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lsed keep the dhaust port ' o r r o r r q n o f F c r . o _ d ' * _ s " e ' o r o ' e r q d r Nole 1) Dolbe wrng specl caton Singe, doibe a.d 3 posilion soenoid E@s can be lsed on a manrfodslatons Useolasrnqsolenodlvi sutrn an unused onlrolsignal li th$ rs notdesred orderwrlh aspecilied layout No1e2)speciedlayoul: ndlelvnn9specf catonsonamanlold sp6ifilio. sh@t (No1e thal doube and 3 posl

Model Selection 1

In the case of liquid: P Q = 1.9 x 106Av (9) G Q : Flow rate [l/min] Av : Flow coefficient [m2] P : Pressure difference [MPa] G : Relative density [water = 1] In the case of saturated aqueous vapor: Q = 8.3 x 106Av P(P2 + 0.1) (10) Q : Flow rate [m3/s] Av : Flow coefficient [m2] P : Pressure difference [Pa] P1 : Relative density [MPa]: P = P1 P2 P2 : Relative density [MPa] Front matter 4

0.5

(ON when there is no problem) B5 White A5 Purple Error signal OUT (B contact) Wiring Circuit Shield IZF21/31 IZF21/31 Shield Green F . G. Ground the F.G. cable with a resistance of 100 or less Green F . G.

Rotary Actuator NCRB1BW Series Single Vane / Double Shaft

(D NCDRB10W10.15.20.30 Dimensions Oside eorts: NcRBlowo-os Top ports: I{CFBIOWO-OSE Tt t F f l I l . ' ,-t L 1 5 1 I Oim. for NCFETOWIO l) : Dim tor NCnBtowl5 l Flans ("F') ,dl P4 ct F > 1 '. 111 '.I!.

NCRBIBwserbs

(D NCDRB10W10.15.20.30 Dimensions Oside eorts: NcRBlowo-os Top ports: I{CFBIOWO-OSE Tt t F f l l . ' ,-t L 1 5 1 I I Oim. for NCFETOWIO l) : Dim tor NCnBtowl5 l Flans ("F') ,dl P4 ct F > 1 '. 111 '.I!.

VQZ100/200/300

VQZ100/200/300 Body Ported How to Order Valve VQZ200/300 VQZ 2 1 2 5 M C6 Series 2 3 VQZ200 Body width15mm VQZ300 Body width18mm Bracket F None With bracket SY SYJ Configuration VK Port size {2(A)port} (A) 2 N.C.

7.4

VQ1000-FPG-C4M5-D: 6 sets Double check block 757 S0700 Series Construction Body Ported Construction 2(B) (A)4 S0716 2-Position Single r u e w q 3(R2) (R1)5 1 (P) t y i 2-Position Double S0726 2(B) (A)4 r u e w q 3(R2) (R1)5 1 (P) t y i 3-Position Closed Center S0736 r u e w q 2(B) (A)4 (R1)5 1 (P) 3(R2) t y i 4-Position Dual 3-Port Valve S07A6 r u e w q 2(B) 4(A) 5(R1) 3(R2) 1(P) N.C. + N.C

For Dry Air, Pilot Operated Series VQ20/30 2 Port Solenoid Valve

VNl VQ 4.3-3 2 Port Solenoid Valve SeriesVQ20/30 For Dry Air, Pilot Operated Single Unit How to Order Valve VQ A C6 2 1 1 1 G Series/Orifice Option Series VQ20 VQ30 Effective orifice 3.4mm 4.8mm : None Symbol 2 3 F: With bracket Switching N.C. (A) 2 L: L style (VQ20 Only ) 1 1 (p) Note) Consult SMC if N.O. is desired. Note) If ordering both options, indicate "LF".

VK300

) 258-9200-www.stevenengineering.com Nil Rc G NPT NPTF Option F N T Option Part No.

VKF300

How to Find the Flow Rate (at air temperature of 20C) Subsonic flow when P1 + 0.1013 < 1.89 (P2 + 0.1013) Q = 226S P(P2 + 0.1013) Sonic flow when P1 +0.1013 1.89 (P2 + 0.1013) Q = 113S (P1 + 0.1013) Q: Air flow rate [l/min(ANR)] S: Effective area (mm) P: Pressure drop (P1-P2) [MPa] P1: Upstream pressure [MPa] P2: Downstream pressure [MPa] Maintenance Correction for different air temperatures

Series: VQZ1000, Configuration: 2 Position Single, Seal Type: Metal Seal, Function: Standard (0.35W DC, AC), Coil Voltage: 24VDC, Lead Wire: M Plug Connector w/Lead Wire, Light & Surge Suppressor, Manual Override: Non-locking Push Style, IP65 Compliant: No, Port Size: ø4 One-touch Fitting, Thread: Rc, Foot Bracket: None, CE Compliant: CE Marked

Series: 1 (VQZ1000), Configuration: 1 (2 Position Single), Seal Type: 0 (Metal Seal), Function: Standard (0.35W DC, AC), Coil Voltage: 5 (24VDC), Lead Wire: M (M Plug Connector w/Lead Wire, Light & Surge Suppressor), Manual Override: Non-locking Push Style, IP65 Compliant: No, Port Size: C4 (ø4 One-touch Fitting), Thread: Rc, Foot Bracket: None, CE Compliant: Q (CE Marked)

VK3000

N T Rc S Port size Type VK3140 G P port: Rc 1/8 1 8 01 Rc C6 6 cassette NPT R port: Rc 1/8 NPTF B port: Rc 1/8 A port: Rc 1/8 Common SUP/Individual EXH Type 21: Body ported (A, B port top ported) How to Order Applicable solenoid valve VK3120M5 VK312001 VK332M5 VK33201 A port: Rc 1/8, M5 x 0.8 VV5K3 21 05 A, B port: Rc 1/8, M5 x 0.8 VK3120 VK332 Thread type Valve stations Nil F N T Rc 01 1

Series VQ1000 10- Base Mounted 21- Plug-in Unit

[Option] How to Order Manifold VV5Q 1 1 08 C6 U1 F 10 CE compliant Series Nil CE compliant VQ1000 1 Q Note) For CE compliant models, DC-type only.

Series: VQZ1000, Configuration: 2 Position Single, Seal Type: Metal Seal, Function: Standard (0.35W DC, AC), Coil Voltage: 24VDC, Lead Wire: M Plug Connector w/Lead Wire, Light & Surge Suppressor, Manual Override: Non-locking Push Style, IP65 Compliant: No, Port Size: ø4 One-touch Fitting, Thread: Rc, Foot Bracket: Bracket, CE Compliant: -

Series: VQZ1000, Configuration: 2 Position Single, Seal Type: Metal Seal, Function: Standard (0.35W DC, AC), Coil Voltage: 24VDC, Lead Wire: M Plug Connector w/Lead Wire, Light & Surge Suppressor, Manual Override: Non-locking Push Style, IP65 Compliant: No, Port Size: M5 Thread, Thread: Rc, Foot Bracket: Bracket, CE Compliant: -

Series: 1 (VQZ1000), Configuration: 1 (2 Position Single), Seal Type: 0 (Metal Seal), Function: Standard (0.35W DC, AC), Coil Voltage: 5 (24VDC), Lead Wire: M (M Plug Connector w/Lead Wire, Light & Surge Suppressor), Manual Override: Non-locking Push Style, IP65 Compliant: No, Port Size: C4 (ø4 One-touch Fitting), Thread: Rc, Foot Bracket: F (Bracket)

Series: 1 (VQZ1000), Configuration: 1 (2 Position Single), Seal Type: 0 (Metal Seal), Function: Standard (0.35W DC, AC), Coil Voltage: 5 (24VDC), Lead Wire: M (M Plug Connector w/Lead Wire, Light & Surge Suppressor), Manual Override: Non-locking Push Style, IP65 Compliant: No, Port Size: M5 Thread, Thread: Rc, Foot Bracket: F (Bracket)

3 Port Direct Operated Poppet Solenoid Valve Series VKF300 1

(Values at the initial period) VG VP JIS Symbol (A) 2 S070 VQ Construction 1 (P) 3 (R) VKF q t o r e VQZ y VZ y VS VFN i w 1(P)2(A)3(R) P R Description Component Parts No. q w e r t y u Note Material Aluminum die-casted Aluminum die-casted Aluminum Resin Stainless steel Steel Solenoid coil assembly Sub-plate Body Spool/Sleeve Manual override Return spring Bracket assembly Gasket assembly

Rotary Actuator: Free Mount Type/Vane Style Series CRBU2

Symbol: C5 Applicable to single vane style only Symbol: C6 Applicable to single vane style only Start of rotation is 45 up from the bottom of the vertical line to the left side. Rotation tolerance for CRBU2W10 is . A parallel key is used instead of chamfer for size 40. Start of rotation is 45 up from the bottom of the vertical line to the left side.