Compact 5-Port Solenoid Valve

D D 64.5 3/5 B 2 E 3/5 58.7 E B 2 B 2 B 2 B 2 1 P P 1 4 A 4 A 4 A 4 A 4 A S Built-in silencer P, E port entry: D Calculation formula for L dimensions L = 6.5 x n1 + 9 x n2 + 39.6 Silencer (Exhaust port) (Built-in silencer specification) n1: Number of 6.5 mm pitch manifold block stations (Applicable fitting: 2, 4) n2: Number of 9 mm pitch manifold block stations (Applicable

LEC-OM02704CN

RY(n2)E () RY(n2)E RY(n2)D RY(n2)C 0 0 0 1 0 0 1 2 0 1 0 3 3 0 1 1 4 1 0 0 5 1 0 1 6 1 1 0 7 1 1 1 8 . 0OFF 1ON RY(n1)ARY(n3)A50ms (RY(n1)ARY(n3)A)(15.12.4(1)) RY(n1)ARY(n3)A PD20(D-1)0 RY(n1)A RY(n+3)A 15 10 15 (2) () CN6 CC-Link () 1 2 CN6-14ON RXn0ON RXn0 RXn0 RXn1PA10 ONRXn1 RXn1 RXn1 RXn2OFF ONRXn2 RXn2 RXn2 CN6-16RXn3ON RXn3ONOFF ON(RYn0) (EMG) (RY(n1)ARY(n3)A) (LSP)

C85

8 10 12 7.5 9 4 4 5 15 Data Hs D-A7H/A80H D-A73C/A80C D-F7/J79 D-F7W/J79W D-F7V D-F7WV D-J79C/A72 D-F7BAL D-F79F 5 16 20 25 8 10 12 8 9.5 2 2 3 (mm) C85 Auto Switch Mounting Height D-A7 D-A80 D-A7H/A80H D-F7/J79 D-F7W/J79W D-F7BAL D-F79F D-F7V D-F7WV D-F7BAVL D-C7/C80 D-H7 D-H7W D-H7BAL D-H7NF D-C73C D-C80C D-A73C D-A80C D-H7C D-A79W D-J79C D-H7 D-H7C D-H7W D-H7BAL D-H7NF Bore 3 16 Hs Hs

High Vacuum Angle Valve

D-G

Aluminum High Vacuum Angle Valve

Symbol Nil A B C D-M9N(M)(L)(Z) D-M9P(M)(L)(Z) D-M9B(M)(L)(Z) D-A90(L) D-A93(M)(L)(Z) M9N(M)(L)(Z) M9P(M)(L)(Z) M9B(M)(L)(Z) A90(L) A93(M)(L)(Z) M9// Solid state auto switch Reed auto switch (Not applicable to flange size 16) Without auto switch (with built-in magnet) Standard lead wire length is 0.5 m.

0.4

(D-sub connector) y u @0 i o !

7.4

O-ring Port plug Body Ported Base Mounted Blanking plug (For One-touch fittings) KJP-02 A L Dimensions [mm] Applicable fitting size d Model A L D Weight [g] 2 KJP-02 8.2 17 3 0.1 3.2 KQ2P-23 16 31.5 5 1 4 KQ2P-04 16 32 6 1 23 KQ2P-04 D Silencer (For manifold EXH port) Body Ported Base Mounted Silencer is installed in the EXH port.

Table of Contents

C D E F Dimensions Part no.

SX

4, 6 n1: Number of SX3000s stations n2: Number of SX5000s stations (Station n) (Station 1) 2n2-One-touch fittings (A, B port) Applicable tubing O.D.: 4 6 8 Equivalent to applicable D-sub connector JIS-X-5101 MIL-C-24308 16 x n2 12.5 x n1 DIN rail DIN rail holding screw Manual override (Press and turn for the locking type.)

CM2

/B6 D-B59W D-G5NTL D-B5 D-B6 D-C7 D-C80 D-C73C D-C80C D-C7/C8 D-H7 D-H7W D-H7BAL D-H7NF D-C73C D-C80C D-H7C D-B59W D-A3A D-G39A D-K39A D-A44A D-H7 D-H7C D-H7W D-H7BAL D-H7NF D-A3A D-G39A D-K39A D-A44A D-G5NTL

SZ3000

G D G 24 V 0 V 24 V 0 V D G D G 24 V 0 V Power supply { 24 V 0 V Power supply { 24 V 0 V Power supply { Transmission line Transmission line G D 0 V 24 V G D 0 V 24 V G D 0 V 24 V G D 0 V 24 V Black White Brown Blue Crimp connector SL-J1A Main transmission line Transmission line 24 V 0 V Power supply { 24 V 0 V Power supply { 24 V 0 V D G D G 24 V 0 V 24 V 0 V D G D G 24 V 0 V The above is

5 Port Solenoid Valve Series SY3000/5000/7000/9000

Purchasing order is available in units of 10 pieces. d D A Part no.

3 Port Solenoid Valve, VQZ Series, Base Mounted and Body Ported

, N3, N7, M5 N1: One-touch fittings for 1/8" N3: One-touch fittings for 5/32" N7: One-touch fittings for 1/4" M5: M5 thread (4.5) (7.5) 20 DIN rail clamp screw U side n Manual override 5 A 2 A 2 A 2 A 2 4 P=10.5 (L4) (L3) L1 L2 3 2 1 16.5 Stations 6.5 D side 2.3 2-M5 x 0.8 External pilot port 21.6 (Only external pilot port type(R)) 34.5 53 5.5 (Lead wire length) 39.5 7.8 (N1, N3, N7) 300

5 Port Solenoid Valve/Body Ported, Cassette Type Manifold, Series SZ3000

G D G 24V 0V Power supply{ 24V 0V D G D G 24V 0V 24V 0V Power supply{ 24V 0V Power supply{ G D 0V 24V G D 0V 24V G D 0V 24V G D 0V 24V Transmission line Transmission line Black White Brown Blue Crimped connector SL-J1A Main transmission line Transmission line 24V 0V Power supply{ 24V 0V Power supply{ 24V 0V D G D G 24V 0V 24V 0V D G D G 24V 0V 24V 0V Power supply{ 24V 0V Power supply{ Special

ISO Cylinder

Auto Switch Mounting Height [mm] [mm] Band mounting Rail mounting Auto switch model Auto switch model D-M9l*1 D-M9lV D-M9lW D-M9lWV D-M9lA D-M9lAV D-A9l*2 D-A9lV D-F7l D-J79 D-F7lW D-J79W D-F79F D-F7BA D-A7lH D-A80H D-H7l D-H7lW D-H7BA D-H7NF D-C7l D-C80 D-M9l D-M9lW D-M9lA D-A9l*1 D-M9lV D-M9lWV D-M9lAV D-A9lV*1 D-F7lV D-F7lWV D-F7BAV D-J79C D-A7l D-A80 D-A73C D-A80C *2 D-A79W D-H7C D-C73C

SMC Pneumatic Clean Series

/C8 D-C73C/C80C D-B5/B6 D-B59W D-A3/A4 D-A3A/A44A D-A3C/A44C D-A7/A8 D-A7H/A80H D-A73C/A80C D-A79W D-A5/A6 D-A59W D-A9 D-A9V D-Z7/Z8 D-H7 D-H7C D-H7BAL D-H7F D-H7W D-G5/K5 D-G5BAL D-G59F D-G5NTL D-G5W/K59W D-G39/K39 D-G39A/K39A D-F7/J7 D-J79C D-F7F D-F7BAL D-F7BAVL D-F7V D-F7NTL D-F7W (V) D-F5/J5 D-F5BAL D-F5W/J59W D-F5F D-F5NTL D-G39C/K39C D-M9 D-M9V D-F9W D-F9WV D-F9BAL D-Y59A/Y7P/Y59B

V

Y P E 41 S I D E P O R T E D M A N I F O L D.

CM2

D-B6 D-B59W D-G5NTL D-B5 D-B6 D-C7 D-C8 D-C73C D-C80C D-C7/C8 D-H7l D-H7lW D-H7BAL D-H7lF D-C73C D-C80C D-H7C D-B59W D-A3lA D-G39A D-K39A D-A44A D-A3lA D-G39A D-K39A D-H7l D-H7C D-A44A D-H7lW D-H7BAL D-H7lF D-G5NTL 1.4-49 World Wide QS\E Support...

Table of Contents

D-A72/D-A73/D-A80 Band Mounting Style . D-A7xH/D-A80H Rail Mounting Style. D-A73C/D-A80C Rail Mounting Style .

SQ1000/2000

Printed in Japan. 1st printing October, 2000 D-SMC.L.A. P-80 (D)