Stainless Steel High Vacuum, Angle/In-line Valve, Angle type Series XM, In-line type Series XY

Seal material and its changed part Seal material Part numbers indicating changed seal material and leakage Leakage Pa m3/s or less Note 1) Compound No. 1349-80 Symbol Nil N1 Seal material FKM EPDM BARREL PERFLUORO Changed part Note 2) Symbol External 1.3 x 10-11 (FKM) 1.3 x 10-9 Internal 1.3 x 10-10 (FKM) 1.3 x 10-8 2101-80 2, 3 2 3 Nil A B C P1 70W 1.3 x 10-11 (FKM) 1.3 x 10-9 1.3 x

SY

SS5Y5-M45Stations B Dimension L: Formulas for dimensions L1 to L4 L3 = 12.5 x n1 + 16 x n2 + 70 L3 12.5 M = ( + 1) omit decimals L1 = 12.5 x M + 23 L2 = L1 10.5 L4 = (L1 L3)/2 n1: Number of SY3000 stations n2: Number of SY5000 stations Order made Manifold spec. sheets 188 Order Made Specifications SY5000/7000/9000/SY500 DIN Connector (DIN 43650C Standard) DIN connector type with conformity

Series VQ Base Mounted Metal Seal/Rubber Seal

P.1.10-140 P.1.10-144 VFS C C3 (3.2) C4 (4) M5 (M5 thread) VS C6 (6) kit VS7 N1 (1/8) N3 (5/32) N7 (1/4) Built-in silencer P.1.10-178 P.1.10-182 P.1.10-186 Terminal block C C3 (3.2) C4 (4) C6 (6) M5 (M5 thread) C8 (8) kit N1 (1/8) N3 (5/32) N7 (1/4) N9 (5/16) Built-in silencer P.1.10-178 P.1.10-182 P.1.10-186 Terminal block 1.10-115 Cylinder Speed Chart Series VQ0 Cylinder

Series VV100 is suitable for both direct or bracket mounting and can also accommodate various piping sizes including our miniature 2mm one-touch fittings. Energy saving has also been considered as individual valves can be ordered with a power saving circuit as each valve can be manually turned off, safe maintenance is guaranteed.3 Port Solenoid Valve, Non Plug-in , Piping Variations 3 PORT

Actuation: 1 (Normally Closed), Coil Specification: Standard, Number of Solenoids: D [2pcs. (Double Solenoid)], Voltage: 5 (24 VDC), Common Specifications: Positive Common, Connector Entry: C (Dedicated for Centralized Wiring), Light/Surge Voltage Suppressor: Z [with Light/Surge Voltage Suppressor, (Polar Type)], Switch: J (w/Switch), 2A/2B Fitting Port Size: LN3 [ø5/32" One-touch Fitting

Actuation: 1 (Normally Closed), Coil Specification: Standard, Number of Solenoids: S [1pc. (Single Solenoid)], Voltage: 5 (24 VDC), Common Specifications: Positive Common, Connector Entry: C (Dedicated for Centralized Wiring), Light/Surge Voltage Suppressor: Z [with Light/Surge Voltage Suppressor, (Polar Type)], Switch: None, 2A/2B Fitting Port Size: N3 (ø5/32" One-touch Fitting, Straight

Actuation: 1 (Normally Closed), Coil Specification: Standard, Number of Solenoids: D [2pcs. (Double Solenoid)], Voltage: 5 (24 VDC), Common Specifications: Positive Common, Connector Entry: C (Dedicated for Centralized Wiring), Light/Surge Voltage Suppressor: Z [with Light/Surge Voltage Suppressor, (Polar Type)], Switch: None, 2A/2B Fitting Port Size: C4 (ø4 One-touch Fitting, Straight Fitting

Actuation: 1 (Normally Closed), Coil Specification: Standard, Number of Solenoids: D [2pcs. (Double Solenoid)], Voltage: 5 (24 VDC), Common Specifications: Positive Common, Connector Entry: MO (Individual Wiring, w/o Connector), Light/Surge Voltage Suppressor: Z [with Light/Surge Voltage Suppressor, (Polar Type)], Switch: None, 2A/2B Fitting Port Size: C4 (ø4 One-touch Fitting, Straight Fitting

Actuation: 1 (Normally Closed), Coil Specification: Standard, Number of Solenoids: D [2pcs. (Double Solenoid)], Voltage: 5 (24 VDC), Common Specifications: Positive Common, Connector Entry: M (Individual Wiring, w/Lead Wire Length 300mm), Light/Surge Voltage Suppressor: Z [with Light/Surge Voltage Suppressor, (Polar Type)], Switch: None, 2A/2B Fitting Port Size: C4 (ø4 One-touch Fitting,

Actuation: 1 (Normally Closed), Coil Specification: Standard, Number of Solenoids: S [1pc. (Single Solenoid)], Voltage: 5 (24 VDC), Common Specifications: Positive Common, Connector Entry: C (Dedicated for Centralized Wiring), Light/Surge Voltage Suppressor: U [with Light/Surge Voltage Suppressor, (Non-polar Type)], Switch: None, 2A/2B Fitting Port Size: LN1 [ø1/8" One-touch Fitting, Elbow

Actuation: 1 (Normally Closed), Coil Specification: Standard, Number of Solenoids: D [2pcs. (Double Solenoid)], Voltage: 5 (24 VDC), Common Specifications: Positive Common, Connector Entry: C (Dedicated for Centralized Wiring), Light/Surge Voltage Suppressor: Z [with Light/Surge Voltage Suppressor, (Polar Type)], Switch: J (w/Switch), 2A/2B Fitting Port Size: C2 (ø2 One-touch Fitting, Straight

Actuation: 1 (Normally Closed), Coil Specification: Standard, Number of Solenoids: D [2pcs. (Double Solenoid)], Voltage: 5 (24 VDC), Common Specifications: N (Negative common), Connector Entry: C (Dedicated for Centralized Wiring), Light/Surge Voltage Suppressor: U [with Light/Surge Voltage Suppressor, (Non-polar Type)], Switch: None, 2A/2B Fitting Port Size: C4 (ø4 One-touch Fitting, Straight

Actuation: 1 (Normally Closed), Coil Specification: Standard, Number of Solenoids: S [1pc. (Single Solenoid)], Voltage: 5 (24 VDC), Common Specifications: N (Negative common), Connector Entry: C (Dedicated for Centralized Wiring), Light/Surge Voltage Suppressor: Z [with Light/Surge Voltage Suppressor, (Polar Type)], Switch: None, 2A/2B Fitting Port Size: C4 (ø4 One-touch Fitting, Straight

Actuation: 1 (Normally Closed), Coil Specification: Standard, Number of Solenoids: D [2pcs. (Double Solenoid)], Voltage: 5 (24 VDC), Common Specifications: Positive Common, Connector Entry: C (Dedicated for Centralized Wiring), Light/Surge Voltage Suppressor: Z [with Light/Surge Voltage Suppressor, (Polar Type)], Switch: J (w/Switch), 2A/2B Fitting Port Size: C4 (ø4 One-touch Fitting, Straight

Actuation: 1 (Normally Closed), Coil Specification: Standard, Number of Solenoids: D [2pcs. (Double Solenoid)], Voltage: 5 (24 VDC), Common Specifications: Positive Common, Connector Entry: C (Dedicated for Centralized Wiring), Light/Surge Voltage Suppressor: Z [with Light/Surge Voltage Suppressor, (Polar Type)], Switch: J (w/Switch), 2A/2B Fitting Port Size: N3 (ø5/32" One-touch Fitting,

Actuation: 1 (Normally Closed), Coil Specification: Standard, Number of Solenoids: D [2pcs. (Double Solenoid)], Voltage: 5 (24 VDC), Common Specifications: Positive Common, Connector Entry: C (Dedicated for Centralized Wiring), Light/Surge Voltage Suppressor: Z [with Light/Surge Voltage Suppressor, (Polar Type)], Switch: None, 2A/2B Fitting Port Size: N3 (ø5/32" One-touch Fitting, Straight

Actuation: 1 (Normally Closed), Coil Specification: Standard, Number of Solenoids: D [2pcs. (Double Solenoid)], Voltage: 5 (24 VDC), Common Specifications: Positive Common, Connector Entry: M (Individual Wiring, w/Lead Wire Length 300mm), Light/Surge Voltage Suppressor: Z [with Light/Surge Voltage Suppressor, (Polar Type)], Switch: None, 2A/2B Fitting Port Size: N3 (ø5/32" One-touch Fitting

Actuation: 1 (Normally Closed), Coil Specification: Standard, Number of Solenoids: D [2pcs. (Double Solenoid)], Voltage: 5 (24 VDC), Common Specifications: N (Negative common), Connector Entry: C (Dedicated for Centralized Wiring), Light/Surge Voltage Suppressor: Z [with Light/Surge Voltage Suppressor, (Polar Type)], Switch: None, 2A/2B Fitting Port Size: N3 (ø5/32" One-touch Fitting, Straight

Actuation: 1 (Normally Closed), Coil Specification: Standard, Number of Solenoids: S [1pc. (Single Solenoid)], Voltage: 5 (24 VDC), Common Specifications: Positive Common, Connector Entry: C (Dedicated for Centralized Wiring), Light/Surge Voltage Suppressor: U [with Light/Surge Voltage Suppressor, (Non-polar Type)], Switch: None, 2A/2B Fitting Port Size: C4 (ø4 One-touch Fitting, Straight

Actuation: 1 (Normally Closed), Coil Specification: Standard, Number of Solenoids: S [1pc. (Single Solenoid)], Voltage: 5 (24 VDC), Common Specifications: Positive Common, Connector Entry: C (Dedicated for Centralized Wiring), Light/Surge Voltage Suppressor: U [with Light/Surge Voltage Suppressor, (Non-polar Type)], Switch: None, 2A/2B Fitting Port Size: N3 (ø5/32" One-touch Fitting, Straight