CEx-OMQ0013

(LCD ) 4.DIN 7 1-2 30mm No. 1-3 30mm Err6 1-4 5mm 5-10-15 5mm Err5 4.2 5 10 15 20 1.0 1.0 1.0 1.0 5.8 5mm 30mm Err6: 30 20 50mm/sec100mm/sec :50cm :0.5MPa 2. 2-1 CE2CEU2 8 NO 1 0 0 2 0 0 2 0 0 YES (kgf) (kgf) 1 0 0 8 0 NO 1 0 0 1 0 0 8 0 6 3 6 3 5 0 YES 5 0 0 0 NO 1 0 0 2 0 0 3 0 0 4 0 0 5 0 0 1 0 0 2 0 0 3 0 0 4 0 0 5 0 0 mm/s mm/s YES OK (), ? NO YES NO , , ?

1

SY Saves and . space energy EX600 New New SY3000 SY5000 SY7000 VM XT34 10 mm 15 mm 18 mm 2, 3.2, 4, 6, 8 fittings are connectable. Type M10/M11 manifold At 300 mm/s 4, 6, 8 fittings are connectable. 32 At 300 mm/s Existing 6, 8, 10, 12 fittings are connectable.

Electric Actuator/Slider Type

Model L A B n D E LEFS40 S -200453.4 6 2 LEFS40 S -300553.4 6 2 LEFS40 S -400653.4 8 3 LEFS40 S -500753.4 10 4 LEFS40 S -600853.4 10 4 LEFS40 S -700953.4 12 5 LEFS40 S -8001053.4 14 6 LEFS40 S -9001153.4 14 6 LEFS40 S -10001253.4 16 7 378 478 578 678 778 878 978 1078 1178 206 306 406 506 606 706 806 906 1006 300 300 450 600 600 750 900 900 1050 SMC Corporation of America 10100 SMC Blvd.,

AC Servo Motor Driver LECYM/LECYU Series Compatible LEF  Position control, speed control and torque control Power supply voltage (V) LEJ can be used. 200 to 230 VAC 
Control encoder: Absolute 20-bit encoder LEL Motor capacity (W) (Resolution: 10485

6 11LEFS 11LEJS A @6 !1o !5 @5 @4 !4 25Aw A-A * Motor bottom mounting type is the same. LEC LEC S LEC SS-T LEC Y LEC Y Motorless Component Parts No. Description Material Note No.

Vacuum

'a,z .s _g ic F S sd 9a' 6); rF G < 6 i 8z_ '62 _::"; ?

Vacuum

'a,z .s _g ic F S sd 9a' 6); rF G < 6 i 8z_ '62 _::"; ;x E !

CJ5-S

LS + Stroke LX LZ ZZ + Stroke Bore size (mm) Stroke range A AL B1 B C D GA GB H H1 I J K KA LD LH LS LT LX LZ M MM NA P S X Y ZZ 20 Up to 350 18 15.5 13 37.5 16.5 8 18 12 35 5 31 M4 x 0.7 5 6 6 22 59 3 40 50 3 M8 x 1.25 29 1/8 83 15 7 124 25 Up to 400 22 19.5 17 41.5 18.5 10 18 12 40 6 33 M5 x 0.8 5.5 8 6 25 59 3 44 60 3.5 M10 x 1.25 29 1/8 83 15 7 129.5 32 Up to 450 22 19.5 17 44 20 12

CJ5-S

R V Rod side flange style (F): CG5FNS GA GB 2-Rc P FT H1 Width across flats B1 D I AL A MM Width across flats NA K KA 8-J 4-FD C0.1 FX0.15 S + Stroke ZZ + Stroke H M B Stroke range A Bore size (mm) AL B1 B C D FX FD FT GA GB H H1 I J K KA M MM NA P S ZZ 20 Up to 350 18 15.5 13 50 16.5 8 36 5.5 6 18 12 35 5 31 M4 x 0.7 5 6 3 M8 x 1.25 29 1/8 83 121 25 Up to 400 22 19.5 17 50 18.5 10 36 5.5

Series LX Dedicated Stepper Motor Driver and Positioning Driver Series LC6D/LC6C

Power cable Black 0V 2 PD+ PD 1 Yellow 8 Brown Red FG 3 Interface cable Interface cable CCW+ CCW 2 Red 9 Green Home position switch (+) White 4 CW+ CW 3 Black 10 White Black Home position switch (OUT) 5 Motor B Motor F 4 White 11 Brown Home position switch () Brown 6 Switch cable Motor cable Motor A Motor E 5 Black 12 Yellow Limit switch (+) Yellow 7 Motor cable GND Motor D 6 Black 13 Green

VQ5000

S. T. Manufacturing Co., Ltd.

HRX-OM-W002

pump mounted . 6-2 6.4 Option T1Inverter pump mounted . 6-3 6.5 Option YWith feet and no Rack Mounting bracket . 6-4 6.5.1 Option YWith feet and no Rack Mounting bracket . 6-4 6.5.2 Anti-quake bracket (Optional Accessories) . 6-5 6.6 Option ZRemoved Parts . 6-6 6.6.1 Option ZRemoved Parts . 6-6 Chapter 7 Alarm Notification and Troubleshooting . 7-1 7.1 Alarm Notification . 7-1 7.2 Alarm

EX510-GMJ1.eng

Master unit Remote unit Local unit (Blue) (White) (Yellow) DB DG SLD FG Terminal resister DA Terminal resister DA DA Communication connector for CC-Link DB DG SLD FG DB DG SLD FG CC-Link dedicated cable CC-Link dedicated cable Drawing 2 Connect the terminal resistor between "DA-DB" (Refer to Drawing 3). Terminating resistor Drawing 4 NOTE 1.

Secondary Batteries

(mm) Bracket assembly no. 1(P) 2(A) 4 90-VHK-B1A 4 4 6 90-VHK-B1A 6 1(P): One-touch fitting 2(A): One-touch fitting 1(P): Male thread 2(A): One-touch fitting 6 8 90-VHK-B1A 8 2(A) Applicable tubing O.D. (mm) 2(A) Applicable tubing O.D. (mm) 4 6 8 4 6 8 1(P) 1(P) 1(P): Male thread 2(A): One-touch fitting Applicable tubing O.D.

Series 10-SQ1000 5 Port Solenoid Valve Plug-in Unit

RD SD EX140-SMJ1 24V 131.5 (Single, Double) 147 (3 position) 2 x M4 0V +24V 24G DA DB DG FG DIN rail clamp screw 55.9 35 5.5 (131.5) B RATE A 4 0 STATION No. 10.4 5.5 37.6 53.6 B 2 18.5 1 1 Air Preparation Equipment Pressure Control Equipment Flow Control Equipment Pressure Switches/ Pressure Sensors 12 12 e d i s U e d i s D Stations 1 2 3 4 5 6 7 8 n 10 One-touch fitting [3(R), 1(P) port

Base Mounted Type, VQ5000 Series, 5 Port Metal Seal/Rubber Seal Solenoid Valve

S. T. Manufacturing Co., Ltd.

Direct Solenoid

NPTF PodLocallon P A B EA EB sP0101/sP01r r 1/B s S sPot0zsP0112 S sP01m/sP0113 1/6 9B S/B S/B s/B S/B sPoto4/sP0114 1/. B B B sPor05/sP011s la S S S Electrictl Conncllons: Class 1 suFplates provide access of alectri(El solenoid leads from the vatue bass inlothe conduitcavitywithinthe sub-platediecasting.

LECP6_C

C 20m Vcc B-4 12 GND A-4 13 A B-5 7 A A-5 6 B B-6 9 B A-6 8 3 14.2 2 1 (5.5) 14 B1 A1 5 6 17.7 2 1 18 A6 B6 (6.3) 15 16 11 30.7 44 - 113 [5m ] A B-1 2 A A-1 1 L B B-2 6 B A-2 5 1 1.5m COM-A/COM B-3 3 3 3m COM-B/ A-3 4 5 5m Shield Vcc B-4 12 GND A-4 13 A B-5 7 A A-5 6 B B-6 9 B A-6 8 3 S 4 B-1 5 A-1 1 B-3 2 A-3 (8) 14.2 B1 A1 17.7 2 1 14 18

Air cooled Thermo-con (Compact type)

Terminating resistance FG FG FG FG Connector Connector Connector shell shell shell 2201/2W + + + + 1 1 1 2 2 2 9 9 9 SG 5 SG 5 SG 5 SG Internal connection Internal connection Internal connection Pin No. Symbol Pin No. Symbol Pin No.

LECA6_C

S [S ] 2.S [S ] S S 1 () (0 ) (+) (+) 1 + mm (-) (-) 1 mm 1 mm/s 1 mm/s 2 1 INP mm 1 31 - mm 0mm M (0mm) 100mm 1 M (100mm) (+)(-) 1 1 +(++) 12 2 (+) SW SW SW 12 1. 2. W W 1 1 W W 2 2 1 1 11 11 12 12 1 32 - 7.3 () 12 1.CW [CW] 2.CCW [CCW] 12 1. [] 2.

Speed Controller with One-touch Fitting Stainless Series Series AS-FG Elbow Type/Universal Type 1

(Refer to pages 15-6-3 to 15-6-5 for details.)