Table of Contents

m Dd9 L (Drill through) 3 x 18 l 4 x 25 l 4 x 35 l 4 x 36 l 0.040 0.076 CD-M03 CD-M05 CD-M08 CDP-7A 10 14 22 25 20, 25 32, 40 50, 63 80 3 4 4 4 4 4.5 5 5 36 51 72 78 44 60 82 88 0.050 0.093 0.065 0.117 0.065 0.117 l m L Note) When using cotter pins, flat washers are used together.

Series VQ Metal Seal/Rubber Seal Body Ported

L=12.5 X n+10.5 L dimension 1 2 3 4 5 6 7 8 9 10 23 35.5 48 60.5 73 85.5 98 110.5 123 135.5 No. L 11 12 13 14 15 16 17 18 19 20 148 160.5 173 185.5 198 210.5 223 235.5 248 260.5 No. L 21 22 23 24 25 26 27 28 29 30 273 285.5 298 310.5 323 335.5 348 360.5 373 385.5 No. L 31 32 33 34 35 36 37 38 39 40 398 410.5 423 435.5 448 460.5 473 485.5 498 510.5 No.

5 Port Solenoid Valve/Body Ported, Cassette Type Manifold, Series SY3000/5000/7000

VVQ2000-51A-C8 VVQ2000-51A-C10 Note) When replacing a pilot valve assembly only, note that SY114 (G, H, L, M) cannot replace SY115 (DIN terminal) or vice versa.

CJ2

Dd9 d L m t CJ2 l Applicable bore (mm) Applicable snap ring Part no.

Series SYJ300/500/700 3 Port Solenoid Valve Rubber Seal

A A n-One-touch fitting (A port) (Pitch) P=19 21 C6: Applicable tube T0604 C8: Applicable tube T0806 Rc (PT) 1/8 L plug connector (L) M plug connector (M) (Non-locking) Manual override (P/R port) 4-Rc (PT)1/4 69.5 [76] 69.5 [76] 57.1 50.5 35 8.5 63.5 63.5 63.5 4-Rc (PT)1/4 (P/R port) 14 1 21.5 21.5 A A 14 1 9.5 C6: MAX. 6 C8: MAX. 6.5 9.5 (Pitch) n-Rc (PT)1/8 (A port) P=19 21 22.5 22.5 43

2-Color Display ® Digital Flow Switch *1 Applicable fluid Dry air, N2, Ar, CO2

/721-C8(-L) Rear ported !

A

P O R T S PT Ports XC18 NPT Ports (25~40 Only) A L L O W A B L E M O M E N T A N D M A X I M U M A L L O W A B L E L O A D H O W T O O R D E R M Y 1 M R O D L E S S C Y L I N D E R MY1M G M O M E N T (N M) A L L O W A B L E L O A D (N) B O R E S I Z E 16 16mm 20 20mm 25 25mm 32 32mm 40 40mm 50 50mm 63 63mm Local Production Available N O O F S W I T C H E S ...2 Pieces S ...1 Piece

3 Port Solenoid Valve Metal Seal/Rubber Seal, Body Ported Series VQZ100/200/300 1

P 1 3 R 1.5 A Rc 1/8 3(R) port Rc 1/4 1(P) port 2-3 die-cast hole For manifold gasket positioning DIN terminal (Y): VQZ32(R)-Y-C6/C8/C10/02 L plug connector (L): VQZ32(R)-L-C6/C8/C10/02 89 300 (Lead wire length) Indicator light 30.5 <35.5> 92.5 Max. 10 Pg.7 Applicable cable O.D. 3.5 to 7 Indicator light Cover diameter 1.5 Cross section 0.23 mm2 < >: AC 61 53.5 M plug connector (M): VQZ32(

3 Port Solenoid Valve Metal Seal/Rubber Seal Body Ported VQZ100/200/300

10.5 Foot bracket 15.4 16.7 PE port P 1 3 R 1.5 A Rc(PT)1/8 R port Rc(PT)1/4 P port 2-3 Die cast hole For manifold gasket positioning DIN terminal (Y): VQZ3l2(R)-lYl-C6, C8, C10, 02 L plug connector (L): VQZ3l2(R)-lLl-C6, C8, C10, 02 88.5 89.5 300 (Lead wire) Indicator light 31.5 35 92.5 MAX.10 Pg.7 Applicable cord O.D.

CM2

Material: Carbon steel Dd9 d L Part No. m t l 0.040 0.076 CD-S02 CD-S03 20/25 32/40 8 C8 type for pivot 7.6 24.5 19.5 1.6 0.9 0.040 0.076 10 C10 type for pivot 9.6 34 29 1.35 1.15 Applicable bore size 20 25/32 40 Part No.

PFxx-OMJ0005CN

min 0.525 L/min 150 L/min 2100 L/min () CO2 0.25 L/min 0.512.5 L/min 125 L/min 250 L/min N2Ar 0.210.5 L/min 1 0.526.3 L/min 152.5 L/min 2105 L/min 2 CO2 0.25.2 L/min 0.513.1 L/min 126.2 L/min 252 L/min N2Ar 010.5 L/min 1 026.3 L/min 052.5 L/min 0105 L/min 2 CO2 05.2 L/min 013.1 L/min 026.2 L/min 052 L/min / 0.01 L/min 0.1 L/min 0.1 L/min 0.1 L/min / 3 09 L / 1 L 0.1 L/Pulse 0.1 L/

VZS

Porting specifications Port size A, B Stations Applicable valve model Base model Wiring A, B port P , EA, EB 2 to 16 stations Plug-in type VV5ZS3-51F VV5ZS3-51G With D-sub connector With attachment plug lead wire Rc , VZS350-FZ 1 8 1 4 Side C6 Rc 1 4 Grommet L plug connector M plug connector K plug connector G L M KZ Non plug-in type VV5ZS3-51 2 to 24 stations C8 VZS350VK With attachment

4/5 Port Air Operated Valve Series SYJA3000

0.51 0.50 0.38 0.46 2.3 2.0 2.1 2.3 2.1 2.1 2.5 2.2 2.2 2.2 0.26 0.25 0.25 0.26 0.24 0.20 0.23 0.30 0.23 0.26 0.55 0.49 0.51 0.54 0.50 0.50 0.59 0.55 0.52 0.53 1/8 1/8 1/8 1/4 1/4 1/4 1/4 1/4 1/4 1/4 1/8 C6 C8 1/8 C6 C8 1/8 1/8 C6 C8 SS5YJ7-20 Body ported SYJ72 for internal pilot SS5YJ7-21 SS5YJ7-40 SS5YJ7-41 SS5YJ7-42-C6 SS5YJ7-42-C8 Base mounted SYJ74 for internal pilot Note) Value at

5 Port Solenoid Valve Metal Seal/Rubber Seal Series SQ1000/2000 1

(Except L kit.) Note 3) For specifying two or more options, enter them alphabetically.

MGG

Hs Approx. 11.5 16 Auto switch D-C7, C8 D-H7 A 12 Approx. Hs Approx. 14.5 B 24.5 Auto switch D-B5, B6 D-G5, K5 A B 8.5 Approx.

Series 10-SQ1000 5 Port Solenoid Valve Plug-in Unit

L RUN SERIAL UNIT L ERR.

ATEX Compliant 5 Port Solenoid Valve Series 52-SY

plug connector with cover (LL) 52-SY5120-LL-01 (-F2) Insulation: Red (+) Insulation: Black () 4.1 0.3 mm2 12 14.7 L 104 (Lead wire length) Cable type (TT) 52-SY5120-TT-01 (-F2) Lead wire marking No.1 (+), No.2 () 5.9 0.75 mm2 L 120.8 (Lead wire length) Max.10 5 ATEX Compliant Body Ported Type Series 52-SY5000 Dimensions 2-position double L plug connector (L) 52-SY5220-L-01 (-F2) 22.6 16.7

SYJ300/500/700

(Value in the initial state) Base mounted Solenoid Specifications JIS Symbol Internal pilot SYJ312 4 SYJ32 2 4 Grommet (G), (H), L plug connector (L), M plug connector (M), M8 connector (W) Electrical entry (A) 2 (A) 2 DC AC 50/60 Hz 24, 12, 6, 5, 3 Coil rated voltage (V) 100, 110, 200, 220 10% of rated voltage Allowable voltage fluctuation 1 (P) 3 (R) 1 (P) 3 (R) Standard With power saving

CL

(mm) L L Dd9 d l l d m t Used snap ring t m Used snap ring Part No.

Guide Cylinder Series MGG ø20, ø25, ø32, ø40, ø50, ø63, ø80, ø100 1

N L Non-lock type Lock type Lock position H R Head end lock Rod end lock Applicable Auto Switch/Refer to page 8-30-1 for further information on auto switches.