Aluminum High Vacuum Angle Valve Uniform baking temperature 108 154 10.6 300 138 200 18.5 800 Common to all series.
(R1)5 1 (P) 3(R2) Coil voltage CE-Compliant SQ 3-position exhaust center 1 2 Note) 3 4 Note) 5 6 100 VAC (50/60 Hz) 200 VAC (50/60 Hz) 110 VAC (50/60 Hz) 220 VAC (50/60 Hz) 24 VDC 12 VDC 2(B) (A)4 4 VFS (R1)5 1 (P) 3(R2) 3-position pressure center VFR 2(B) (A)4 5 (R1)5 1 (P) 3(R2) VQ7 Note) 200 and 220 VAC: F/L kit only Note) For sub-plate single unit type, refer to page 417.
combined with the single style 25 (0.88) 50 (1.77) 100 (3.53) 200 (7.06) 300 (10.59) 500 (17.66) 600 (21.19) 750 (26.49) 1000 (35.31) IDG3M IDG5M IDG10M IDG20M IDG30M IDG50M IDG60M IDG75M IDG100M 25 (0.88) 50 (1.77) 100 (3.53) 200 (7.06) 300 (10.59) 500 (17.66) 600 (21.19) 750 (26.49) 1000 (35.31) IDG3HM IDG5HM IDG10HM IDG20HM IDG30HM IDG50HM IDG60HM IDG75HM IDG100HM 75 (2.65) 110 (3.88)
100 200 300 400 500 1000 1 100 200 300 400 500 1000 Data Maximum speed: V (mm/s) Maximum speed: V (mm/s) Graph (7) Graph (4) 0.5 MPa P 0.5 MPa P 1000 1000 100 100 80 80 500 400 300 500 400 300 63 63 100 100 50 50 40 40 80 80 200 200 63 63 100 100 32 32 50 50 40 40 Load weight: m (kg) Load weight: m (kg) 50 40 30 50 40 30 32 32 20 20 10 10 5 4 3 5 4 3 2 2 1 100 200 300 400 500 1000 1 100
Standard Stroke/ Bore size (mm) 32 40 50 63 80 100 Standard stroke (mm) 25, 50, 75, 100, 125, 150, 175, 200, 250, 300, 350, 400, 450, 500 25, 50, 75, 100, 125, 150, 175, 200, 250, 300, 350, 400, 450, 500 25, 50, 75, 100, 125, 150, 175, 200, 250, 300, 350, 400, 450, 500, 600 25, 50, 75, 100, 125, 150, 175, 200, 250, 300, 350, 400, 450, 500, 600 25, 50, 75, 100, 125, 150, 175, 200, 250, 300
www.stevenengineering.com I 2.82 SOLENOID VALVES SERIES VQZ100/200/300 BODY PORTED 3 PORT SOLENOID VALVE BODY PORTED / PLUG LEAD TYPE SERIES VQZ100/200/300 T E C H N I C A L SPECIFICATIONS S E R I E S VQZ100/200/300 Type Of Seal Metal Seal Rubber Seal Fluid Air, Inert Gas Air, Inert Gas Maximum Operating Pressure 0.7MPa / 102PSI (High Pressure Type 0.8MPa / 116PSI) Valve Specifications Solenoid
DXT170-176-2-01 DXT170-176-2-02 DXT170-176-2-03 DXT170-176-2-04 DXT170-176-2-07 DXT170-176-3-51 DXT170-176-3-06 DXT170-176-3-05 DXT170-176-3-53 For Series VZ300/500 With light/surge voltage suppressor With surge voltage suppressor 100 VAC 200 VAC 110 VAC 220 VAC 240 VAC 6 VDC 12 VDC 24 VDC 48 VDC S E For VZ120 Indicator light is not available for grommet type.
AXT100-20-2-05 AXT100-20-2-06 AXT100-20-2-01 AXT100-20-2-02 AXT100-20-2-03 AXT100-20-2-04 13.8 24 VDC 12 VDC 100 VAC 200 VAC 110 VAC 220 VAC 24V 12V 100V 200V 110V 220V 1. It is able to change the cylinder port between side ported and top ported.
Red (DC) Blue 100 VAC 110 VAC 200 VAC 220 VAC Red Blue 100 VAC 110 VAC Red 200 VAC 220 VAC Push type (Tool required) Push down on the manual override button with a small screwdriver until it stops. Release the screwdriver and the manual override will return.
Note) 2 position single 1 2 Note) 100 VAC (50/60 Hz) 200 VAC (50/60 Hz) 110 VAC (50/60 Hz) 220 VAC (50/60 Hz) 24 VDC 12 VDC G: Grommet C kit single only.
7 5.5 32 2 14 44 40 Up to 200 7 6.6 38 2 18 53 40 Up to 200 8 6.6 46 2 25 61 50 End boss is machined on the flange for E.
Electrical entry P/E port R port 24 V, 12 V, 6 V, 5 V, 3 VDC/100 V, 110 V, 200 V, 220 VAC AC specifications (50/60 Hz) Grommet L plug connector M plug connector 100 VAC 200 VAC 1 2 3 4 110 VAC [115 VAC] 220 VAC [230 VAC] MN: Without lead wire G: Lead wire length: 300 mm L: With lead wire (Wire length: 300 mm) M: With lead wire (Wire length: 300 mm) 200 VAC, 220 VAC specifications An AC specification
VA (9 mA) 3-position pressure center 110 VAC Inrush 1.26 VA (6 mA), Holding 1.26 VA (6 mA) 200 VAC Inrush 1.38 VA (6 mA), Holding 1.38 VA (6 mA) 220 VAC Note 1) Use dry air to prevent condensation when operating at low temperatures.
VA (9 mA) 3-position pressure center 110 VAC Inrush 1.26 VA (6 mA), Holding 1.26 VA (6 mA) 200 VAC Inrush 1.38 VA (6 mA), Holding 1.38 VA (6 mA) 220 VAC Note 1) Use dry air to prevent condensation when operating at low temperatures.
D-Y7GL Motor model Compatible driver model Power supply voltage (VAC) Motor output (W) + Brown lead wire MSD021P1E MSM021P1A Matsushita Electric Industrial Co., Ltd. 100/115 Main circuit of switch MSM022P1A 200 Output Black lead wire MSD023P1E 200/230 MR-C20A1 100/115 Mitsubishi Electric Corporation HC-PQ23 200 MR-C20A 200/230 SGDE-02BP 100/115 200 SGME-02BF12 Yaskawa Electric Corporation
220 77.5 80 50 40 18 9 88 35 3 9 4.6 74 226 187 38 110 235 93 96 70 50 20 11 115 44.5 3.3 11 6.4 84 303 264 43 110 282 98 96 70 50 20 11 11 6.4 117.5 84 44.5 3.3 318 279 45 110 292 98 101 70 50 20 11 11 6.4 117.5 84 44.5 3.3 318 280 46 110 297 Note 1) For AC20 only, the position of the pressure gauge is above the center of the piping.
200 16 20 10, 25, 40, 50, 80, 100, 125, 160, 200, 250, 300 1000 25 Refer to pages 101 to 111 for cylinders with auto switches.
IDG50HV IDG60HV IDG75HV IDG100HV 25 50 100 200 300 500 600 750 1000 25 50 100 200 300 500 600 750 1000 IDG30LV IDG50LV IDG60LV IDG75LV IDG100LV 75 110 170 240 300 IDG60SV IDG75SV IDG100SV 50 100 150 Note) Standard dew point : Outlet air atmospheric pressure dew point under standard performance conditions Standard purge rate : Ratio of purge air flow rate to inlet air flow rate under standard
JSX21U Series b JSX31 Series 9 mm shorter (12% reduction) JSX31 Series Height Applied voltage 0 V Inrush power Standard model 69 mm 78 mm Power saving type Holding power 0 W 200 ms JSX21U Series Effective after being energized for more than 200 ms 110 g lighter (24% reduction) Weight Power Consumption (Holding) [W] Height [mm] Weight [g] Size 10 Size 20 Size 30 JSXmmU Series 2 3 3 JSX21U
220 77.5 80 50 40 18 9 88 35 3 226 9 4.6 74 187 38 110 235 93 96 70 50 3.3 20 11 11 6.4 115 84 44.5 303 264 43 110 282 98 96 70 50 3.3 318 20 11 11 6.4 117.5 84 44.5 279 45 110 292 98 101 70 50 3.3 318 20 11 117.5 44.5 11 6.4 84 280 46 110 297 Note 1) For AC20 only, the position of the pressure gauge is above the center of the piping.