5 Port Air Operated Valve

single 2 position double 1/4, 3/8, 1/2 [4 (A), 2 (B) port] 1/4, 3/8, 1/2 [4 (A), 2 (B) port] 02 03 04 VFA5244(-P) 02 03 04 VFA5144(-P) 36 (39.5) 27 (31) 36 (39.5) 27 (31) SYA 14 (15.5) 14 (15.5) SYJA 20.5 (24.5) 20.5 (24.5) VZA 92 (100) 1/8 [Pilot port: Lateral (-P)] 1/8 [Pilot port: Lateral (-P)] VFA VFA 82 (87) 51.5 (55.5) 82 (87) 5 (6.5) 51.5 (55.5) VFRA 2B 4A 2B 4A VPA4 42 (45) 52 (58

Table of Contents

Port size Rc1/4, NPT1/4, G1/4(ISO1179) U P DOWN U P DOWN U P DOWN SET SET SET Model with initial display settings of PSI is also available as standard.

NCQ8

Snap rings (2) PC-01 PC-02 PC-03 PC-03 PC-05 Snap rings (2) PC-01 PC-02 PC-03 PC-03 PC-05 Clevis (1) RCS-015 RCS-02 RCS-03 RCS-04 RCS-05 Pin (1) PS-015 PS-02 PS-03 PS-03 PS-05 Clevis (1) RCD-015 RCD-02 RCD-03 RCD-04 RCD-05 Pin (1) PS-015 PS-02 PS-03 PS-03 PS-05 056 (9/16") 075 (3/4") 106 (1-1/16") 150 (1-1/2") 200 (2"), 250 (2-1/2") 056 (9/16") 075 (3/4") 106 (1-1/16") 150 (1-1/2") 200 (2

Hand Valve Series VH 1

-02/03 3 (Exhaust center) Rc 1/4: 17 VH302-02/03 VH312-02/03 2 (Position) 1 (P) 3 (R) 2 1 VH3 0.71 1/4, 3/8 VH320-02/03 VH330-02/03 3 (Closed center) Rc 3/8: 20 Exhaust center VH321-02/03 VH331-02/03 3 (Exhaust center) (A) 2 (B) 4 VH322-02/03 VH332-02/03 2 (Position) 12 3 4 VH400-02 to 06 VH410-02 to 06 3 (Closed center) 1 (P) 3 (R) Rc 1/4: 45 4 3 VH401-02 to 06 VH411-02 to 06 3 (Exhaust

Hand Valve Series VH

3 (R) 4 3 3 (Exhaust center) VH301-02, 03 VH311-02, 03 Rc1/4: 17(0.9) Exhaust center 2 (Position) VH302-02, 03 VH312-02, 03 2 1 (A) 2 (B) 4 VH3 1/4, 3/8 0.71 3 (Closed center) VH320-02, 03 VH330-02, 03 Rc3/8: 20(1.1) 1 (P) 3 (R) 3 (Exhaust center) VH321-02, 03 VH331-02, 03 2 (Position) VH322-02, 03 VH332-02, 03 12 3 4 3 (Closed center) VH400-02 to 06 VH410-02 to 06 Rc1/4: 45(2.5) 4 3 3 (Exhaust

LEC-OM02704CN

1 1 DC (FR-BEL) P 2 LEC-MR-J3BAT P C 1. 3.

5 Port Solenoid Valve SY Series

Combination of different fittings is possible. + + + + P EB EA Type 20P SY3 20 SY5 20 SY7 20 Bar stock type Flat ribbon cable P. 47 Body ported Base mounted A 26 pins MIL connector permits One-touch wiring of external cables in a bundle. P EB EA In common Type 23 Stacking type Individual wiring SY9 20 + + + + P. 43 EA P EB Manifold stations can be increased.

CQ2

A type mounting bracket part No.YA-03 Joint YU-03 Joint Part No. Applicable mounting bracket Bore size (mm) Weight (g) Joint part No. B bracket A bracket YB-03 YU-03 YA-03 32, 40 25 YB-05 YU-05 YA-05 50, 63 40 Bore size (mm) YB-08 YU-08 YA-08 80 90 Part No.

Clean One-touch Fittings and Tubing Series KP/KPQ/KPG

D1 M M A L1 D1 D2 L2 H Connection threads Male Branch: KPQU, KPGU (M5) Effective area mm D Model L TPH TPS A H (width across flats) (M5) 2-Applicable tubing Note1) Connection threads R Applicable tubing O.D. mm Weight g M P P M5 1/8 1/4 M5 1/8 1/4 1/8 1/4 1/4 3/8 3/8 1/2 KPQU04-M5 KPQU04-01 KPQU04-02 KPQU06-M5 KPQU06-01 KPQU06-02 KPQU08-01 KPQU08-02 KPQU10-02 KPQU10-03 KPQU12-03 KPQU12-04

KP/KPQ/KPG

Male Branch "Y": KPU Effective area mm Note 1) D Model L TPH TPS A H (width across flats) P Connection threads R Applicable tubing O.D. mm Weight g 2-Applicable tubing M P D KPU04-01 KPU04-02 KPU06-01 KPU06-02 KPU08-01 KPU08-02 KPU10-02 KPU10-03 KPU12-03 KPU12-04 45.4 49.4 49.6 52.4 56.7 61.3 64.5 67.5 69.7 72.7 1/8 1/4 1/8 1/4 1/8 1/4 1/4 3/8 3/8 1/2 12 41.5 43.5 45.5 46.5 52.5 55.5 59 61.5

SYJ3000/5000/7000

SUP spacer assembly Body ported A, B port P port -+ -+ R R P R port P Base mounted P port Type 32P Individual EXH spacer assembly R port A, B port R2 R1 -+ -+ R port R P A, B port Mixed mounting of 3 port valves and 4, 5 port valves P port 3 port valve 4, 5 port valve Interface regulator -+ -+ A B R port R P A, B port P port -+ -+ A B R P -+ -+ A B B R port R P For detailed specifications

VQ5000

R1 R2 R2 R1 P 27.5 27.5 41 41 Rc 1/8 PE port Rc 1/8 External pilot port Rc 1/8 PE port Rc 1/8 External pilot port 27.5 27.5 41 41 5-Rc 1/2 1(P), 4(A), 2(B), 5(R1), 3(R2) port 5-Rc 1/2 1(P), 4(A), 2(B), 5(R1), 3(R2) port Numbers inside ( ) are for metal seal 3 position type 2-6-7 8 Series VQ5000 Base Mounted Plug-in Unit How to Order Manifold VV5Q 5 1 08 03 F U1 Option Option None Exhaust

3 Port Air Operated Valve

Base mounted Body ported 2(A) 1/4 3/8 P. 1558 8.9 (P)1 3(R) VPA700 For vacuum N.C.

Series IDG

and 50HM are 03 only.

IDG

P P1 or Step 2 Step 3 Model selection based on corrected outlet flow rate HA Review operating conditions or increase size. YES In the case of IDG30 and IDG30M (with the element in the initial state), P P1, therefore proceed to Step 7 .

Modular Type Filter Regulator Series AW

Contact P/A regarding the bowl assembly supply for PSI and F unit specifications.

3 Port Air Operated Valve Series SYJA300 1

-03 Base specifications VR 42 41 Individual exhaust Combination symbol Common exhaust Piping 2A Side Side Passage VH Air supply port (P port) is common.

VFRA3000

, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com (P , A, B port) (EA, EB port) (P , A, B port) (EA, EB port) 03 04 03 04 03 04 3 position closed center: VFRA43113 position exhaust center: VFRA44113 position pressure center: VFRA4511(Pilot port) Main valve manual override (Direct manual) (Mounting hole) (Pilot port

Series H, DL, L, LL Self-align Fittings

Female union Plug P. 104 DHF Use to pipe from male threaded portion such as pressure gauge. P. 106 DP Use to plug unused fitting Branch tee P. 105 DT Use to branch line from female thread of both sides 90 direction. Swivel elbow P. 106 L Use to pipe at right angle to female thread portion. Swiveled at any direction.

High Purity Fluoropolymer

Ltd. 1-16-4 Shimbashi, Minato-ku, Tokyo 105-8659 JAPAN Tel: 03-3502-2740 Fax: 03-3508-2480 Specifications are subject to change without prior notice and any obligation on the part of the manufacturer. Printed in Japan. 1st printing June, 1999 D-SMC.L.A. P-100 (YG) 4th printing April, 2002 D-DN P-80 (DN)