TABLE OF CONTENTS

/4 NPT 9 6 3 3/8 NPT 1 10 1/2 NPT 33 12 11 1 NPT 23 13 1 1/2 NPT 24 14 3/4 NPT 29 19 2 NPT 26 16 2 1/2 NPT 27 17 3 NPT 28 18 B Mounting Bracket In an AC appl. give full details 2 Series 20 3 Series 30 4 Series 40 5 Series 50 7 Series 70 8 Series 80 1 2WNO 2 2WNC 3 3WNC 4 3WNO 5 3WDC 6 3WMP 18 Direct Lift 2WNO 27 Direct Lift 2WNC 28 Pilot Lift 2WNC G 1/32 H 3/64 J 1/16 K 3/32 L 7/64 N 1/8

Air Cylinder Series MB

D-A3 D-G39 D-K39 n (different side) n (same side) 1 10 2 (different side) 2 (same side) 35 55 35 + 30 (n2) n = 2,3,4... 55 + 50 (n2) n = 2,3,4... n (different side) D-A44 n (same side) 1 2 (different side or same side) 1 10 15 20 20 D-A5 D-A6 (n2) 2 (n2) 2 (n2) 2 20 + 55 n = 2,4,6,8... 15 + 55 n = 2,4,6,8... 20 + 55 n = 2,4,6,8... n (same side) 2 (different side or same side) 20 25 25 (n2

Rotary Actuator Rack & Pinion Style Series CRA1 Size: 30, 50, 63, 80, 100 1

, Air cushion Cushion (1) Output (Nm) 1.9 9.3 17 32 74 9.3 17 32 74 CRBU2 1.5 MPa Allowable surge pressure CRB1 Within 1 Backlash (2) + 4 0 MSU Tolerance in rotating angle Note 1) Output under the operating pressure of 0.5 MPa.

Rotary Actuator Rack & Pinion Style Series CRA1 Size: 30, 50, 63, 80, 100 1

, Air cushion Cushion (1) Output (Nm) 1.9 9.3 17 32 74 9.3 17 32 74 CRBU2 1.5 MPa Allowable surge pressure CRB1 Within 1 Backlash (2) + 4 0 MSU Tolerance in rotating angle Note 1) Output under the operating pressure of 0.5 MPa.

Series MXQ 13- ø6, ø8, ø12, ø16, ø20, ø25 22- Air Slide Table

depth 5 +0.030 0 NA x M6 x 1 thread depth 6 M 37 25 KA 6.5 12 Bottom view of MXQ20-50 132225 K 12 48 36 6.5 12 43.5 0.5 6.5 46 Z ZZ H G (NN 1) x H 26 10.5 26 10.5 A B 9.5 5.1 5.1 11 11 29 1.5 A B NN x M6 x 1 thread depth 12 6 5H9 ( ) depth 5 +0.030 0 GA HA B-B A-A 5H9 ( ) depth 5 +0.030 0 (mm) Model F 45 40 48 58 42 55 50 55 62 N 4 4 4 4 6 6 8 8 8 G 22 22 22 22 17 18 37 56 H 46 46 46 56

CM2

8 1/8 1/8 1/4 13 26 5 8 M8 X 1.25 M20 X 1.5 15 8 28 18 24 13 5 15.5 20 8 4 40 8 41 6.8 21 25 20 3.2 40 55 M10 X 1.25 17 32 6 8 M26 X 1.5 15 10 33.5 22 30 13 5.5 19.5 20 8 4 47 8 45 6.8 25 28 25 3.2 40 55 M10 X 1.25 17 32 6 8 M26 X 1.5 15 12 37.5 22 34.5 13 5.5 19.5 20 8 4 47 8 45 6.8 25 28 32 3.2 40 55 M14 X 1.5 M32 X 2 22 41 8 10 21.5 14 46.5 24 42.5 16 7 21 23 11 4 54 10 50 7 27 30 40 3.2

V100

Sub-plate gasket VP300-2-1P (Rc 1/8) VP300-2-2P (Rc 1/4) VP500-2-1P (Rc 1/4) VP500-2-2P (Rc 3/8) VP700-2-1P (Rc 3/8) VP700-2-2P (Rc 1/2) Mounting Screw Tightening Torques M3: 0.6 Nm M4: 1.4 Nm M5: 2.9 Nm VP300-17-1 VP344 SF4--50 VP500-17-1 VP544 VP700-17-1 VP744 How to Order Sub-plate VP 00 2 1 Series Port size Thread type VP744 3/8 1/2 VP544 1/4 3/8 VP344 1/8 1/4 3 5 7 P F N T VP344 VP544

C85

18.3 10 9 10.5 5.5 8 24 14 5 17 12 14 38 22 6 6 19.7 12 16 16 6 M5 x 0.8 M16 x 1.5 6.2 M6 x 1 18.3 10 9 10.5 5.5 8 24 14 5 17 12 13 38 22 6 6 19.7 16 22 20 8 G 1/8 M22 x 1.5 8.2 M8 x 1.25 24 13 12 15 15 11 32 17 6 20 16 11 44 24 8 28 20 8 22 22 10 G 1/8 M22 x 1.5 10.2 M10 x 1.25 30 17 12 15 15 11 32 20 8 22 16 11 50 28 8 33.5 25 (mm) S XC ZZ Z Bore 1 to 50 1 to 50 1 to 50 1 to 50 101 to 150

MXS

, #3 SMXS6, #1(#1+#5) (mm) Model F 20 30 20 28 38 ZZ 48 58 68 90 106 M 42 52 62 84 100 Z 41.5 51.5 61.5 83.5 99.5 K 22.5 32.5 42.5 52.5 62.5 J 17 27 40 50 60 I 10 10 7 19 25 NN 2 2 3 3 4 H 25 35 20 30 24 G 6 6 11 13 17 HA 20 20 20 30 48 N 4 4 6 6 6 GA 11 21 31 43 41 MXS6-10 MXS6-20 MXS6-30 MXS6-40 MXS6-50 SMXS6N, #4(#1+#4) SMXS6N, #5(#2+#5) SMXS6N, #6(#3+#6+#7) SMXS6, #2(#1+#2+#5) 3.11-12

SMC Pneumatic Clean Series

40 40 40 75 55 55 55 27 25 25 21 122 120 120 3.2 3.2 3.2 24 22 22 18 22 17 17 13 41 32 32 26 14 12 10 8 1/8 21 19.5 19.5 15.5 35.5 17.5 4 4 4 11 8 8 16 13 13 1/4 1/8 1/8 7 6.8 6.8 191 155 153 35.5 17.5 37.5 35.5 17.5 M32 x 2 23 10 8 3.2 154 42.5 46.5 41.5 21.5 18 Air cylinder CM2 2122CM2/ 101110112122Rod side flange style (F) / CM2F, CM2F With rubber bumper Air cylinder Rotary actuator Air

Series CM2-Z 10-/11- ø20, ø25, ø32, ø40 21-/22- Air Cylinder

X 55 55 55 75 NA M8 x 1.25 M10 x 1.25 M10 x 1.25 M14 x 1.5 NN 24 30 34.5 42.5 P M20 x 1.5 M26 x 1.5 M26 x 1.5 M32 x 2 S 1/8 1/8 1/8 1/4 WA 31 31 31 36 Y 20 20 20 23 Z 8 8 8 10 LD 4 4 4 4 LT LS 25 28 28 30 Bore size 40 47 47 54 13 17 17 22 26 32 32 41 26 26 26 31 41 45 45 50 5 6 6 8 8 8 8 10 21 25 25 27 149 153 155 191 The bracket is shipped together.

C95

[Example] 1.

AC

02 03 04 0 1 VY150 04 06 10 0 1 VY170 0 1 10 12 01 02 0 1 0 1 01 02 0 1 VY190 0 1 14 20 M5 01 0 1 VY110 VY1D00-M5 VY1A0 -M5 VY1B0 VY120 VY130 Model 14 M5 01 04 02 03 04 20 10 M5 Port P A R mm2 M5 01 02 01 02 02 03 04 06 10 12 11 2 1 Port size M5 1 8 1 8 1 4 1 8 1 4 1 4 3 8 1 2 1 4 3 8 1 2 1 2 3 4 1 4 1 300 17 2 M5 M5 1 1 1 4 2 10 5 0.28 16 0.9 25 1.4 590 33 5 0.28 0.16 0.13 0.007 0.11 1%

Floating Joint

6.6 9 9 11 11 18 22 7 8 11 13.5 16 20 22 24 13 17 22 27 32 41 46 55 19 20.5 27 34.5 43.5 52 73.5 86 1.25 1.25 1.5 1.5 1.5 1.5 1.5 1.5 32.5 36 49 61.5 76.5 94 131 152 8 9 13 15 18 24 38 42 0.5 0.5 0.75 1 1.25 2 2.5 3 1100 2500 4400 11000 18000 28000 36000 55000 0.08 0.12 0.28 0.63 1.15 2.07 5.2 9 Semi-standard Pneumatic: Up to 1 MPa Hydraulic: Up to 3.5 MPa JAF20-8-100 JAF25-10-150 JAF32-

2/3 Port Valve

55 59 60 62 38.5 47 54 47 48 50 92 95 97 38.5 47 55 59 62 64 , , , VX31 VX32 VX33 1 4 1 8 27.5 27.5 3 8 1 4 3 8 1 4 4.1-51 VXV31/32/33 Vacuum Use/VXV3mmm Specifications QVacuum flow passage has large orifice.

MXS Series Air Slide Table

Allowable moment Wmax: Table 2 1=W/Wa Calculate static moment Wa(N) Wa=1 x 1 x 40=40 K=1 =1 Wmax=40 1=10/40=0.25 Calculate load rate 1 of static moment. 3-2 Load rate of static moment Rolling Yawing Calculate static moment M(Nm).

Modular F.R.L. Units

Drain cock with barb fitting B B B B B B Dimensions Barb fitting applicable tubing: T0604 Width across flats 17 1/4 Width across flats 17 1/4 Width across flats 17 1/4 Standard specifications Model P1 P2 A B C E F G J K Bracket mount M N Q1 Q2 R S U V AC20C-B 1/8, 1/4 1/8 126.4 87.6 26.5 41.6 40 28.5 2 1 30 43.2 24 33 5.5 12 3.5 29 AC25C-B 1/4, 3/8 1/8 167.4 115.1 28 30 55.1 50 27.5 0 41

ZP

H: M5 x 0.8 H: M6 x 1 Y Model A B C D E F G G Flat Flat with ribs C Y A B Model ZPR10UT 10 11 1 U C U C U C ZPR10 10 12 12 15 5 6 1.7 21 29.9 46 3 ZPR13UT 13 14 ZPR13 13 1.8 1.5 ZPR16UT 16 17 ZPR16 16 18 12.5 21.5 30.4 46.5 3.5 1.2 2.5 ZPR10CT 10 11 0.8 Deep ZPR13CT 13 14 1 ZPR16CT 16 17 H: M5 x 0.8 H: M6 x 1 Model A B C D E F Y G G Dimensions of D are the same.

JA/JAH/JB/JS

38 47.5 56.5 68 94.5 112 0.5 0.7 0.8 1 1.25 1.25 1.5 1.5 1.5 1.5 1.5 1.5 8 10 14 14 45 55 12 12 16 16 21 24 31 41 50 59.5 79 96 1.5 1.5 2 2 4.5 5 6 7.5 9.5 11.5 14 16 4 4 6 6 7 8 11 14 19 24 30 36 3.2 4 5 5 7 8 11 13.5 16 20 22 24 5.5 7 10 10 13 17 22 27 32 41 46 55 5 5.5 7 7 8 9 13 15 18 24 38 42 0.5 0.5 0.5 0.5 0.5 0.5 0.75 1 1.25 2 2.5 3 19 54 123 123 1100 2500 6000 11000 18000 28000

JA/JAH/JB/JS

11 11 18 22 7 8 11 13.5 16 20 22 24 13 17 22 27 32 41 46 55 CV MVGQ CC RB Option Pneumatic: Up to 1 MPa Hydraulic: Up to 3.5 MPa 20 25 32 30, 40 40 30, 40 50 50, 63 80 100 100 125 160 JAF20-8-100 JAF25-10-150 JAF32-10-100 JAF40-12-125 JAF40-12-150 JAF40-12-175 JAF50-16-150 JAF63-16-200 JAF80-20-250 JAF100-24-300 JAF100-27-150 JAF125-27-200 JAF160-33-200 13 17 17 22 22 22 27 27 32 41 41