5

L1 Double Clevis (mm) Double clevis: CQ2YD/CDQ2YD Bore size (mm) Stroke range (mm) Without auto switch With auto switch CD CT CU A B CL A B CL 4 x N Cap bolt CT 32 5 to 50 70 33 60 80 43 70 10 5 14 75, 100 80 43 70 CD hole H10 Axis d9 40 5 to 50 78.5 39.5 68.5 88.5 49.5 78.5 10 6 14 75, 100 88.5 49.5 78.5 50 10 to 50 90.5 40.5 76.5 100.5 50.5 86.5 14 7 20 75, 100 100.5 50.5 86.5 CU RR CW

ZP

-75kPa -80kPa -85kPa 100 Pad diameter (mm) 80 63 50 40 10 30 50 70 100 200 5 7 Lifting force (N) How to read Example: Work load 20 kg (Lifting force: 196 N) Conditions:Desired number of pads 5 pcs.

Electric Actuator/Slider Type

70 10 75 100 1000 70 10 75 Stroke [mm] Stroke [mm] u L = 50 mm Max. speed = Over 200 mm/s i L = 100 mm Max. speed = Over 200 mm/s 10 10 Load mass m [kg] Load mass m [kg] LEYG32M LEYG32M LEYG32M LEYG32M LEYG25M LEYG25M 1 1 LEYG25M LEYG25M 0.1 0.1 100 1000 70 10 75 100 1000 70 10 75 Stroke [mm] Stroke [mm] Horizontal Mounting, Ball Bushing Bearing o L = 50 mm Max. speed = 200 mm/s or less

Hydraulic

Mounting bolt Mounting bolt diagram C D D Model C Mounting bolt Model C D Mounting bolt M5 x 55l x 60l x 65l x 70l x 75l x 80l x 85l x 90l x 95l x 100l M8 x 95l x 100l x 105l x 110l x 115l x 120l x 125l x 130l x 135l x 160l x 185l 5D (M) CHQB63 10D (M) CH QB20 55 60 65 70 75 80 85 90 95 100 70 75 80 85 90 95 100 105 110 115 140 165 75 80 85 90 95 100 105 110 115 120 145 170 90 95 100 105

Made to Order

(mm) A B Bore size (mm) 50 st or less for both of S1, S2 Stroke Both of S1, S2 L Combination of 50 st or less, 75, 100 st 75, 100 st for both of S1, S2 50 st or less 75, 100 st 12 16 20 25 32 40 50 63 80 100 41 (63) 3.5 17 (28) 5 to 30 44 (68) 3.5 18.5 (30.5) 48 (72) 4.5 19.5 (31.5) 5 to 50 55 (75) 5 22.5 (32.5) 70 (80) 80 (80) 60 (80) 7 23 (33) 33 (33) 5 to 100 83 (93) 93 (93

ZP

-75kPa -80kPa -85kPa 100 Pad diameter (mm) 80 63 50 40 10 30 50 70 100 200 5 7 Lifting force (N) How to read Example: Work load 20 kg (Lifting force: 196 N) Conditions:Desired number of pads 5 pcs.

CA2

n = 2, 4, 6, 8 Same side 15 90 100 110 35 75 80 90 100 1 Different sides With 2 Same side 100 100 100 D-A3 D-G39 D-K39 35 + 30(n2) n = 2, 3, 4 75 + 30 (n 2) n = 2, 4, 6, 8 80 + 30(n2) n = 2, 4, 6, 8 90 + 30(n2) n = 2, 4, 6, 8 100 + 100(n 2) n = 2, 3, 4 100 + 100 (n2), n = 2, 4, 6, 8 Different sides With n Same side 10 35 55 75 80 90 75 80 90 75 80 90 1 Different sides With 2 Same side 35

Smooth Cylinder/Low Speed Cylinder

x 110L x 115L x 140L x 165L CQ-M10 x 85L x 90L x 95L x 100L x 105L x 110L x 115L x 120L x 125L x 150L x 175L 70 75 80 85 90 95 100 105 110 135 160 75 80 85 90 95 100 105 110 115 140 165 85 90 95 100 105 110 115 120 125 150 175 50 55 60 65 70 75 80 85 90 95 120 145 55 60 65 70 75 80 85 90 95 100 125 150 65 70 75 80 85 90 95 100 105 130 155 CQ-M5 x 50L x 55L x 60L x 65L x 70L x 75L x 80L x

Electric Actuator with Integrated Guide

point distance mm LTF8 Horizontal Lateral 10 10 Load 100% Load 100% Load 50% 1000 Load 50% 10 Amount of deflection m Amount of deflection m 100 1000 10 100 1 No load 10 No load 0.1 1 0.01 100 1000 100 1000 Load point distance mm Load point distance mm w w With single end support and table moved to the end of the stroke Load point distance Load point distance Figure 2.

High Vacuum Angle Valve

70 170 69 70 95 87 11 3 100 88 196 96 83 110 114 11 3 117 90 235 131 102 130 134 11 3 154 108 300 112 153 180 190 11 3 200 138 315 Note 1) Dimension E applies when heater option is included.

CL

77 85 69 78 84 92 100 44 52 64 78 92 115 128 144 16 20 20 25 30 36 36 40 42 50 59 76 92 100 112 118 60 70 86 102 116 15 17 17 21 21 16 16 11 11 11 11 11 16 16 40 50 55 65 80 90 90 90 6.5 6.0 6.0 8.0 8.0 43 43 43 32 40 40 52 52 14 14 14 9.0 9.0 30 35 35 40 40 50 50 56 27 32 32 37 37 47 47 53 60 70 86 102 116 145 161 182 MGG 11.5 MGC 13.5 13.5 19 19 19 MGF 112.5 121 133 141.5 150 167 CY1 18.5

ZP

/125) H ZP (100/125) HB 100, 125 M22 x 1.5 Heavy-duty Ball Joint Pad Product part no.

AC Servo Motor Driver LECYM/LECYU Series Compatible LEF  Position control, speed control and torque control Power supply voltage (V) LEJ can be used. 200 to 230 VAC 
Control encoder: Absolute 20-bit encoder LEL Motor capacity (W) (Resolution: 10485

[mm] 100 1000 70 10 75 LEY u L = 50 mm Max. speed = Over 200 mm/s i L = 100 mm Max. speed = Over 200 mm/s LES 10 10 Load mass m [kg] Load mass m [kg] LEYG32M LEYG32M LEPY LEPS LEYG32M LEYG32M LEYG25M LEYG25M 1 1 LER LEYG25M LEYG25M LEH 0.1 0.1 LEY -X5 Stroke [mm] 100 1000 70 10 75 Stroke [mm] 100 1000 70 10 75 11LEFS Horizontal Mounting, Ball Bushing Bearing o L = 50 mm Max. speed = 200

Mounting: L (Foot), Bore Size: 50mm, Thread: TN (NPT Thread), Full Stroke: 300mm, First Stroke: 150mm, Auto Switch: M9P--Solid State , Gen. Purpose, 3 Wire PNP, Horizontal, Lead Wire or Prewired Connector: SDPC (0.5m Cord Length, M12-4 Pin Connector)

Mounting: L (Foot), Bore Size: 50mm, Thread: TN (NPT Thread), Full Stroke: 300mm, First Stroke: 150mm, Auto Switch: M9P--Solid State , Gen. Purpose, 3 Wire PNP, Horizontal, Lead Wire or Prewired Connector: SAPC (0.5m Cord Length, M8-3 Pin Connector)

Mounting: L (Foot), Bore Size: 50mm, Thread: TN (NPT Thread), Full Stroke: 50mm, First Stroke: 10mm, Auto Switch: M9N--Solid State , Gen. Purpose, 3 Wire NPN, Horizontal

Mounting: L (Foot), Bore Size: 50mm, Thread: TN (NPT Thread), Full Stroke: 50mm, First Stroke: 10mm, Auto Switch: M9N--Solid State , Gen. Purpose, 3 Wire NPN, Horizontal, Lead Wire or Prewired Connector: L (3m)

Mounting: L (Foot), Bore Size: 50mm, Thread: TN (NPT Thread), Full Stroke: 250mm, First Stroke: 180mm, Auto Switch: M9P--Solid State , Gen. Purpose, 3 Wire PNP, Horizontal, Lead Wire or Prewired Connector: SDPC (0.5m Cord Length, M12-4 Pin Connector), Number: 3 pcs.

Mounting: Foot, Bore Size: 50mm, Thread: NPT Thread, Full Stroke: 50mm, First Stroke: 10mm, Auto Switch: M9N--Solid State , Gen. Purpose, 3 Wire NPN, Horizontal, Lead Wire or Prewired Connector: -, Number: -

Mounting: Foot, Bore Size: 50mm, Thread: NPT Thread, Full Stroke: 50mm, First Stroke: 10mm, Auto Switch: M9N--Solid State , Gen. Purpose, 3 Wire NPN, Horizontal, Lead Wire or Prewired Connector: 3m, Number: -