VQC

(A) 4 (B) 2 (A) 4 (B) 2 C: Locking type (Manual) C Note) 5 (R1) 3 (R2) 1 (P) Function 5 (R1) 3 (R2) 1 (P) N.C N.O Standard type (1 W) High pressure type (1.0 MPa) Negative COM External pilot Low wattage type (0.5 W) Nil K N R Y Seal type 3 position closed center Note) For rubber seal type only.

AC Servo Motor Driver (Pulse input type)

(Parameter initial configuration Set the recommended parameter value Operation start) *3 The travel distance of the actuator per 1 pulse should be 10 [m/pulse]. 26 - Recommended Parameter Values [LEY] LEY25/ LEY25D/ LEY32/ LEY32D/ LEYG25 LEYG25D LEYG32 LEYG32D Series Lead symbol A B C A B C A B C A B C Lead 12 6 3 12 6 3 20 10 5 16 8 4 Parameter *1,*2 Para.

Speed Controller with Indicator In-line Brass Stainless steel Electroless nickel plated In-line Type “Made to Order” “Made to Order” section has been added. Pages 3, 8 section has been added. ¡Lubricant: Vaseline -X12 The numerical indication of ¡Greas

L8 L8 x n pcs. + L16 x 2 + L26 x (n1) pcs. L8 x n pcs. + L17 x 2 + L26 x (n1) pcs. L8 L8 x n pcs. + L25 x 2 + L26 x (n1) pcs. L27 + L8/2 Bonnet Mounting surface Refer to page 6 for L8. The figure above shows the manifold with speed controllers connected using two DIN rail mounting brackets, adapters and a threaded stud kit for manifold.

Table of Contents

M9 M9V F9W(V) B Electrical entry is in the direction C (mm) Proper mounting position Proper mounting position Proper mounting position D-M9 D-F9W D-M9V D-F9WV D-M9 D-F9W D-M9V D-F9WV D-M9 D-F9W D-M9V D-F9WV Model Model Model A B C D E A B C D E A B C D E A B C D E A B C D E A B C D E A B C D E A B C D E A B C D E A B C D E A B C D E A B C D E A B C D E A B C D E A B C D E A B C D E A B C

4 Port Direct Operated Poppet Solenoid Valve Series VQD1000 1

Body width of 10 mm, C: 0.22 dm3/(sbar) 2 W C: 0.27 dm3/(sbar) 3.2 W (U type: Large flow) SQ VQ0 VQ4 Clean room specifications available as special.

Proposals for Energy Saving

G, C T S Note) S L, Z L, Z S (Other) 1 (100V) 2 (200V) 3 (110V) 4 (220V) 7 (240V) 8 (48V) 5 (24V) 6 (12V) AC Fluid and ambient temperature Fluid temperature C Ambient temperature C Temperature condition Power supply Water (standard) Air (standard) Oil (standard) High Note 3) temp. oil (D.N.)

Rotary Actuator/Vane Type

Clockwise CRQ2 Stopper ring Block C Hatched area represents a stopper lever.

MQQ

A B C D E F Part no.

MQQ

C C RHC D D Note) Be sure to use a flat washer for the type A mounting.

Series 10-SZ3000 5 Port Solenoid Valve Cassette Type Manifold

83503 Flat ribbon cable connector Socket: 10 pin MIL type with strain relief Conforming to MIL-C-83503 D-sub connector Conforming to MIL-C-24308 JIS-X-5101 Flat ribbon cable connector Socket: 26 pin MIL type with strain relief Conforming to MIL-C-83503 Applicable connector Internal wiring +COM, COM Location Valve 4(A), 2(B) port Porting specifications Direction Lateral, Upward, Downward Metric

The use of 34 pin connectors allows up to 16 stations with double solenoids.Fluid: air, Operating pressure range: -100kPa to 0.7MPa, Response time ms (at 0.5MPa): 18 or less, Coil rated voltage: 12, 24VDC, Ambient & fluid temperature: -10 to 50° C, Enclosure: IP67 (based on IEC529) 4/5 PORT SOLENOID VALVE. 2 Position Single Solenoid. 0.00000 lb.

MQQ

C Use a flat washer.

Rotary Actuator: Free Mount Type/Vane Style Series CRBU2

Single flat Single flat D D D D D D D D C Single flat Single flat (mm) 15 9 18 20 10 20 30 13 22 40 15 30 10 8 14 Size C D Note ) Dimensions and tolerance of the shaft and single flat (a parallel keyway for size 40) are the same as the standard.

XLAQ/XLDQ

Example) -M9NL Symbol Nil A B C Quantity Without auto switch 2 pcs. 1 pc. 1 pc.

VS 8-2/VS 8-4

(A) 4 (B) 2 Flow-rate Characteristics 1 (P) 5 (R1) 3 (R2) 4, 2 5, 3 (A, B EA, EB) 1 4, 2 (P A, B) Flow-rate characteristics Series Response time (msec) Mass (g) 4-position dual 3-port valve Note) (A) Type of actuation Seal C [dm3/(sbar)] C [dm3/(sbar)] Cv b Cv b (A) 4 (B) 2 140 140 170 170 185 185 185 185 185 185 170 225 215 260 250 285 275 285 275 285 275 250 0.30 0.50 0.30 0.50 0.30

Compact and Lightweight

ZA A B t 2 x D ZX C ZM ZL ZH ZH ZH ZH -X267 ZH13 to 20DA 2 x D B ZHP A F E C ZU VQD-V Long clamping screw set for 1 station required for assembly needs to be ordered separately.

5 Port Solenoid Valve Series SQ1000/2000

N1: 1/8 N3: 5/32 N7: 1/4 Top ports are indicated by LN.

Lateral Load Resisting Low Friction Cylinder Series MQM ø6, ø10, ø16, ø20, ø25

C B H B H Material: Carbon steel Material: Carbon steel Part no.

5 Port Solenoid Valve Series SV

14, 2 (PA, B) 4, 25, 3 (A, BEA, EB) Model 4, 2 (A/B) 1, 5, 3 (P/EA/EB) C[dm3/(sbar)] C[dm3/(sbar)] Cv Cv b b C6 SS5V1-16 C8 0.89 0.22 0.23 0.22 0.21 0.98 C8 SS5V2-16 C10 2.3 0.50 0.56 0.28 0.18 2.7 Note) Value is for manifold base with 5 stations and individually operated 2 position type.

VK3000

Flow characteristics Operating pressure range (MPa) Weight (g) 4/2 5/3 (A/B R1/R2) Port size 1 4/2 (P A/B) Valve model C [dm3/ (sbar)] b Cv C [dm3/ (sbar)] b Cv Grommet 0.12 0.10 0.10 0.10 0.12 0.37 0.33 0.34 0.38 0.12 0.43 0.40 0.40 0.35 0.54 0.12 0.19 0.09 0.11 0.14 0.37 0.10 0.30 0.11 0.10 M5 x 0.8 0.45 0.84 0.38 0.48 0.63 VK3120 Used as a 3 Port Valve 1 8 Body ported 90 VK3120Y (For