ISO Cylinder

to 100 101 to 150 151 to 200 201 to 250 1 to 50 51 to 100 101 to 150 151 to 200 201 to 250 1 to 50 51 to 100 101 to 150 151 to 200 201 to 250 32 68 118 143 168 97 147 172 197 140 190 215 240 40 89 139 164 189 214 122 172 197 222 247 174 224 249 274 299 Boss-cut/Basic [mm] Bore size Stroke Item S ZZ 1 to 50 51 to 100 101 to 150 151 to 200 201 to 250 1 to 50 51 to 100 101 to 150 151 to

SY

/location) SUP/EXH block assembly (standard): SX3000-51-2A SUP/EXH block assembly (R type): SX3000-51-6A SUP/EXH block assembly (S type): SX3000-51-7A SUP/EXH block assembly (RS type): SX3000-51-8A 6 5 4 C4 3 2 1 Stations or layout 2 position Single solenoid a C 6 Double solenoid For mixed port sizes For SMC use only Enter ordered part numbers. Order no. Part no. Qty. Part no.

Table of Contents

Silencer (AN203-KM81 pc) 51 26 16 2.

Air Cylinder

CG1 With Rod Trunnion With Head Trunnion CG3 Z + Stroke TX CD Z + Stroke TX JMB CD MB 51 40 3.2 3.2 40 51 MB1 6.8 x 3.4 6.8 20.5 7.5 40 57 6.8 20.5 LX LZ LX LZ 7.5 40 CA2 57 6.8 x 3.4 (mm) CS1 Mounting Part no.

ZP

Form w 1 Material e Buffer spec. r Buffer stroke t Vacuum inlet y Connection thread C B 10 55.5 32.5 23 20 93.5 42.5 51 30 103.5 52.5 40 139.5 62.5 77 50 149.5 72.5 10 13 21 D2 10 56 33 23 20 94 43 51 30 104 53 40 140 63 77 50 150 73 16 21.5 Construction p. 118 B5 04 06 N6 U6 Buffer Assembly p. 124 J: 2.5 K: 2 M10 x 1 A10 14 3 8 M5 x 0.8 10 57.5 34.5 23 20 95.5 44.5 51 30 105.5 54.5 40 141.5

CATALOG

63 80 10 27 20 10 108.5 51 16 32 63.5 85.5 25 13 Courtesy of Steven Engineering, Inc. !

CM2

With Rod Boot Data l Z Symbol h B3 e f Stroke Bore size (mm) 1 to 50 51 to 100 101 to 150 151 to 200 201 to 300 301 to 400 401 to 500 1 to 50 51 to 100 101 to 150 151 to 200 201 to 300 301 to 400 401 to 500 1 to 50 51 to 100 101 to 150 151 to 200 201 to 300 301 to 400 401 to 500 20 36 17 30 68 81 93 106 131 156 181 12.5 25 37.5 50 75 100 125 160 173 185 198 223 248 273 25 36 17 32 72 85 97

CM2

With rod boot (mm) Symbol Z h l Stroke f e 1 to 50 1 to 50 1 to 50 51 to 100 101 to 150 151 to 200 201 to 300 51 to 100 101 to 150 151 to 200 201 to 300 51 to 100 101 to 150 151 to 200 201 to 300 Bore 68 81 93 106 131 12.5 25 37.5 50 75 160 173 185 198 223 17 36 20 72 85 97 110 135 12.5 25 37.5 50 75 164 177 189 202 227 17 36 25 72 85 97 110 135 12.5 25 37.5 50 75 166 179 191 204 229 17 36

Table of Contents

Pitch P = 51 Pitch P = 51 2n-Rc , 1 2 3 4 Stations Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com 2n-Rc 1 2 D side Plug assembly VVFS2000-30A(Option: Refer to page 3-8-8.)

Table of Contents

Straight union Bulkhead connector K P. 49 KFH P. 51 KFE Use to connect male thead and tube through a panel. Use to connect tubes in the same direction. M H D Male elbow Bulkhead union P. 49 KFL P. 51 KFE Use to pipe at right angles to female thread. Most general type. MS Use to connect tubes through a panel.

Vacuum System Peripherals:

SX3000-51-4A SUP/EXH block assembly (for RS): SX3000-51-5A 2 pcs 1 location EXH block disk: SX3000-77-1A SUP/EXH block assembly (Standard): SX3000-51-1A The following columns shall be filled in by SMC.

5 Port Solenoid Valve Series SY3000/5000/7000/9000

(Gasket 7 is supplied as an accessory.) 1 Manifold block assembly (Metric size) SX3000-51-2A (Inch size) SX5000-51-16A SX5000-52-2A(-Q) (Metric size) SX3000-51-2A (Inch size) SX3000-51-16A SX3000-52-2A(-Q) Metric size SY3000: P, R port with one-touch fitting for 8 SY5000: P, R port with one-touch fitting for 10 Inch size With one-touch fitting for With one-touch fitting for 2 SUP/EXH block

ZP

-B5 P.51 ZP3-04UM: ZP3-06UM: ZP3-08UM: ZP3-04B: ZP3-06B: ZP3-08B: ZP3B-Y2AK3-B5 P.51 ZP3-04UM: ZP3-06UM: ZP3-08UM: ZP3-04B: ZP3-06B: ZP3-08B: ZP3-04UM: ZP3-06UM: ZP3-08UM: ZP3-04B: ZP3-06B: ZP3-08B: P.51 ZP3B-Y2AK6-B5 P.51 ZP3B-Y2AK15-B5 ZP3-04UM: ZP3-06UM: ZP3-08UM: ZP3-04B: ZP3-06B: ZP3-08B: P.51 ZP3B-Y2AK10-B5 ZP3-04UM: ZP3-06UM: ZP3-08UM: ZP3-04B: ZP3-06B: ZP3-08B: P.51 ZP3B-Y2AK20-B5

A

63 80 10 27 20 10 108.5 51 16 32 63.5 85.5 25 13 Courtesy of Steven Engineering, Inc. !

Made to Order

to 99 stroke 49 stroke or less 51 to 99 stroke Bore size (mm) Applicable stroke range(mm) 49 stroke or less 51 to 99 stroke 49 stroke or less 51 to 99 stroke A B A B 121 132.5 80 100 136 147.5 111 120.5 116 125.5 6 to 99 113.5 125 80 100 136 147.5 103.5 113 116 125.5 6 to 99 1734 Made to Order Common Specifications: Intermediate Stroke Symbol -XB10 Dimensions: CQS Series Double acting, Single

42

*VQ5100-51(-Q)2 setsValve part no. (Stations 1 and 2) *VQ5200-51(-Q)2 setsValve part no. (Stations 3 and 4) *VQ5300-51(-Q)1 setValve part no.

ZX

Filter unit (F) ZX100-K6-F 1 41 51 2-R1.8 (Mounting hole) 3.6 (Mounting hole) 1 10 19 8.8 4.8 Filter unit (Mounting hole) 13-2-51 51 Series ZX Air supply for release valve pilot Air supply for supply valve pilot Vacuum pad connection V port Valve Unit: Type K8 Vacuum switch (ZSE2) Pilot exhaust PE port Configuration and combination Valve unit (K8) + Adsorption confirmation switch (ZSP1) Filter

C85

to 100 Bore 20 M8 x 1.25 71 20 8 36 20 6 96 159 84 134 109 25 M10 x 1.25 74 22 10 36 20 8 187 162 99 87 137 112 Item Wh I Stroke 1 to 50 1 to 50 51 to 100 101 to 150 151 to 200 201 to 300 301 to 400 401 to 500 51 to 100 101 to 150 151 to 200 201 to 300 301 to 400 401 to 500 Bore 12.5 51 25 37.5 50 75 100 64 76 89 114 139 20 12.5 52 25 37.5 50 75 100 125 65 77 90 115 140 165 25 6-11-16

ZP

) 65 (50) 68 (48) (51) 57 (50) 61 (48) (51) 57 (50) 61 (48) (51) 57 (50) 61 (48) ZPR25 ZPR32 64 (56) 67 (54) 64 (56) 67 (54) 65 (57) 68 (55) 64 (56) 67 (54) 66 (58) 69 (56) 66 (58) 69 (56) 67 (59) 70 (57) ZPR40 ZPR50 ( ): Figures for female thread connections.

2

Compressed air inlet Compressed air outlet Valve closed Valve open 51 Series IDF/IDU Specific Product Precautions 3 Air Preparation Equipment Be sure to read this before handling. Refer to page 1154 for Safety Instructions.