Compact and Lightweight

H2 L3 L2 L1 All Ports: Screw-in Model H1 H2 H3 L1 L2 L3 L4 Connection thread 1 Connection thread 2 Connection thread 3 ZH05DA-01-01-01 12 12 12 67 42.5 27 26 Rc1/8 Rc1/8 Rc1/8 ZH07DA-01-01-01 70.2 ZH10DA-01-01-01 76.4 ZH13DA-01-02-02 17 17 90.8 51 29.5 36.3 Rc1/4 Rc1/4 ZH15DA-02-03-03 17 19 19 108.2 63.3 34.3 37.1 Rc1/4 Rc3/8 Rc3/8 ZH18DA-03-03-03 19 131.1 73.6 41.1 39.1 Rc3/8 ZH20DA-03-04

Secondary Batteries

Note 3) Please consult with SMC regarding the set nuts for the 90-AW60(K). 51 Precision Regulator 90-IR1000/2000/3000 Series How to Order 90 IR 2 0 0 0 02 Series compatible with secondary batteries Accessory Nil B None With bracket 90 Material restriction Precision regulator Port size Application Body size size Symbo 90-IR2000 90-IR3000 90-IR1000 1 2 3 90-IR1000 90-IR2000 90-IR3000 01 02

VQ5000

OMRON Corp.: CompoBus/S System (16 output points) OMRON Corp.: CompoBus/S System (8 output points) JEMANET (JPCN-1) Mitsubishi Electric Corp.: CC-LINK System Rockwell Automation: Allen Bradley Remote I/O (RIO) System NKE Corp.: Uni-wire H System 02 2 stations (2) ... ... 12 12 stations Note 1) When two or more symbols are specified, indicate them alphabetically. Example) -CD1K.

Series 10-SYJ300/500/700 Rubber Seal 3 Port Solenoid Valve

Q CE-compliant Nil 02 2 stations Nil Rc P R Pilot valve is on the A port side.

Series CQS Compact Cylinder Compact Type ø12, ø16, ø20, ø25

51 63.5 67 (All dimensions are common between standard stroke and long stroke except "A", "B", "C", "L" and "L1".)

TABLE OF CONTENTS

All Models STRAIN RELIEF CONNECTOR BOTTOM CAVITY PORT .20 (5.1) .30 (7.6) SPADE TERMINAL COIL MOLDED All Models All Models * Models 21, 31, 51 ADD .232 (5.9) FOR SPADE TERMINAL COIL OPTION SINGLE AUTOMOTIVE MANIFOLD MOUNT HIGH TEMPERATURE MOLDED COIL All Models except 51 All Models All Models DOUBLE AUTOMOTIVE FLANGE MOUNT EUROPEAN DIN STYLE COIL All Models except 51 Models 21, 71 Models

ZX

Filter unit (F) ZX100-K6-F 1 41 51 2-R1.8 (Mounting hole) 3.6 (Mounting hole) 1 10 19 8.8 4.8 Filter unit (Mounting hole) 13-2-51 51 Series ZX Air supply for release valve pilot Air supply for supply valve pilot Vacuum pad connection V port Valve Unit: Type K8 Vacuum switch (ZSE2) Pilot exhaust PE port Configuration and combination Valve unit (K8) + Adsorption confirmation switch (ZSP1) Filter

LEC-OM02704CN

C 1. ##0064 ## 00 01 1 02 2 03 3 62 62 63 63 64 64 2. $$$0255 3. ** 4.

KJ

How to Order KQ2 H 05 S 02 With thread seal One-touch fittings Nil Without seal S With thread seal Applicable tubing O.D.

Table of Contents

96 51 90 9.5 51 M10 x 1.5 x 15 18 K L LD M MM N P Q QW TC W WP WS X Y Z PW T Model CY1R 6 7 34 3.5 3.5 M3 x 0.5 3.5 M5 x 0.8 64 10 10.5 20 9.5 6 10 35.5 72 19 17.5 CY1R10 9 38 3.5 4 M3 x 0.5 4.5 M5 x 0.8 68 14 14 20 13 8 15 39.5 76 26 17.5 CY1R50 25 110 8.6 10 M8 x 1.25 15 Rc 1/4 159 48 42 60 41 10 50 113 176 82 30 CY1R63 24 118 8.6 10 M8 x 1.25 16 Rc 1/4 171 60 48 70 47 10 60 121 188 94

CL

CXS Rear flange With rod boot Without rod boot CXT Bore (mm) ZZ 182 198 201 227 ZZ 202 220 223 247 MX 20 25 32 40 MXU Front trunnion/CLG1UN Front trunnion MXS With rod boot Without rod boot Bore (mm) BZ TDe8 TE TF TH TR TS TV TW TX TY TZ Z 46 51 51 62 TT MXQ Z 66 73 73 82 20 25 32 40 0.025 0.047 69.5 31 40 47 47 54 3.2 3.2 4.5 4.5 47.8 42 42 48 56 59.6 8 10 10 10 10 51 26 28 28 36 5.5 5.5

Air Cylinder

to 100 st 101 to 125 st 126 to 200 st 20 46 131 156 181 25 51 136 161 186 211 32 51 138 163 188 213 40 62 155 180 205 230 Bore size 1 to 50 st 51 to 100 st 101 to 125 st 126 to 200 st Z ZZ Z ZZ Z ZZ Z ZZ 20 118 139 143 164 168 189 25 123 144 148 169 173 194 198 219 32 126 150 151 175 176 200 201 225 40 143 171 168 196 193 221 218 246 Constructed of pins, flat washers and hexagon socket

4 Way • 4 and 5 Port, Rubber Seal • Solenoid Pilot Valve, Series SYJ3000

SYJ312 SYJ322 SYJ332 SYJ342 SYJ352 SYJ314 SYJ324 SYJ334 SYJ344 SYJ354 SYJ313 SYJ323 SYJ333 SYJ343 SYJ353 2 position 0.9 (0.05) 5 Port Body ported type M3 0.5 50 54 3 position 59(33) 73(47) 61(35) 77(51) 2 position 5 Port Base mounted type (With sub-plate) 1.8 (0.1) Body ported type M5 0.8 76(50) 80(54) 3 position 33 47 35 51 2 position 4 Port Base mounted type For manifold use only Note1

Compact Cylinder Series CQ2 ø12, ø16, ø20, ø25, ø32, ø40, ø50, ø63, ø80, ø100, ø125, ø140, ø160, ø180, ø200 1

63 RQ m1: Weight of cylinder operating part kg m2: Load weight kg V: Piston speed m/s 10 50 MU 40 32 5.0 4.0 3.0 (g) Table (2) Weight of Cylinder Movable Parts/Without Built-in Magnet D25 Cylinder stroke (mm) 2.0 Bore size 20 16 (mm) 5 10 15 20 25 30 35 40 45 50 75 100 -X 1.0 5 6 7 8 10 11 12 12 209 11 13 15 17 19 16 0.5 0.4 0.3 15 18 21 24 27 31 34 37 40 44 20 Data 24 28 33 37 42 46 51

Speed Controller with Indicator

30.2 (30.3) 23 (24) AS221FS-02-03 (S) 5/32" 8.2 AS221FS-02-07 (S) 1/4" 11.2 23.4 32.7 (32.8) 24 (24) AS221FS-02-09 (S) 5/16" 13.2 23.9 33.2 (33.3) 14.2 24 (25) AS221FS-02-11 (S) 3/8" 15.5 26.4 35.7 (35.8) 15.6 25 (26) AS321FS-02-07 (S) 1/4" 3/8 19 11.2 16.6 21.8 32.1 36.4 63.1 61.7 57.9 56.5 13.3 24.5 28.5 9.3 19.2 47 (48) AS321FS-02-09 (S) 5/16" 13.2 22.7 33 14.2 AS321FS-02-11 (S) 3/8"

smcmaintenancepartslist

Float type Note 5) AD27 Y200 AKM2000-01 (02) IS1000M-20 Y210-01 (02) AD17 Y100 AD48 AD47 AD38 AD37 Y300 AKM3000-(01) 02 IS1000M-30 Y310-(01) 02 auto drain Spacer Y400 AKM4000-(02) 03 IS1000M-40 Y410-(02) 03 02 VHS40-03 04 02 E400-03 04 06 02 IS1000E-4003 04 06 Y44-02 03 Y600 Y500 Check valve Note 6) Note 7) Pressure switch Note 7) IS1000M-60 IS1000M-50 Y510-(02) 03 Y610-03 (04) Y610-(03

Speed Controller with One-touch Fitting Stainless Steel Type Elbow Type/Universal Type AS-FG Series Push-lock type

-23(S)A 3.2 1/8 13 (12.7) 7.2 20.9 30.2 (30.3) 22.6 36.6 35 31.1 29.5 13.3 17 (18) AS22l1FG-02-04(S)A 4 8.2 AS22l1FG-02-06(S)A 6 10.4 23.4 32.7 (32.8) AS22l1FG-02-08(S)A 8 13.2 23.9 33.2 (33.3) 14.2 18 (19) AS22l1FG-02-10(S)A 10 15.9 26.9 36.2 (36.3) 15.6 19 (20) AS32l1FG-02-06(S)A 6 1/4 17 (17.5) 13 13.3 40 (40) AS32l1FG-02-08(S)A 8 13.2 22.7 33 14.2 41 (41) AS32l1FG-02-10(S)A 10 15.9 26.7

Series 10-SYJ3000/5000/7000 Rubber Seal 4/5 Port Solenoid Valve

R2 P Manual override 8.5 34 63.8 13.8 (Light/surge voltage suppressor) 1/4, 1/8 (P, A, B port) 57.5 [64.5] + 42.1 25.5 20 12 22 22 11.5 18 1/4 (R1, R2 port) 31.5 34 63 L plug connector (L): 10-SYJ7 43-L3 4 5 01 02 M plug connector (M): 10-SYJ7 43-M3 4 5 01 02 DIN terminal (D, Y): 10-SYJ7 43D Y3 4 5 01 02 M8 connector (WO): 10-SYJ7 43-WO3 4 5 01 02 Applicable cable O.D. 3.5 to 7 141.8 [146.2

Series 10-SQ1000 5 Port Solenoid Valve Plug-in Unit

Note 2) S kit: 24 VDC only 588 5 Port Solenoid Valve/Plug-in Unit 10-SQ2000 How to Order Manifold Assembly (Example) Example) D-sub connector kit, with cable (3 m) 2 position double (24 VDC) 10-SQ2231D-51-C8 (3 sets) 3 position closed center (24 VDC) 10-SQ2331-51-C8 (1 set) 2 position single (24 VDC) 10-SQ2131-51-C8 (3 sets) Blanking plate SSQ2000-10A-3 (1 set) Stations 1 2 3 4 5 6 7 8 U

HRX-OM-M090

5.17.1 Data reset function . 5-51 5.17.2 Method of resetting data reset function . 5-51 5.18 Accumulated time reset function . 5-52 5.18.1 Accumulated time reset function . 5-52 5.18.2 Method of resetting accumulated time reset function . 5-52 5.19 Communication function . 5-54 5.19.1 Communication function . 5-54 5.19.2 Communication function setting and checking . 5-54 Chapter 6 OptionOptional