Series SYJ700 Rubber seal 3 Port Pilot Solenoid Valve

4 (P, R port) (Pitch) P=19 21 Manual override Approx. 300 (Lead wire length) For 1/8 (Station n) (Station 1) (Light/surge voltage suppressor) (Light/surge voltage suppressor) + + + + 67 [74] 51.6 + + + + 67 [74] 35 A A 51.6 (Pitch) P=19 21 9.5 35 One-touch fitting (A port) Applicable tubing O.D.: 6, 1/4", 8, 5/16" A A 8.5 (Pitch) P=19 21 1/8 (A port) L plug connector (L) M plug connector

VCW

Grommet: G Conduit: C Approx. 300 Approx. 280 D D Q F Q F C C G (PF) 1/2 R R E E A H 2-P Port size 2-M B B A H 2-P Port size 2-M L L K K DIN connector: D Conduit terminal: T Cable 6.8 to 10 27.5 F F Q (Q) S 34 25 U R C R C (44) G (PF) 1/2 E B A H D 2-P Port size (S) E G (PF) 1/2 B A H D 2-M 2-P Port size 2-M L L K K N.C.

Series VC, Direct Operated, 2 Port Solenoid Valve for Water, Series VCW

Grommet: G Conduit: C Approx. 300 Approx. 280 D D Q F Q F C C G (PF) 1/2 R R E E A H 2-P Port size 2-M B B A H 2-P Port size 2-M L L K K DIN connector: D Conduit terminal: T Cable 6.8 to 10 27.5 F F Q (Q) S 34 25 U R C R C (44) G (PF) 1/2 E B A H D 2-P Port size (S) E G (PF) 1/2 B A H D 2-M 2-P Port size 2-M L L K K N.C.

3 Port Solenoid Valve Series SYJ300/500/700

Features 1 Series SYJ300/500/700 Manifold Variations A port size With one-touch fitting Valve series A port location P, R ports size M3 M5 1/8 Applicable tubing O.D. 6 4 N3 N7 N9 8 Note 1) M5 x 0.8 SYJ300 Top Note 2) Body ported Base mounted 1/8 SYJ500 Top 1/8 Note 1) 1/8 SYJ700 Top 1/4 Note 1) M5 x 0.8 SYJ300 Side 1/8 Bottom SYJ500 1/8 Side Note 1) 1/8 Bottom SYJ700 1/4 Side 1/4 Note 1)

VCW

OUT L FKM (2) Note) High corrosion resistant specification used for armature material. 1 Thread type IN (1) Rc G NPT Nil F N N.O.

SMC Pneumatic Clean Series

L 40 150 A H7B 21 C D M 2 L 40 150 A H7B Number of auto switches Mounting style Basic style Axial foot style Rod side flange style Head side flange style Boss-cut basic style Boss-cut rod side flange style B L F G BZ FZ 2 pcs. 1 pc.

Series VCL

Q=14.2Cv 10.2 P l/min G Formula based on effective area (Smm) Q=0.8S 10.2P l/min G Other : Flow rate (l/min) : Pressure differential (P1 P2) : Upstream pressure (MPa) : Downstream pressure (MPa) : Effective area (mm) : Cv factor : Fluid specific gravity (water = 1) Q P P1 P2 S Cv G 1. Materials FKM: Fluoro rubber Trade names: Viton, Dai-el, etc. 2.

Series VC, Series VCL, Direct Operated 2 Port Solenoid Valve for Oil

Q=14.2Cv 10.2 P l/min G Formula based on effective area (Smm) Q=0.8S 10.2P l/min G Other : Flow rate (l/min) : Pressure differential (P1 P2) : Upstream pressure (MPa) : Downstream pressure (MPa) : Effective area (mm) : Cv factor : Fluid specific gravity (water = 1) Q P P1 P2 S Cv G 1. Materials FKM: Fluoro rubber Trade names: Viton, Dai-el, etc. 2.

3M/SMseries

Pod NVF3000 NVF5000 Supply SUP Cylindet cYL.1, CYL.2 A , B Exhaust EXH.1, EXH.2 Rl, R2 Symbol (SirEle solenoid) l c 1 : c Y L . 1 l IC2:CYL.2 lEl :EXH.r I {E2:EXH.2] Lubricant 1.

Series 10/11 -CQSX, -CQ2X Microspeed Cylinder for Clean Room Series 10-, 11-

Elbow Type (Metal Body) Flow rate and effective area AS220M-02 Model AS120M AS220M-01 R 1/4 Cylinder side Tubing side M5 x 0.8 10-32UNF NPT 1/8 NPT 1/4 R 1/8 Port size Rc 1/4 Rc 1/8 l/min (ANR) {Nl/min} Flow rate 38 7 12 Controlled flow Effective area mm 0.6 0.1 0.2 l/min (ANR) {Nl/min} 420 Flow rate 105 280 Free flow 6.5 1.6 4.3 Effective area mm Note) Flow rates are values measured with

VCL

Max.operating pressure differential (MPa) Port size Flow characteristics Max.system pressure (MPa) Orifice size (mm) Weight (kg) Class Model PAX Cv converted Av x 10 -6(m 2) 2 0.16 3.8 1.5 PB 3 0.33 7.9 0.8 1/8 (6A) 1/4 (8A) 1/8 : 0.21 1/4 : 0.24 2 VCL2 2.0 4 0.51 12 0.4 5 0.65 16 0.25 3 0.35 8.4 1.5 4 0.54 13 0.8 1/4 (8A) 3/8 (10A) 1/2 (15A) 1/4 : 0.42 3/8 : 0.40 1/2 : 0.49 VCL3 3 5 0.80

AKH/AKB Series

Inch Size A L Connection thread size NPT (a) Weight g Effective area (mm) A H L Model (b) 1/8 1/4 3/8 1/2 AKB01-N01S AKB02-N02S AKB03-N03S AKB04-N04S 14.29 17.46 22.23 23.81 24.2 40 44.9 55.5 20.2 34 38.4 47.5 18 44 86 113 6.5 14 24 34 1/8 1/4 3/8 1/2 Connection thread size (b) Reference dimension after screwing into NPT threads.

AKH/AKB Series Check Valve with One-touch Fitting

Inch Size A L Connection thread size NPT (a) Weight g Effective area (mm) A H L Model (b) 1/8 1/4 3/8 1/2 AKB01-N01S AKB02-N02S AKB03-N03S AKB04-N04S 14.29 17.46 22.23 23.81 24.2 40 44.9 55.5 20.2 34 38.4 47.5 18 44 86 113 6.5 14 24 34 1/8 1/4 3/8 1/2 Connection thread size (b) Reference dimension after screwing into NPT threads.

Microspeed Cylinder: Double Acting/Single Rod Series CM2X ø 20, ø 25, ø 32, ø 40 Dimensions and auto switch details are equivalent to those of the standard double acting single rod cylinder.

UZ Without auto switch L 40 150 CM2X With auto switch CDM2X C73 Number of auto switches L 40 150 2 pcs. 1 pc.

[Option] 3 Port Solenoid Valve Direct Operated Poppet Type VT317 Series Rubber Seal

DXT083-13-1 Qty. 1 pc. Hexagon socket head screw DXT083-19-1 2 pcs.

ZL3-OM00801

16 No.ZL3-OM00801-A 7.2 1 (/) ZL3/ZL6 ZL3-JSY3140-5LZ -a 1 3) 2) DC24V 1) 300mm 300mm * *0.150.18Nm 2) D: E: 1 1 1 1 3) 1 1 2 X12 ZL3/ZL6 SY100-30-4A-6 1 2) / 1) 2) 300 4 DC24V 6 600 10 1000 15 1500 20 2000 25 2500 30 3000 50 5000 ZL3/ZL6 SY100-30-A *x2 17 No.ZL3-OM00801-A ZL3/ZL6 ZS-39-5G ZL3-LW1-N-A 1 1) N NPN P PNP 2 ZL3/ZL6 ZL3-EJ1-H-A 1 2) 1) M 0.35 MPa

VT317

type Max. number of stations Applicable solenoid valve B mount 20 stations (1) VO317(3) Port location (Direction)/Port size A Exhaust port Symbol Type R P Base (Side) Base (Side) Base (Side) ( ) 1 4 3 8 1 Common (2) ( ) 1 4 3 8 1 4 Base (Side) Base (Side) Base (Side) VV317-02-053-02 3 Individual 1 4 1 4 1 4 Individual exhaust Note 1) For more than 3 stations, supply air both sides of P port

Microspeed Cylinder: Double Acting/Single Rod Series CQ2X ø 32, ø 40, ø 50, ø 63, ø 80, ø 100 Dimensions and auto switch details are equivalent to those of the standard double acting single rod cylinder.

Grease pack GR-L-005 (5g) GR-L-010 (10g) GR-L-150 (150g) 8

Microspeed Cylinder: Double Acting/Single Rod Series CQSX ø 12, ø 16, ø 20, ø 25 Dimensions and auto switch details are equivalent to those of the standard double acting single rod cylinder.

Piston seal: 1 pc. 12 16 20 25 CQSX12-PS Rod seal: 1 pc. CQSX16-PS Tube gasket: 1 pc. CQSX20-PS Grease pack (10g): 1 pc. CQSX25-PS 2. Grease packs When maintenance requires only grease, use the following part numbers to order. Grease pack GR-L-005 (5g) GR-L-010 (10g) GR-L-150 (150g) 6

Microspeed Cylinder: Double Acting/Single Rod Series CUX ø 10, ø 16, ø 20, ø 25, ø 32 Dimensions and auto switch details are equivalent to those of the standard double acting single rod cylinder.

Grease pack GR-L-005 (5g) GR-L-010 (10g) GR-L-150 (150g) Operation Warning 1. The speed may not be controllable during low speed operation with the meter-out controller. Caution 1. For Series CUX10, up to 0.1Nl/min (ANR) of internal leakage is anticipated due to cylinder structure. 4