3 Thin shaft Position of rotational axis: Perpendicular to the shaft, and attached near one end CKQ = m1 + m2 a12 3 a22 = m1 + m2 4a12 + b2 4a22 + b2 3 12 12 2. Thin shaft Position of rotational axis: Perpendicular to the shaft, and attached at the center of gravity 5.
WH (E1) D B2 BZ MM AL A K Plug bolt (4 pcs. included) KA 8-J (F1) C 0.1 S + Stroke ZZ + Stroke H NA (mm) Stroke range A Bore size (mm) NA AL B1 B2 BM BZ C D E1 F1 GA GB H H1 I J K KA M MM P S 20 29 to 350 18 15.5 13 7 M4 x 0.7 9 16.5 8 15 3 18 12 35 5 31 M4 x 0.7 depth 7 5 6 3 M8 x 1.25 M5 x 0.8 83 25 29 to 400 22 19.5 17 8 M5 x 0.8 9.5 18.5 10 17 3 18 12 40 6 33 M5 x 0.8 depth 8 5.5 8 3.5
115.5 D-F9, D-F9V (mm) Mounting patternq Bore size Mounting patternq A1 Mounting patternw A2 Mounting patterne A3 B1 A1 Operating range B1 B2 B3 (mm) 10 15 25 5.5 34 64 22 76 34 76 5 35 70 23 82 35 82 5 40.5 99.5 28.5 111.5 40.5 111.5 Mounting patternw B2 A2 D-F9W, D-F9WV (mm) Bore size Mounting patternq A1 Mounting patternw A2 Mounting patterne A3 Operating range B1 B2 B3 (mm) 10 15 25
A part z1 m1 = 20 x 3 x 4 x 2.7 x 10-6 = 6.48 x 10-4 (kg) Weight calculation m1 = a x b x c x Relative density IZ1 Inertial moment around Z1 axis IZ1 = {m1 (a2 + b2) / 12} x 10-6 = {6.48 x 10-4 x (202 + 32)/12} x 10-6 = 2.21 x 10-8 (kg.m2) = 2.21 x 10-8 + 6.48 x 10-4 x 16.42 x 10-6 = 0.20 x 10-6 (kg.m2) IA Inertial moment around Z axis IA =IZ1 + m1r12 x 10-6 z f2 z2 B part r2 = 23.5(mm)
Series ZSE60F/ISE60 Confirmation of atmospheric pressure of load lock Special fitting types are used in semiconductor production equipment (metal gasket seal fittings) Leak rate: 1 x 10 -10Pa. m3/s ZSE/ ISE60(F)-A2 ZSE/ ISE60(F)-B2 URJ 1/ 4 TSJ 1/ 4 ZSE50F ISE50 ZSE60F ISE60 Model Standard thread type Special fittings for the semiconductor industry (metal gasket seal fittings) Variations
B2 B1B2(VAR) (2) (3) (a) R[]:() L[H]:() Vb[V]: DC24V U Vs[V] N () 14.1.2 14 2 14.
plate) = m 2 r2 = m 5 2r2 = m 4 r2 = m 12 a2 + b2 !
G Za2 D2 Ea Ea Eb Eb 4-MM E1 E1 E2 E2 C2 P Q2 Section Za2 detail (Adjustable range) B2 F2 D G Section Z detail (Adjustable range) F B3 B2 B1 C1 Zb2 JJ B F Z H K2 Counter bore depth H H L Thread length A2 Section Za2 detail (Adjustable range) A A 2 x 2 x LD J C Mounting direction (1) Mounting direction (2) C2 (mm) (mm) Adjustable range Applicable cylinder MY1B25 MY1B32 MY1B40 Mounting direction
Series ZSE60F/ISE60 Confirmation of atmospheric pressure of load lock Special fitting types are used in semiconductor production equipment (metal gasket seal fittings) Leak rate: 1 x 10 -10Pa. m3/s ZSE/ ISE60(F)-A2 ZSE/ ISE60(F)-B2 URJ 1/ 4 TSJ 1/ 4 ZSE50F ISE50 ZSE60F ISE60 Model Standard thread type Special fittings for the semiconductor industry (metal gasket seal fittings) Variations
PSE56-C01 24 B PSE56-A2 A B Model 8.2 12 9.2 12.2 15.5 9.5 A PSE56-01 PSE56-02 PSE56-N01 PSE56-N02 PSE56-C01 PSE56-A2 PSE56-B2 R 1/8 R 1/4 NPT 1/8 NPT 1/4 Rc 1/8 URJ 1/4 TSJ 1/4 24 B PSE56-B2 A 24 B 16-3-28 7 Series PSE Specific Product Precautions 1 Be sure to read before handling. Pressure Sensor Handling Air Supply Warning Warning ZSE ISE 1.
ZSM PF2 IF Series ZSE60F/ISE60 Confirmation of atmospheric pressure of load lock Data Special fitting types are used in semiconductor production equipment (Metal gasket seal fittings) Leak rate: 1 x 10 10 Pa.m3/s ZSE/ISE60(F)-A2 ZSE/ISE60(F)-B2 URJ 1/ 4 TSJ 1/ 4 ZSE50F ISE50 ZSE60F ISE60 Model Standard thread type Special fittings for the semiconductor industry (Metal gasket seal fittings
Series SGC coolant valve, with both CE and RoHS accreditation, provides the perfect solution for high speed machining. Due to the SGC's unique scraper, squeeze seal, grease channel and dry bearing construction, the valve's service life will exceed 5 million cycles. The introduction of a built-in magnet allows auto switches to be fitted, enabling confirmation of whether the valve is open
Model: 2 (SGC200), Valve Type: 1 (Normally Closed), Seal Material: A (NBR), Pressure Range: 05 (0 to 0.5 MPa), Thread: N (NPT), Port Size: 15 (1/2), Pilot Valve: Y (0.35 W Type, V116), Voltage: 3 (110 VAC (115 VAC) 50/60 Hz), Electrical Entry: DO (DIN Terminal Without Connector), Surge Suppressor: None, Manual Override: Non-locking Push Type, Bracket Mounting Position: B2 (Bracket on the
Model: SGC200, Valve Type: Normally Closed, Seal Material: NBR, Pressure Range: 0 to 0.5 MPa, Thread: NPT, Port Size: 1/2, Pilot Valve: 0.35 W Type, V116, Voltage: 110 VAC (115 VAC) 50/60 Hz, Electrical Entry: DIN Terminal Without Connector, Surge Suppressor: None, Manual Override: Non-locking Push Type, Bracket Mounting Position: Bracket on the Right Side, Auto Switch: M9BA--Solid State,
Series SGC coolant valve, with both CE and RoHS accreditation, provides the perfect solution for high speed machining. Due to the SGC's unique scraper, squeeze seal, grease channel and dry bearing construction, the valve's service life will exceed 5 million cycles. The introduction of a built-in magnet allows auto switches to be fitted, enabling confirmation of whether the valve is open
Series SGC coolant valve, with both CE and RoHS accreditation, provides the perfect solution for high speed machining. Due to the SGC's unique scraper, squeeze seal, grease channel and dry bearing construction, the valve's service life will exceed 5 million cycles. The introduction of a built-in magnet allows auto switches to be fitted, enabling confirmation of whether the valve is open
Series SGC coolant valve, with both CE and RoHS accreditation, provides the perfect solution for high speed machining. Due to the SGC's unique scraper, squeeze seal, grease channel and dry bearing construction, the valve's service life will exceed 5 million cycles. The introduction of a built-in magnet allows auto switches to be fitted, enabling confirmation of whether the valve is open
I = m x (a2 + b2) / 12 + m x H2 I = 0.15 x (0.062 + 0.042) / 12 + 0.15 x 0.032 = 0.0002 kgm2 Moment of inertia Kinetic energy 6 Confirm that the loads kinetic energy is within the allowable value. 1/2 x I x 2 = < Allowable energy 1 / 2 x (0.0002) x (2 x ( / 2) / 0.3)2 = = 2 / t (: Terminal angular velocity) 0.01096 J < Allowable energy OK : Rotation angle (rad) t: Rotation time (s) Allowable
A1 (mm) Note 2) Operating range Bore size Mounting patternq A1 Mounting patternw A2 Mounting patterne A3 B1 B2 B3 (mm) 10 15 25 5.5 34 64 22 76 34 76 5 35 70 23 82 35 82 Mounting pattern w B2 A2 5 40.5 99.5 28.5 111.5 40.5 111.5 Note 1) Adjust the auto switch after confirming the operating conditions in the actual setting.
I = m x (a2 + b2) / 12 + m x H2 I = 0.15 x (0.062 + 0.042) / 12 + 0.15 x 0.032 = 0.0002 kgm2 Moment of inertia Kinetic energy 6 Confirm that the loads kinetic energy is within the allowable value. 1/2 x I x 2 = < Allowable energy 1 / 2 x (0.0002) x (2 x ( / 2) / 0.3)2 = = 2 / t (: Terminal angular velocity) 0.01096 J < Allowable energy OK : Rotation angle (rad) t: Rotation time (s) Allowable