0.01

(C04) C08 (C06) 02 (C06) 02 (C08) Port size w C10 (C08) 02 (C08) C12 (C10) 02 (C10) 02 (C12) Model Port size q C04 (C06) C04 (02) C06 (C08) C06 (02) C08 (02) Model Port size q C08 (C10) C08 (02) C10 (C12) C10 (02) C12 (02) SFD100SFD200326 Related Products Mist Separator AM Series Refer to pages 223 to 230 for details.

0.4

Note 2) : Stations 02 to 24 Note 3) For S/P/F/L kits Replacement Parts No. Part no. Description Material Quantity VVQ1000-80A-1 VVQ1000-80A-2 VVQ1000-80A-3 VVQ1000-80A-4 o !0 !1 !

Speed Controller with Indicator

In addition, the universal type is only available with 180 setting. 5 Speed Controller with Indicator Series AS-FS Needle Valve/Flow Rate Characteristics AS101FS-M5, AS111FS-M5 AS201FS-01, AS211FS-01 AS201FS-02, AS211FS-02 600 300 AS-FS AS-FSG Uni-AS-FS Inlet pressure: 0.5 MPa Inlet pressure: 0.5 MPa Inlet pressure: 0.5 MPa 100 500 Flow rate [L/min (ANR)] Flow rate [L/min (ANR)] Flow rate

VEX1

Z With indicator light and surge voltage suppressor (Except for grommet) Body size T NPTF F G(PF) N NPT 22 1 8 1 4 Without subplate 02 03 Electrical entry Symbol Electrical entry 1 100V AC (50/60Hz) Voltage (Only solenoids) G Grommet, 300mm lead wire 1 4 3 8 2 200V AC (50/60Hz) 42 H Grommet, 600mm lead wire L plug connector, with lead wire L plug connector, without lead wire L plug connector

Stainless Steel One-touch Fittings Series KG

A M Weight (g) M5 D L P Nylon Urethane KGU04-01 KGU04-M5 M5 0.8 4 11 20 13 12 22 35 10.4 36 38 40 2.2 2.2 39.5 42 46 11 16 1 8 4 10.4 4.2 4.2 1 4 KGU04-02 14 KGU06-M5 KGU06-01 KGU06-02 KGU06-03 KGU08-01 2.2 2.2 M5 0.8 39 41.5 43 44.5 48.5 49.5 50 55 55.5 57 42.5 45.5 49 51 13 1 8 1 4 3 8 1 8 17 12.8 6 12.8 13.4 13.4 14 17 52.5 55.5 56.5 25.6 17.7 16 24 36 17 15.2 1 4 KGU08-02 8 18.5 15.2

Series VQ1000/2000 10- 21- 5 Port Solenoid Valve

other than above For P kit For J kit For L kit For S kit Note) The !

Series VQ1000/2000 10- 21- 5 Port Solenoid Valve

other than above For P kit For J kit For L kit For S kit Note) The !

Speed Controller Adjustable by Flat Head Screwdriver with One-touch Fitting Series AS


1F-D Elbow Type/Universal Type 1

01, AS2211FG-01 AS2201FG-02, AS2211FG-02 Inlet pressure 0.5 MPa Inlet pressure 0.5 MPa Inlet pressure 0.5 MPa Flow rate (l/min (ANR)) Flow rate (l/min (ANR)) Flow rate (l/min (ANR)) Effective area (mm2) Effective area (mm2) Effective area (mm2) Number of needle rotations Number of needle rotations Number of needle rotations AS4201FG, AS4211FG AS3201FG, AS3211FG Inlet pressure 0.5 MPa Inlet

Rubber seal 5 Port Solenoid Valve Series SYJ7000

8.5 34 63.8 13.8 129.6 [131.8] 1/4, 1/8 (P, A, B port) (Light/surge voltage suppressor) 80 [87] 57.5 [64.5] + 42.1 36.5 25.5 20 12 22 22 11.5 34 18 43.6 1/4 (R1, R2 port) 31.5 63 L plug connector (L): SYJ7 40-L3 4 5 01 02 M plug connector (M): SYJ7 40-M3 4 5 01 02 DIN terminal (D): SYJ7 40-D3 4 5 01 02 M8 connector (W0): SYJ7 40-W03 4 5 01 02 Applicable cable O.D. 3.5 to 7 141.8 [146.2]

A

P O R T S PT Ports XC18 NPT Ports (25~40 Only) A L L O W A B L E M O M E N T A N D M A X I M U M A L L O W A B L E L O A D H O W T O O R D E R M Y 1 M R O D L E S S C Y L I N D E R MY1M G M O M E N T (N M) A L L O W A B L E L O A D (N) B O R E S I Z E 16 16mm 20 20mm 25 25mm 32 32mm 40 40mm 50 50mm 63 63mm Local Production Available N O O F S W I T C H E S ...2 Pieces S ...1 Piece

VZ100/300/500

hole) Manual override (Non-locking) VZ Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com VT VP VG (Lead wire length) VP G: 300 mm H: 600 mm S070 VQ VKF (PE port) VQZ (P , A, R port) VZ VS L plug connector (L) VZ54-LM plug connector (M) VZ54-M01 02 01 02 01 02 DIN terminal

Series H, DL, L, LL Self-align Fittings

Thread Rc(PT) L1 L2 M 1 4 1 4 3 8 1 4 1 4 1 4 4 DHF04-02 27 DHF06-02 17 17 10 4 15 30.3 30.8 16 16.5 28 6 11 16 12 DHF06-03 31 19 32.8 18.5 8 DHF08-02 29.8 30 16 20 14 17 15.5 10 12 DHF10-02 30.8 37 DHF12-02 30.8 17 17 40 17 19 34 51 17 17 16.5 16.5 104 Series H, DL, L, LL Self-align Fittings Branch tee: DT Thread R(PT) Part No. Effective orifice (mm2) Applicable tube O.D.

Speed Controller with One-touch Fitting Stainless Steel Series Elbow Type/Universal Type AS-FG Series

AK AS121FG AS131FG AS221FG-01 AS231FG-01 AS221FG-02 AS231FG-02 VCHC Inlet pressure: 0.5 MPa Inlet pressure: 0.5 MPa Inlet pressure: 0.5 MPa ASR ASQ 07, 08, 09, 10, 11 05, 06, 07, 08, 09, 10 Flow rate (L/min (ANR)) Flow rate (L/min (ANR)) Flow rate (L/min (ANR)) 01, 03, 04 05, 06 03, 04 Number of needle rotations Number of needle rotations Number of needle rotations AS321FG AS331FG AS421FG

HEC-OM-S008

sensor No 05 33 33 33 0D 02 33 33 30 30 32 03 3F 38 0D Answer 30.02 deg.C 34 Reading alarm status No 05 34 33 34 0D 02 34 30 38 30 03 3C 3C 0D Answer ERR11 Reading offset No 05 36 33 36 0D 02 36 2D 31 35 32 03 3F 3B 0D Answer -1.52 deg.C 36 Offset setting (without writing FRAM) No 02 36 30 31 35 30 03 3F3C 0D 06 0D Set at +1.50 deg.C 37 Temperature setting (with writing FRAM) No 02 37 32

V

O R D E R VA C U U M R E G U L AT O R S E R I E S T203 T203 ACCESSORIES T203 Bracket 230236 Gauge (Scale in mmHg) GZ46-A-02 1 P O R T S I Z E 02 1/4 03 3/8 P R E S S U R E CHARACTERISTICS O P T I O N Nil None B With Bracket G With Gauge PA N E L M O U N T O P T I O N Nil Standard X2 Panel Mount Option Courtesy of Steven Engineering, Inc. !

Speed Controller with One-touch Fitting Stainless Steel Series Elbow Type/Universal Type Series AS-FG

ASS AS121FG AS131FG AS221FG-01 AS231FG-01 AS221FG-02 AS231FG-02 ASR ASQ Inlet pressure: 0.5 MPa Inlet pressure: 0.5 MPa Inlet pressure: 0.5 MPa 07, 08, 09, 10, 11 05, 06, 07, 08, 09, 10 Flow rate (L/min (ANR)) Flow rate (L/min (ANR)) Flow rate (L/min (ANR)) 01, 03, 04 05, 06 03, 04 Number of needle rotations Number of needle rotations Number of needle rotations AS321FG AS331FG AS421FG AS431FG

Prevents Micro-Bubbles

A (OUT) port A A LLH2A-03-02-C 1 set 1 set Manifold base part no. Non-locking Locking LVH20A-02-C 2 sets 2 sets Valve part no. (stations 1 & 2) LVH20AL-02-C 1 set 1 set Valve part no.

5 Port Solenoid Valve SY Series

AS3001F-08 AN101-01 AN101-01 T1075 x 1 m T0604 x 1 m T0604 x 1 m T1209 x 1 m T1075 x 1 m AS4001F-10 SY7120-02 SY7140-03 AS3001F-06 AS4001F-10 AS3001F-06 AN110-01 AN200-02 T0604 x 1 m T1075 x 1 m T1209 x 1 m T0604 x 1 m T1075 x 1 m T1209 x 1 m AS3001F-06 AS4001F-10 AS4001F-12 SY9120-03 SY9140-04 AS3001F-06 AS4001F-10 AS4001F-12 AN202-02 AN200-02 AN200-02 Conditions [When using SGP (steel

ZP

ZF Symbol S Pad dia. 02 to 16 L 20 to 50 ZP ZCU With buffer AMJ Misc.

ASR

ASR430F-02-08S(-F20) ASR430F-02-10S(-F20) ASR530F-02-06S(-F20) ASR530F-02-08S(-F20) ASR530F-02-10S(-F20) ASR530F-02-12S(-F20) ASR530F-03-06S(-F20) ASR530F-03-08S(-F20) ASR530F-03-10S(-F20) ASR530F-03-12S(-F20) ASR630F-03-10S(-F20) ASR630F-03-12S(-F20) ASR630F-04-10S(-F20) ASR630F-04-12S(-F20) ASQ430F-02-06S(-F20) ASQ430F-02-08S(-F20) ASQ430F-02-10S(-F20) ASQ530F-02-06S(-F20) ASQ530F-02-08S