High Vacuum Angle Valve

Refer to Maintenance Parts on page 6 for further details regarding quantity and type.

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i 50,63 Double rod rNPm( 1 2 , 1 6 2A' 25 _i#-&S-*-6-32, arl 5!,63 80,100 Axial piping (centmlized piping) f Sngle TOO CQP2 Sqng 12, 16 _ rel.rln. __+_&__s-__ __--_-*?)

[Option] 3 Port Solenoid Valve Direct Operated Poppet Type VT317 Series Rubber Seal

(136.6) Conduit terminal (T) Grommet (G) DIN terminal (D) 2n x 1/4 Applicable cable O.D. 6 to 12 L Dimension n: Stations Stations Formula L1 = 46 x n + 29 L2 = 46 x n + 14 2 121 106 3 167 152 4 213 198 5 259 244 6 305 290 7 351 336 8 397 382 9 443 428 10 489 474 L L1 L2 Precautions Be sure to read this before handling the products.

CG1-OM0227

24. 1) 2) 3) 1) 2) 1.5~2 2 2. 2-5. ,AS 8 2-6. 2-6-1.

PFxx-OMS0001CN

6 6 6 zhi chi ON OFF ON OFF OU2 -30No.PF-OMS0001CN-A <>OUT1 [F 1] [oUt1][()] [oU1] [] [1ot] [] 32 33 34 36 -31No.PF-OMS0001CN-A a.

A

4, 6 S Y M B O L S Primary pressure Bar Flow ln/min H O W T O O R D E R M I N I AT U R E R E G U L AT O R (N)ARJ1020F (N)ARJ1020F M5 D I M E N S I O N S S E R I E S NARJ 04 4mm 06 6mm Japanese N North American M5 M5X0.8 Panel Mount Dimension Model A B C D E F G H J NARJ1020F-M5-04 21 10.4 4 M5X0.8 6 10.6 3.5 15.5 50 NARJ1020F-M5-06 22 12.8 6 Courtesy of Steven Engineering, Inc. !

ARJ1020F

M5 x 0.8 6 3.5 15.5 50 17.2 ARJ1020F-M5-06 22 12.8 6 VY1 Manifold Base (Option)/Dimensions G PPA 2-3.5 (Mounting hole) 31 (ARJ1020F-M5-04) 32 (ARJ1020F-M5-06) AL Applicable tubing O.D. 4, 6 (Mounting hole) IN (Common) Stations Manifold base part no. 4 6 10 B dimension A dimension 90 130 210 82 122 202 ARJM10-4 ARJM10-6 ARJM10-10 14-4-5 3 Miniature Regulator Series ARJ210 Lightweight body

XL-OMY0003

SUS304> 5 (SUS304) () 2 4 (A6063) < A6063> C D E E F C H B G A A mm A B C D E F G H XLH-16 40 100.5 38 1 30 17 35 XLH-25 50 114 48 1 12 40 26 41 XLH-40 65 162.5 66 2 11 55 41 57 XLH-50 70 179.5 79 2 11 75 52 70 8 XL-OMY0003 5 10 []18 12 O 1) FKM M 10 FKM : 110 Pa <> 9 XL-OMY0003 6 6-1. 1 1P4P5 10 XL-OMY0003 6-2 1 2 b 3 1 2 O 4 a aa b O O

PSxx-OMM0006CN

(M8(3 )11 ) 01 X M ISE40A 2 K ISE40A -0.11.000 MPa ZSE40A 0.0-101.3 kPa ZSE40AF -100.0100 kPa 1 01 R1/8 (M5) A A N01 NPT1/8 (M5) W1 Rc1/8 B B WF1 G1/81 D D M5 M5X0.8 () E C4 4 C6 6 F + 1IS0228-1 P10/1 X NPN2() Y PNP2() 1 R NPN2 +/ T PNP2 +/ M SI2 P (psi)1 S NPN2 +/ 1 2kPaMPa V PNP2 +/ -9No.PS-OMM0006CN-E /1 1 01 N01 W1 WF1 M5 C4 C6 A A ZS-24-A X X X B B ZS-24-B X X X X X D

ZB-OM00301

Q2 +COM 30.30.4 4 L L 5 DC24V LO L 6 DC12V M M 5 MO M 5 4300 5MMO 6 B 6() 9 - No.ZB-OM00301 / kPa / P1 0-101 15V2F.S.7 P3 -100100 15V2F.S.7 8 EA EAM SI 9 NPN2 EAP [psi] 8 0-101 8 EB EBM SI 9 PNP2 EBP [psi] 8 8 FA FAM SI 9 NPN2 FAP [psi] 8 -100100 8 FB FBM SI 9 PNP2 FBP [psi] 8 73m 8 9kPa G 2m V 10 11 12 C2 2 B C4 4 N1 1/8 N3 5/32 K 12 L2 2 L4 4

High Vacuum L Type Valve

30 17 44 XLA-25-2 50 121 48 27 12 40 26 44 XLA-40-2 65 171 66 39 11 55 41 67 XLA-50-2 70 185 79 46 11 75 52 72 XLA-63-2 88 212 100 55 11 87 95 70 76 XLA-80-2 90 257 117 65 11 114 110 83 104 12 XL-OMS0001-B 6.

ARJ310

Tightening of the M5 threads 1) M5 After tightening by hand, give an additional 1/6 rotation with the correct tool. Overtightening can cause damage to the threads and/or air leakage due to deformation of the gasket. Undertightening can cause loose threads and air leakage, etc. 6 SMC'S GLOBAL MANUFACTURING, DISTRIBUTION AND SERVICE NETWORK EUROPE SLOVENIA SMC Slovenia d.o.o.

IR10-OM00007

No. o S o1 T P2 U Q3 V R4 W Z12 -6- (1) Nm 1/8 (2) (3) (4) -7- (1) (2) (3) (4) (1) (2) (3) (1) (2) 3 (3) 1 3 1 (4) P.5 0 (5) 0 (6) 0.6Nm -8- (1) (2) (3) 12.5Nm (4) ()ON-OFF (5) 79Nm (6) (7) (1) AF AM AFM (2) (1) ( (2) 1.52 (1) -9- 6 (1) 1 1.5 (2) , (3) (4) [][] -10- 8 2 6 3 2 () 5 2 2 (80-) (80-) 2 2 9 EXH 2 2 ON-OFF 1 1 7 2

XL-OMY0001

industrial robots-Safety JIS B 8370: JIS B 8361: JIS B 9960-1: -1 ) JIS B 8433: *2) 1. 2. 3. 1. 2. 3. 4. 2 XL-OMY0001 / 1 1.5 *3) 3)1 1 () 3 XL-OMY0001 1 &/ 1.52 2 ( ) 5 5 P-01-11 P-06-3 4 XL-OMY0001 2.2 A6063 SUS316L SUS304 5 P11 FKM 3 3[]P8 60 , 245250Hz 30m/s 5 XL-OMY0001 /H0 H4 H5 510% O 0.1mm0.2mm 6 P13 3 3 P7P8 5 P11 7 P14 P18 6 XL-OMY0001 33 5 P11

IR20-OM00008

I R20O M 08A / Series IR2000 IR2010 IR2020 23 1. 4 2. 5 3. 6 4. 6 5. 79 6. 10 7. 11 8. 12 -1- (ISO / IEC)(JIS) *1) *1) ISO 4414:Pneumatic fluid power -General rules relating to systems. ISO 4413:Hydraulic fluid power -General rules relating to systems. IEC 60204-1:Safety of machinery --Electrical equipment of machines.

Compatible Fluid: Air / Water, Operating Environment: Standard, Type: Electromagnetic Type, Number of Solenoids: Single Solenoid, Switching Type: Normally Closed, Body Material: Resin, Application: Individual Item, Connection Type: Tube Connection, Tube Diameter: φ10, Operating Temperature Range(°C): -10～50, Driving Type: Linear Motion Type, Orifice Diameter(Ø): 6, IP Rating: IP65, Acquired

Model: VDW40, Voltage: 24VDC, Power-saving Circuit: None, Electrical Entry Direction: 90° Left Direction, Orifice Diameter: 6.0 mm, Port Connection Type: One-touch fitting for ø10, Body Material and Coil Insulation Type: PPS Body, EPDM Seal, Class B Coil, Option: Bottom Mounting Insert Type

Model: VDW40, Voltage: 24VDC, Power-saving Circuit: Power-saving Circuit, Electrical Entry Direction: 90° Right Direction, Orifice Diameter: 6.0 mm, Port Connection Type: One-touch fitting for ø8, Body Material and Coil Insulation Type: PPS Body, EPDM Seal, Class B Coil, Option: Bottom Mounting Insert Type

Model: 4 (VDW40), Voltage: 5 (24VDC), Power-saving Circuit: None, Electrical Entry Direction: L2 (90° Left Direction), Orifice Diameter: 6 (6.0 mm), Port Connection Type: C10 (One-touch fitting for ø10), Body Material and Coil Insulation Type: B (PPS Body, EPDM Seal, Class B Coil), Option: N (Bottom Mounting Insert Type)

Model: 4 (VDW40), Voltage: 6 (12VDC), Power-saving Circuit: E (Power-saving Circuit), Electrical Entry Direction: Piping Direction, Orifice Diameter: 6 (6.0 mm), Port Connection Type: C10 (One-touch fitting for ø10), Body Material and Coil Insulation Type: B (PPS Body, EPDM Seal, Class B Coil), Option: N (Bottom Mounting Insert Type)