Modular Type Air Filters Series AF

AF10 AF20 AF30 AF40 AF40-06 AF50 AF60 No.

5 Port Solenoid Valve Series SV1000/2000/3000/4000

Connector for unit (Plug) 6 y t y t EX600-DXlB EX600-DYlB EX600-DXlCl q w q w e q w er e y t y t y t EX600-DXlD EX600-DXlE EX600-DYlE EX600-DMlE EX600-DXlF EX600-DYlF EX600-DMlF Analog Unit q w e q w e No.

5 Port Solenoid Valve Series VQZ1000/2000/3000

AN120-M5 T0604 x 1m AS3001F-06 INA-25-46 T1075 x 1m AS4001F-10 AN101-01 T0604 x 1 m AS3001F-06 AN110-01 T0604 x 1 m AS3001F-06 VQZ1151-01 VQZ1121-C6 T0806 x 1 m AS3001F-08 VQZ2151-02 VQZ2121-C6 AN200-02 T1075 x 1 m AS4001F-10 AN300-03 T0604 x 1 m AS3001F-06 T1209 x 1 m AS4001F-12 VQZ3121-C6 VQZ3151-03 909 Series VQZ Model Selection Sonic conductance C [dm3/(sbar)] Type of actuation Voltage

Series 10-SYJ3000/5000/7000 Rubber Seal 4/5 Port Solenoid Valve

Load factor: ((Load mass x 9.8)/Theoretical force) x 100% Conditions Series CJ2 Series CM2 6 x 1 m AS3302F-06 12 x 1 m AS4002F-12 AN20-02 AS2302F-06 AN110-01 Series MB/CA2 Series CJ2 Series CM2 Series MB/CA2 Body ported Tubing diameter x Length Speed controller Silencer Base mounted Tubing diameter x Length Speed controller Silencer AN20-02 AN3301F-06 AS1302F-06 6 x 1 m AS3002F-06 10-SYJ7123

VQZ1000/2000/3000

Rc 1/8 1(P) port L plug connector (L): VQZ2220 1(R)-L-C4/C6/M5 DIN terminal (Y): VQZ2220 1(R)-Y-C4/C6/M5 Indicator light 300 136.5 68 (Lead wire length) Pg.7 31 <36> 142.5 MAX.10 71.5 Applicable cable O.D.

Series VQ Metal Seal/Rubber Seal Body Ported

Kit (D-sub connector) 15 pin F Kit (Flat cable connector) 10 pin, 16 pin, 20 pin P How to Order Manifold How to Order Manifold 06 FSA D VV5Q14 06 P SC VV5Q14 D Ex.) Ex.)

AW

AW10 AW20(K) AW30(K) AW40(K) AW60(K) AR40(K)-06 No.

Series 10-SY3000/5000/7000/9000 5 Port Solenoid Valve

Power saving circuit is not available for D, Y, DO, YO or W types.

Modular Type Regulators Series AR

Example) AR30K-03BE-1NR q w e r t y Made to Order (Refer to pages 354 and 355 for details.)

4/5 Port Solenoid Valve

Load factor: ( (Load weight x 9.8) /Theoretical force) x 100% Conditions Series CJ2 Series CM2 6 x 1 m AS3301F-06 12 x 1 m AS4001F-12 AN200-02 AS2301F-06 AN110-01 Series MB/CA2 Series CJ2 Series CM2 Series MB/CA2 Body ported Tubing bore x Length Speed controller Silencer Base mounted Tubing bore x Length Speed controller Silencer AN200-02 AN3301F-06 AS1301F-06 6 x 1 m AS3001F-06 SYJ7120-01

90

Note 8) For y (connector type) of the single unit, select L, L, or W.

Modular Type Air Filter Series AF

1 Drain q r e w t i u y o !0 !

High Purity Chemical Valve

Symbol A R P 4 Metric sizes 03 04 06 3 4 6 Valve type N.C. 0 N.C.

•

L Y 0 __D . .

SQ1000/2000

list e q w e w y No.

A

04C Y-05C Y-05C Y-08C Y-10C Rear off-set mounting bracket CA1-B04 CA1-B05 CA1-B06 CA1-B08 CA1-B10 ACCESSORIES TIE ROD MOUNTS Floating joint JA40-14-150 JA 6318150 JA 6318150 JA8022150 JA10026150 Piston rod nut NT-04 NT-05 NT-05 NT-08 NT-10 BT-03 (32/40) BT-04 (50/63) BT-06 (80/100) Seal kit (NBR) CAIN40A-PS CAIN50A-PS CAIN63A-PS CAIN80A-PS CAIN100-PS ACCESSORIES AUTO SWITCHES Note: Pre-wired

Compact Manifold Regulator

t y u A B N 1.

Prevents Micro-Bubbles

LVQ Metric sizes 4 04 06 4 6 N.C.

Soft Start-up Valve

)-A AVA5000-(F,N)06~10(B,G,S)(-R,Z)-A AVL2000-(F,N)02(B,G,S)-(1~6)(D,Y,DO,YO,WO)(Z)(-R,Z)-A AVL3000-(F,N)02(B,G,S)-(1~6)(D,Y,DO,YO,WO)(Z)(-R,Z)-A AVL4000-(F,N)02(B,G,S)-(1~6)(D,Y,DO,YO,WO)(Z)(-R,Z)-A AVL5000-(F,N)06~10(B,G,S)-(1~6)(D,Y,DO,YO,WO)(Z)(-R,Z)-A Contents Page 1.

Basic type / Direct mount type Series CY3B/CY3R

Z m1 x g x Y m2 x g x Y M2 y z z m4 x g x Y m3 x g x X Y M3 m4 x g g: Gravitational acceleration Dynamic Moment z Mounting orientation Horizontal Ceiling Wall Vertical M1 x a x mn x g 1.4 100 Dynamic load FE 1 3 Dynamic moment a x FE x Z M1E a Dynamic moment M2E is not generated.