Thermo-chiller

Q: Heat generation amount I: Current Users equipment q Derive the heat generation amount from the power consumption.

MNB

34 43.5 34.5 50 CLS 44 51.5 36 43 36 40 36 39 93.5 83.5 46 39 48.5 39.5 63 51.5 58 45 52 45 48.5 45 47.5 103 92.5 52.5 46.5 55 46.5 80 CLQ 60.5 65.5 53.5 60 53.5 56.5 53.5 55.5 113.5 103 59.5 55 62 55 100 MLGP Operating Range RLQ Auto switch model Bore size (mm) 32 40 50 63 80 100 7.5 MLU D-Z7/Z80 10.5 11 15 11 9.5 11 14 11 9.5 11 14 11 7.5 10 13 10 8.5 9 13 9 ML1C D-A5/A6 9 D-A59W

MNB

34 43.5 34.5 50 CLS 44 51.5 36 43 36 40 36 39 93.5 83.5 46 39 48.5 39.5 63 51.5 58 45 52 45 48.5 45 47.5 103 92.5 52.5 46.5 55 46.5 80 CLQ 60.5 65.5 53.5 60 53.5 56.5 53.5 55.5 113.5 103 59.5 55 62 55 100 MLGP Operating Range RLQ Auto switch model Bore size (mm) 32 40 50 63 80 100 7.5 MLU D-Z7/Z80 10.5 11 15 11 9.5 11 14 11 9.5 11 14 11 7.5 10 13 10 8.5 9 13 9 ML1C D-A5/A6 9 D-A59W

10

4.5 5 5 5.5 6.5 D-P4DW 4 4 4 4.5 4 4.5 4.5 D-A9l/A9lV 7 7.5 8.5 9.5 9.5 10.5 12 D-Z7l/Z80 7.5 8.5 7.5 9.5 9.5 10.5 13 D-A5l/A6l 9 9 10 11 11 11 10 D-A59W 13 13 13 14 14 15 17 D-A3l/A44 9 9 10 11 11 11 10 * The switch mounting bolt is supplied with the switch.

ZP

A B D A B D Model Model ZP3-T13B;3-B5 ZP3-T13B;6-B5 ZP3-T13B;10-B5 ZP3-T10B;3-B5 ZP3-T10B;6-B5 ZP3-T10B;10-B5 8.5 9.7 11.7 8.6 9.8 11.8 8.6 9.7 11.7 8.7 9.8 11.8 15 18 22 34.5 41 51 11 14.5 20.5 15 18 22 34.5 41 51 11 14.5 20.5 Note 1) ;in the table indicates the pad material "N, S, U, F, GN, GS."

smcmaintenancepartslist

Fit the grooved part of gasket w into the flange part of case q. b. Place element e in case q. Element e must be positioned at the center of case q. c. Set clamp ring t to case q. The tapered part of clamp ring t must be facing downward. d. Set seal part of the element e to the cover r while the flange part of case q is being placed on clamp ring t. e.

SX

) SY3000-11-24 Mounting Screw Tightening Torques SX5000 SY5000-11-10 M2: 0.17 Nm M3: 0.8 Nm M4: 1.4 Nm SX7000 SY7000-11-9 Warning When mounting a valve or spacer on the manifold base or sub-plate, etc., those mounting directions are determined.

Table of Contents

Refer to pages 11-13-3 to 4 for Safety Instructions and Common Precautions on the products mentioned in this catalog, and refer to pages 11-1-4 to 6 for Precautions on every series. Component Parts Note No. q w e r t y u i o !0 !

Modular F.R.L. Unit

40 18 9 88 35 9 4.6 74 3 226 187 38 110 235 93 96 70 50 20 11 115 44.5 11 6.4 84 3.3 303 264 43 110 282 98 96 70 50 20 11 11 6.4 117.5 84 44.5 3.3 318 279 45 110 292 98 101 70 50 20 11 11 6.4 117.5 84 44.5 3.3 318 280 46 110 297 Note 1) For AC20 only, the position of the pressure gauge is above the center of the piping.

2/3 Port Valve

Refer to table q for configuration.

Modular Type Lubricators Series AL

50 N 51 64 81 Q 24 35 40 U 5 7 7 V 33 45 50 W 34.5 41 AC21 AC31 AC41 * Without relief valve option ** With relief valve option mm AC-A A* 90 117 154 AA** 140 181 238 B 160 220 239 C 73 86 92 E 30 38 F 45.5 58.5 75.5 G 40 55 80 J 26 29.5 37.5 K 5 3.5 1.5 M 30 41 50 N 51 64 81 Q 24 35 40 U 5 7 7 V 33 45 50 W 34.5 41 AC21A AC31A AC41A * Without relief valve option ** With relief valve option

Series VQ1000/2000 10- 21- 5 Port Solenoid Valve

Note) Refer to page 568 for How to Order Pilot Valve Assembly. 564 VQ1000/2000 10211021-VQ2000 Plug-in Unit: Main Parts/Replacement Parts Metal seal Rubber seal e q w e q w 1021-VQ2101 (B) 2 (A) 4 1021-VQ2100 (B) 2 (A) 4 r r 3 (R2) 1 (P) 5 (R1) 3 (R2) 1 (P) 5 (R1) e q w e q w 1021-VQ2200 1021-VQ2201 (B) 2 (A) 4 (B) 2 (A) 4 3 (R2) 1 (P) 5 (R1) 3 (R2) 1 (P) 5 (R1) r r e q w e q w 1021-VQ2300

Series VQ1000/2000 10- 21- 5 Port Solenoid Valve

Note) Refer to page 568 for How to Order Pilot Valve Assembly. 564 VQ1000/2000 10211021-VQ2000 Plug-in Unit: Main Parts/Replacement Parts Metal seal Rubber seal e q w e q w 1021-VQ2101 (B) 2 (A) 4 1021-VQ2100 (B) 2 (A) 4 r r 3 (R2) 1 (P) 5 (R1) 3 (R2) 1 (P) 5 (R1) e q w e q w 1021-VQ2200 1021-VQ2201 (B) 2 (A) 4 (B) 2 (A) 4 3 (R2) 1 (P) 5 (R1) 3 (R2) 1 (P) 5 (R1) r r e q w e q w 1021-VQ2300

SYJ300/500/700

(For details, refer to page 4-4-25.) 4-4-20 21 3 Port Pilot Operated Solenoid Valve Rubber Seal Series SYJ500 Construction q e r t w y q e r t w y N.C. N.O.

ZP

P Q R 4 4 6 20.6 21.6 15.6 16.6 S 10.4 12.8 6 a e Y b c d Model ZPR2004U 2 1.2 0.3 4 2.6 4.6 ZPR3507U 3.5 1.8 0.5 7 4.3 7.8 ZPR4010U 4 2 0.8 10 5 11 Flat/Flat with Ribs Dimensions of D are the same.

MGG

size (mm) W V U T O P S Z X Bore size (mm) Bore size (mm) Y R HR HN Q Y R Q 20 25 32 40 50 40 48 82 12 M6 x 1 depth 9 Rc 1/8 26 157 30 20 25 32 40 50 20 25 32 40 50 11 25.3 12 (14) 21 37 47.5 107 (115) 104 46 57 100 13 Rc 1/8 M6 x 1 depth 13 31 175 37 11 28.3 12 (14) 21 40 104 48 107 (115) 52 65 114 16 Rc 1/8 M6 x 1 depth 13 38 201 37 11 31.3 12 (14) 21 43 106 49 110 (118) 62 84 138 Rc 1

High Vacuum Angle Valve, XL Series

-25 XLD-40 XLD-50 XLD-63 XLD-80 12 11 11 11 11 41 63 68 72 98 95 110 Note 1) Dimension E applies when heater option is included.

XL

-25 XLD-40 XLD-50 XLD-63 XLD-80 12 11 11 11 11 41 63 68 72 98 95 110 Note 1) Dimension E applies when heater option is included.

VFR

1, Metal joint q, w End plate (D) !2, Connection bracket q, w, Gasket e, r, O-ring y, u End plate (D) !2, Connection bracket q, w, Gasket e, t, O-ring y, u Non plug-in type Plug-in type VVF4000-3A-2 !

MXS Series Air Slide Table

Q Q Q Q Q Q Q Q Q Q Q Q Q 41 Q MXS Series 6, 8, 12, 16, 20,25 The MXS series air slide table is ideal when precise load transfer/ assembling is required. Shock absorber type and Symmetric type are now available.