2-Color Display ® Digital Flow Switch *1 Applicable fluid Dry air, N2, Ar, CO2 Back cover 8 2-Color Display Digital Flow Switch RoHS PF2M7 Series How to Order PF2M7 10 C6 A M Integrated display q r t y u i w e q Rated flow range e Port size Piping variations 01 0.01 to 1 L/min 02 0.02 to 2 L/min 05 0.05 to 5 L/min 10 0.1 to 10 L/min 25 0.2 to 25 L/min 50 0.5 to 50 L/min 11 1 to 100 L/min 21 2 to 200 L/min With One-touch fitting Female thread C4*2, C6, C8, N7 01, 02,
Note 2) ( ): denotes without sub-plate. 1731 Series SYA3000/5000/7000 Dimensions/Series SYA3000: Body Ported Foot bracket SYA3120-F1 C4, N3 C6, N7 2 position single SYA3120(-F2) C4, N3 C6, N7 One-touch fitting (A, B port) M5 x 0.8 (Pilot port) Applicable tubing O.D.: 4, 1/4" 6, 5/32" Manual override (Non-locking) 2 x 2.2 (For manifold mounting) 2 x 3.2 (For mounting) (2 x 3.2 for mounting
Note 2) ( ): denotes without sub-plate. 1461 SYA3000/5000/7000 Series Dimensions/SYA3000 Series: Body Ported Foot bracket SYA3120-F1 C4, N3 C6, N7 2 position single SYA3120(-F2) C4, N3 C6, N7 One-touch fitting (A, B port) M5 x 0.8 (Pilot port) Manual override (Non-locking) Applicable tubing O.D.: 4, 1/4" 6, 5/32" 2 x 2.2 (For manifold mounting) 2 x 3.2 (For mounting) (2 x 3.2 for mounting
Symbol Description Surface treatment Note Material A VCC12(D)-00 For VVCC12-1A-02FC4 C6 PPS resin C4 C6 VVCC12-1A-02F Pilot port C4: 4 piping C6: 6 piping Manifold block assembly for 2 port valve Manifold block q Hard anodized containing PTFE For VVCC12-1G-02FC4 C6 Aluminum C O-ring Special FKM w C4 C6 VVCC12-1G-02F Pilot port C4: 4 piping C6: 6 piping Manifold block assembly for gate
(The standard valve has an individual exhaust for the pilot valve.) 4-14-40 41 Series VQZ Replacement Parts Base Mounted One-touch Fitting Assembly (For cylinder port) C3 C4 C6 C8 C10 Fitting size M5 (VQZ100 only) Model VQZ100 VVQ1000-50A-C3 VVQ1000-50A-C4 VVQ1000-50A-C6 VVQ1000-50A-M5 V100 VQZ200 VVQ1000-51A-C4 VVQ1000-51A-C6 VVQ1000-51A-C8 VQZ300 VVQ2000-51A-C6 VVQ2000-51A-C8 VVQ2000-51A-C10
Size and weight reduced by eliminating the manifold base C4/C6 One-touch fitting C4/C6 One-touch fitting (Elbow type) SZ3000 Series Height 31% reduction (Compared with SX3000-45 with DIN rail manifold and 5 stations) FREE LOCK Weight 12% reduction M5 port block assembly A port 1-3-1 B port 2 Series SZ3000 Precautions 1 Be sure to read before handling.
(The standerd valve has an individual exhaust for the pilot valve.) 2.10-38 Series VQZ Replacement Parts Base Mounted One-touch Fitting Assembly (For cylinder port) C3 C4 C6 C8 C10 Fitting size Series M5 (VQZ100 only) VQZ100 VVQ1000-50A-C3 VVQ1000-50A-C4 VVQ1000-50A-C6 VVQ1000-50A-M5 VQZ200 VVQ1000-51A-C4 VVQ1000-51A-C6 VVQ1000-51A-C8 SY VQZ300 VVQ2000-51A-C6 VVQ2000-51A-C8 VVQ2000-51A-C10
) 10.1 8.1 C4 4(5/32) 10.1 8.1 C6 6 10.3 8.3 C6 6 10.3 8.3 C8 8(5/16) 12 10 C8 8(5/16) 12 10 N7 1/4 10.3 8.3 N7 1/4 10.3 8.3 PFM7-01/02--X693 PFM7S-01/02--X693 A B C() A B C() Rc1/81/4 Rc1/81/4 NPT1/81/4 NPT1/81/4 13 11 17 13 11 17 G1/8 G1/8 G1/4 17 15 21 G1/4 17 15 21 -73No.PF-OMJ0005CN-I PFM7-C4/C6/C8/N7--X694 PFM7S-C4/C6/C8/N7--X694 A B A B C4 4(5/32) 10.1 36.1 C4 4(5/32) 10.1 8.1
1/8 1/8 M5 x 0.8 Base mounted for internal pilot Type SS3YJ5-41-M5 SYJ54 1/8 Type SS3YJ5-41-01 Type SS3YJ5-41-C4 Type SS3YJ5-41-C6 C6 1/8 M5 x 0.8 1/8 M5 x 0.8 1/8 1/8 Body ported for external pilot SYJ52R Type SS3YJ5-21R Type SS3YJ5-40R-M5 Type SS3YJ5-40R-01 1/8 1/8 1/8 1/8 1/8 Base mounted for external pilot Type SS3YJ5-41R-M5 M5 x 0.8 1/8 SYJ54R Type SS3YJ5-41R-01 Type SS3YJ5-41R-C4 C4
(A)4 2(B) 5 24 VDC X90 1 1 (P) (EA)5 3(EB) 2 position double solenoid J: With switch 2(B) (A)4 2 (EA)5 1 (P) 3(EB) Back pressure check valve A, B port size 3 position closed center Nil K None C4: 4 One-touch fitting C6: 6 One-touch fitting 2(B) (A)4 Built-in 3 The built-in back pressure check valve type has an effective area approximately 20% smaller.
Type of Actuation: 3 Position Closed Center, Manifold Type: Body Ported Plug-in Integrated, Pilot: Internal Pilot, Specifications: Standard, Voltage: 24VDC, Electrical Entry: Grommet Lead Wire 0.3m, Lead Wire Length: None, Surge Suppressor: None, Manual Override: Push-turn Locking Lever Style, A, B Port Size: Body Ported 1/8, Thread: -, Option: -
Actuation Type: -, Sealant: Metal Seal, Function: Standard (1W), Voltage: 24VDC, Lead Wire: Grommet Lead Wire 0.6m, Light & Surge Suppressor: w/o Light w/Surge Suppressor, Manual Override: Non-locking Push Style, Protection: Dust Proof, 1: -, Piping Specification: Side Ported, Port Size: Rc1/2, Thread: NPTF, Composite Symbol: 2 Position Double
Actuation Type: -, Sealant: Metal Seal, Function: External Pilot, Voltage: 24VDC, Lead Wire: Grommet Lead Wire 0.6m, Light & Surge Suppressor: w/o Light w/Surge Suppressor, Manual Override: Non-locking Push Style, Protection: Dust Proof, 1: -, Piping Specification: Side Ported, Port Size: Rc1/2, Thread: NPTF, Composite Symbol: 2 Position Double
Actuation Type: -, Sealant: Metal Seal, Function: Standard (1W), Voltage: 24VDC, Lead Wire: Grommet Lead Wire 0.6m, Light & Surge Suppressor: w/o Light w/Surge Suppressor, Manual Override: Non-locking Push Style, Protection: Dust Proof, 1: -, Piping Specification: Side Ported, Port Size: Rc1/2, Thread: -, Composite Symbol: 3 Position Closed Center
Actuation Type: -, Sealant: Metal Seal, Function: Low Wattage 0.5W, Voltage: 24VDC, Lead Wire: Grommet Lead Wire 0.6m, Light & Surge Suppressor: w/o Light w/Surge Suppressor, Manual Override: Non-locking Push Style, Protection: Dust Proof, 1: -, Piping Specification: Side Ported, Port Size: Rc1/2, Thread: -, Composite Symbol: 3 Position Exhaust Center
Actuation Type: -, Sealant: Metal Seal, Function: External Pilot, Voltage: 24VDC, Lead Wire: Grommet Lead Wire 0.6m, Light & Surge Suppressor: w/o Light w/Surge Suppressor, Manual Override: Non-locking Push Style, Protection: Dust Proof, 1: -, Piping Specification: Side Ported, Port Size: Rc1/2, Thread: NPTF, Composite Symbol: 2 Position Single
Function: 3 (3 Position Closed Center), Piping: 2 (Body Ported), Exhaust: 3 (Common), Specifications: Standard, Voltage: 5 (24VDC), Lead Wire: G (Grommet Lead Wire 0.3m), Surge Suppressor: None, Manual Override: E (Push-turn Locking Lever Style), Port Size: 01 (Base Mounted w/Sub-plate 1/8, Body Ported 1/8)
Function: 3 (3 Position Closed Center), Piping: 2 (Body Ported), Exhaust: 3 (Common), Specifications: Standard, Voltage: 5 (24VDC), Lead Wire: G (Grommet Lead Wire 0.3m), Surge Suppressor: None, Manual Override: E (Push-turn Locking Lever Style), Port Size: N7 (1/4" One-touch Fitting)
Function: 1 (2 Position Single), Piping: 2 (Body Ported), Exhaust: 3 (Common), Specifications: Standard, Voltage: 5 (24VDC), Lead Wire: G (Grommet Lead Wire 0.3m), Surge Suppressor: None, Manual Override: E (Manually Operated), Port Size: N7 (1/4" One-touch Fitting)
Type of Actuation: 5 (3 Position Pressure Center), Manifold Type: 20 (Body Ported Plug-in Integrated), Pilot: Internal Pilot, Specifications: Standard, Voltage: 5 (24VDC), Electrical Entry: G (Grommet Lead Wire 0.3m), Lead Wire Length: None, Surge Suppressor: None, Manual Override: E (Push-turn Locking Lever Style), A, B Port Size: 01 (Body Ported 1/8)