Battery-less

[mm] Size Stroke range [mm] A B C D EH EV H J K L M O1 R S T T2 U V X2 Y Without lock With lock 16 10 to 100 101 90.5 10 16 34 34.3 M5 x 0.8 18 14 10.5 25.5 M4 x 0.7 7 35 90.5 0.5 28 100.5 145.5 22.5 101 to 300 121 110.5 25 15 to 100 130.5 116 13 20 44 45.5 M8 x 1.25 24 17 14.5 34 M5 x 0.8 8 46 92 7.5 1 42 88.5 129 26.5 101 to 400 155.5 141 32 20 to 100 148.5 130 13 25 51 56.5 M8 x 1.25

Sine Cylinder Series REC

0.033 0 -0.033 0 -0.033 0 -0.039 20 18 15.5 34 26 13 8 13 10.5 10 41 4 60 75 20 20, 25, 32 25 22 19.5 40 32 13 10 17 10.5 10 45 4 60 75 26 32 22 19.5 40 32 13 12 17 10.5 11 45 4 60 75 26 40 24 21 52 41 16 14 22 13.5 12.5 50 5 66 36 82 32 MM N NA NN P S Z ZZ H1 H2 I K KA Bore (mm) 20 30 M20 x 1.5 1/8 37 200 146 M8 x 1.25 20 5 8 33.5 5 6 25 34.5 M26 x 1.5 1/8 41 204 146 M10 x 1.25 20 6 8

Sine Cylinder Series REC

0.033 0 -0.033 0 -0.033 0 -0.039 20 18 15.5 34 26 13 8 13 10.5 10 41 4 60 75 20 20, 25, 32 25 22 19.5 40 32 13 10 17 10.5 10 45 4 60 75 26 32 22 19.5 40 32 13 12 17 10.5 11 45 4 60 75 26 40 24 21 52 41 16 14 22 13.5 12.5 50 5 66 36 82 32 MM N NA NN P S Z ZZ H1 H2 I K KA Bore (mm) 20 30 M20 x 1.5 1/8 37 200 146 M8 x 1.25 20 5 8 33.5 5 6 25 34.5 M26 x 1.5 1/8 41 204 146 M10 x 1.25 20 6 8

High Vacuum Angle Valve

With Bypass Valve (Flange size: 80) (40) 148.5 3 117 (40) I G H H V A C 117 A U U M E V V A L Lead wire length: 500 mm (L type: 3000 mm) (40) XLA-16-X65 e u t w y Pilot port: Rc1/8 Bypass valve adjustment nut (Initial exhaust) Adjustment pitch: 1 mm/rotation Shaft seal (FKM) r Scraper (FKM) Pilot port: M5 0.2 Lock nut Width across flats 13 96 90 235 (Max. 13) 7.5 8-2 112 114 83 8-1 i !

Rotary Actuator/Vane Type

14 0 0.043 1.5 1.5 8 7 10 0.5 25.5 14 13 21 M4 x 0.7 M4 x 0.7 4.5 4.5 M5 x 0.8 30 16 4 56 64.5 22 44 36 26 59 30 50 47.5 13 22 80.005 0.020 16 0 0.043 2 2 9 8 12 1.0 33.5 15.5 14 25 M5 x 0.8 M5 x 0.8 5.5 5.5 M5 x 0.8 42 21.5 4.5 71.5 82.5 24 52 42 29 69 40 63 53 15 30 100.005 0.020 25 0 0.052 3 4.5 10 9 20 1.0 39 21 20 31.6 M5 x 0.8 M5 x 0.8 5.5 5.5 M5 x 0.8 47.8 25 5 87.5 98 30 64 52 38

A

B240 AL2000 B340 AL3000 B440 AL4000 B640 AL5000/6000 Model A B C D F G H J K L M P NAL1000 25 81.5 25.5 25 27 NAL2000 40 122 38 40 30 27 22 5.4 8.4 40 2.3 40 NAL3000 53 142 38 53 41 40 23 6.5 8 53 2.3 56 NAL4000 70 177 41 70 50 54 26 8.5 10.5 70 2.3 73 NAL5000 90 254 45 90 70 66 35 11 13 90 3.2 90 NAL6000 95 268 45 95 70 66 35 11 13 90 3.2 95 Courtesy of Steven Engineering, Inc. !

ZP

1 8 M5 x 0.8 M6 x 1 M8 x 1.25 Rc M6 x 1 M8 x 1 M6 x 1 M8 x 1 4 6 8 10 13 16 M4 x 0.7 M5 x 0.8 M5 x 0.8 M6 x 1 1 8 M6 x 1 M8 x 1.25 Rc 1 8 13-11-2 3 Series ZPT Vacuum Pad: Vertical Vacuum Entry without Buffer How to Order Vacuum entry port Pad dia.

Series KG Stainless Steel One-touch Fittings

KGY04-M5 KGY04-01 16 M5 0.8 13.5 22 25.5 36 13 15 3.5 4.6 4.6 7 9.5 1 8 4 6.4 6.4 16 13 M5 0.8 14 10 10 18 10.4 1 4 KGY04-02 26 38 19 4.3 13 KGY06-M5 KGY06-01 14.5 17.5 23 14 39 29 4.6 4.6 17.5 7 11.5 1 8 10 6 10 20 12.8 1 4 KGY06-02 27 41 17 17 14 13.4 13.4 21 3 8 KGY06-03 29 42.5 35 1 8 1 4 KGY08-01 KGY08-02 24.5 28.5 43.5 45.5 12 17 13.4 13.4 15 23 15.2 12 23 8 14 18.5 17.7 25.6 3

Stainless Steel One-touch Fittings Series KG

KGY04-M5 KGY04-01 16 M5 0.8 13.5 22 25.5 36 13 15 3.5 4.6 4.6 7 9.5 1 8 4 6.4 6.4 16 13 M5 0.8 14 10 10 18 10.4 1 4 KGY04-02 26 38 19 4.3 13 KGY06-M5 KGY06-01 14.5 17.5 23 14 39 29 17.5 4.6 4.6 7 11.5 1 8 10 6 10 20 12.8 1 4 KGY06-02 27 41 17 17 14 13.4 13.4 21 3 8 KGY06-03 29 42.5 35 1 8 1 4 KGY08-01 KGY08-02 24.5 28.5 43.5 45.5 12 17 13.4 13.4 15 23 15.2 12 23 8 14 18.5 17.7 25.6 3

Series VQ1000/2000 10- 21- 5 Port Solenoid Valve

Note 4) M5 fittings for M5 thread are attached without being incorporated.

Series VQ1000/2000 10- 21- 5 Port Solenoid Valve

Note 4) M5 fittings for M5 thread are attached without being incorporated.

Floating Joint

(mm) d: Nominal thread size Model M22 x 1.5 M26 x 1.5 H 13 16 32 41 B C 37 47.3 Order no.

MGP

15 M4 X 0.7 4.3 4.3 5.6 5.6 M5 X 0.8 6 8 10 12 58 64 83 93 8 8 9.5 9.5 13 M4 M4 M5 M5 4.5 4.5 5.5 5.5 8 8 8 10 10 13 15 18 21 18 13 15 18 21 5 5 6 6 18 22 24 30 12 16 20 25 26 30 36 42 10, 20, 30, 40, 50, 75, 100 125, 150, 175, 200, 250 20, 30, 40, 50, 75, 100 125, 150, 175, 200 250, 300, 350, 400 46 33 11 M5 X 0.8 M5 X 0.8 M5 X 0.8 15 10 19 MGC 53 37 10.5 M5 X 0.8 M5 X 0.8 Rc1/8 12.5 10.5

VQZ1000/2000/3000

mm2 < >: AC 61.5 54 0 1 M plug connector (M): VQZ212 (R)-M-C4/C6/M5 36 300 (Lead wire length) Cover diameter 1.5 Cross section 0.23 mm2 73.5 92 103.5 62 Indicator light 37.5 <42.5> < >: AC 2-7-12 13 13 Body Ported Series VQZ1000/2000/3000 Plug Lead Unit: Single Unit VQZ2000 2 position double Grommet (G): VQZ2220 1(R)-G-C4/C6/M5 300 (Lead wire length) 109.2 54.5 17.3 6 6 R2.5 VQC 3.4 B

Table of Contents

10.5 9.5 10.5 10 11 13 13 14 0.004 0.012 0 0.036 4 9 15.5 0.5 29 22 8 14 1 5 9 24 3.5 M3 x 0.5 17 3 25 31 41 0.004 0.012 0 0.043 5 12 34 25 9 18 1.5 29 3.5 M3 x 0.5 21 3 29 36 48 15.5 0.5 M3 x 0.5 6 10 0.004 0.012 0 0.043 6 14 M5 x 0.8 42 34.5 10 20 1.5 36 4.5 M4 x 0.7 26 4 36 44 59 M4 x 0.7 17 0.5 7 10 0.005 0.014 0 0.043 M5 x 0.8 8 16 1 50 47.5 13 22 43 5.5 M5 x 0.8 29 42 52 69 M5

Table of Contents

Specifications. 4 4 6 8 8 9 9 10 11 11 12 12 13 14 15 15 15 15 16 17 17 17 18 19 19 20 20 21 22 25 31 31 31 31 35 35 35 39 39 39 41 41 41 43 45 47 47 48 54 63 63 65 67 67 68 69 69 70 71 72 72 73 Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com Dimensions .

Base Mounted Type, VQ5000 Series, 5 Port Metal Seal/Rubber Seal Solenoid Valve

194.5 121.3 73.2 53 59.5 59.5 27.5 27.5 2-3/8 Ports R1, R2 (Port A) 17.5 13.5 (Port B) Indicator light SMC 2 4 T 5 1 3 16 16 13 A 40 53 66 53 66 B A VQ5000 2 4 14 5 1 3 12 Manual override 2-6.5 Mounting hole 17.5 13.5 35 53 35 53 3-1/2 Ports P, A, B Bottom ports 16 M5 ground screw SMC (Ports A, B) 26.5 18 31.5 37 41 50 98 PE X P R1 R2 27.5 41 41 27.5 1/8 Port PE 1/8 External pilot port 5

VQ5000

194.5 121.3 73.2 53 59.5 59.5 27.5 27.5 2-3/8 Ports R1, R2 (Port A) 17.5 13.5 (Port B) Indicator light SMC 2 4 T 5 1 3 16 16 13 A 40 53 66 53 66 B A VQ5000 2 4 14 5 1 3 12 Manual override 2-6.5 Mounting hole 17.5 13.5 35 53 35 53 3-1/2 Ports P, A, B Bottom ports 16 M5 ground screw SMC (Ports A, B) 26.5 18 31.5 37 41 50 98 PE X P R1 R2 27.5 41 41 27.5 1/8 Port PE 1/8 External pilot port 5

CG5-S

M10 x 1.25 M5 x 0.8 83 32 35.5 to 450 22 19.5 17 8 M5 x 0.8 9.5 20 12 19 3 18 12 40 6 38 M5 x 0.8 depth 8 5.5 10 3.5 M10 x 1.25 Rc 1/8 85 40 44 to 800 30 27 19 10 M6 x 1.0 12 26 16 23 3 19 13 50 8 47 M6 x 1.0 depth 12 6 14 4 M14 x 1.5 Rc 1/8 93 50 55 to 1200 35 32 27 13 M8 x 1.25 15.5 32 20 28 3 21 14 58 11 58 M8 x 1.25 depth 16 7 18 5.5 M18 x 1.5 Rc 1/4 109 63 69 to 1200 35 32 27 17 M10

Compact 5-Port Solenoid Valve

COM. 41 Red Red COM.