Air Slide Table

Dimensions [mm] Model F G GA GB H HA HB I J M N NN Z ZZ MXQ12-10Z 28 17 17 11 32 32 46 11 32 82.5 4 2 62.5 75 MXQ12-20Z 28 19 19 11 32 32 48 13 32 92.5 4 2 64.5 77 MXQ12-30Z 38 21 21 11 40 40 58 15 40 102.5 4 2 74.5 87 MXQ12-40Z 34 40 27 39 60 23 50 120.5 6 3 92.5 105 MXQ12-50Z 34 11 50 37 39 39 60 23 60 130.5 6 3 102.5 115 MXQ12-75Z 36 25 61 41 36 72 100 42 85 174.5 8 4 146.5 159 MXQ12

Table of Contents

Weight m (kg) 32 32 0.1 0.1 25 25 20 20 0 0.03 0 0.02 20 40 60 80 100 20 40 60 80 100 Overhang l (mm) Overhang l (mm) Graph (12) V = Up to 1000 mm/s; Up to 100 st CXSM CXSL Weight m (kg) 32 0.1 25 20 0 0.02 20 40 60 80 100 Overhang l (mm) 8-28-17 17 Dual Rod Cylinder: Compact Type Series CXSJ 6, 10, 15, 20, 25, 32 How to Order Piping Standard piping (6 to 32) Axial piping (6, 10) Nil Nil

Smooth Cylinder/Low Speed Cylinder

32 71 43 15 M14 x 1.5 15 17 Up to 1000 25 32 32 64 +0.084 0 0.1 0.3 +0.3 +0.1 0 0.2 50 47 157 128 160 17 32 71 43 15 M14 x 1.5 15 17 Up to 1000 28 36 36 72 +0.084 0 0.1 0.3 +0.3 +0.1 0 0.2 56 53 177 144 180 20 38 78.5 42 18 M16 x 1.5 15 20 Up to 1200 32 40 40 80 +0.100 0 0.1 0.3 +0.3 +0.1 0 0.2 (mm) Bore size (mm) Without rod boot With rod boot K KA L N P S U RR MM Z ZZ e f h Z1 ZZ1 H l

Table of Contents

0 0.036 0 0.043 0 0.043 +0.025 0 +0.025 0 +0.030 0 +0.030 0 +0.036 0 12 14 17 23 31.5 8 10 11 15 21.5 2H9 8h9 6 7 9 11 12 3H9 8h9 4H9 10h9 6H9 12h9 8H9 14h9 TA M4 x 0.7 M4 x 0.7 M5 x 0.8 M5 x 0.8 M6 x 1 SC 9 9 12 14 19 SB 8 9.5 9.5 11 11 R 44 53 62 76 95 SA 4.5 5.5 5.5 6.6 6.6 Y O 4.5 4.5 5 5.5 6 P M5 x 0.8 M5 x 0.8 M5 x 0.8 M5 x 0.8 Rc 1/8 Q 11 12 14 17 20 TB 8 8 10 10 12 UA M4 x 0.7 M5

ISO Cylinder

x 0.8 12 5 28 13.4 M4 x 0.7 19 6 15 12 7 16 10 12 M12 x 1.25 4 M5 x 0.8 12 5 28 14.2 M4 x 0.7 19 6 15 12 7 16 12 16 M16 x 1.5 6 M5 x 0.8 17 6 38 14.2 5 M6 x 1 24 8 18.3 16 10 22 16 16 M16 x 1.5 6 M5 x 0.8 17 6 38 14.2 5 M6 x 1 24 8 18.3 16 10 22 20 20 M22 x 1.5 8 G1/8 20 8 44 17 6 M8 x 1.25 32 11 24 22 13 24 25 22 M22 x 1.5 10 G1/8 22 8 50 20 8 M10 x 1.25 32 11 30 22 17 28 Bore size S

1

Data Series CG1R Adjustable range Width across flats MA Stroke MH + Stroke + Adjustment ML + Adjustment S + Stroke ZZ + 2 x Stroke + Adjustment (A: 25 mm, B: 50 mm) Bore size (mm) 20 25 32 40 50 63 MA 14 17 17 24 32 32 MH 38 41 41 47 60 60 MI 16.2 19.7 19.7 27.8 37 37 ML 18 18 18 22 28 28 MT 9 11 11 11 11 13 S 83 85 91 103 120 126 ZZ 148 158 164 189 225 231 6-17-50 6-17-51 42 Made to Order

Air Cylinder

x 0.8 18 15.5 34 13 14 8 35 5 26 M4 x 0.7 5 6 4 6 20 45 (53) 3 32 44 3 M8 x 1.25 25 Up to 300 301 to 1500 12 10 (12) 1/8 12.5 10 (12.5) M5 x 0.8 22 19.5 38.5 17 16.5 10 40 6 31 M5 x 0.8 5.5 8 4 6 22 45 (53) 3 36 49 3.5 M10 x 1.25 32 Up to 300 301 to 1500 12 10 (12) 1/8 10.5 10 (10.5) 1/8 22 19.5 45 17 20 12 40 6 38 M5 x 0.8 5.5 10 4 7 25 45 (53) 3 44 58 3.5 M10 x 1.25 40 Up to 300 301 to

Made to Order

CG1(K)R series Width across flats B2 Width across flats MA MI MM2 H2 MK Stroke MT ML + Adjustment MH + Stroke + Adjustment S + Stroke ZZ + 2 x Stroke + Adjustment (A: 25 mm, B: 50 mm) CG1(K)R Series (mm) B2 10 13 13 17 19 19 H2 3.6 5 5 6 8 8 MA 12 17 17 19 24 24 MH 38 41 41 47 60 60 MI 14 20 20 25 32 32 MK 7 9 9 10 13 13 ML 18 18 18 24 32 32 MM2 M6 x 1 M8 x 1.25 M8 x 1.25 M10 x 1.25 M14 x

Proposals for Energy Saving

Specifications other than above Bore size (mm) 20 25 32 40 d J HA ZZ 3 M5 x 0.8 32 135 3 M5 x 0.8 32 139 3 M5 x 0.8 32 141 4 Rc 1/8 36 174 Precision cylinder/MTS8-XC38 Specifications 8 Bore size (mm) Standard type, Top ported type Port direction Female thread Rod end configuration Dimensions Use 4 or 2.5 urethane tubing (TU0425), or soft nylon tubing (TS0425). 1 4 7 + Stroke 60 + 2 x

SX

Dimensions Applicable fittings fitting d Model A L D KQ2P-04 16 32 6 6 KQ2P-06 18 35 8 8 KQ2P-08 20.5 39 10 10 5/32" 1/4" 5/16" 3/8" 4 4 148 L dimension 0 98 1 110.5 2 123 3 135.5 No. 5 160.5 6 173 7 185.5 8 198 9 210.5 10 223 KQ2P-10 KQ2P-03 KQ2P-07 KQ2P-09 KQ2P-11 12 6 8.5 10 11.5 43 32 35 39 43 22 16 18 20.5 22 L dimension 11 No. 235.5 12 248 13 260.5 14 273 15 285.5 16 298 17 310.5 18

ZP

NBR (50), Conductive silicon rubber (50) Durometer Weight/Male Thread (Female thread) (g) Pad form Flat Flat with ribs Deep Bellows Connection M5 M6 M8 M5 M6 M8 M5 M6 M8 M5 M6 M8 Model ZPY02 to 08 2004 3507 4010 10 to 16 (Thin section series) 15 (11) except 2, 4 15 (11) except 2, 4 15 (11) 15 33 (26) 31 (27) ZPY10 33 (25) 32 (25) 33 (25) 32 (25) 33 (25) 33 () (25) ZPY13 38 (27) 32 (27

Micro Mechanical Valve Series VM1000

Max. 6 R port (3 port only) (62) 32 24 16 Symbol 2 port (A) 2 12 10 1 (P) 30 (A) 2 3 port 17 44 25.4 10.5 12 10 1 (P) 3 (R) 2 x 4.6 mounting hole 14 8.5 2 x M5 x 0.8 depth 4 * 0.5 MPa supply F .O.F .* 29 N P .T. 2 mm O.T. 1.5 mm T.T. 3.5 mm Roller plunger VM122-M5-06A VM132-M5-06A VM122-M5-06SA VM132-M5-06SA Panel mounting hole 2 x M14 x 1 Hexagon nut Thickness 5, Width across flats 17 10

Series 10-SY3000/5000/7000/9000 5 Port Solenoid Valve

Note 2) ( ): denotes without sub-plate. 60 Base Mounted 10-SY3000/5000/7000/9000 Dimensions: Series 10-SY3000 [ ]: AC 2 position single Grommet (G), (H): 10-SY3140(R)-01 G H (A, B port) 1/8 14.5 13.5 38.1 17 19 17 19 Manual override (For mounting) 2 x 3.2 5 35 3 22 A B + B A X PE P EB EA (External pilot port) M5 x 0.8 M5 x 0.8 2 (Pilot EXH port) 44.7 66.9 [69.1]

A

Bore size A B C DA DB E F G GA GB H J K L MM ML NN P PW 12 39 39 29 6 8 0 8 29 11 7.5 58 16 13 18 M4 x 0.7 10 M4 x 0.7 M5 7 16 43 43 33 8 10 0 8 33 11 8 64 18 15 22 M5 x 0.8 13 M5 x 0.8 M5 5 20 47 47 37 10 12 0 8 36 10.5 8.5 74 19 17 26 M5 x 0.8 13 M5 x 0.8 1/8 7 S L I D E B E A R I N G 25 47.5 47.5 37.5 12 16 0 8 42 11.5 9 88 21 21 32 M6 x 1.0 15 M6 x 1.0 1/8 8 32 71.5 47.5 37.5 16 20 24

Stability of suction position,

Pad diameter 32, 40 Dimensions/With Ball Joint Male Thread Adapter: Vacuum Inlet Lateral Pad form Flat type with groove ZP3E-YF32UMl-AL14 ZP3E-YF40UMl-AL14 Width across flats 19 M14 x 1 Width across flats 19 M14 x 1 5 5 14.5 19.2 38.6 25 63.6 5 5 M5 x 0.8/ Effective thread depth 5 14.5 19.2 38.6 25 63.6 M5 x 0.8/ Effective thread depth 5 A A A A 17 17 32.6 14.41) 2.5 32.6 14.41) 2 ZP3 31

KR

(mm) <M5> Note) A Weight (g) D1 D2 L1 M L2 Model Nylon Urethane Applicable tubing KGW04-M5 KGW04-01 8 18 30 37.5 32 38.5 M5 x 0.8 11 3.0 3.0 8 10.4 1 8 4 16 23 M5 x 0.8 14 10 10 4.0 4.0 1 4 KGW04-02 43.5 42.5 38 11 26 KGW06-M5 KGW06-01 30.5 40 33.5 42.5 3.0 3.0 8 8 1 8 10 6 12.8 17 20 10 1 4 KGW06-02 46 46.5 17 14 10.9 8.6 41 3 8 KGW06-03 48 48 67 1 8 1 4 KGW08-01 KGW08-02 43.5 49.5 47 51

5

(mm) Bore size (mm) Stroke range (mm) A AL B1 C D E F H H1 I J K KA MM NA 20 18 15.5 13 14 8 12 2 35 5 26 M4 x 0.7 depth 7 5 6 M8 x 1.25 24 25 22 19.5 17 16.5 10 14 2 40 6 31 M5 x 0.8 depth 7.5 5.5 8 M10 x 1.25 29 32 22 19.5 17 20 12 18 2 40 6 38 M5 x 0.8 depth 8 5.5 10 M10 x 1.25 35.5 40 30 27 19 26 16 25 2 50 8 47 M6 x 1 depth 12 6 14 M14 x 1.5 44 Up to 1500 50 35 32 27 32 20 30 2 58 11

Hydraulic

50 50 25 9 73 53 20 28 17 17 13 M10 x 1.5 20 10 22 M16 x 1.5 30 26 3/8 43 112 11 15 19 63 55 28 8 80 60 22.4 30 17 17 13 M10 x 1.5 22 10 25 M18 x 1.5 30 26 3/8 47 116 11 15 21 80 65 32 8 100 75 28 32 22 20 15 M12 x 1.75 26 13 29 M22 x 1.5 35 30 1/2 57 127 11 25 26 100 80 38 6.5 118 90 35.5 35 27 19 16 M12 x 1.75 27 13 34 M27 x 2 35 32 1/2 66 137 12 32 34 125 80 38 6.5 140 112 35.5 35 27

Tamper Proof and Flat Head Screw

L4 L5 M1 d AS121F-M5-23T AS121F-U10/32-01T 1/8" 8.4 17.3 22.1 12.3 3.2 8.4 5/32" 9.3 12.7 17.3 22.1 12.3 12.7 AS121F-U10/32-03T AS121F-M5-04T 28.4 4 9.3 M5 x 0.8 8 9.6 4.5 31 0.7 31 0.7 28.4 10-32UNF 8 9.6 4.5 AS121F-M5-06T AS121F-U10/32-05T 3/16" 11.4 21.3 26.1 16.5 11.6 6 18.1 11.7 13.5 22.9 18.3 23.1 11.7 AS121F-U10/32-07T AS221F-01-23ST 1/4" 12 13.5 3.2 8.4 12.7 AS221F-01-04ST AS221F-N01

VM

JIS Symbol 2 port Roller plunger VM122-M5-06 VM132-M5-06 VM122-M5-06S VM132-M5-06S Panel mounting hole Polyacetal or hard steel roller Hexagon nut thick 5, across flats 17 3 port 0.5 MPa supply R port (3 port only) 2-M5 x 0.8 depth 4 T.T. O.T. P.T.