Series SYJ500 Rubber seal 3 Port Pilot Solenoid Valve

(Value in the initial state) Base mounted Solenoid Specifications JIS Symbol Grommet (G), (H), L plug connector (L), M plug connector (M), DIN terminal (D), M8 connector (W) Internal pilot Electrical entry SYJ512 4 SYJ52 2 4 DC AC 50/60 Hz Coil rated voltage (V) 24, 12, 6, 5, 3 (A) 2 (A) 2 100, 110, 200, 220 10% of rated voltage Allowable voltage fluctuation Standard With power saving circuit

SMC Pneumatic Clean Series

MM 2-LC LX D D I LZ 20, 25 Width across flats B2 Standard port MM Relief port 45 45 Width across flats NA LT N 4-LD N X Y S + Stroke X Y Z LS + Stroke Z + Stroke ZZ + 2 x Stroke 32, 40 (mm) 11 8 8 8 Z H H2 H1 S P N I F A 13 8 AL D K MM NA NN B1 B2 G 54 47 47 40 B ZZ 188 154 152 144 LX 55 40 40 40 LH 30 28 28 25 LT LS LD 4 4 4 4 LC 75 55 55 55 LZ X Y 40 32 25 20 Bore size 1/8 27 25 25 21 24

3 Port Solenoid Valve Series SYJ300/500/700

(Value in the initial state) Base mounted Solenoid Specifications JIS Symbol Internal pilot SYJ312 4 SYJ32 2 4 Grommet (G), (H), L plug connector (L), M plug connector (M), M8 connector (W) Electrical entry (A) 2 (A) 2 DC AC 50/60 Hz Coil rated voltage (V) 24, 12, 6, 5, 3 100, 110, 200, 220 10% of rated voltage Allowable voltage fluctuation 1 (P) 3 (R) 1 (P) 3 (R) Standard With power saving

Series VCL

1in = 25.4mm W (44) Z (X) (V) T R (Y) T 25 IN port 2-3/8 l=280 l=300 2.5 (N) E A (U) S Q D G C C B L1 L2 L3 16 D side U side Stations 1 2 3 4 5 n 21 5.5 16 OUT port n-1/4 n-1/8 H H P=J (pitch) 2 : Thread type L dimensions (mm) n (stations) Model Dimension 2 3 4 6 9 7 5 8 10 L1 69 103.5 138 207 310.5 241.5 172.5 276 345 VV2CL2 L2 81 115.5 150 219 322.5 253.5 184.5 288 357 L3 93 127.5 162 231

Series VC, Series VCL, Direct Operated 2 Port Solenoid Valve for Oil

1in = 25.4mm W (44) Z (X) (V) T R (Y) T 25 IN port 2-3/8 l=280 l=300 2.5 (N) E A (U) S Q D G C C B L1 L2 L3 16 D side U side Stations 1 2 3 4 5 n 21 5.5 16 OUT port n-1/4 n-1/8 H H P=J (pitch) 2 : Thread type L dimensions (mm) n (stations) Model Dimension 2 3 4 6 9 7 5 8 10 L1 69 103.5 138 207 310.5 241.5 172.5 276 345 VV2CL2 L2 81 115.5 150 219 322.5 253.5 184.5 288 357 L3 93 127.5 162 231

VCL

Series 2 3 4 Class 2 Class 3 Class 4 OUT port size Port size 1/8 (6A) 1/4 (8A) All IN ports are 3/8.

Series 10/11 -CQSX, -CQ2X Microspeed Cylinder for Clean Room Series 10-, 11-

Elbow/Universal Type Flow rate and effective area AS221FM-02 AS221FM-01 Model AS121FM-M5 AS231FM-02 AS231FM-01 AS131FM-M5 3.2, 4, 6 6, 8 Metric sizes 3.2, 4 8, 10 4 6 Tubing O.D. 1/8", 5/32", 3/16" 1/4" 3/16", 1/4" 5/16" 1/4", 5/16" 3/8" Inch sizes 1/8", 5/32" 5/32" 3/16" l/min (ANR) {Nl/min} 38 7 Flow rate 12 Controlled flow Effective area mm 0.6 0.2 0.1 l/min (ANR) {Nl/min} 230 Flow rate

3M/SMseries

Pod NVF3000 NVF5000 Supply SUP Cylindet cYL.1, CYL.2 A , B Exhaust EXH.1, EXH.2 Rl, R2 Symbol (SirEle solenoid) l c 1 : c Y L . 1 l IC2:CYL.2 lEl :EXH.r I {E2:EXH.2] Lubricant 1.

AKH/AKB Series

Inch Size A L Connection thread size NPT (a) Weight g Effective area (mm) A H L Model (b) 1/8 1/4 3/8 1/2 AKB01-N01S AKB02-N02S AKB03-N03S AKB04-N04S 14.29 17.46 22.23 23.81 24.2 40 44.9 55.5 20.2 34 38.4 47.5 18 44 86 113 6.5 14 24 34 1/8 1/4 3/8 1/2 Connection thread size (b) Reference dimension after screwing into NPT threads.

AKH/AKB Series Check Valve with One-touch Fitting

Inch Size A L Connection thread size NPT (a) Weight g Effective area (mm) A H L Model (b) 1/8 1/4 3/8 1/2 AKB01-N01S AKB02-N02S AKB03-N03S AKB04-N04S 14.29 17.46 22.23 23.81 24.2 40 44.9 55.5 20.2 34 38.4 47.5 18 44 86 113 6.5 14 24 34 1/8 1/4 3/8 1/2 Connection thread size (b) Reference dimension after screwing into NPT threads.

Series: 350 [3 Port COM (Single Unit)], Voltage: 12VDC, Electrical Entry: Grommet / Tape winding, Orifice: 4 [350 (3 Port) ø4], Port Size: 02 [1/4 (8A)], Thread: NPT, Material: Stainless Steel Body, FKM Seal, Class B Coil, Option: -, CE Compliance: -

Series: 350 [3 Port COM (Single Unit)], Voltage: 24VDC, Electrical Entry: Grommet / Molded, Orifice: 4 [350 (3 Port) ø4], Port Size: 02 [1/4 (8A)], Thread: NPT, Material: Stainless Steel Body, FKM Seal, Class B Coil, Option: -, CE Compliance: -

Series: 350 [3 Port COM (Single Unit)], Voltage: 24VDC, Electrical Entry: Faston terminal / Molded, Orifice: 4 [350 (3 Port) ø4], Port Size: 02 [1/4 (8A)], Thread: NPT, Material: Stainless Steel Body, FKM Seal, Class B Coil, Option: -, CE Compliance: -

Series: 350 [3 Port COM (Single Unit)], Voltage: 6 (12VDC), Electrical Entry: G (Grommet / Tape winding), Orifice: 4 [350 (3 Port) ø4], Port Size: 02 [1/4 (8A)], Thread: N (NPT), Material: L (Stainless Steel Body, FKM Seal, Class B Coil)

Series: 350 [3 Port COM (Single Unit)], Voltage: 5 (24VDC), Electrical Entry: W (Grommet / Molded), Orifice: 4 [350 (3 Port) ø4], Port Size: 02 [1/4 (8A)], Thread: N (NPT), Material: L (Stainless Steel Body, FKM Seal, Class B Coil)

Series: 350 [3 Port COM (Single Unit)], Voltage: 5 (24VDC), Electrical Entry: F (Faston terminal / Molded), Orifice: 4 [350 (3 Port) ø4], Port Size: 02 [1/4 (8A)], Thread: N (NPT), Material: L (Stainless Steel Body, FKM Seal, Class B Coil)

[Option] 3 Port Solenoid Valve Direct Operated Poppet Type VT317 Series Rubber Seal

x 1/4 n x 1/4 Applicable cable O.D. 6 to 12 L Dimension n: Stations Stations Formula L1 = 46 x n + 29 L2 = 46 x n + 14 2 121 106 3 167 152 4 213 198 5 259 244 6 305 290 7 351 336 8 397 382 9 443 428 10 489 474 L L1 L2 With mounting adaptor: VV317-02-1-02-A 4 x 7 mounting hole Manual override (Non-locking) (Station 1) (Station n) VV061 VV100 DIN terminal facing upward 141.6 V100 S070 VQD n

VT317

2 121 106 L L1 L2 S070 With mounting adaptor: VV317-02-1-02-A VQ 4-7 mounting hole P = 46 VKF VQZ VZ Manual override (Non-locking) VS DIN terminal facing upward 141.6 VFN Applicable cable O.D. 6 to 12 L Dimension n: Stations Stations Formula L1 = 46 x n + 89 L2 = 46 x n + 59 2 181 151 3 227 197 4 273 243 5 319 289 6 365 335 7 411 381 8 457 427 9 503 473 10 549 519 L L1 L2 4-7-15 16 Series

ZL3-OM00801

N06 NPT3/4 5/16(inch) N04 2xNPT1/2 6) 5 DC24V *1G JIS B0202 ISO1603 ISO1179 8) Z 7 L L 0.3(m) 11) A NPN LO B PNP M M 0.3(m) MO 12) 9) M SI (kPa) D P (:psi) E 10) 14 GN (G) B G *7ZL212 27mm ZL212 (2 /1 , 4 ) E (2 ) F (2 ) V (1 ) 13 G 2m) W (2m) 5 No.ZL3-OM00801-A 2. 2.1 (1/P) (2/V) ZL3 ZL6 (3/E) // / (G) (2/V) 2.2 ZL6 1 ZL6 (ZL6-SC1-A) 2), 6 No.ZL3-OM00801-A 3. 3.1

Series: 350 [3 Port COM (Single Unit)], Voltage: 24VDC, Electrical Entry: Grommet / Tape winding, Orifice: 4 [350 (3 Port) ø4], Port Size: 02 [1/4 (8A)], Thread: NPT, Material: Brass Body, FKM Seal, Class B Coil, Option: Foot Bracket, CE Compliance: -