Series CM2-Z 10-/11- ø20, ø25, ø32, ø40 21-/22- Air Cylinder

31 31 36 Y 20 20 20 23 Z 8 8 8 10 LD 4 4 4 4 LT LS 25 28 28 30 Bore size 40 47 47 54 13 17 17 22 26 32 32 41 26 26 26 31 41 45 45 50 5 6 6 8 8 8 8 10 21 25 25 27 149 153 155 191 The bracket is shipped together.

REA/REB

Contents Replacement parts: Seal kits 10 REBH15-PS Above numbers 29, 30, 31, 32, 33, 34, 35 15 REBH25-PS 77 Series REBH Construction/25, 32 Dual axis type/REBHT @0 !9 q !4 !3 !8 !7 @7 #1 @9 !0 t y e i u !2 !1 w #3 !6 @4 @5 @2 @1 r #0 #4 #2 o !5 @8 @3 REBHT32 @6 Parts list Parts list No. Description Material Note No.

Magnetically Coupled Rodless Cylinder Series CY3 B R /CY1 1

DMade to Order Specifications (For details, refer to page 8-31-1.)

MY1

9 Qty. 1 1 2 2 2 4 Material Special resin Stainless steel NBR NBR NBR NBR Description Seal belt Dust seal band Scraper Piston seal Tube gasket O-ring GMY10 P7 5.33 x 3.05 x 1.14 8-11-31 31 Series MY1B Construction: 16 to 100 MY1B16 to 100 t u y w q !1 #0 #1 #2 @4 !9 r @3 #3 i !

15

Additionally, when running the positioning operation, do not set within 2 mm of both ends. 11LEJS XAH9 XA 32 Up to 114 97.5 13 115 to 190 116.5 191 to 300 134 25ADimensions [mm] Size Motor type FA FB FC FD FE FF FG FH LEC [mm] LEYGlM (Sliding bearing) NZ, NX M4 x 0.7 7.5 46 30 3.7 47 45 NY M3 x 0.5 6 45 30 4.2 47 45 NM1 3.4 17 31 22 2.5 36 45 19 NM2 3.4 28 31 30 3.5 56 45 30 Size Stroke

MXS Series Air Slide Table

31 26 32 32 32 Shock absorber at extension end A Stroke 75 to 125 A Max. 25 Shock absorber at retraction end Other dimensions not indicated are the same as basic model.

Series MXQ 13- ø6, ø8, ø12, ø16, ø20, ø25 22- Air Slide Table

H 25 28 31 29 30 NN 2 2 3 3 4 4 GA 13 14 29 39 37 61 HA 19 28 27 31 58 60 I 11 10 12 14 13 12 J 17 28 40 52 78 105 K 23.5 33.5 43.5 53.5 63.5 88.5 KA 82.5 112.5 NA 4 4 4 4 8 8 M 46 56 70 84 109 135 Z 45.5 55.5 69.5 83.5 108.5 134.5 ZZ 71 81 95 109 134 160 13-/22-MXQ8-10 13-/22-MXQ8-20 13-/22-MXQ8-30 13-/22-MXQ8-40 13-/22-MXQ8-50 13-/22-MXQ8-75 Note) Note) 1322Note) Refer to the bottom view

VM

30.5 20.8 16.1 22 12 10 12 46 62 63 31.5 30.5 21.5 4 21.8 20.8 14 17 3.2 31 32 VHK-B2A 49 17 1 30 25 21.5 31 1(P): Male Thread, 2 (A): One-touch Fitting Effective area (mm2) Bracket assembly no.

3 Port Solenoid Valve/

Symbol M12 connector pin number Wiring specication G1/2 terminal number Wiring specication r w (32) (12) (11) q 12 11 (12) e w w (31) e (31) (11) r q 32 31 q e (32) r VP542(R)/742(R)-X536 Internal pilot External pilot External pilot/With check valve r (32) w (12) r (32) w (12) r (32) w (12) 2(A) 2(A) 2(A) (31) e (11) q (31) e (11) q (31) e (11) q 3(R) 1(P) 3(R) 1(P) 3(R) 1(P) Safety limit

0.4

, 4 in/4 out, 31 slave modes, 2 power supply systems AS-Interface, 8 in/8 out, 31 slave modes, 1 power supply systems AS-Interface, 4 in/4 out, 31 slave modes, 1 power supply systems 1 to 4 stations (8) SDTA VQ 1/2 IP67 compliant 1 to 2 stations (4) SDTB SI unit: EX600 Note) A separate gateway unit and communication cable are required.

HRX-OM-Q026

The displayed circulating fluid temperature is the fluid temperature discharged from the thermo-chiller (31 oC).

4 Port Direct Operated Poppet Solenoid Valve Series VQD1000 1

Applicable manifold model DXT154-34-1A VV5F1-31 AN120-M5 VV5F1-31 AN110-01 VV5F1-30 DXT144-13-2A VV5F1-30/31 Description Throttle valve VV5F1-30 VFS Silencer VS4 Blanking plate assembly VQ7 How to Order Manifold Instruct by specifying the valves and blanking plate assembly to be mounted on the manifold along with the manifold base model no. (Example) VV5F1-30-051 1 pc.

ISO Cylinder

31 31 10 6.5 29 29 29 12 7.5 31 31 31 8 5 29.5 29.5 29.5 10 5 27.5 27.5 27.5 12 6 29.5 29.5 29.5 D-M9l D-M9lV D-M9lW D-M9lWV D-M9lA D-M9lAV D-M9l D-M9lV D-M9lW D-M9lWV D-M9lA D-M9lAV 16 7.5 36 [30] 62 [56] 88 [82] 20 10.5 34.5 59.5 84.5 25 12 34.5 59.5 84.5 16 6 34.5 [28.5] 60.5 [54.5] 86.5 [80.5] 16 2 30.5 [24.5] 56.5 [50.5] 82.5 [76.5] 20 5 29 54 79 25 6.5 29 54 79 D-F7l/J79 D-F7lW D-J79W

CLS

31 36 41 46 56 14 14 14 17 17 20 35 35 39 39 39 49 Up to 1000 3 5 30 46 M14 x 1.5 M30 x 1.5 161 78 18 110 146 128 16 114 64 110 27 Up to 1000 M16 x 1.5 M36 x 1.5 182 95 23 132 169 144 18.5 130 74 120 30.5 Up to 1200 16 21 35 5 5.5 6 30 34 42 25 31 41 M18 x 1.5 M40 x 1.5 204 106 36 167 195 162 18.5 149 86 135 35 Up to 1200 M12 x 1.75 118 226 124 40.5 187 216 182 18.5 165 97 135

HEC-OM-S008

02 38 30 31 35 30 03 3F3E 0D 06 0D Set at +1.50 deg.C Examples of commands and answers from the thermo-con (unit specified) Command Command Unit Host requirement Answer from thermo-con code (ASCII code) Content specified (ASCII code) ASCII 31 Reading setting temperature 2 01 32 05 31 36 38 0D 01 32 02 31 32 35 30 30 03 32 3C 0D Answer 25.0 deg.C 31 Temperature setting (without writing FRAM

MGG

(mm) Q R X Y + Stroke Y Q R X Bore size (mm) 32 86 (94) 25 13 39 40 96 (105) 29 14 46 50 109 (121) 31 15 57 Dimensions inside ( ) are for long strokes.

10

38 31 40 28.5 25.5 31.5 25.5 34 25.5 36.5 27.5 38.5 27.5 71.5 27.5 81.5 27.5 29.5 26 30 26 39 25.5 42 33 50 33.5 31 36 31 38.5 31 41 34 43.5 34.5 77 87 33.5 31 34.5 31 43 31 46.5 39 63 38.5 36 40.5 36 43 36 46 39 48.5 39.5 83.5 93.5 39 36 40 36 48 36 51.5 44 80 46.5 45 49 45 52 45 52.5 46.5 55 46.5 92.5 103 47.5 45 48.5 45 56.5 45 58 51.5 100 54 53.5 57 53.5 59.5 53.5 59.5 55 62 55

Proposals for Energy Saving

340 10 1.9 34 4.5 0.61 11 250 1.0 6 1.05 19 3/8 (10A) 8 1.7 31 340 0.4 10 2.4 43 1/2 (15A) 10 2.4 43 420 Directional Control Equipment Symbols Pilot pressure OUT N.C.

Series SYJ3000/5000/7000 4, 5 Port Solenoid Valve Rubber Seal

Type (4 Port/Base mounted) How to Order SS5YJ3-31-05 --M3 31 Type S31 Type Single solenoid coil is located on same side as the A, B port.

Cylinder with Lock

38 31 40 28.5 25.5 31.5 25.5 34 25.5 36.5 27.5 38.5 27.5 71.5 27.5 81.5 27.5 29.5 26 30 26 39 25.5 42 33 50 33.5 31 36 31 38.5 31 41 34 43.5 34.5 77 87 33.5 31 34.5 31 43 31 46.5 39 63 38.5 36 40.5 36 43 36 46 39 48.5 39.5 83.5 93.5 39 36 40 36 48 36 51.5 44 80 46.5 45 49 45 52 45 52.5 46.5 55 46.5 92.5 103 47.5 45 48.5 45 56.5 45 58 51.5 100 54 53.5 57 53.5 59.5 53.5 59.5 55 62 55