Microspeed Cylinder: Double Acting/Single Rod Series CQ2X ø 32, ø 40, ø 50, ø 63, ø 80, ø 100 Dimensions and auto switch details are equivalent to those of the standard double acting single rod cylinder.

Grease pack GR-L-005 (5g) GR-L-010 (10g) GR-L-150 (150g) 8

Series 10/11 -CQSX, -CQ2X Microspeed Cylinder for Clean Room Series 10-, 11-

Grease pack GR-X-005 (5g) Caution 1. Be careful of the snap ring springing out.

3 Way, 3 Port NVF110 Series Direct Solenoid Operated

B Locking ' Special Order option t Consult factory for availability NVF 1100-ODO{IT (drx ) Lamp and Sorga Protec-tion Z rv/Lamp/Surge Protection S dsurqe Protection Onlv L.mp and S dsurge Only BRACKET (Sutfix "F') .[ otMEr{stoNs A B c D E F 1.35 (34.41 1.34 (34.11 0.61 115.4) 0.83 Q 1 t 1.76 1.77 (44.9) Millamte.s in Parenthe$s rxfENsroNs A B c D E F G H J K It N o P o R 64.7) 0.83 (21) l.t

lVFl 10

B Locking ' Special Order option t Consult factory for availability NVF 1100-ODO{IT (drx ) Lamp and Sorga Protec-tion Z rv/Lamp/Surge Protection S dsurqe Protection Onlv L.mp and S dsurge Only BRACKET (Sutfix "F') .[ otMEr{stoNs A B c D E F 1.35 (34.41 1.34 (34.11 0.61 115.4) 0.83 Q 1 t 1.76 1.77 (44.9) Millamte.s in Parenthe$s rxfENsroNs A B c D E F G H J K It N o P o R 64.7) 0.83 (21) l.t

Super Compact Direct Acting 2/3 Port Solenoid Valve Series S070

Flow characteristics Flow characteristics Max. operating pressure C[dm3/(sbar)] Power consumption b Cv 0.5MPa 0.27 0.042 0.011 0.5WDC 0.3MPa 0.28 0.083 0.021 0.3MPa 0.27 0.042 0.011 0.35WDC 0.1MPa 0.28 0.083 0.021 0.3MPa 0.27 0.021 0.006 0.1WDC with power saving circuit(Holding) 0.35WDC(Inrush) 0.1MPa 0.28 0.042 0.011

Microspeed Cylinder: Double Acting/Single Rod Series CM2X ø 20, ø 25, ø 32, ø 40 Dimensions and auto switch details are equivalent to those of the standard double acting single rod cylinder.

Grease pack GR-L-005 (5g) GR-L-010 (10g) GR-L-150 (150g) Note With pins With pins Note 1) Mounting nuts are not included with the integrated clevis, single clevis, and double clevis types. Note 2) Trunnion nuts are included with the front trunnion and rear trunnion types.

Electro-Pneumatic Proportional Valve

0.64, 08: 0.8 Model PVQ30 16: 1.6, 23: 2.3, 40: 4.0 Orifice (mm) Fluid Ambient and fluid temperature Port size Max. operating pressure (MPa) Hysteresis Repeatability Proof pressure Rated voltage Power consumption Coil insulation Air, inert gas 0 to +50oC M5 03: 0.7, 04: 0.45, 06: 0.2, 08: 0.1 Rc 1/8 16: 0.7, 23: 0.35, 40: 0.12 10% or less 3% or less 1MPa 12, 24VDC 0 to 2W 0 to 4W Class B

2

For AC10-A For AC20-B For AC25-B For AC30-B For AC40-B For AC40-06-B For AC50-B For AC55-B For AC60-B For AC10A-A For AC20A-B For AC30A-B For AC40A-B For AC40A-06-B For AC50A-B For AC60A-B For AC10B-A For AC20B-B For AC25B-B For AC30B-B For AC40B-B For AC40B-06-B For AC50B-B For AC55B-B For AC60B-B For AC20C-B For AC25C-B For AC30C-B For AC40C-B For AC40C-06-B For AC20D-B For AC30D-B

7

flow ratio to be b = 0.3.

Air Slide Table

the MXQ6(A, B).

2/3 Port Valve

Description B VNH1 VNH2 VNH3 VNH4 VNH1-16 VNH2-16 VNH3-16 VNH4-16 Bracket (with bolt and washer) 4.2-30 VNH Specifications 3 port valve 2 port valve A B A B VNH311 20A A B VNH411 25A A B VNH113 10A A B VNH213 15A A B VNH313 20A A B VNH413 25A A B VNH133 10A A B VNH233 15A A B VNH333 20A A B VNH433 25A A B VNH111 10A VNH211 15A Model Operating fluid pressure Fluid Operation 0 to 7.0MPa 0 to

42

Connector location on U side (FU) 3.5 163 10.7 47 106 71.7 9 9 U side 27 Manual override n X 12 12 2 B 4 A 8 2 B 4 A A A B A B A B A B A B A 7 SMC SMC SMC SMC SMC SMC SMC A A A A A A A B B B 2 B 4 A Indicator light 6 2 B 4 A 5 L2 L1 2 B 4 A 4 B B 2 B 4 A 3 2 B 4 A 2 P = 25 2 B 4 A 1 50.5 44 X Stations 38 27 Connector location on D side (FD) 11.7 16.2 139.9 (Single) 43.2 49.7 D side 148.9

SQ1000/2000

A Black 8A 6B Station 4 Black 6A Station 3 SOL. B White 7A 7B Station 3 White 7A SOL. A Black 6A 8B Station 3 Black Station 4 8A SOL. B White 5A 9B Station 2 Black 9A SOL. A Black 4A 10B Station 6 Black Station 1 Black 10A Station 5 SOL. B White 3A SOL.

Table of Contents

AL-31S JIS B 2401G35 5 pcs. u O-ring NBR JIS B 2401G35 1 pc. JIS B 2401G35 1 pc. JIS B 2401G35 3 pcs.

Vacuum System Peripherals:

R L B 01 1 Nil F G Rc 1 8 ... ...

Proposals for Energy Saving

No. of tubes Color Black (B) Black (B) Black (B) Black (B) Black (B) Black (B) Black (B) Max. operating length m Model O.D. TCU0425B-1 TCU0425B-2 TCU0425B-3 TCU0604B-1 TCU0604B-2 TCU0604B-3 TCU0805B-1 1 1.5 4 2.5 2 1 3 2 1 6 4 1.5 2 1 3 8 5 2 1 Best Pneumatics Best Pneumatics Refer to page 2.5-3 of No. 4 for details.

Direct Operated 2 Port Solenoid Valve For Water, Oil, Steam, Air Series VX21/22/23 1

Bracket Nil B None With bracket Refer to the table (4) if a bracket is ordered separately.

Compact 5-Port Solenoid Valve

68.6 D D B 2 S B 2 B 2 B 2 B 2 1 P P 1 A 4 A 4 A 4 A 4 A 4 * These figures show the JJ5SY3-10F2-05DR-C8.

Series VCS

A H 2-P Port size 2-P A B H 2-M Port size 2-M Thread depth N L L K K Conduit terminal: T F (Q) 34 25 U R C G (PF) 1/2 E B A H D 2-P Port size (S) 2-M L K N.C.

IDUS/IDFS

ES30-8A. Similar updating for other IDF/IDU models is scheduled to follow shortly. Model Selection 1 Obtain the correction factor for the temperature from data A or B and the correction factor for the air pressure from data C. Temperature Data A or B = Series IDUS: Data A Series IDFS: Data B Air pressure Data C = 3 2 Calculate corrected air flow by using A or B and C.