5 Port Solenoid Valve SY Series

suppressor) (35.5) (32) + 25 16.9 13.1 28.5 [35.5] (15) 10 0.8 2 P EA EB 21.5 die-cast hole (For manifold gasket positioning) 19 M5 x 0.8 (P, EA, EB port) L plug connector (L): SY3220-L(-F ) 1 2 1 2 C4, N3 C6, N7 M plug connector (M): SY3220-M(-F ) C4, N3 C6, N7 M8 connector (W0): SY3220-W0(-F ) C4, N3 C6, N7 1 2 (Lead wire length) 108.6 [113] Approx. 300 28.5 [35.5] 13.1 33 15.5 M8 x 1

SZ3000

B RATE PWR L RUN SETTINGS MOD/NET ADDRESS NO. PWR PWR COM ERR ON ON L ERR.

Series SYJ300/500/700 3 Port Solenoid Valve Rubber Seal

Rc(PT)1/8 P Port Rc(PT)1/8 A port side Stations M5 X 0.8 M5 2 stations 02 Applicable blank plate ass'y SYJ500-10-3A Rc (PT)1/8 01 .. .. 20 stations 20 A Port M5 X 0.8, Rc (PT) 1/8 Note) If more than 9 stations, supply air to both sides of P port and exhaust air from both sides of R port. 41 Type Applicable solenoid valve SYJ514-l SYJ514M-l SYJ524-l SYJ524M-l How to Order SS3YJ5--41-05 -C6

3/5 Port Solenoid Valve Metal Seal/Rubber Seal Base Mounted VQZ1000/2000/3000

51 VQZ1000 2 to 20 stations l l Rc(PT) 1/8 lll In-line SY C4(4) C6(6) C8(8) Rc(PT)1/8 2 stations: 193 Addition per/ station: 54 VV5QZ25 VQZ2 50 VQZ2 51 VQZ2000 lll l l Rc(PT) 1/4 2 to 20 stations SYJ In-line SX 2 stations: 398 Addition per/ station: 102 1(P)port Rc(PT)3/8 35(R)port Rc(PT)1/4 C6(6) C8(8) C10(10) Rc(PT)1/4 l l VV5QZ35 VQZ3 50 VQZ3 51 VQZ3000 2 to 20 stations VK In-line lll

3 Port Solenoid Valve Metal Seal/Rubber Seal Body Ported VQZ100/200/300

10.5 Foot bracket 15.4 16.7 PE port P 1 3 R 1.5 A Rc(PT)1/8 R port Rc(PT)1/4 P port 2-3 Die cast hole For manifold gasket positioning DIN terminal (Y): VQZ3l2(R)-lYl-C6, C8, C10, 02 L plug connector (L): VQZ3l2(R)-lLl-C6, C8, C10, 02 88.5 89.5 300 (Lead wire) Indicator light 31.5 35 92.5 MAX.10 Pg.7 Applicable cord O.D.

3 Port Solenoid Valve Metal Seal/Rubber Seal, Body Ported Series VQZ100/200/300 1

VQZ L plug connector (L): VQZ22(R)-L-C4/C6/M5 DIN terminal (Y): VQZ22(R)-Y-C4/C6/M5 VZ VS Indicator light 84 300 VFN (Lead wire length) 30.5 <35.5> 87 Max. 10 Applicable cable O.D. 3.5 to 7 Pg.7 Cover diameter 1.5 Cross section 0.23 mm2 Indicator light < >: AC 61.5 M plug connector (M): VQZ22(R)-M-C4/C6/M5 54 36 (Lead wire length) Cover diameter 1.5 Cross section 0.23 mm2 300 89 78 Indicator

5 Port Solenoid Valve/Body Ported, Cassette Type Manifold, Series SZ3000

B RATE PWR L RUN SETTINGS MOD/NET ADDRESS NO. PWR PWR COM ERR ON ON L ERR.

Series 10-SZ3000 5 Port Solenoid Valve Cassette Type Manifold

L Elbow (Upward) B Elbow (Downward) Pilot type Nil Internal pilot R External pilot How to Order Valve Manifold Assembly Ordering example (10-SZ3000, Non plug-in) Double solenoid (24 VDC) 10-SZ3260-5MZ-C6 (3 sets) SUP/EXH block (U side mounting) Single solenoid (24 VDC) 10-SZ3160-5MZ-C6 (2 sets) U side D side Stations 3 2 1 10-SS5Z3-60-05U1 set (Manifold part no.) 10-SZ3160-5MZ-C62 sets

SZ3000

L 16 44 8 L (7.5) 8 2514 131 (35) (25) 5.5 47.04 SMC 55 10 Multi-core vinyl cable 0.3 mm2 x 25C 2-M2.6 x 0.45 Socket side Terminal no.

Series: VQ21, Body Style: For Manifold, Coil Voltage: 12VDC, Lead Wire: Grommet, Voltage Protection: None (Or w/Surge Suppressor in Case of AC Volts), Manual Override: None, Port Size: ø8 One-touch Fitting, Option: L Type (VQ21 Only)

Series: VQ21, Body Style: For Manifold, Coil Voltage: 24VDC, Lead Wire: Grommet, Voltage Protection: None (Or w/Surge Suppressor in Case of AC Volts), Manual Override: None, Port Size: ø8 One-touch Fitting, Option: L Type (VQ21 Only)

Series: VQ21, Body Style: For Manifold, Coil Voltage: 24VDC, Lead Wire: DIN Terminal, Voltage Protection: S [Surge Suppressor (DC Voltage)], Manual Override: None, Port Size: ø8 One-touch Fitting, Option: L Type (VQ21 Only)

Series: VQ21, Body Style: For Manifold, Coil Voltage: 24VDC, Lead Wire: Grommet, Voltage Protection: S [Surge Suppressor (DC Voltage)], Manual Override: None, Port Size: ø8 One-touch Fitting, Option: L Type (VQ21 Only)

Series: 2 (VQ21), Body Style: M (For Manifold), Coil Voltage: 6 (12VDC), Lead Wire: G (Grommet), Voltage Protection: None (Or w/Surge Suppressor in Case of AC Volts), Manual Override: None, Port Size: C8 (ø8 One-touch Fitting), Option: L Type (VQ21 Only)

Series: 2 (VQ21), Body Style: M (For Manifold), Coil Voltage: 5 (24VDC), Lead Wire: G (Grommet), Voltage Protection: None (Or w/Surge Suppressor in Case of AC Volts), Manual Override: None, Port Size: C8 (ø8 One-touch Fitting), Option: L Type (VQ21 Only)

VQC

VVQ2000-P-1-C8 Port plug VVQ0-58A (For VQC1000) VVQ1000-58A (For VQC2000) EXH block plate assembly Elbow fitting assembly VVQ1000-F-L VVQ2000-F-L Electrical wiring specifications [-K] C3 C4 C6 M5 VVQC1000-19AD S C6 (SUP port) D-sub connector Terminal no. 6 One-touch fitting SOL.

42

SYJ SZ VF VP4 VQ 1/2 VQ 4/5 VQ 4/5 VQC 1/2 VQC 4/5 Plug lead type Plug-in type VQZ Lead wire length L 0: Approx. 600 mm L 1: Approx. 1500 mm L 2: Approx. 3000 mm 1/4", 3/8" C6, C8, C10, C12, N7, N9, N11 4(A), 2(B) port SQ 1/4", 3/8" C6, C8, C10, C12, N7, N9, N11 4(A), 2(B) port 106.5 155.4 (Single) 164.4 (Double) 178.5 (3-position) 3.5 VFS 3.5 139.9 (Single) 148.9 (Double) 163 (3-position

Vacuum System Peripherals:

R L B 01 1 Nil F G Rc 1 8 ... ...

VFR

0 1000 2000 3000 4000 Flow rate (l/min (ANR)) Flow rate (l/min (ANR)) Flow rate (l/min (ANR)) ARBF5050-00-A ARBF3050-00-A ARBF4050-00-A 0.6 Inlet pressure 0.7 MPa Inlet pressure 0.7 MPa Inlet pressure 0.7 MPa 0.5 Outlet pressure (MPa) 0.4 0.3 0.2 0.1 0 1000 2000 3000 4000 Flow rate (l/min (ANR)) Flow rate (l/min (ANR)) Flow rate (l/min (ANR)) 3-5-6 7 Series VFR2000/3000/4000/5000/6000 Caution

SYJ300/500/700

C6 1/8 M5 x 0.8 1/8 M5 x 0.8 1/8 1/8 Body ported for external pilot SYJ52R Type SS3YJ5-21R Type SS3YJ5-40R-M5 Type SS3YJ5-40R-01 1/8 1/8 1/8 1/8 1/8 Base mounted for external pilot Type SS3YJ5-41R-M5 M5 x 0.8 1/8 SYJ54R Type SS3YJ5-41R-01 Type SS3YJ5-41R-C4 C4 C6 Type SS3YJ5-41R-C6 Note) Value at manifold base mounted, 2 position single operating How to Order Manifold (Example) Instruct