VDW

Material and insulation type Symbol Nil A G H L Body material Coil insulation type Seal material NBR FKM NBR FKM FKM C.O.

[Option] 3 Port Solenoid Valve Direct Operated Poppet Type VT317 Series Rubber Seal

) Conduit terminal (T) Grommet (G) DIN terminal (D) 2n x 1/4 Applicable cable O.D. 6 to 12 L Dimension n: Stations Stations Formula L1 = 46 x n + 29 L2 = 46 x n + 14 2 121 106 3 167 152 4 213 198 5 259 244 6 305 290 7 351 336 8 397 382 9 443 428 10 489 474 L L1 L2 Precautions Be sure to read this before handling the products.

VT317

Dimension VP Stations Formula L1 = 46 x n + 29 L2 = 46 x n + 14 10 489 474 9 443 428 8 397 382 7 351 336 6 305 290 5 259 244 4 213 198 3 167 152 2 121 106 L L1 L2 S070 With mounting adaptor: VV317-02-1-02-A VQ 4-7 mounting hole P = 46 VKF VQZ VZ Manual override (Non-locking) VS DIN terminal facing upward 141.6 VFN Applicable cable O.D. 6 to 12 L Dimension n: Stations Stations Formula L1 =

Microspeed Cylinder: Double Acting/Single Rod Series CQ2X ø 32, ø 40, ø 50, ø 63, ø 80, ø 100 Dimensions and auto switch details are equivalent to those of the standard double acting single rod cylinder.

Grease pack GR-L-005 (5g) GR-L-010 (10g) GR-L-150 (150g) 8

Microspeed Cylinder: Double Acting/Single Rod Series CQSX ø 12, ø 16, ø 20, ø 25 Dimensions and auto switch details are equivalent to those of the standard double acting single rod cylinder.

Grease pack GR-L-005 (5g) GR-L-010 (10g) GR-L-150 (150g) 6

ZL3-OM00801

min(ANR)] + *2 300 [L/min(ANR)] 150 135 [MPa] 0.20.6 [] -550() 2] *2 20 [m/s 2] *3 100 [m /s *1 *22 2/V *310500Hz XYZ 2 *4XYZ 3 ZL6 ZL6M ZL6H [mm] 1.9x2 1.5x2 0.35 0.50 [MPa] 0.37 0.52 *1 -91 -93 [MPa] 580 [L/min(ANR)] + *2 600 [L/min(ANR)] 300 270 [MPa] 0.20.6 [] -550() 2] *3 20 [m/s 2] *4 100 [m /s *1 *22 2/V *310500Hz XYZ 2 *4XYZ 3 21 No.ZL3-OM00801-A 9.2 / ZL3-JSY3140 *1

Microspeed Cylinder: Double Acting/Single Rod Series CUX ø 10, ø 16, ø 20, ø 25, ø 32 Dimensions and auto switch details are equivalent to those of the standard double acting single rod cylinder.

Grease pack GR-L-005 (5g) GR-L-010 (10g) GR-L-150 (150g) Operation Warning 1. The speed may not be controllable during low speed operation with the meter-out controller. Caution 1. For Series CUX10, up to 0.1Nl/min (ANR) of internal leakage is anticipated due to cylinder structure. 4

Electro-Pneumatic Proportional Valve

Base mounted Body ported Base mounted Voltage 5 6 24VDC 12VDC Port size Nil M5 01 01F 01N 01T Without sub-plate (PVQ13, 33) With sub-plate (PVQ13 only) Rc 1/8 G 1/8 NPT1/8 NPTF 1/8 Electrical entry Orifice size L type plug connector, with lead wire (PVQ13 only) M type plug connector, with lead wire (PVQ13 only) Grommet (PVQ31, 33) L 03 04 06 08 16 23 40 0.3mm ( for PVQ13) 0.4mm ( for PVQ13

3 Way, 3 Port NVF110 Series Direct Solenoid Operated

Six station manifrcld ass'y: sta. 1-4) NVF'I'10-5G-017 sta. 5-6) NVF1 10-3G-017 NW3F1 -30-061-017 No. ot Stgliorg I l 5 I F Mounting Brackets tPoding 01 ,d' NPIF DltrlENSlON D E F G H J x ll ta o P n s T u w x z AA BB 3.78 (96) 3.41 1.77 (,r5)0.39 (10) o.59 (15) 0.20 (5) 0.63 (16) 1.O2 (28t 3.50 (89) 1 . 1 8 (30) 0.59 (15) 2.76 (70) o.87 (21) o_20 {5) 1 . 1 8 {30} 0.67 ltTl 0.59 (ls) o.32

lVFl 10

Six station manifrcld ass'y: sta. 1-4) NVF'I'10-5G-017 sta. 5-6) NVF1 10-3G-017 NW3F1 -30-061-017 No. ot Stgliorg I l 5 I F Mounting Brackets tPoding 01 ,d' NPIF DltrlENSlON D E F G H J x ll ta o P n s T u w x z AA BB 3.78 (96) 3.41 1.77 (,r5)0.39 (10) o.59 (15) 0.20 (5) 0.63 (16) 1.O2 (28t 3.50 (89) 1 . 1 8 (30) 0.59 (15) 2.76 (70) o.87 (21) o_20 {5) 1 . 1 8 {30} 0.67 ltTl 0.59 (ls) o.32

Fitting Type: B (Branch Tee), Metric Size, Side A: No (Select Inch Size, Side A), Inch Size, Side A: 5G (Tube O.D. 1/4", Tubing Size 3/4"x5/8"), Metric Size, Side B: No (For Types H and L, and Types B or R w/Same Tubing Size), Inch Size, Side B: No (For Types H and L, and Types B or R w/Same Tubing Size), Piping: F (Female), Thread: N (NPT)

Fitting Type: R (Run Tee), Metric Size, Side A: No (Select Inch Size, Side A), Inch Size, Side A: 5G (Tube O.D. 1/4", Tubing Size 3/4"x5/8"), Metric Size, Side B: No (For Types H and L, and Types B or R w/Same Tubing Size), Inch Size, Side B: No (For Types H and L, and Types B or R w/Same Tubing Size), Piping: M (Male), Thread: N (NPT)

Fitting Type: H (Connector), Metric Size, Side A: No (Select Inch Size, Side A), Inch Size, Side A: 5G (Tube O.D. 1/4", Tubing Size 3/4"x5/8"), Metric Size, Side B: No (For Types H and L, and Types B or R w/Same Tubing Size), Inch Size, Side B: No (For Types H and L, and Types B or R w/Same Tubing Size), Piping: M (Male), Thread: N (NPT)

Fitting Type: B (Branch Tee), Metric Size, Side A: No (Select Inch Size, Side A), Inch Size, Side A: 5G (Tube O.D. 1/4", Tubing Size 3/4"x5/8"), Metric Size, Side B: No (For Types H and L, and Types B or R w/Same Tubing Size), Inch Size, Side B: No (For Types H and L, and Types B or R w/Same Tubing Size), Piping: M (Male), Thread: N (NPT)

Series: VQ21, Body Style: For Manifold, Coil Voltage: 24VDC, Lead Wire: Grommet, Voltage Protection: None (Or w/Surge Suppressor in Case of AC Volts), Manual Override: None, Port Size: ø8 One-touch Fitting, Option: L Type (VQ21 Only)

Series: 2 (VQ21), Body Style: M (For Manifold), Coil Voltage: 5 (24VDC), Lead Wire: G (Grommet), Voltage Protection: None (Or w/Surge Suppressor in Case of AC Volts), Manual Override: None, Port Size: C8 (ø8 One-touch Fitting), Option: L Type (VQ21 Only)

Type: Solenoid Valves, Application: Single Unit, Mounting Orientation: Direct, Voltage: DC24V, Specification: Standard / Drip-Proof / Lubrication Free, Valve Type: 2-Port Valve, Actuation: [Single] Single, Status at Power Off: Self-Recovery (Spring Return), Valve Positions: 2-Position Normally Closed, Pipe Port Type: One-Touch Plumbing, Connecting Tube Diameter: Ø6, Pressure Rating(MPa):

Series: 2 (VQ21), Body Style: A (Single Unit), Coil Voltage: 5 (24VDC), Lead Wire: G (Grommet), Voltage Protection: None (Or w/Surge Suppressor in Case of AC Volts), Manual Override: None, Port Size: C6 (ø6 One-touch Fitting)

SQ1000/2000

0 Fitting assemblies> Wiring For single (2 wires) For double (3 wires) 0 1 (For P, R port) VVQ1000 51A C8 SSQ1000 4 A P 1 200 For stations 2 to 24 Bore size Wiring C6 C8 N7 N9 6 One-touch fitting 8 One-touch fitting 1/4" One-touch fitting 5/16" One-touch fitting 0 1 For single (2 wires) For double (3 wires) Lead wire length Dimension L (mm) Dimension L (mm) Dimension L (mm) Dimension L (mm

Compact 5-Port Solenoid Valve

C6: 6 (SMC) C8: 8 (SMC) 34.9 107 15.8 * These figures show the JJ5SY3-10T-05D-C8. * Refer to page 98 for dimensions of external pilot (Made to Order) and silencer. n: Stations L: Dimensions n L 2 3 4 5 6 7 8 9 10 11 12 13 14 15 16 L1 167.4 178.9 190.4 201.9 213.4 224.9 236.4 247.9 259.4 270.9 282.4 293.9 305.4 316.9 328.4 L2 66.1 77.6 89.1 100.6 112.1 123.6 135.1 146.6 158.1 169.6 181.1