Type of Actuation: 2 Position Single, Manifold Type: Base Mounted Non Plug-in Single/Stacking Base, Plug-in Stacking Base, Pilot: External Pilot, Specifications: Standard, Voltage: 24VDC, Electrical Entry: M Plug Connector w/Lead Wire 0.3m, Lead Wire Length: None, Surge Suppressor: Surge Suppressor, Manual Override: Non-locking Push Style, A, B Port Size: Base Mounted w/Sub-plate 1/8, Thread

Type of Actuation: 3 Position Exhaust Center, Manifold Type: Base Mounted Non Plug-in Single/Stacking Base, Plug-in Stacking Base, Pilot: Internal Pilot, Specifications: Standard, Voltage: 24VDC, Electrical Entry: M Plug Connector w/Lead Wire 0.3m, Lead Wire Length: None, Surge Suppressor: Surge Suppressor, Manual Override: Non-locking Push Style, A, B Port Size: Base Mounted w/Sub-plate

Type of Actuation: 3 Position Closed Center, Manifold Type: Base Mounted Non Plug-in Single/Stacking Base, Plug-in Stacking Base, Pilot: Internal Pilot, Specifications: Standard, Voltage: 24VDC, Electrical Entry: M Plug Connector w/Lead Wire 0.3m, Lead Wire Length: None, Surge Suppressor: Surge Suppressor, Manual Override: Non-locking Push Style, A, B Port Size: Base Mounted w/Sub-plate 1

Type of Actuation: 3 Position Closed Center, Manifold Type: Base Mounted Non Plug-in Single/Stacking Base, Plug-in Stacking Base, Pilot: External Pilot, Specifications: Standard, Voltage: 24VDC, Electrical Entry: M Plug Connector w/Lead Wire 0.3m, Lead Wire Length: None, Surge Suppressor: Surge Suppressor, Manual Override: Non-locking Push Style, A, B Port Size: Base Mounted w/Sub-plate 1

Type of Actuation: 2 Position Double, Manifold Type: Body Ported Plug-in Integrated, Pilot: Internal Pilot, Specifications: Standard, Voltage: 24VDC, Electrical Entry: M Plug Connector w/Lead Wire 0.3m, Lead Wire Length: None, Surge Suppressor: Surge Suppressor, Manual Override: Non-locking Push Style, A, B Port Size: Body Ported 1/8, Thread: -, Option: -

Type of Actuation: 1 (2 Position Single), Manifold Type: 20 (Body Ported Plug-in Integrated), Pilot: Internal Pilot, Specifications: Standard, Voltage: 5 (24VDC), Electrical Entry: M (M Plug Connector w/Lead Wire 0.3m), Lead Wire Length: None, Surge Suppressor: S (Surge Suppressor), Manual Override: Non-locking Push Style, A, B Port Size: 01 (Body Ported 1/8)

Response speed: 5ms or less , Proof pressure: 500 kPa , Low flow rate range , Output: 1 to 5V analog (non-linear) , Piping specification: M5 female threads, Weight 10g (not including the lead wire) DIGITAL FLOW SWITCH. Flow Sensor for Air. 10.00000 lb. F29.

Dedicated Controller

V O Speed Max. 10ms ON OFF BUSY ON OFF BUSY Max. 30ms Max. 60ms V O Speed Timing for alarm reset Response time with respect to controller input signals ON OFF ALARM -RESET Max. 5ms The following factors exist for delay of response with respect to controller input signals.

Response speed: 5ms or less , Proof pressure: 500 kPa , Low flow rate range , Output: 1 to 5V analog (non-linear) , Piping specification: M5 female threads, Weight 10g (not including the lead wire), FLOW SWITCH, INSTRUMENTATION, IFW/PFW FLOW SWITCH, 2X, IFW/PFW NO SIZE ALL OTHER, .22312 lb

Table of Contents

V O Speed Max. 10ms ON OFF BUSY ON OFF BUSY Max. 30ms Max. 60ms V O Speed Timing for alarm reset Response time with respect to controller input signals ON OFF ALARM -RESET Max. 5ms The following factors exist for delay of response with respect to controller input signals.

Dedicated Controller

V O Speed Max. 10ms ON OFF BUSY ON OFF BUSY Max. 30ms Max. 60ms V O Speed Timing for alarm reset Response time with respect to controller input signals ON OFF ALARM -RESET Max. 5ms The following factors exist for delay of response with respect to controller input signals.

Electric Actuators

V O Speed Max. 10ms ON OFF BUSY ON OFF BUSY Max. 30ms Max. 60ms V O Speed Response time with respect to controller input signals Timing for alarm reset ON OFF ALARM -RESET Max. 5ms The following factors exist for delay of response with respect to controller input signals.

Electric Actuator with Integrated Guide

V O Speed Max. 10ms ON OFF BUSY ON OFF BUSY Max. 30ms Max. 60ms V O Speed Timing for alarm reset Response time with respect to controller input signals ON OFF ALARM -RESET Max. 5ms The following factors exist for delay of response with respect to controller input signals.

Dedicated Controller Series LC1 Uniaxial Type

Timing for stop by ALARM-RESET during operation Timing for home position return ON OFF SET -UP ALARM -RESET ON OFF max 5ms max 25ms ON OFF BUSY V O Speed max 20ms max 15ms V O Speed Home position return speed Creeping speed BUSY ON OFF ON OFF SET -ON BUSY-OFF timing is controlled by actuator deceleration.

Large Type Vacuum Unit Series ZR

Function plate (order made) Without vacuum switch Double solenoid Air operated Valve unit Vacuum pump specification full set One pilot Digital Vacuum Switch Specifications/Series ZSE4 ZSE426 65 25 Model NPN open collector 30V, 80mA Analog output 1 to 5V (5%FS) load impedance 1k PNP open collector 80mA Output specifications Indicator light Response frequency Lights up when ON, Green 200Hz (5ms

Response speed: 5ms or less , Proof pressure: 500 kPa , Low flow rate range , Output: 1 to 5V analog (non-linear) , Piping specification: M5 female threads, Weight 10g (not including the lead wire), Flow Sensor for Air, DIGITAL FLOW SWITCH, 10 lb

Response speed: 5ms or less , Proof pressure: 500 kPa , Low flow rate range , Output: 1 to 5V analog (non-linear) , Piping specification: M5 female threads, Weight 10g (not including the lead wire), Flow Sensor for Air, DIGITAL FLOW SWITCH, 10 lb

Response speed: 5ms or less , Proof pressure: 500 kPa , Low flow rate range , Output: 1 to 5V analog (non-linear) , Piping specification: M5 female threads, Weight 10g (not including the lead wire), FLOW SWITCH, INSTRUMENTATION, IFW/PFW FLOW SWITCH, 2X, IFW/PFW NO SIZE ALL OTHER, .19200 lb

Response speed: 5ms or less , Proof pressure: 500 kPa , Low flow rate range , Output: 1 to 5V analog (non-linear) , Piping specification: M5 female threads, Weight 10g (not including the lead wire), FLOW SWITCH, INSTRUMENTATION, IFW/PFW FLOW SWITCH, 2X, IFW/PFW NO SIZE ALL OTHER, .22354 lb

Response speed: 5ms or less , Proof pressure: 500 kPa , Low flow rate range , Output: 1 to 5V analog (non-linear) , Piping specification: M5 female threads, Weight 10g (not including the lead wire), FLOW SWITCH, INSTRUMENTATION, IFW/PFW FLOW SWITCH, 2X, IFW/PFW NO SIZE ALL OTHER, .16591 lb