Conforming to ISO Standard Solenoid Valve (with M12 Connector) Series EVS7-6/7-8/7-10 (Size 1) (Size 2) (Size 3) 1

For details, please contact SMC. 3-11-17 18 Manifold Specifications Standard Specifications ISO Size 1 ISO Size 2 ISO Size 1 Maniflod block size VSR/S8-6 VSR/S8-8 VSR/S8-6 Applicable solenoid valve 1 to 10 Number of stations 1/4, 3/8, 1/2, 3/4, 1 A, B port Port size 1/4, 3/8, 1/2, 3/4, 1 P , EA, PB port VV82-P-03/04/06 VV81-P-02/03/04 Individual SUP spacer VV82-R-03/04/06 VV81-R-02/03/04

Modular Design with Uniform Body Style

Series Body size Details 20 30 40 50 60 AF p. 61 AFM AFD p. 71 AR(K) p. 79 AW(K) p. 98 AL p. 89 2 A Modular F.R.L.

0.4

5(R1) 3(R2) 1(P) 5(R1) 3(R2) 1(P) 5(R1) 3(R2) 1(P) 5(R1) None Nil IN side port size OUT side port size DIN rail mounting (For manifold) D 01 02 C6 C8 N7 N9 Rc 1/8 Rc 1/4 6 One-touch fitting 8 One-touch fitting 1/4" One-touch fitting 5/16" One-touch fitting 01 02 C6 C8 N7 N9 Rc 1/8 Rc 1/4 6 One-touch fitting 8 One-touch fitting 1/4" One-touch fitting 5/16" One-touch fitting F With bracket

Series SYJ300/500/700 3 Port Solenoid Valve Rubber Seal

(A) 2 (A) 2 X X 1 (P) 3 (R) 1 (P) 3 (R) 2.2-47

3 Port Solenoid Valve Metal Seal/Rubber Seal Base Mounted VQZ100/200/300

Grommet (G) 34 (7.5) (3) 23.5 C8: One-touch fitting for 8 C10: One-touch fitting for 10 U side 02: Rc(PT)1/4 n A 2 A 2 Manual override 5 4 (L4) 3 (L3) L2 L1 2 P=20 P=20 19.5 1 23 9 Station D side 50 29.5 75.5 300 3.8 (Lead wire) Cover dia 1.6 Cross section 0.34mm2 64 62 11.5 R P 29.5 34 3 1 PE port 2-Rc(PT)3/8 P(SUP) port M5 X 0.8 External pilot port (Only external pilot style (R)) 21 18

3 Port Air Operated Valve Series SYJA300

P and R port Type 40R Applicable solenoid valve SYJ514RSYJ524RHow to Order SS3YJ5 40R 05 01 R port 1/8 X port (External pilot type) Applicable blanking plate assembly SYJ500-10-3A P, R port thread type P port 1/8 R Stations A port size + + + + M5 x 0.8 02 : 20 2 stations : 20 stations P port 1/8 M5 01 M5 x 0.8 Nil Rc G NPT NPTF P A A X F N T 1/8 R P A port M5 x 0.8, 1/8 R port 1/8 Note) For

Series VQ1000/2000 10- 21- 5 Port Solenoid Valve

P. 547 VQ1000/2000 1021S kit (Serial transmission) EX120/123/124 P. 551 VQ2000 1021M kit (Circular connector) P. 557 VQ2000 Sub-plate Single Unit VQ1000/2000 Semi-standard VQ1000/2000 Construction VQ1000/2000 Exploded View of Manifold VQ1000/2000 Manifold Optional Parts VQ1000/2000 Specific Product Precautions P. 560 P. 561 P. 564 P. 567 P. 571 P. 575 102110211021102110211021514 1021Series

Series VQ1000/2000 10- 21- 5 Port Solenoid Valve

P. 547 VQ1000/2000 1021S kit (Serial transmission) EX120/123/124 P. 551 VQ2000 1021M kit (Circular connector) P. 557 VQ2000 Sub-plate Single Unit VQ1000/2000 Semi-standard VQ1000/2000 Construction VQ1000/2000 Exploded View of Manifold VQ1000/2000 Manifold Optional Parts VQ1000/2000 Specific Product Precautions P. 560 P. 561 P. 564 P. 567 P. 571 P. 575 102110211021102110211021514 1021Series

4/5 Port Air Operated Valve Series SYJA3000

Valve mounting direction Stations 02 Single solenoid coil is on opposite side as the A, B port. 2 stations Nil + + A + + + + + : : R P P R R port M5 x 0.8 R port M5 x 0.8 Single solenoid coil is on same side as the A, B port.

Table of Contents

ASR430F-02-08S(-F20) ASR430F-02-10S(-F20) ASR530F-02-06S(-F20) ASR530F-02-08S(-F20) ASR530F-02-10S(-F20) ASR530F-02-12S(-F20) ASR530F-03-06S(-F20) ASR530F-03-08S(-F20) ASR530F-03-10S(-F20) ASR530F-03-12S(-F20) ASR630F-03-10S(-F20) ASR630F-03-12S(-F20) ASR630F-04-10S(-F20) ASR630F-04-12S(-F20) ASQ430F-02-06S(-F20) ASQ430F-02-08S(-F20) ASQ430F-02-10S(-F20) ASQ530F-02-06S(-F20) ASQ530F-02-08S

A

A G E A P P L I C A T I O N S S E E N E X T P A G E Courtesy of Steven Engineering, Inc. !

Vacuum System Peripherals:

(mm ) 0 2 4 M V VX311 -01 1.5 ZCU 0.29 0 2 4 M V VX312 -01 2.2 1 8 0.60 AMJ 0 2 4 M V VX313 -01 3 0.82 Misc. 0 2 4 M V VX311 -02 1.5 0.29 0 2 4 M V VX312 -02 0.60 M V VX3224 -02 2.2 0.64 M V VX3324 -02 0 2 4 M V 0.82 VX313 -02 1 4 Series VX31 Series VX32 Series VX33 M V 3 VX3234 -02 1.1 M V VX3334 -02 M V 4 VX3244 -02 1.6 M V VX3344 -02 M V VX3224 -03 2.2 0.64 M V VX3324 -03 M V VX3234 -03

ATEX Compliant 5 Port Solenoid Valve Series 52-SY

P port on both sides and exhaust from EA/EB port on both side.

44

Swivel Elbow KFG2V Metric Inch P. 324 P. 329 Metric Inch P. 325 P. 331 KDM KB KR KA KQG2 Straight Union KFG2H Female Connector KFG2F KG Metric Inch P. 324 P. 330 Metric Inch P. 326 P. 331 KFG2 KFG2 MS KKA KP LQ Union Tee KFG2T Union Nut KFG2N MQR Metric Inch P. 324 P. 330 Metric Inch P. 326 P. 331 T IDK 321 Stainless Steel 316 Insert Fittings Applicable Tubing: Metric Size, Connection Thread

VZ100/300/500

VZ54-M01 02 01 02 01 02 DIN terminal (D) VZ54-DVFN Applicable cable O.D.: 3.5 to 7 (Lead wire length) 300 300 (Lead wire length) : With light/surge voltage suppressor 4-6-33 34 Series VZ500 Manifold Specifications Flow Characteristics Flow characteristics Port size 1 2 (P A) 2 3 (A R) C [dm3/(sbar)] C [dm3/(sbar)] b Cv b Cv Manifold 1(P), 3(R) port 2(A) port VV3Z5-20-1 VV3Z5-21-1 VV3Z5

SZ3000

External pilot LOCK FREE LOCK FREE Valve stations F: D-sub connector P: Flat ribbon cable connector (26 pins) Note Note Symbol 02 Stations Symbol 02 Stations 2 stations 2 stations Connector mounting position Double wiring specifications Double wiring specifications (1) 12 02 12 02 12 stations 12 stations Symbol D Mounting position 2 stations 2 stations D side Specified layout (2) (Up to 24

V

1 P O R T S I Z E 02 1/4 03 3/8 P R E S S U R E CHARACTERISTICS O P T I O N Nil None B With Bracket G With Gauge PA N E L M O U N T O P T I O N Nil Standard X2 Panel Mount Option Courtesy of Steven Engineering, Inc. !

Direct Operated 2 Port Solenoid Valve For Water, Oil, Steam, Air Series VX21/22/23 1

VX2122-02 VX2-02 VX2322-02 VX2132-02 VX2232-02 VX2332-02 VX2242-02 VX2342-02 VX2-03 VX2322-03 VX2232-03 VX2332-03 VX2242-03 VX2342-03 VX2110-01 VX2120-01 VX2130-01 VX2110-02 VX2120-02 VX2220-02 VX2320-02 VX2130-02 VX2230-02 VX2330-02 VX2240-02 VX2340-02 VX2250-02 VX2350-02 VX2260-02 VX2360-02 VX2220-03 VX2320-03 VX2230-03 VX2330-03 VX2240-03 VX2340-03 VX2250-03 VX2350-03 VX2260-03 VX2360

Series 10-SYJ300/500/700 Rubber Seal 3 Port Solenoid Valve

Manifold type CE-compliant Stations P, R port thread type 20 21 Type 20 Type 21 -+ -+ -+ -+ -+ -+ -+ -+ Nil Rc G NPT NPTF 2 stations : 20 stations Nil 02 : 20 R P 00F 00N 00T R P Q CE-compliant P port 1/4 R port 1/4 P port 1/8 R port 1/8 Note) If there are more than 6 stations for type 20, or more than 9 stations for type 21, supply air to both sides of P port and exhaust air from both sides

ZP

P Applicable tubing O.D.