CJ5-S

LS + Stroke LX LZ ZZ + Stroke Bore size (mm) Stroke range A AL B1 B C D GA GB H H1 I J K KA LD LH LS LT LX LZ M MM NA P S X Y ZZ 20 Up to 350 18 15.5 13 37.5 16.5 8 18 12 35 5 31 M4 x 0.7 5 6 6 22 59 3 40 50 3 M8 x 1.25 29 1/8 83 15 7 124 25 Up to 400 22 19.5 17 41.5 18.5 10 18 12 40 6 33 M5 x 0.8 5.5 8 6 25 59 3 44 60 3.5 M10 x 1.25 29 1/8 83 15 7 129.5 32 Up to 450 22 19.5 17 44 20 12

CJ5-S

R V Rod side flange style (F): CG5FNS GA GB 2-Rc P FT H1 Width across flats B1 D I AL A MM Width across flats NA K KA 8-J 4-FD C0.1 FX0.15 S + Stroke ZZ + Stroke H M B Stroke range A Bore size (mm) AL B1 B C D FX FD FT GA GB H H1 I J K KA M MM NA P S ZZ 20 Up to 350 18 15.5 13 50 16.5 8 36 5.5 6 18 12 35 5 31 M4 x 0.7 5 6 3 M8 x 1.25 29 1/8 83 121 25 Up to 400 22 19.5 17 50 18.5 10 36 5.5

VQ5000

S. T. Manufacturing Co., Ltd.

Series LX Dedicated Stepper Motor Driver and Positioning Driver Series LC6D/LC6C

Power cable Black 0V 2 PD+ PD 1 Yellow 8 Brown Red FG 3 Interface cable Interface cable CCW+ CCW 2 Red 9 Green Home position switch (+) White 4 CW+ CW 3 Black 10 White Black Home position switch (OUT) 5 Motor B Motor F 4 White 11 Brown Home position switch () Brown 6 Switch cable Motor cable Motor A Motor E 5 Black 12 Yellow Limit switch (+) Yellow 7 Motor cable GND Motor D 6 Black 13 Green

HRX-OM-W002

pump mounted . 6-2 6.4 Option T1Inverter pump mounted . 6-3 6.5 Option YWith feet and no Rack Mounting bracket . 6-4 6.5.1 Option YWith feet and no Rack Mounting bracket . 6-4 6.5.2 Anti-quake bracket (Optional Accessories) . 6-5 6.6 Option ZRemoved Parts . 6-6 6.6.1 Option ZRemoved Parts . 6-6 Chapter 7 Alarm Notification and Troubleshooting . 7-1 7.1 Alarm Notification . 7-1 7.2 Alarm

Secondary Batteries

(mm) Bracket assembly no. 1(P) 2(A) 4 90-VHK-B1A 4 4 6 90-VHK-B1A 6 1(P): One-touch fitting 2(A): One-touch fitting 1(P): Male thread 2(A): One-touch fitting 6 8 90-VHK-B1A 8 2(A) Applicable tubing O.D. (mm) 2(A) Applicable tubing O.D. (mm) 4 6 8 4 6 8 1(P) 1(P) 1(P): Male thread 2(A): One-touch fitting Applicable tubing O.D.

EX510-GMJ1.eng

Master unit Remote unit Local unit (Blue) (White) (Yellow) DB DG SLD FG Terminal resister DA Terminal resister DA DA Communication connector for CC-Link DB DG SLD FG DB DG SLD FG CC-Link dedicated cable CC-Link dedicated cable Drawing 2 Connect the terminal resistor between "DA-DB" (Refer to Drawing 3). Terminating resistor Drawing 4 NOTE 1.

Series 10-SQ1000 5 Port Solenoid Valve Plug-in Unit

RD SD EX140-SMJ1 24V 131.5 (Single, Double) 147 (3 position) 2 x M4 0V +24V 24G DA DB DG FG DIN rail clamp screw 55.9 35 5.5 (131.5) B RATE A 4 0 STATION No. 10.4 5.5 37.6 53.6 B 2 18.5 1 1 Air Preparation Equipment Pressure Control Equipment Flow Control Equipment Pressure Switches/ Pressure Sensors 12 12 e d i s U e d i s D Stations 1 2 3 4 5 6 7 8 n 10 One-touch fitting [3(R), 1(P) port

Base Mounted Type, VQ5000 Series, 5 Port Metal Seal/Rubber Seal Solenoid Valve

S. T. Manufacturing Co., Ltd.

Direct Solenoid

NPTF PodLocallon P A B EA EB sP0101/sP01r r 1/B s S sPot0zsP0112 S sP01m/sP0113 1/6 9B S/B S/B s/B S/B sPoto4/sP0114 1/. B B B sPor05/sP011s la S S S Electrictl Conncllons: Class 1 suFplates provide access of alectri(El solenoid leads from the vatue bass inlothe conduitcavitywithinthe sub-platediecasting.

LECP6_C

C 20m Vcc B-4 12 GND A-4 13 A B-5 7 A A-5 6 B B-6 9 B A-6 8 3 14.2 2 1 (5.5) 14 B1 A1 5 6 17.7 2 1 18 A6 B6 (6.3) 15 16 11 30.7 44 - 113 [5m ] A B-1 2 A A-1 1 L B B-2 6 B A-2 5 1 1.5m COM-A/COM B-3 3 3 3m COM-B/ A-3 4 5 5m Shield Vcc B-4 12 GND A-4 13 A B-5 7 A A-5 6 B B-6 9 B A-6 8 3 S 4 B-1 5 A-1 1 B-3 2 A-3 (8) 14.2 B1 A1 17.7 2 1 14 18

Air cooled Thermo-con (Compact type)

Terminating resistance FG FG FG FG Connector Connector Connector shell shell shell 2201/2W + + + + 1 1 1 2 2 2 9 9 9 SG 5 SG 5 SG 5 SG Internal connection Internal connection Internal connection Pin No. Symbol Pin No. Symbol Pin No.

LECA6_C

S [S ] 2.S [S ] S S 1 () (0 ) (+) (+) 1 + mm (-) (-) 1 mm 1 mm/s 1 mm/s 2 1 INP mm 1 31 - mm 0mm M (0mm) 100mm 1 M (100mm) (+)(-) 1 1 +(++) 12 2 (+) SW SW SW 12 1. 2. W W 1 1 W W 2 2 1 1 11 11 12 12 1 32 - 7.3 () 12 1.CW [CW] 2.CCW [CCW] 12 1. [] 2.

Speed Controller with One-touch Fitting Stainless Series Series AS-FG Elbow Type/Universal Type 1

(Refer to pages 15-6-3 to 15-6-5 for details.)

Pulse Valve

MOperation sequence diagram M Operation sequence diagram 4 output points Two-time hitting only for CH2 ON for 1 s OFF for 2 s Stop signal ONt For CH1 OFFt CH2 OFFt CH3 Power supply ON time CH4 2 s 1 s tA tA 1 s CH1 2 s 2 s 2 s 2 s OFFt 1 s 1 s 1 s 1 s CH2 2 s Two-time hitting 1 s CH3 2 s 1 s CH4 Power switch ON (Output start) Power switch OFF (Output stop) Cascade Connection (Multiple-board

LV50-OMQ0002

(at 80 mA load current) Response time *5 *7 0.25 s/0.5 s/1 s/2 s/5 s Outputprotection Short circuit protection Output Mode Select from Hysteresis mode, Window comparator mode, Accumulated output mode or Accumulated pulse output mode Response time*6*7 0.25 s/0.5 s/1 s/2 s/5 s Analogue output Voltage output Output voltage: 1 to 5V (Output impedance approx. 1k) Current output Output current

PF-OMM0004_C

1 s/2 s -65No.PF-OMM0004-D PF3W704 PF3W720 PF3W740 PF3W711 PF3W721 6 0.5 s/1 s/2 s 15 V 1 k 420 mA DC12 V 300 DC24 V 600 0.4 V ()30 ms 2 4 7 /6 11 ) 5 / 12 DC1224 V10 50 mA IP65 050 () 3585R.H.() 7 AC1000V 1 50M (DC500V ) CE UL(CSA)RoHS PPSSUS304FKMSCS13 PPSSUS304 FKM 3/8 3/81/2 1/23/4 3/41 11/411/2 -66No.PF-OMM0004-D PF3W704 PF3W720 PF3W740 PF3W711 PF3W721 210 g 260 g 410

LFE-OMY0008

0.5 s/1 s/2 s/5 s 6 7 0.25 s/0.5 s/1 s/2 s/5 s 15 V 1 k 420 mA 600 2 (4 7 2 /6 11 ) 5 / 12 DC24 V10 45 mA () 64 No.LFE*-OMY0008 LFE1 LFE2 LFE3 9 IP65 050 () 3585R.H.() CE RoHS PPSFKM 3/8(10 A) 1/2(15 A) 3/4(20 A) 1(25 A) () 8 340 g 400 g 520 g 680 g 166 [] 20L/min 3(69 []) 4OFF (2 5 ) 5 100 (24 5 100 500 9.5 ) 563% 663% 0.25s0.5s 0.05s 7(69 []) 8 9M12 10DC(-)/+ 65 No.LFE

4-channel Flow Monitor ( compatible)

(page 72) Y U16 0x0064 5 R/W (100) Setting of OUT1 delay time at ON. 0x0 ~ 0x1770 (0 ~ 6000) 0.01 s increment dtH1 (OUT1 delay time at ON) Y U16 0x0 6 R/W (0) dtL1 (OUT1 delay time at OFF) Setting of OUT1 delay time at OFF. 0x0 ~ 0x1770 (0 ~ 6000) 0.01 s increment Y U16 0x0 7 R/W (0) OUT1 Accumulated threshold value setting (L) Consider the accumulated inclination when reading or writing

HEC-OM-S008

Host Computer Thermo-con RS-485 RS-485 Symbol Pin No Symbol FG Connector shell FG + 1 + 9 SG 5 FG Figure1-1 Communication Connection (RS-485) Host Computer Thermo-con RS-232C RS-232C Symbol Pin No Symbol FG Connector shell FG RD 2 RD SD 3 SD SG 5 SG RS Short CS Figure1-2 Communication Connection (RS-232C) 1-1 HECR Specifications of Communication Method 2 Specifications of Communication Method