C85 54) 56 (56) 6H9 12 M5 x 0.8 M16 x 1.5 M6 x 1 18.3 6.2 24 8 5 10 14 5.5 17 38 22 6 12 9 16 14 9.5 16 19.7 6H9 16 M5 x 0.8 M16 x 1.5 M6 x 1 18.3 6.2 24 8 5 10 13 5.5 17 38 22 6 12 9 16 14 9.5 16 19.7 20 M22 x 1.5 G 1/8 M8 x 1.25 24 8.2 32 11 62 126 6 13 115 11 8.5 95 20 44 24 8 16 12 22 17 8 8 11.5(13) 15(17) 15(17) 20 28 8 25 M22 x 1.5 G 1/8 M10 x 1.25 30 32 11 65 137 8 126 17 11 104 22 50
[mm] Size Stroke range (mm) A B C D EH EV F G H J K L M O1 25 15 to 100 130.5 116 13 20 44 45.5 2 4 M8 x 1.25 24 17 14.5 34 M5 x 0.8 105 to 400 155.5 141 32 20 to 100 148.5 130 13 25 51 56.5 2 4 M8 x 1.25 31 22 18.5 40 M6 x 1.0 105 to 500 178.5 160 63 Up to 200 192.6 155.2 21 40 76 82 4 8 M16 x 2 44 36 37.4 60 M8 x 1.25 205 to 500 227.6 190.2 505 to 800 262.6 225.2 Size Stroke range (mm)
8 4 55 3.5 6 26 38 13 80 Up to 300 18 15.5 57.5 8 25 26 83.5 13 9 8 7 64.5 4 9 32 45 17 90 Up to 300 22 19.5 69 10 26 32 13 83.5 9 8 7 64.5 4 9 32 45 17 90 Up to 300 22 19.5 69 12 32 16 90.5 8 11 8 70 4 40 11 41 52 22 100.5 Up to 300 24 21 76 14 H GR H1 K PG P N NA PH PL PW S TD TT TY TX TZ Z ZZ MM NN Bore size (mm) 1/8 1/8 1/8 1/4 20 127 38 10 20 32 22 32 52 8 183 173 5 4 41 19.5 M20 x
M10 x 1.25 M5 x 0.8 83 32 35.5 to 450 22 19.5 17 8 M5 x 0.8 9.5 20 12 19 3 18 12 40 6 38 M5 x 0.8 depth 8 5.5 10 3.5 M10 x 1.25 Rc 1/8 85 40 44 to 800 30 27 19 10 M6 x 1.0 12 26 16 23 3 19 13 50 8 47 M6 x 1.0 depth 12 6 14 4 M14 x 1.5 Rc 1/8 93 50 55 to 1200 35 32 27 13 M8 x 1.25 15.5 32 20 28 3 21 14 58 11 58 M8 x 1.25 depth 16 7 18 5.5 M18 x 1.5 Rc 1/4 109 63 69 to 1200 35 32 27 17 M10
14 20 13 8 15 39.5 76 26 17.5 CY1R15 14 53 4.3 5 M4 x 0.7 6 M5 x 0.8 84 18 17 25 16 7 18 54.5 94 32 19 Rc(PT) 1/8 Rc(PT) 1/8 Rc(PT) 1/8 Rc(PT) 1/4 Rc(PT) 1/4 Rc(PT) 1/4 CY1R20 11 62 5.6 5 M4 x 0.7 7 95 17 20 40 19 7 22 64 107 38 20.5 CY1R25 15 70 5.6 6 M5 x 0.8 6.5 105 20 22.5 40 21.5 7 28 72 117 43 21.5 CY1R32 13 76 7 7 M6 x 1 8.5 116 26 28 50 27 7 35 79 130 54 24 CY1R40 15 90 7 8 M6 x 1
20 22 13 15 M8 x 1.25 8 12 10.5 13 27.5 36 ZPT16F-B5 ZPT20F-B01 16 18 2 Rc(PT)1/8 6.2 14 12.5 15.5 ZPT25F-B5 32 M5 x 0.8 5 9 ZPT 40/50 F-B 8/01 (Without Buffer/Female Thread) ZPT25F-B8 25 28 M8 x 1.25 8 12 36 ZPT25F-B01 Rc(PT)1/8 6.2 14 ZPT32F-B5 32.5 M5 x 0.8 5 9 ZPT32F-B8 32 35 M8 x 1.25 8 12 13 16 36.5 ZPT32F-B01 Rc(PT)1/8 6.2 14 Width across flats P N NL F D C Y 2.5 A B Dimensions A
Stations Note 02 2 stations Double wiring*1 Nil Internal pilot S Internal pilot, Built-in silencer 32 M12 NB NBN 16 NC NCN 32 *3 D-sub ND NDN 16 VA VAN CC-Link 32 M12 VB VBN 16 DA DAN EtherCAT 32 M12 DB DBN 16 FA FAN PROFINET 32 M12 FB FBN 16 EA EAN EtherNet/IP 32 M12 EB EBN 16 *2 GAN Ethernet POWERLINK 32 M12 *2 GBN 16 *2 KAN IO-Link 32*4 M12 08 8 stations 02 2 stations Specified layout
NM M5T N9 N7 N3 N1 Symbol 1/8" 5/32" 1/4" 5/16" 10-32UNF (M5 thread) Mixed Applicable tubing O.D.
NM M5T N9 N7 N3 N1 Symbol 1/8" 5/32" 1/4" 5/16" 10-32UNF (M5 thread) Mixed Applicable tubing O.D.
Bore size 16 20 25 32 40 50 63 16 20 25 32 40 50 53 Recommended length Part No.
MGPM, MGPL Common dimensions (mm) Standard stroke (mm) Bore size (mm) B C DA FA FB G GA GB H HA J K L MM ML NN OA OB OL P PA PB PW 42 29 11 7.5 8 8.5 9 M4 x 0.7 10 12 13 15 M4 x 0.7 4.3 4.3 5.6 5.6 M5 x 0.8 6 8 10 12 58 64 83 93 8 8 9.5 9.5 13 8 8 10 10 M4 M4 M5 M5 4.5 4.5 5.5 5.5 8 5 5 6 6 13 15 18 21 18 26 30 36 42 13 15 18 21 18 22 24 30 12 16 20 25 10, 20, 30, 40, 50, 75, 100 125, 150
NM M5T N9 N7 N3 N1 Symbol 1/8" 5/32" 1/4" 5/16" 10-32UNF (M5 thread) Mixed Applicable tubing O.D.
Bore size (mm) 6 10 16 Z T S NB NA NN MM H GB GA FZ FY FX FT FC FB F D C B A 77 3 49 7 16 M6 x 1.0 M3 x 0.5 28 14.5 32 14 24 1.6 4.5 13 8 3 14 12 15 74 46 9.5 12.5 M8 x 1.0 M4 x 0.7 28 5 8 32 14 24 1.6 4.5 13 8 4 14 12 15 75 47 9.5 12.5 M10 x 1.0 M5 x 0.8 28 5 8 42 20 33 2.3 5.5 19 8 5 20 18.3 15 With Air Cushion/Dimensions other than the table below are the same as the table above.
Connection 10 40, 50 20 to 32 10 to 16 10 13 13 B5 M5 x 0.8 16 16 B8 M8 x 1.25 Female thread 20 20 B01 Rc 1/8 25 25 N01 NPT 1/8 32 32 T01 NPTF 1/8 40 40 50 50 Material N NBR S Silicone rubber Pad type U Urethane rubber F Ball joint type F FKM GN Conductive NBR GS Conductive silicone rubber Note) Pads are exclusively ball joint type and are not interchangeable with other pads.
4 5 H 28 30 20 28 23 28 G 9 12 13 15 20 27 N 4 4 4 4 6 6 HA 20 30 20 28 46 56 KA 82.5 132.5 GA 17 12 33 43 43 83 NA 2 2 2 2 4 4 13-/22-MXS8L-10 13-/22-MXS8L-20 13-/22-MXS8L-30 13-/22-MXS8L-40 13-/22-MXS8L-50 13-/22-MXS8L-75 139 MXS Air slide table 1322Dimensions: MXS12 1322Basic style 2-M4 x 0.7 thread depth 5 Operating port 2-M5 x 0.8 9.5 2 Vacuum suction port M5 x 0.8 5.5 J 8 Max. 11 (With
40 6 10 16 20 25 32 40 6 10 16 20 25 32 40 32, 40 Double acting Normally closed Normally open Single acting 3.7 13 38 57 83 161 267 JIS Symbol Double acting Note 1) Values based on pressure of 0.5 MPa, gripping point L = 20 mm, at center of stroke.
40 6 10 16 20 25 32 40 6 10 16 20 25 32 40 32, 40 Double acting Normally closed Normally open Single acting 3.7 13 38 57 83 161 267 JIS Symbol Double acting Note 1) Values based on pressure of 0.5 MPa, gripping point L = 20 mm, at center of stroke.
(mm) <M5> Note) Weight (g) D L1 L2 L3 A M P Q1 Q2 KGLU04-M5 KGLU04-01 KGLU04-02 KGLU06-M5 KGLU06-01 KGLU06-02 KGLU06-03 KGLU08-01 KGLU08-02 KGLU08-03 KGLU10-02 KGLU10-03 KGLU10-04 KGLU12-02 KGLU12-03 M5 x 0.8 12 10 11 10.4 18.5 24 26.5 30.5 29.5 32 36 25.5 27.5 16 10.4 18.5 10 30 26.5 33 29.5 4.3 4.1 4 1 8 1 4 6.0 4.1 14 21 13 M5 x 0.8 4.3 4.3 13 12.8 21 17 12.8 20.5 12 1 8 15 22 35 29.5
10.5 9.5 10.5 10 11 13 13 14 0.004 0.012 0 0.036 4 9 15.5 0.5 29 22 8 14 1 5 9 24 3.5 M3 x 0.5 17 3 25 31 41 0.004 0.012 0 0.043 5 12 34 25 9 18 1.5 29 3.5 M3 x 0.5 21 3 29 36 48 15.5 0.5 M3 x 0.5 6 10 0.004 0.012 0 0.043 6 14 M5 x 0.8 42 34.5 10 20 1.5 36 4.5 M4 x 0.7 26 4 36 44 59 M4 x 0.7 17 0.5 7 10 0.005 0.014 0 0.043 M5 x 0.8 8 16 1 50 47.5 13 22 43 5.5 M5 x 0.8 29 42 52 69 M5
P.1.10-140 P.1.10-144 VFS C C3 (3.2) C4 (4) M5 (M5 thread) VS C6 (6) kit VS7 N1 (1/8) N3 (5/32) N7 (1/4)