Speed Controller Adjustable by Flat Head Screwdriver with One-touch Fitting Elbow Type/Universal Type AS  1F-D Series

Universal Metric size 04 06 08 10 12 Inch size 01 KE 4 6 8 10 12 1/8" 5/32" 3/16" 1/4" 5/16" 3/8" 03 05 07 09 11 AS-FG With One-touch fitting AS-FP AS-FM M5 Port size AS-D AS-D M5 x 0.8 R 1/8 R 1/4 R 3/8 R 1/2 10-32 UNF NPT 1/8 NPT 1/4 NPT 3/8 NPT 1/2 01 02 03 04 AS-T ASP Caution U10/32 N01 N02 N03 N04 ASN Be sure to read this before handling the products.

Table of Contents

BA -10 BA -32 BA -02 BA -01 CX D-G5NBL 35 40 45 45 45 40 50 45 D-G5/K5 D-B7/B8 BM1 -01 BM1 -02 BM1 -32 BM1 -04 BM1 -05 BM1 -06 Since this is a guideline including hysteresis, not meant to be guaranteed.

Vacuum

08 Tube a a E E 5 List O Pad Dia.

Flow Control Equipment

(mm) JIS Symbol 3.2 23 04 06 08 10 Port size Style 4 6 8 10 M5 X 0.8 R(PT)1/8 R(PT)1/4 M5 01 02 Elbow Universal 2 3 Inch size: 1/8 Controlled method For low speed operation Meter-out Meter-in 0 1 With One-touch fittings 4.1-41 Speed Controller for Low Speed Operation Series AS-M Standard (Metal Body) Specifications Model AS12l0M-M5 AS22l0M-01 AS22l0M-02 Specifications Cylinder R(PT)1/8 R(

VFS

02 Pressure center VFS2510-E-01 02 DIN terminal: Double VFS2210-D Y-01 02 Closed center VFS2310-D Y-01 02 Exhaust center VFS2410-D Y-01 02 Pressure center VFS2510-D Y-01 02 EVS VFN With light/surge voltage suppressor Lead wire O.D.

3 Port Solenoid Valve Metal Seal/Rubber Seal Base Mounted VQZ100/200/300

override 34 41 3.5 (Lead wire) 38.5 300 Cover diameter 1.6 Cross section 0.34mm2 SMC 35.5 A port PE 16 12 14.5 7 7.5 7.5 7.5 3-Rc(PT)1/8 P/A/R port M5 X 0.8 PE port L plug connector (L): VQZ115(R)-lLl-01 M plug connector (M): VQZ115(R)-lMl-01 60.5(65.5) 300 (Lead wire) Cover diameter 1.5 51.5(52.5) 300 (Lead wire) Cross section 0.23mm2 55.5(59) Indicator light Indicator light Cover dia 1.5

VQ5000

27.5 27.5 41 41 5-Rc 1/2 1(P), 4(A), 2(B), 5(R1), 3(R2) port 5-Rc 1/2 1(P), 4(A), 2(B), 5(R1), 3(R2) port Numbers inside ( ) are for metal seal 3 position type 2-6-7 8 Series VQ5000 Base Mounted Plug-in Unit How to Order Manifold VV5Q 5 1 08 03 F U1 Option Option None Exhaust cleaner for Rc 1: D side exhaust Exhaust cleaner for Rc 1 1/2: D side exhaust Exhaust cleaner for Rc 1: U side exhaust

Prevents Micro-Bubbles

Double acting Body Applicable option Actuator section End plate PPS Diaphragm Port size Symbol Note 1 2 3 4 VN Symbol 01 02 01 02 02 03 03 04 04 06 10 Port size 1/8 1/4 1/8 1/4 1/4 3/8 3/8 1/2 1/2 3/4 1 Body class Stainless steel PTFE A 1 Note) Refer to Variations in the table below for valve type combinations.

Table of Contents

ZSE1-01-15CN1 pc.

3 Port Solenoid Valve, VQZ Series, Base Mounted and Body Ported

Fitting plug KQP-01 KQP-03 KQP-07 KQP-09 KQP-11 Dimensions L (mm) A Applicable fitting size d A L D Part number KQP-01 KQP-03 KQP-07 KQP-09 KQP-11 5 6 8.5 10 11.5 31.5 32 35 39 43 1/8 5/32 1/4 5/16 3/8 16 16 18 20.5 22 D Used to block unused cylinder port. L DIN rail AXT100-DR12.5 (Pitch) 5.25 7.5 Suffix number into from the dimension table below.

25

A 13 15 22 06 08 10 340 400 460 580 640 820 1120 1300 1600 1900 2320 2500 End bracket/IZS40-BE 35 22 4.5 30 44 2 x 5.4 18 105 33 L 33 Intermediate bracket/IZS40-BM 55 35 22 4.5 36 30 18 2 x 5.4 A 105 33 A A-A section 432 Ionizer IZS40/41/42 Series Dimensions Feedback sensor/IZS31-DF 2 x 3.4 Amplifier 2 x 3.4 Head 1500 3500 IZS IZS 9 16.6 13 SMC IZN 4.8 10.2 25 58 4.8 69 23 87.5 IZF 78 ZVB

Speed Controller Adjustable by Flat Head Screwdriver with One-touch Fitting Series AS


1F-D Elbow Type/Universal Type 1

-01-D Meter-out M5 type U10/32 port AS3200-02-D Meter-out M5 type U10/32 port AS2210-01-D AS3210-02-D Component Parts No.

ARM10/11

ARM 2500 05 A 02 G1 AV AU Accessory None (With plug) Nil G1 G2 Regulator for manifold AF G33-10-01 GA33-10-01 AR Pressure gauges are shipped together (but not assembled).

ARM10/11

ARM 2500 05 A 02 G1 AV AU Accessory None (With plug) Nil G1 G2 Regulator for manifold AF G33-10-01 GA33-10-01 AR Pressure gauges are shipped together (but not assembled).

Gun Type Ionizer

08 8 (Metric) 09 5/16" (Inch) Symbol Type 01 AC adapter (With AC cord*2) 02 AC adapter (Without AC cord) 03 Power supply cable (For 24 VDC wiring) N None Symbol Type 01 Standard nozzle 02 Bypass nozzle*3 *1 The AC adapter body and the power supply cable (For AC adapter) come as a set.

Miniature Fittings M3, R(PT) 1/8, M5 Series M

I.D. 1 8 1 4 1 8 1 4 3 8 1 8 1 4 3 8 1 8 1 4 3 8 1 4 3 8 1 2 1 4 3 8 1 2 1 4 3 8 1 2 1 4 3 8 1 2 KFH04-01 KFH04-02 KFH06-01 KFH06-02 KFH06-03 KFH08U-01 KFH08U-02 KFH08U-03 KFH08N-01 KFH08N-02 KFH08N-03 KFH10U-02 KFH10U-03 KFH10U-04 KFH10N-02 KFH10N-03 KFH10N-04 KFH12U-02 KFH12U-03 KFH12U-04 KFH12N-02 KFH12N-03 KFH12N-04 10 10 15.5 1.5 1.6 13 23 14 25 36 16 25 37 16 24 36 32 40 65 31 39 64

V

8mm Tube 10 10mm Tube 01 Rc 18 02 Rc 14 Operating Temperature Range 5 ~ 60C / 40~140F N Canada, USA Other (PT) Lubrication Forbidden N O Z Z L E D I A M E T E R V A C U U M P O R T 05 0.5mm 07 0.7mm 10 1.0mm 13 1.3mm 06 6mm Tube 08 8mm Tube 01 Rc 18 02 Rc 14 07 1/4 Tube 11 3/8 Tube T01 1/8NPT T02 1/4NPT S Y M B O L S T Y P E I N L E T P O R T B Box type D Body type 06 6mm Tube 08 8mm Tube

LEC-OM02904

C 1. ##0016 ## 00 01 1 02 2 03 3 04 4 05 5 06 6 07 7 08 8 09 9 10 10 11 11 12 12 13 13 14 14 15 15 16 16 2. **No. 3.

Vacuum System Peripherals:

R L B 01 1 Nil F G Rc 1 8 ... ...

Speed Controller with

Flat washer AS1002F-02 AS1002F-23 AS1002F-04 AS1002F-06 AS2002F-04 AS2002F-06 AS2052F-06 AS2052F-08 AS3002F-06 AS3002F-08 AS3002F-10 AS3002F-12 AS4002F-10 AS4002F-12 AS-31B AS-32B AS-33B AS-34B AS-35B AS-36B AS-37B AS-38B AS-41B AS-42B AS-43B AS-44B AS-45B AS-46B AS-47B AS-48B AS1002F-01 AS1002F-03 AS1002F-07 AS2002F-03 AS2002F-07 AS2052F-07 AS2052F-09 AS3002F-07 AS3002F-09 AS3002F