VZS

VV5ZS2 C6 06 51G 1 VFN Thread type Series VZS2000 Manifold Standard Nil NPT Rc N T F Plug-in type Stacking type manifold base with attachment plug lead wire NPTF G Option Port size Rc 1 8 01 Embedded type One-touch fitting Applicable tubing O.D.: 4 Stations C4 02 2 stations C6 Embedded type One-touch fitting Applicable tubing O.D.: 6 15 stations 15 Symbol Max. 15 stations.

Rubber seal 5 Port Solenoid Valve Series SYJ5000

-21-1A 02 2 stations -+ -+ A : : B B R port 1/4 R P 20 20 stations Applicable individual EXH spacer assembly SYJ5000-17-1A Applicable individual SUP spacer assembly SYJ5000-16-2A Applicable individual SUP spacer assembly ARBYJ5000-00-P Thread type A, B port size A, B port 1/8, C6 Nil F N T Rc G NPT NPTF P port 1/4 01 1/8 One-touch fitting for 6 C6 N7 One-touch fitting for 1/4" Type 43 (5

Rubber seal 5 Port Solenoid Valve Series SYJ7000

Type 42 (5 Port/Base mounted) How to Order SS5YJ742 05 C6 Applicable interface regulator ARBYJ7000-00-P Thread type A, B port size Stations C6 Nil F N T 02 Rc G NPT NPTF One-touch fitting for 6 2 stations + + P port 1/4 C8 : One-touch fitting for 8 : B R P R N7 20 One-touch fitting for 1/4" 20 stations A, B port A N9 One-touch fitting for 5/16" R port 1/4 B Note) For more than stations,

Series 10-SYJ300/500/700 Rubber Seal 3 Port Solenoid Valve

N.O. 3(R) (P)1 3(R) (P)1 e t q r e t q r (A) (A) 2 2 u u 3 (R) 1 (P) 3 (R) 1 (P) w w y y Component Parts Replacement Parts Note Zinc die-casted Part no.

A

O I N S TA L L T H E A U T O S W I T C H S T R O N G M A G N E T I C F I E L D P R O O F A U T O S W I T C H (40~63) Courtesy of Steven Engineering, Inc. !

3 Port Air Operated Valve Series SYJA300

Type 41 Applicable solenoid valve SYJ514SYJ514MSYJ524SYJ524MHow to Order SS3YJ5 41 05 C6 R port 1/8 Stations P, R port thread type A port size 02 : 20 P port 1/8 2 stations : 20 stations A A M5 01 C4 C6 N3 N7 M5 x 0.8 1/8 Nil Rc G NPT NPTF Applicable blanking plate assembly SYJ500-10-3A F N T 4 One-touch fitting 6 One-touch fitting A port M5 x 0.8, 1/8, C4, C6 5/32" One-touch fitting 1/4"

VCC

Symbol Description Surface treatment Note Material A VCC12(D)-00 For VVCC12-1A-02FC4 C6 PPS resin C4 C6 VVCC12-1A-02F Pilot port C4: 4 piping C6: 6 piping Manifold block assembly for 2 port valve Manifold block q Hard anodized containing PTFE For VVCC12-1G-02FC4 C6 Aluminum C O-ring Special FKM w C4 C6 VVCC12-1G-02F Pilot port C4: 4 piping C6: 6 piping Manifold block assembly for gate

Series SYJ300/500/700 3 Port Solenoid Valve Rubber Seal

(A) 2 (A) 2 1 (P) 3 (R) 1 (P) 3 (R) ey q t wr ey q t wr A A i i P R P R u u Component Parts Replacement Parts Description Body Piston plate End cover Piston Spool valve ass'y Spool spring Description Sub-plate Pilot valve Note Zinc die cast Part No.

VZ100/300/500

VP Applicable solenoid valve VZ514VZ514MVZ524VZ524MApplicable blanking plate assembly DXT201-15-4A How to Order Type 41 (Side ported) VG VV3Z5 41 05 1 C6 R port VP P/R port thread type A port side Stations 01 C6 C8 B7 B9 1/8 2 stations 02 S070 Nil P port Rc G NPT NPTF One-touch fitting for 6 Tube F N T One-touch fitting for 8 20 stations 20 A port One-touch fitting for 1/4 VQ One-touch

5 Port Solenoid Valve SY Series

Metric size Inch size Nil Rc 5 32" One-touch fitting for 4 VVQ1000-50A-C4 VVQ1000-50A-N3 One-touch fitting for F G SY3000 SY3000 1 4" VVQ1000-50A-N7 One-touch fitting for 6 VVQ1000-50A-C6 One-touch fitting for N NPT 5 32" One-touch fitting for 4 VVQ1000-51A-C4 VVQ1000-51A-N3 One-touch fitting for NPTF T A, B port size 1 4" One-touch fitting for 6 VVQ1000-51A-C6 VVQ1000-51A-N7 One-touch

2-Color Display ® Digital Flow Switch *1 Applicable fluid Dry air, N2, Ar, CO2

Back cover 8 2-Color Display Digital Flow Switch RoHS PF2M7 Series How to Order PF2M7 10 C6 A M Integrated display q r t y u i w e q Rated flow range e Port size Piping variations 01 0.01 to 1 L/min 02 0.02 to 2 L/min 05 0.05 to 5 L/min 10 0.1 to 10 L/min 25 0.2 to 25 L/min 50 0.5 to 50 L/min 11 1 to 100 L/min 21 2 to 200 L/min With One-touch fitting Female thread C4*2, C6, C8, N7 01, 02,

smcmaintenancepartslist

6 Single acting, spring extend Piston seal Rod seal NBR 12 16 20 25 32 40 50 CQ2B12-T-PS CQ2B16-T-PS CQ2B20-T-PS CQ2B25-T-PS CQ2B32-T-PS CQ2B40-T-PS CQ2B50-T-PS Gasket Set of left nos. !4, !5, !6. Replacement Parts: Seal Kit Kit no.

Secondary Batteries

C6 X121 90-VQ1000 Series compatible with secondary batteries For blanking manual specification 90 Material restriction OUT side port size One-touch fitting for 4 One-touch fitting for 6 C4 C6 IN side port size One-touch fitting for 4 One-touch fitting for 6 C4 C6 *Specifications and dimensions for the 90-series are the same as standard products. 90 X121 VQ2000 FPG 01 01 90-VQ2000 Series

VQC

Series VQC1000 Base Mounted Plug-in Unit How to Order Manifold VQC F P T B VV5QC 1 1 08 C6 FD1 L M / / / Kit / SQ VQ0 VQ4 S Kit B VV5QC 1 1 08 C6 SDQ VQ5 Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com Option VQZ Series Nil None All stations with back pressure check

modular-press-e

(except when the bowl material is metal) 221 Regulator / AR20K to AR60K Regulator with Backflow Function AR10 to AR60 Replacement Procedure is P.404 Construction AR10 AR20(K)/AR25(K) AR30(K)/AR40(K) AR50(K)/AR60(K) t e t t t IN OUT e e e IN OUT IN OUT r IN OUT r r r AR20K to AR60K (Regulator with Backflow Function) A-A y A 2 OUT 1 I N C SM A The numbers are the same as the "Construction"

Modular F.R.L. Pressure Control Equipment

(except when the bowl material is metal) 221 Regulator / AR20K to AR60K Regulator with Backflow Function AR10 to AR60 Replacement Procedure is P.404 Construction AR10 AR20(K)/AR25(K) AR30(K)/AR40(K) AR50(K)/AR60(K) t e t t t IN OUT e e e IN OUT IN OUT r IN OUT r r r AR20K to AR60K (Regulator with Backflow Function) A-A y A 2 OUT 1 I N C SM A The numbers are the same as the "Construction"

SZ3000

Stations...3 2 1 Serial unit (D side mounting) SS5Z3-60SRID-05U-C6 . 1 set (manifold part number) SZ3160-5LOZ-C6. 2 sets (single solenoid part number) SZ3260-5LOZ-C6. 3 sets (double solenoid part number) The symbol indicates built-in.

New

Power supply Pressure switch S = 12.1 log10( ) . (6) Thermometer V PS + 0.1 293 Solenoid valve Pressure control Control t P + 0.1 T circuit equipment Equipment for test S : Effective area [mm2] V : Air tank capacity [dm3] t : Discharging time [s] Air tank Rectifier tube on the Rectifier tube on the downstream side Filter Air Shut off upstream side Pressure gauge or pressure convertor supply

Series SYJ500 Rubber seal 3 Port Pilot Solenoid Valve

Type 41 Applicable solenoid valve SYJ514-SYJ514M-SYJ524-SYJ524M-How to Order SS3YJ5--41-05 -C6 R port 1/8 Stations P, R port thread type A port size 02 : 20 P port 1/8 2 stations : 20 stations A A M5 01 C4 C6 N3 N7 M5 x 0.8 1/8 Nil Rc G NPT NPTF Applicable blanking plate assembly SYJ500-10-3A F N T 4 one-touch fitting 6 one-touch fitting A port M5 x 0.8, 1/8, C4, C6 5/32" one-touch fitting

Series SYJ700 Rubber seal 3 Port Pilot Solenoid Valve

A port 1/8 Type 42 How to Order SS3YJ7--42-05 -C6 Applicable solenoid valve SYJ714SYJ714MSYJ724SYJ724MApplicable blanking plate assembly SYJ700-10-2A Stations R port 1/4 P, R port thread type A port size -+ -+ -+ -+ 02 : 20 2 stations : 20 stations 01 C6 C8 N7 N9 1/8 P port 1/4 A A Nil Rc G NPT NPTF R X 6 one-touch fitting P F N T 8 one-touch fitting A port 1/8 1/4" one-touch fitting 5/16