2 MPa 0.2 MPa 10 10 5 5 0 0 5 5 25 25 10 10 15 15 20 20 30 30 35 35 Gripping point L (mm) Gripping point L (mm

Compact Cylinder Series CQ2 ø12, ø16, ø20, ø25, ø32, ø40, ø50, ø63, ø80, ø100, ø125, ø140, ø160, ø180, ø200 1

Rod 12, 16/5 to 30 20, 25/5 to 50 32, 40/5 to 100 50, 63/10 to 100 12, 16, 20 25, 32, 40 50, 63 Single rod CQ2K 7-6-62 20Double acting Data 12, 16, 20 25, 32, 40 50, 63 12, 16/5 to 30 20, 40/5 to 50 50, 63/10 to 50 Double rod CQ2KW 7-6-76 Axial Piping (Centralized Piping Type) 12, 16/5 to 30 20, 25/5 to 50 32, 40/5 to 100 50 to 100/10 to 100 12, 16, 20, 25 32, 40, 50, 63, 80, 100 Single

CQ2

32, 40/5 to 100 50 to 100/10 to 100 Double rod CQ2W 2.3-22 Spring 12, 16, 20 25, 32, 40 50 Single acting 12 to 40/5, 10 50/10, 20 2.3-38 return/extend CQ2 CU Non-rotating rod 12, 16, 20 25, 32, 40 50, 63 12, 16/5 to 30 20, 25/5 to 50 32, 40/5 to 100 50, 63/10 to 100 Single rod CQ2K 2.3-56 CQS Double acting 12, 16, 20 25, 32, 40 50, 63 CQ2 Double rod CQ2KW 12, 16/5 to 30 20, 40/5 to 50 50

Fluoropolymer Piping Equipment

x 22 25 x 22 25 x 22 25 x 22 25 x 22 25 x 22 25 x 22 12 x 10 25 x 22 25 x 22 25 x 22 25 x 22 25 x 22 25 x 22 25 x 22 25 x 22 19 x 16 19 x 16 6 x 4 3/8" x 1/4" 1/4" x 5/32" 1/4" x 5/32" 1/8" x 0.086" 3/8" x 1/4" 3/8" x 1/4" 1/2" x 3/8" 1/2" x 3/8" 1/2" x 3/8" 1/2" x 3/8" 1/2" x 3/8" 1/2" x 3/8" 1/4" x 5/32" 1/2" x 3/8" 1/2" x 3/8" 1/8" x 0.086" 3/4" x 5/8" 3/4" x 5/8" 3/4" x 5/8" 3/4" x 5

Smooth Cylinder/Low Speed Cylinder

stroke (mm) 10, 16 5, 10, 15, 20, 25, 30 20, 25, 32 5, 10, 15, 20, 25, 30, 40, 50 Precautions Be sure to read before handling.

ZP

> > > > > > /5 /5 Gasoline/Gas oil /5 > > /5 /5 Benzene/Toluene > > > > 5 5/> > > > > > Alcohol /5 /5 /5 /5 /5 Ether > > Ketone (MEK) /5 /5 /5 5 5 Ethyl acetate > > > > > > 5 > > Water /5 /5 5/> > > Organic acid Organic acid of high concentration Organic acid of low concentration 5/> 5/> > > 5 5 > > > > > > 5 > > > > > > > Strong alkali > > > > > > > Weak alkali > > = Excellent -

Made to Order

32 40 50 63 80 100 Bore size (mm) 20 25 32 40 50 63 80 100 MGPM MGPL MGPA DA AW B EW FD FB MT Bore size (mm) 10 10 14 14 20 20 25 30 74 74.5 82.5 89 95 100 120.5 143 6 6 7 7 7 7 8 8 63 63.5 69.5 76 82 87 106.5 126 5 5 6 6 6 6 6 9 18 17 22 22 26 26 34 41 6 7 9 8.5 11 11 14 16 5 6 6 6 6 6 8 9 5 5 5 5 5 5 6 6 20 25 32 40 50 63 80 100 120 119.5 139.5 139.5 160.5 160.5 190.5 200.5 0 0 15.5 9

ZP

ZPR10D 10 16 12 18 15 16 24 25 32.9 33.9 49 50 5 6 6 7 ZPR16D Applicable Tubing Applicable tubing O.D.

Applicable Auto Switch Model

DC() Blue(Black) Dimensions Operation Range ( l Dimension) (mm) Bore size 6 4 10 5 5 Actuator series 63 50 20 25 32 40 15 16 5 5 5 CDJ2 CDVJ3, 5 CDLJ2 CDM2, CDBM2, CDVM3, CDVM5, CDLM2, CDLG1, REC CDG1, MGG RSDG MGC RHC, MLGC 5 5 5.5 6 7.5 7 7 7 5 5 5.5 6 6 6 5 5 4 5 4 5.5 4.5 Note) Average value at normal temperature including hysteresis.

ZP

49 42.5 2 38 32.5 R 3.5 5 6 7.9 32 27 33 30 13.8 4 26 25 10.2 4 Note) R part has to be smooth with no corners.

Table of Contents

ZPR10D 10 16 12 18 15 16 24 25 32.9 33.9 49 50 5 6 6 7 ZPR16D Applicable Tubing Applicable tubing O.D.

5

2, 3, 4, 5) D-A9 5 15 30 Note 1) 15 + 35(n 2) 2 (n = 2, 4, 6) Note 3) 50 + 35 (n 2) (n = 2, 3, 4, 5) D-M9V 5 20 35 20 + 35(n 2) 2 (n = 2, 4, 6) Note 3) 35 + 35 (n 2) (n = 2, 3, 4, 5) D-A9V 5 15 25 15 + 35(n 2) 2 (n = 2, 4, 6) Note 3) 25 + 35 (n 2) (n = 2, 3, 4, 5) D-M9WV D-M9AV 10 20 35 20 + 35(n 2) 2 (n = 2, 4, 6) Note 3) 35 + 35 (n 2) (n = 2, 3, 4, 5) D-C7 D-C80 5 15 50 15 + 45

Air Cylinder

15 30 Note 1) 15 + 35 (n 2) 2 (n = 2, 4, 6)Note 3) 50 + 35 (n 2) (n = 2, 3, 4, 5) CM2 CM2 D-M9lV 5 15 Note 1) 35 20 + 35 (n 2) 2 (n = 2, 4, 6)Note 3) 35 + 35 (n 2) (n = 2, 3, 4, 5) CM3 D-A9lV 5 15 25 15 + 35 (n 2) 2 (n = 2, 4, 6)Note 3) 25 + 35 (n 2) (n = 2, 3, 4, 5) D-M9lWV D-M9lAV 10 15 Note 1) 35 20 + 35 (n 2) 2 (n = 2, 4, 6)Note 3) 35 + 35 (n 2) (n = 2, 3, 4, 5) CG1 D-C7l D-C80

Free Mount Cylinder

Single Acting, Spring Return D-M9, D-F9W D-M9V, D-F9WV D-A9, D-A9V Bore size (mm) Stroke A B W A B W A B W 6 4.5 6.5 4 4 2.5(5) 0 17.5 17.5 All stroke 13.5 16.5 21.5 20 25 24 29 26.5 31.5 27.5 32.5 16.5 21.5 20 25 24 29 26.5 31.5 27.5 32.5 5, 10 15 5, 10 15 5, 10 15 5, 10 15 5, 10 15 12.5 17.5 16 21 20 25 22.5 27.5 23.5 28.5 10 0.5 2.5 7.5 7.5 1.5(1) 3.5 16 0.5 2 8 8 2(0.5) 4 2 20 0 10 10