5 Port Solenoid Valve/Body Ported, Cassette Type Manifold, Series SZ3000

(Manifold specification sheet on page 41.)

NARM Series

A 1.18 (30) 1.61 (41) B 1.34 (34) 1.57 (40) C D E F G 136314 2.76 (70) 2.97 (75.5) .21 (5.4) .26 (6.5) .61 (15.4) .31 (8) 2.17 (55) 2.09 (53) .09 (2.3) .09 (2.3) NARM2500 43.5 136414 NARM3000 30 15 Precautions 0 35.3 70.6 106 Be sure to read before handling.

Piping: Base Mounted, Stations: 9 Stations, A, B Port: 1/4\" One-touch Fitting

Piping: 41 (Base Mounted), Stations: 9 Stations, A, B Port: N7T (1/4" One-touch Fitting)

Piping: Base Mounted, Stations: 9 Stations, A, B Port: 1/4" One-touch Fitting, Bracket: -

Manifold Type: 41 (Base Mounted, Bar Manifold, Compact, Individual Wiring), Valve Stations: 9 Stations, A, B Port: N7T (1/4" One-touch Fitting)

Manifold Type: Base Mounted, Bar Manifold, Compact, Individual Wiring, Valve Stations: 9 Stations, A, B Port: 1/4" One-touch Fitting, Q: -

MY1

Blue [Black] Lead wire length: 0.5m 7 7 6 7 8 8 D-A96(V) Lead wire length: 3m 35 35 30 35 41 41 DC(+) Brown [Red] LED (+) Resistor Reed switch Load OUT Black [White] Reverse current prevention diode DC power () DC() Blue [Black] Dimensions D-A90, D-A93, D-A96 D-A90V, D-A93V, D-A96V The dimension inside ( ) is for D-A93. 13 Reed Switches: Direct Mounting Type D-Z73, D-Z76, D-Z80 Specifications

ARM10/11

A B C D E F G H Composition of assembly Set nut (1349172) ARM2500 136314 30 34 70 5.4 15.4 55 2.3 M33 x 1.5 Bracket (B220) Set nut (131532) ARM3000 136414 41 40 75.5 6.5 8 53 2.3 M42 x 1.5 Bracket (B320) Note) Tighten the set nut securely and fix it.

With Factory Installed

D.8 AR3001 1/4 3/8 53 127.5 35 53 29.5 41 2.3 40 46 6.5 8 53 52.5 36

EXxx-OMY0006CN

SI 1oo1Input N Input N+4 1 1 1oo2Input N Input N+4 11 1oo2 equivalent non-equivalent 1oo2-channel non-equivalentInput N Input N+4 1 39 No.EX##-OMY0006CN 1oo22 2 2 2 SI 40 No.EX##-OMY0006CN Start inhibit after discrepancy Input N Input N+4 Disable Enable 0 Safety Mode (Channel Passivation)Enable , Disable Safety Mode (Module Passivation/xxx)Enable 41 No.EX##-OMY0006CN 8.2.2.5.

PFxx-OMP0001CN

No.PF-OMP0001CN-F // PFMB7501 PFMB7102 PFMB7202 2 10 11 12 14 14 16 17 [] 21 OU1OUT2 {3 ] 22 22 [] 24 25 F0 26 F1 OUT1 28 F2 OUT2 36 F3 41 F10 42 F13 43 F20 44 F22 45 F30 46 F31 47 F80 OFF 48 F81 49 F90 50 F98 52 F99 53 54 58 59 61 62 62 65 67 -1No.PF-OMP0001CN-F (ISO/IEC)(JIS) *1) *2) *1) ISO 4414: Pneumatic fluid power -General rules relating to systems

Vane Type Rotary Actuator Series CRB1 New 63mm Bore Size

Type Type CDRB1BW63 CDRB1BW63 P411040-8 P411040-09 P411030-1 One piece each of right hand and left hand switch block units are installed on auto switch units. Order examples {CRB1BW63} (Selection of side port position and single vane type) 1. Standard type (without auto switches), rotation 90 CRB1BW63-90S 2. With switch unit (without auto switches), rotation 180 CDRB1BW63-180S 3.

DOC1020530

Actuator operation from host . 40 8.1 CiA 402 drive profile . 40 8.1.1 FSA state . 40 8.1.2 Controlword / Statusword . 41 8.1.3 Control mode . 42 8.2 Parameter setting . 43 8.3 Servo-on and Homing . 44 8.4 Positioning operation (Profile position mode) . 45 9.

Type: 41 (Feedback Sensor Type), Bar Length: 1420mm, Electrode Cartridge, Needle Material: High Speed De-Ionizing Cartridge, Tungsten, Input/Output Specifications: NPN (or N/A for Type 40), Power Supply Cable: 3m, One-Touch Fitting: 09 (ø5/16"), Bracket: w/o Bracket, Sensor: Type 40: N/A; Type 41 & 42: Built-in Auto Balance Sensor, Option: X14 (Electrode Cartridge Drop Prevention Cover, for

Type: 41 (Feedback Sensor Type), Bar Length: 1900mm, Electrode Cartridge, Needle Material: High Speed De-Ionizing Cartridge, Tungsten, Input/Output Specifications: NPN (or N/A for Type 40), Power Supply Cable: 3m, One-Touch Fitting: 09 (ø5/16"), Bracket: w/o Bracket, Sensor: Type 40: N/A; Type 41 & 42: Built-in Auto Balance Sensor, Option: X14 (Electrode Cartridge Drop Prevention Cover, for

Type: 41 (Feedback Sensor Type), Bar Length: 1840mm, Electrode Cartridge, Needle Material: High Speed De-Ionizing Cartridge, Tungsten, Input/Output Specifications: NPN (or N/A for Type 40), Power Supply Cable: 3m, One-Touch Fitting: 09 (ø5/16"), Bracket: B (Bracket), Sensor: F (Feedback Sensor for Type 41), Option: X10 [Non-standard Bar Length (Not Required with Electrode Cartridge Drop Prevention

Type: 41 (Feedback Sensor Type), Bar Length: 2020mm, Electrode Cartridge, Needle Material: High Speed De-Ionizing Cartridge, Tungsten, Input/Output Specifications: P (PNP), Power Supply Cable: 3m, One-Touch Fitting: 09 (ø5/16"), Bracket: B (Bracket), Sensor: Type 40: N/A; Type 41 & 42: Built-in Auto Balance Sensor, Option: X10 [Non-standard Bar Length (Not Required with Electrode Cartridge

Type: 41 (Feedback Sensor Type), Bar Length: 1180mm, Electrode Cartridge, Needle Material: High Speed De-Ionizing Cartridge, Tungsten, Input/Output Specifications: P (PNP), Power Supply Cable: 3m, One-Touch Fitting: 09 (ø5/16"), Bracket: w/o Bracket, Sensor: Type 40: N/A; Type 41 & 42: Built-in Auto Balance Sensor, Option: X10 [Non-standard Bar Length (Not Required with Electrode Cartridge

Vacuum

manifold assembly: sta. 1-4) NZXl101-KlsLZ-EC-M NZZXlO4-TB-A Parl Number / Configuration Six station manitold assembly: sra. 1) NZX 1071 -K3sMZ-F-M sta. 2-5) NZX1071-K1sLZ-EC-M sta. 6) zx'l-BABI NZZXl O6-TB-A 4tl 2 ' Part Number / Configuratlon Four station manifold assembly: sta. 1-2) NZX'I101-EC-M zx1-DR1-4 sra.3-4) NZXi071-EC-M zxl-DR16-4 NZZXl04-TB-A r:::r:l::t: l:l:l:lrrl:l:l:l :r:t:41