Air Fittings & Tubing

24 30 42 53 51 60 82 71 74 91 118 113 125 14 10.4 13.4 16 13.4 4 17 14 6 12.8 13.4 17 13.4 24.5 17 19 8 18.5 15.2 17.6 15.9 28.5 21 10 21 21 18.5 20.6 19.2 31.5 12 26 34 22 20.9 25.2 21.6 Reference dimensions after R(PT) thread installation.

Electric Actuators

Positioning driver Model Operating Conditions Plate non-rotating accuracy () Allowable plate rotation torque (T) Allowable lateral load (F) Non-rotating accuracy () Stroke 50 75 100 125 150 175 200 Load (N) Stroke 50 75 100 125 150 175 200 Torque (Nm) 42 2.87 0.09 42 2.47 40 2.17 + 42 2.38 32 2.16 24 1.98 17 1.82 F T F Refer to page 304 for deflection data. 218 2 Phase Stepper Motor/Without

CL

R +0.058 0 0.2 0.4 8 8 0.2 0.4 10 0.3 0.5 18 I-G02 I-G03 I-G04 Y-G02 Y-G03 Y-G04 +0.058 0 8 +0.4 +0.2 8 16 20 22 34 41 42 20 25, 32 40 8.5 10.5 14 25 30 30 M8 X .25 M10 X .25 M14 X 1.5 10.3 12.8 12 11.5 14 14 16 20 22 21 34 41 42 25 30 30 10.3 12.8 12 20 8.5 M8 X .25 11.5 14 14 16 20 36 IY-G02 IY-G03 IY-G04 +0.058 0 10 +0.058 0 10 +0.4 +0.2 10 +0.5 +0.3 18 25, 32 40 10.5 16 M10 X 1.25 M14

AC Servo Motor Driver

42 14.

Fluoropolymer Piping Equipment

TL TIL Dimensions TLM TILM Union Flange: LQ3F TD TID TH TIH Metric Size (S) Model E E H L1 L1 L2 L2 M P Q R S T W N Min. port size LQ3F22 17 16 16 32.1 30.9 56.1 54.9 20 58 42 43 14 10 14 4 4 LQ3F42 24 22 24 49 46.8 73 70.8 29 58 42 43 14 10 22 9.5 9.5 LQ3F43 69 LQ3F51 26.5 24 32 58 55.3 80 77.3 37 53 42 43 12 10 30 16 16 LQ3F52 82 79.3 58 14 LQ3F53 69 LQ3F62 30 26 41 68.5 64.2 92.5 88.2

4 Port Direct Operated Poppet Solenoid Valve Series VQD1000 1

Refer to page 3-3-14.

ZP

tubing: 6 Applicable tubing: 6 Applicable tubing: 6 Width across flat 14 Width across flat 14 Width across flat 14 2 2 2 2 2 2 7 18 12 12 18 18 12 M12 x 1 M12 x 1 M12 x 1 33.2 33.2 Width across flat 14 Width across flat 14 Width across flat 14 7 5 5 5 7 1.8 1.8 1.8 1 1.2 1.2 10 13 16 11 14 17 9 With Adapter: Vacuum Inlet Series ZP3 Vertical 4 to 8 Pad diameter Vertical Dimensions/With Adapter

Air Cylinder Series CG1 ø20, ø25, ø32, ø40, ø50, ø63, ø80, ø100 1

A MM A1 E1 L1 NDH10 NX I-G02 I-G03 I-G04 I-G05 I-G08 I-G10 16 20 22 28 38 44 20 25, 32 40 50, 63 80 100 8.5 10.5 14 18 21 21 10.3 12.8 12 16 21 24 25 30 30 40 50 55 M8 x 1.25 11.5 14 14 20 27 31 34 41 42 56 71 79 Applicable bore (mm) 8 10 10 14 18 22 8 10 18 22 28 32 +0.058 0 0.2 0.4 R1 U1 ND Applicable pin part no. L MM NZ NX Part no.

F

Connection thread Model D1 D2 L1 L2 *A M Nylon M5x0.8 KXL04-M5 8 22.5 24 11 4 10.4 13 22 16 2.5 3.5 18 KXL04-01S 12 23 25 16 18 KXL06-01S 25 28 20 6 14 12.8 15 24 17 4 8.6 14 KXL06-02S 28 29 26 18 KXL08-01S 29 32 28 14 KXL08-02S 32 33 34 8 17 15.2 17 27 18.5 6 21.6 38 KXL08-03S 33 34 43 14 KXL10-02S 38 42 69 38 KXL10-03S 39 42 77 10 22 18.5 23.5 32 21 7 30.5 95 12 KXL10-04S 42 43 38 KXL12

CJ2

(SNJ-016B for 10, SNKJ-016B for 16) LB KA MM H LZ GB LY GA LX Z F LT S BA CB LH NN Y A BB CA LC NA NB X Bore size (mm) 10 16 4.2 28 42 5 25 8 33 74 8 2.3 46 14 14 9 15 17 5.5 9.5 6 15 12 21.5 12.5 M4 x 0.7 M10 x 1.0 5.2 28 42 5 25 8 33 75 8 2.3 47 20 14 9 15 20 5.5 9.5 6 18.3 18.3 23 12.5 M5 x 0.8 M12 x 1.0 6-3-36 37 37 Series CJ2K Air Cylinder: Non-rotating Rod Type Double Acting, Single

ISO Cylinder

78 (81.5) 4 20 32 33 42 18 32 86 (89.5) 16 5.5 6 14 84 (87.5) 99.5 (103) 115 (118.5) 4 20 32 33 42 18 32 92 (95.5) 107.5 (111) 123 (126.5) 20 6.6 8 17 96 146 171 5 25 40 42 54 19 36 103 153 178 25 6.6 8 17 96 147.5 172.5 5 25 40 42 54 23 40 110 158.5 183.5 ( ): For built-in magnet Refer to page 12 of Standard Type Single Rod for details of accessories (rod end, double knuckle joint,

C85

32 14 38 6 4 32 6 16 25 8 52 88(90) 40 80(82) 18 5.5 20 4 30 18 5.5 18 33 58 42 32 14 38 6 4 32 6 20 32 8 66 103 50 96 19 6.6 25 5 40 20 6.6 19 42 66 54 36 17 46 8 5 40 6 25 32 8 66 110 50 99 23 6.6 25 5 40 24 6.6 23 42 66 54 40 17 46 8 5 40 6 ( ): In the case of air cushion. { }: In the case of auto switch. 6-11-19 6-11-19 19 Series C85 Accessory Dimensions [First angle projection] Single

Table of Contents

Model Operating Conditions Plate non-rotating accuracy () Allowable plate rotation torque (T) Allowable lateral load (F) Non-rotating accuracy () Torque (Nm) Stroke 50 75 100 125 150 175 200 Load (N) Stroke 50 75 100 125 150 175 200 0.09 42 2.87 42 2.47 40 2.17 + 42 2.38 32 2.16 24 1.98 17 1.82 F T F Refer to page 304 for deflection data. 234 27 Courtesy of Steven Engineering, Inc.-230

Air Cylinder

14 12 (14) 1/4 14 12 (14) 1/4 35 32 76 27 32 20 30 2 9 9 58 58 11 58 M8 x 1.25 7 63 Up to 300 301 to 1500 14 12 (14) 1/4 14 12 (14) 1/4 35 32 92 27 38 20 32 2 11 9 70 58 11 72 M10 x 1.5 7 80 Up to 300 301 to 1500 20 16 (20) 3/8 17.5 16 (17.5) 3/8 40 37 104 32 50 25 40 3 11 11 82 71 13 89 M10 x 1.5 10 100 Up to 300 301 to 1500 20 16 (20) 1/2 17.5 16 (17.5) 1/2 40 37 128 41 60 30 50 3 14 14

CA2

42 77 86.5 77 76.5 35.5 86.5 42 35.5 78.5 6 5 9 2.5 1.5 3 2 8 4.5 3.5 6.5 5.5 14 13 63 49 46.5 91 93.5 91 83.5 43 93.5 47 43 85.5 9.5 7.5 4.5 12.5 6 4 6.5 4.5 8 6 10 8 17.5 15.5 80 107 57.5 53.5 107 102 92 51 102 53.5 51 94 11 10 14 13 7.5 6.5 8 7 9.5 8.5 11.5 10.5 19 18 100 121 68 61.5 121 112 102.5 57.5 112.5 61 57.5 104 6-8-15 16 Series CA2 Proper Auto Switch Mounting Position (Detection

LEC-OM071xx

If 8 or a higher COMM_ALM has occurred, the system shifts 14 to communication phase 2.

Series SYJ3000/5000/7000 4, 5 Port Solenoid Valve Rubber Seal

SS5YJ3-31 -S31 -32 -S32 Blank plate ass'y SYJ3000-21-4A Blank plate ass'y SYJ3000-21-3A Phillips head screw SY100-33 -2 (M1.7 X 7, matted nickel plated) Phillips head screw SY100-33 -2 (M1.7 X 7, matted nickel plated) Blank plate SYJ3000-21-1 A Mark A Mark Blank plate SYJ3000-21-1 Manifold gasket Manifold gasket VJ3000-14-3 VJ3000-14-2 Dust cap SYJ3000-42-1 Applicable manifold base SS5YJ3

CQS

17 19.5 22.5 CL 34.5 35.5 42 47.5 A 45.5 46.5 61 67.5 B 22 22 29.5 32.5 CL 39.5 40.5 52 57.5 14 15.5 18.5 22.5 6 6 9 10 12 14 20 24 5 5 8 10 4 4 5 5 7 10 12 14 14 15 18 20 5 6.5 8 10 10 12 16 20 3.5 3.5 4.5 5 12 16 20 25 5, 10 B + Stroke CL + Stroke A + Stroke Double clevis bracket material: Carbon steel For details about the rod end nut and accessory brackets, refer to page 7-6-20.

Table of Contents

-20-9 Mist Separator 14-20-16 Micro Mist Separator 14-20-22 Odor Removal Filter 14-20-42 Note: Some models have different heights depending on the port size.

CJ2

(SNJ-016B for 10, SNKJ-016B for 16) (mm) Bore Y X NN LT LH LC LB LY LX CB CA BB A BA KA H GA F LZ NB NA MM 10 16 9 6 25 33 2.3 14 5.5 21.5 4.2 28 8 8 14 17 12 15 15 M10 X 1.0 5.5 12.5 42 M4 X 0.7 9 6 25 33 2.3 14 5.5 23 5.2 28 8 8 20 20 18 15 18 M12 X 1.0 5.5 12.5 42 M5 X 0.8 Dimensions by stroke Symbol S Z Stroke 5 to 15 48.5 48.5 16 to 30 56 57 31 to 45 68 69 46 to 60 80 81 61 to 75 87