SZ3000

112.5 97 13 135.5 125 107.5 14 148 137.5 118 15 160.5 150 128.5 16 173 162.5 139 17 External Pilot Manifold L Dimension n: Stations (n1 + n2) L n 2 3 4 5 6 7 8 9 10 11 12 13 14 15 16 17 18 19 20 L1 L2 L3 L4 135.5 125 107.5 14 148 137.5 118 15 160.5 150 128.5 16 173 162.5 139 17 173 162.5 149.5 12 185.5 175 160 13 198 187.5 170.5 14 210.5 200 181 15 223 212.5 191.5 16 235.5 225 202 17 248

Table of Contents

, C6 C4: One-touch fitting for 4 C6: One-touch fitting for 6 2-C4, C6 C4: One-touch fitting for 4 C6: One-touch fitting for 6 4.5 4.5 M3 mounting hole M2.5 mounting hole Residual pressure release manual override DIN rail clamp screw 2n-C3, C4, C6, M5 C3: One-touch fitting for 3.2 C4: One-touch fitting for 4 C6: One-touch fitting for 6 M5: M5 thread D side U side Stations 1 2 3 Dimensions

Series 10-SZ3000 5 Port Solenoid Valve Cassette Type Manifold

Fittings & Tubing Air Cylinders Rotary Actuators Without Power Supply Terminal With Power Supply Terminal Positive common Negative common Common 20 20 20 Positive pin (Common) Positive pin 19 19 19 18 18 Station 9 SOL.b Negative pin Negative pin (Common) 18 17 17 SOL.a Station 16 Station 16 17 16 16 Station 8 SOL.b 16 15 15 SOL.a 15 6 6 SOL.b Station 5 SOL.b Station 5 4 5 4 5 Station 2

3 Port Solenoid Valve Metal Seal/Rubber Seal, Body Ported Series VQZ100/200/300 1

For the DIN rail model number, refer to page 4-14-17.

VCC

Indication of A B C D E F G T VCKH1209-02F VCKH1008-02F VCKH1075-02F VCKH0806-02F VCKH0604-02F 12/9 13 38.5 10 19 17 18.5 9 to 12 Nm 10/8 11 38 9 17 17 18.5 6 to 9 Nm 1075 11 38 9 17 17 18.5 6 to 9 Nm 8/6 9 36.5 8 14 14 16 4 to 9 Nm 6/4 7 36.5 8 12 14 15 3 to 8 Nm VCKK 40 swivel elbow 40 B A 10 Approx. F D Width across flats 14 Tightening torque: Tighten within 10 1 Nm. Approx.

5 Port Solenoid Valve Metal Seal/Rubber Seal Series SQ1000/2000 1

SQ1000 VVQ1000-50A-C3 VVQ1000-50A-C4 VVQ1000-50A-C6 SQ2000 Applicable tubing O.D. (mm) VQ4 SQ2000 VVQ1000-51A-C4 VVQ1000-51A-C6 VVQ1000-51A-C8 Built-in silencer direct exhaust (-S) SSQ1000-SE SSQ2000-SE 3.2 4 6 8 Part numbers above are for a set of ten elements.

3 Port Solenoid Valve Metal Seal/Rubber Seal Body Ported VQZ100/200/300

Refer to p.2.10-17 for DIN rail part number.

5 Port Solenoid Valve Metal Seal/Rubber Seal Body Ported

holes SY 0.8 4 8.6 SYJ 17 10 24 SMC 2 R2 25.8 Cover diameter 1.6 Cross section 0.34mm2 SX 2-C3, C4, C6, M5 16.6 23.6 60.3 C3: One-touch fittings for 3.2 C4: One-touch fittings for 4 VK Manual override C6: One-touch fittings for 6 M5: M5 thread VZ VF 25.5 (M5) 9.5 (C3, C4, C6) VFR (47.5) VP7 VP4 26.5 5.4 18.5 VQ 23.2 Mounting holes 5 2 VQ4 10 25.5 9.5 VQZ (47.5) 9.9 9.9 3-M5 x 0.8 P, R

Series SYJ500 Rubber seal 3 Port Pilot Solenoid Valve

1/8 25 Series SYJ500 C4, N3 C6, N7 [ ] for AC Type 41 Manifold: Side Ported/SS3YJ5-41Stations Grommet (G) (Pitch) P=16 17 20.5 10.5 Approx. 300 (Lead wire length) 35 (DIN 36.2) 21.5 R P R P 37.9 57.1 [59.3] 2-4.5 (For mounting) (4.9) 1/8 (P, R port) Manual override L2 4.5 L1 (Station 1) (Station n) (Light/surge voltage suppressor) + + + + 54.1 [61.1] 38.7 25.5 A A (Pitch) P=16 17 One-touch

5 Port Solenoid Valve/Body Ported, Cassette Type Manifold, Series SY3000/5000/7000

Interchargeable Cylinder Ports High Speed Response Time SY3000 double, 0.5MPa 24VDC, without surge voltage suppressor Interchangeable port sizes [ports A, B] Series C4, C6, M5 C4, C6, C8, Rc(PT) 1/8 C8, C10, Rc(PT) 1/4 SY3000 The innovated design of the pilot valve enables the SY to achieve a response time of 10ms while only consuming a half watt of power.

Table of Contents

02-02 ZH15DS-02-03-03 ZH15DL-02-03-03 12 31.5 28.5 7.8 17 24 12 31.5 28.5 17 24 12 31.5 29.5 17 24 12 31.5 29.5 17 24 14 33.5 33 20 28 14 33.5 33 20 28 17 36.5 38.5 22 30 17 36.5 38.5 22 30 7.8 7.8 7.8 9.6 9.6 10.7 10.7 Rc 1 8 Rc 1 4 Rc 1 4 Rc 3 8 Rc 3 8 19 43 44.5 27 35 12 19 43 44.5 27 35 12 13-5-7 8 Series ZH Body Ported Type (Without silencer): ZH18D ---, ZH20D --S L S L One-touch connection

2-Color Display ® Digital Flow Switch *1 Applicable fluid Dry air, N2, Ar, CO2

2.8 depth 6.2 PF2M711/721L-N2(-L) 88 13 17 2.8 depth 6.2 PF2M711/721L-F2(-L) 88 17 21 2.8 depth 6.2 20 PF2M7(-L) Series Dimensions 76 A PF2M7mS-C4/C6/C8/N7(-L) 76 A 68 68 58 58 48 48 18 18 OUT1 OUT2 OUT1 OUT2 DC(+) 10.2 DC() 1.4 DC(+) 10.2 DC() 1.4 46.9 (Max. 53.9) 46.9 (Max. 53.9) 38.5 (30.9) 38.5 (30.9) 13 3 13 3 2 x 3.4 2 x One-touch fitting Applicable tubing O.D.: 4, 6, 8, 1/4" 18 2

PFxx-OMJ0005CN

C8 8(5/16) 12 10 N7 1/4 10.3 8.3 N7 1/4 10.3 8.3 PFM7-01/02--X693 PFM7S-01/02--X693 A B C() A B C() Rc1/81/4 Rc1/81/4 NPT1/81/4 NPT1/81/4 13 11 17 13 11 17 G1/8 G1/8 G1/4 17 15 21 G1/4 17 15 21 -73No.PF-OMJ0005CN-I PFM7-C4/C6/C8/N7--X694 PFM7S-C4/C6/C8/N7--X694 A B A B C4 4(5/32) 10.1 36.1 C4 4(5/32) 10.1 8.1 C6 6 10.3 36.3 C6 6 10.3 8.3 C8 8(5/16) 12 37 C8 8(5/16) 12 10 N7 1/4 10.3 36.3

3/5 Port Solenoid Valve Metal Seal/Rubber Seal Base Mounted VQZ1000/2000/3000

(The standard valve has an individual exhaust for the pilot valve.) 1.12-58 Series VQZ Base Mounted Replacement Parts One-touch Fitting Assembly (For cylinder port) C3 C4 C6 C8 C10 Fitting Size Series VQZ1000 VVQ1000-50A-C3 VVQ1000-50A-C4 VVQ1000-50A-C6 VVQ1000-51A-C8 VQZ2000 VVQ1000-51A-C4 VVQ1000-51A-C6 VVQ2000-51A-C8 VVQ2000-51A-C10 VQZ3000 SY VVQ2000-51A-C6 Note) Order is accepted in

smcmaintenancepartslist

6 17 !8 19 Rod seal NBR Component part numbers: !4, !5, !6, !8. Cushion seal Urethane 17 and 19 are non-replaceable parts, so they are not included in the seal kit. Piston seal NBR Seal kit includes a grease pack (40 g). Order with the following part number when only the grease pack is needed.

VZ100/300/500

C6 B3 B7 2 stations 02 M5 x 0.8 1/8 Tube Nil Rc G NPT NPTF F N T 20 stations 20 One-touch fitting for 4 One-touch fitting for 6 A port M5 x 0.8, 1/8, C4, C6, B3, B7 One-touch fitting for 5/32" One-touch fitting for 1/4 Note) For more than 9 stations, supply air to both sides of P port and exhaust air from both sides of R port.

Modular F.R.L. Units

1/4 Width across flats 17 1/4 Width across flats 17 1/4 Standard specifications Model P1 P2 A B C E F G J K Bracket mount M N Q1 Q2 R S U V AC10-A M5 x 0.8 1/16 87 59.9 25.5 28 35 12.5 25 31 20 27 4.5 6.8 3 24.5 AC20-B 1/8, 1/4 1/8 126.4 87.6 35.9 41.6 60 28.5 2 1 30 43.2 24 33 5.5 12 3.5 29 AC25-B 1/4, 3/8 1/8 167.4 115.1 38.1 30 55.1 80 27.5 0 41 57.2 35 7 14 4 41 AC30-B 1/4, 3/8 1

VZS

Passage Porting specifications Symbol 4(A), 2(B) Side 5(R1), 3(R2) 1(P) Common Common 1 Non Plug-in Type: Stacking Type Manifold Base Wiring for every valve VV5ZS2 C4 06 51 1 Thread type Series VZS2000 Manifold Standard Nil NPT Rc N T F Non plug-in type Stacking type manifold base NPTF G Option Port size Rc 1 8 01 Embedded type One-touch fitting Applicable tubing O.D.: 4 Stations C4 02 2

7.4

(Stations 7 to 8) SS0752-08C S0712-5G-C4 S0722-5G-C4 S0732-5G-C4 S07A2-5G-C4 Body Ported Manifold Bar Base Voltage Symbol Type 5 24 VDC 6 12 VDC Note) The valve cannot be used as a standalone unit. Prefix the asterisk to the part numbers of the solenoid valve etc. Write sequentially from the 1st station on the D side.

3 Port Solenoid Valve Metal Seal/Rubber Seal Base Mounted VQZ100/200/300

(The standerd valve has an individual exhaust for the pilot valve.) 2.10-38 Series VQZ Replacement Parts Base Mounted One-touch Fitting Assembly (For cylinder port) C3 C4 C6 C8 C10 Fitting size Series M5 (VQZ100 only) VQZ100 VVQ1000-50A-C3 VVQ1000-50A-C4 VVQ1000-50A-C6 VVQ1000-50A-M5 VQZ200 VVQ1000-51A-C4 VVQ1000-51A-C6 VVQ1000-51A-C8 SY VQZ300 VVQ2000-51A-C6 VVQ2000-51A-C8 VVQ2000-51A-C10