AS321FG-N02-09 21.3 29.5 19 41 69 22 48.3 32.8 44.3 43.3 42.8 12 20.9 5/16" 15.2 37.8 18.5 63 23 AS321FG-03-06 AS321FG-N02-11 31.8 43.3 55 17 27.8 39.3 6 12.8 3/8" 17.9 21 67 AS321FG-03-08 AS321FG-N03-07 27.8 39.3 57 18.5 29.5 41 8 15.2 1/4" 13.2 17 55 23 35.2 40.4 45.4 19 40.2 R 3/8 19.8 NPT 3/8 AS321FG-03-10 AS321FG-N03-09 19.8 29.5 19 41 59 21 45.4 31.8 43.3 40.4 40.2 10 18.5 5/16" 15.2
AS321FG-N02-09 21.3 29.5 19 41 69 22 48.3 32.8 44.3 43.3 42.8 12 20.9 5/16" 15.2 37.8 18.5 63 23 AS321FG-03-06 AS321FG-N02-11 31.8 43.3 55 17 27.8 39.3 6 12.8 3/8" 17.9 21 67 AS321FG-03-08 AS321FG-N03-07 27.8 39.3 57 18.5 29.5 41 8 15.2 1/4" 13.2 17 55 23 35.2 40.4 45.4 19 40.2 R 3/8 19.8 NPT 3/8 AS321FG-03-10 AS321FG-N03-09 29.5 19.8 19 41 59 21 45.4 31.8 43.3 40.2 40.4 10 18.5 5/16" 15.2
KQ2 KFG2H0425-01 KFG2H0425-02 KFG2H0403-01 KFG2H0403-02 KFG2H0604-01 KFG2H0604-02 KFG2H0806-01 KFG2H0806-02 KFG2H0806-03 KFG2H1075-02 KFG2H1075-03 KFG2H1075-04 KFG2H1008-02 KFG2H1008-03 KFG2H1008-04 KFG2H1209-02 KFG2H1209-03 KFG2H1209-04 KFG2H1210-02 KFG2H1210-03 KFG2H1210-04 KFG2H1613-03 KFG2H1613-04 1/8 1/4 1/8 1/4 1/8 1/4 1/8 1/4 3/8 1/4 3/8 1/2 1/4 3/8 1/2 1/4 3/8 1/2 1/4 3/8 1/2 3/8
(Values at the initial period) Note 3) Values inside ( ) denote the low wattage (0.5 W) specifications. 1 (P) 5 (R1) 3 (R2) 1 (P) 5 (R1) 3 (R2) 3 position double check (A) 4 (B) 2 1 (P) 5 (R1) 3 (R2) 2-5-4 5 Base Mounted Series VQ4000 Plug-in/Plug Lead: Single Unit How to Order Valves Body Port size Nil Without sub-plate (For manifold) 0: Plug-in sub-plate 02 03 Rc 1/4 Rc 3/8 Porting specifications
21.7 21.7 Screw-in connection S type: White color L type: Black color (Mounting hole) B C D E F G H Model A 3 8 Rc3 8 Rc3 8 Rc3 8 ZH18DS-03-03-03 ZH18DL-03-03-03 ZH20DS-03-04-04 ZH20DL-03-04-04 Rc 133 52.45 42 19 3.5 19 20.95 20.95 133 52.45 42 19 3.5 19 151.1 60.95 47.7 19 3.5 24 26.75 151.1 60.95 47.7 19 3.5 24 26.75 I J K L M N O Model 3 8 Rc3 8 Rc3 8 Rc1 2 Rc1 2 ZH18DS-03-03-03 ZH18DL
5/32 05 3/16 07 1/4 09 5/16 11 3/8 13 1/2 Metric Size: 23 3.2mm 04 4mm 06 6mm 08 8mm 10 10mm 12 12mm 16 16mm Imperial 32 UNF 10-32 33 1/16 34 1/8 35 1/4 36 3/8 37 1/2 03 5/32 Dia Reducer 05 3/16 Dia Reducer 07 1/4 Dia Reducer 09 5/16 Dia Reducer 11 3/8 Dia Reducer 13 1/2 Dia Reducer 00 Same Diameter Tubing 99 Plug-In Type ACCESSORIES G A S K E T S F O R UNI ONE TOUCH FITTINGS Applicable
0040 0001 BB [CR][LF] :01 03 02 09E1 10 [CR][LF] Answer 25.29 deg.C. 0041 Reading external Sensor temperature 1 :01 03 0041 0001 BA [CR][LF] :01 03 02 09E1 10 [CR][LF] Answer 25.29 deg.C. 0043 Reading status 1 :01 03 0043 0001 B8 [CR][LF] :01 03 02 0005 F5 [CR][LF] Run with alarm 0044 Alarm flag 1 1 :01 03 0044 0001 B7 [CR][LF] :01 03 02 8000 7A [CR][LF] ERR15 :01 06 0050 0 A9 [CR][LF] :
1 4 3 8 1 4 3 8 1 4 3 8 1 4 3 8 1 4 3 8 VFA5120 2 position single 02 03 0.33 1 8 VFA5220 2 position double 0.34 1 8 34.2 (1.9) 45 (2.5) 02 03 Body ported Base mounted (With sub-plate) Base mounted VFA5320 -X1 3 position closed center 0.43 1 8 30.6 (1.7) 36 (2) 02 03 VFA5420 -X1 3 position exhaustcenter 0.43 1 8 32.4 (1.8) 41.4 (2.3) 02 03 VFA5520 -X1 3 position pressuretcenter 0.43 1 8 32
-02-11 (S) 3/8 15.9 17.4 23 41.2 26.1 62.5 15.6 53 AS331FS1-03-07 (S) 1/4 3/8 19 11.2 12.9 16.6 20.2 36 21.4 50.1 55.4 54 50.2 48.8 13.3 24.5 19.2 41 AS331FS1-03-09 (S) 5/16 13.2 37.1 23.5 52.2 14.2 42 AS331FS1-03-11 (S) 3/8 15.9 17.4 23 41.2 26.1 54.8 15.6 45 AS431FS1-04-11 (S) 3/8 1/2 24 (23.8) 15.9 17.4 18.8 25.6 46.4 26.1 61.2 64.1 62.5 57 55.4 15.6 26 19 69 AS431FS1-04-13 (S) 1/2 18.5
-02/03 3 (Exhaust center) Rc 1/4: 17 VH302-02/03 VH312-02/03 2 (Position) 1 (P) 3 (R) 2 1 VH3 0.71 1/4, 3/8 VH320-02/03 VH330-02/03 3 (Closed center) Rc 3/8: 20 Exhaust center VH321-02/03 VH331-02/03 3 (Exhaust center) (A) 2 (B) 4 VH322-02/03 VH332-02/03 2 (Position) 12 3 4 VH400-02 to 06 VH410-02 to 06 3 (Closed center) 1 (P) 3 (R) Rc 1/4: 45 4 3 VH401-02 to 06 VH411-02 to 06 3 (Exhaust
KPGH12-03 KPGH12-04 KPQH04-M5 KPQH04-01 KPQH04-02 KPQH06-M5 KPQH06-01 KPQH06-02 KPQH08-01 KPQH08-02 KPQH10-02 KPQH10-03 KPQH12-03 KPQH12-04 25.4 25.9 25.4 22.9 26.3 26.8 25.6 26.1 32.6 30.6 37.6 33 34.1 34.1 8 M5 22.5 10 4 4 4 18 4 10 14 1/8 1/4 19.5 17 7 12 M A L H Connection threads 8 M5 23 12 5 6 10 10 19.5 (R) 12 14 1/8 1/4 1/8 1/4 1/4 3/8 3/8 1/2 19.5 20 26.5 24.5 31.5 26.5 27.5
59.9 14.2 50 AS331FSG1-02-11 (S) 3/8 15.9 17.4 23 41.2 26.1 62.5 15.6 53 AS331FSG1-03-07 (S) 1/4 3/8 19 11.2 12.9 16.6 20.2 36 21.4 50.1 55.4 54 50.2 48.8 13.3 24.5 19.2 41 AS331FSG1-03-09 (S) 5/16 13.2 37.1 23.5 52.2 14.2 42 AS331FSG1-03-11 (S) 3/8 15.9 17.4 23 41.2 26.1 54.8 15.6 45 AS431FSG1-04-11 (S) 3/8 1/2 24 (23.8) 15.9 17.4 18.8 25.6 46.4 26.1 61.2 64.1 62.5 57 55.4 15.6 26 19 69
7) IS1000M-60 IS1000M-50 Y510-(02) 03 IS1000M-20 IS1000M-30 IS1000M-40 IS1000M-50 IS1000M-60 Y610-03 (04) Y610-(03) 04 T-interface Note 6) Note 7) Y110-M5 Y110-M5 VHS20-01 02 VHS50-06 10 3-port valve for residual pressure release Note 7) VHS30-02 03 VHS40-06 01 E200-02 03 02 E300-03 04 E600-06 10 E100-M5 Piping adapter Note 7) E500-06 E100-M5 01 IS1000E-2002 03 02 IS1000E-3003 04 Pressure
7) IS1000M-60 IS1000M-50 Y510-(02) 03 IS1000M-20 IS1000M-30 IS1000M-40 IS1000M-50 IS1000M-60 Y610-03 (04) Y610-(03) 04 T-interface Note 6) Note 7) Y110-M5 Y110-M5 VHS20-01 02 VHS50-06 10 3-port valve for residual pressure release Note 7) VHS30-02 03 VHS40-06 01 E200-02 03 02 E300-03 04 E600-06 10 E100-M5 Piping adapter Note 7) E500-06 E100-M5 01 IS1000E-2002 03 02 IS1000E-3003 04 Pressure
15.2 3/8 45.4 40.4 40.2 35.2 19.8 23 3/8 AS321F-03-10 AS321F-03-11 31.8 43.3 21 59 17.9 10 18.5 21 43.3 31.8 59 3/8" AS321F-03-12 AS421F-04-11 12 3/8" 20.9 22 44.3 32.8 33.6 61 47.9 21 100 17.9 24 28.6 49.2 49.6 42.1 1/2 24.5 56.7 (23.8) AS421F-04-10 AS421F-04-13 10 1/2" 18.5 21 47.9 33.6 35.2 100 49.5 22 101 21.7 24 56.7 49.2 49.6 42.1 24.5 28.6 1/2 (23.8) Note 1) ( ) are the dimensions
Body size 1 2 3 4 M5 standard 1/8, 1/4 standard 3/8 standard 1/2 standard Type M5 Port size Elbow Universal 2 3 M5 x 0.8 R 1/8 R 1/4 R 3/8 R 1/2 Universal type 01 02 03 04 Applicable tubing O.D.
hole) (12) 24.9 43.85 L (Lead wire length) 153.4 3 x 1/4" {1(P), 3(EB), 5(EA) port} 56.3 23 0.5 0.5 EB 3 P 1 EA 5 49.8 02 03 L-type plug connector with cover (LL) 53-SY9120-LLInsulator: Red (+) Insulator: Black () 4.1 16.7 0.3 mm2 L (Lead wire length) 148.3 02 03 Terminal type (TT) 53-SY9120-TTLead wire marking No. 1 (+), No. 2 () 14 0.75 mm2 L (Lead wire length) 165.1 Max. 10 11 Body Ported
03-06 12.8 6 39.3 18.5 63 15.2 41 29.5 17 55 27.8 23 43.8 21.8 48.8 42.8 37.8 5/16" AS321F-02-11 AS321F-03-08 31.8 15.2 41 8 17.9 43.3 21 67 18.5 57 29.5 3/8" 23 20.9 46.5 35.2 40.2 41.5 19 3/8 AS321F-03-07 AS321F-03-10 27.8 43.3 10 13.2 18.5 39.3 17 55 21 59 31.8 1/4" AS321F-03-09 AS321F-03-12 29.5 15.2 41 18.5 57 44.3 12 20.9 46.5 41.5 40.2 35.2 20.9 22 61 32.8 23 5/16" 3/8 AS321F-03-11
Filter Regulator AW30K-03-D 1 pc. Mist Separator AM30-03-D 1 pc. Micro Mist Separator AMD30-03-D 1 pc. Spacer with Bracket Y300T-D 3 pcs.
M5 Port size M5 x 0.8 R 1/8 R 1/4 R 3/8 R 1/2 10-32 UNF NPT 1/8 NPT 1/4 NPT 3/8 NPT 1/2 Type 01 02 03 04 U10/32 N01 N02 N03 N04 Elbow Universal 2 3 Universal type Applicable tubing O.D.