Vacuum System Peripherals:

Power supply voltage S L Straight type 3 m Right angle type 3 m Without cable connector Flow Characteristics 0 1 24 VDC 12 to 15 VDC N 0 Option Input signal 10 Bracket 0 1 2 3 4 Current type 4 to 20 mA DC Current type 0 to 20 mA DC Voltage type 0 to 5 VDC Voltage type 0 to 10 VDC Preset input 20 Output pressure (kPa) Nil B Without bracket Flat bracket L-bracket 30 40 C Option 50 Monitor

4 Port Direct Operated Poppet Solenoid Valve Series VQD1000 1

VZ VZ 3 5 0 X20 ( ) VF VFR Entry is the same as standard products.

Series 10-SYJ3000/5000/7000 Rubber Seal 4/5 Port Solenoid Valve

Rc G NPT NPTF Nil F N T A, B port 1/8 Stations Symbol Note A B 8 6 4 2 0 03 3 stations Applicable solenoid valve Refer to page 326. Applicable blanking plate assembly Refer to page 329.

Modular Type Air Filter Series AF

0 !1 Drain q r e w t i u y o !0 !

Antistatic One-touch Fittings Series KA

(mm) Polyurethane Soft nylon Effective orifice (mm 2) Weight (g) L M D Part No. 4 3.2 KAH23-00 31.5 32.5 34.5 18.5 21 22 9.6 10.4 12.8 15.5 16 17 15.2 18.5 20.9 KAH04-00 KAH06-00 13.1 13.1 5.6 5.6 3.4 2.9 46.1 46.1 29.5 29.5 18.0 18.0 5 3 3 8 6 KAH08-00 38.5 42.5 44.5 7 11 12 10 KAH10-00 KAH12-00 14 Different Dia. Straight: KAH Applicable tube O.D.

VQ7-6/7-8

0 !0 t t r i w e r i u w y e q Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com q VQ7-8-FG-DVQ7-8-FG-D-R !0 !0 t t r i w y e q r i w e q VQ7-8-D-R FHG FJG FIG VQ7-8-DFHG FJG FIG !0 !0 t t r i w y e q r i w e q VQ7-8-FPG-D!

Electric Actuator/Slider Type

[kg] 1,500 1,500 1,500 1,000 1,000 1,000 500 500 500 Mep m 0 0 00 0 5 10 15 20 0 4 2 6 8 10 10 20 30 L4 Work load [kg] Work load [kg] Work load [kg] 1,500 1,500 1,500 1,000 1,000 1,000 500 500 500 Mey m 0 0 0 0 0 0 10 20 30 4 2 6 8 10 5 10 15 20 L5 Work load [kg] Work load [kg] Work load [kg] 20 Series LEFS Table Accuracy A side B side Model Traveling parallelism [mm] (Every 300 mm) q C

AC Servo Motor Driver (CC-Link Type)

RX RX RX RX RX RX RX RX (n+2)8 (n+2)9 (n+2)7 (n+2)6 (n+2)5 (n+2)4 (n+2)3 (n+2)2 Point table No. output 3 (PT2) RX(n+2)4 0 0 0 0 0 0 1 0 1 1 0 0 0 0 0 2 0 0 Point table No. output 4 (PT3) RX(n+2)5 1 1 0 0 0 0 0 3 0 0 1 4 0 0 0 0 0 0 Point table No. output 5 (PT4) RX(n+2)6 Point table No. output 6 (PT5) RX(n+2)7 1 1 1 1 1 254 1 1 0 1 255 1 1 1 1 1 1 1 Point table No. output 7 (PT6) RX(n+2)8

Vacuum

See example on page 14. 0 1 ^ oo7 J 005 fl o.oe E ,* c', 001 .F o.ooz d0.005 _a z I z 0.003 0.002 I it E 0 001 0.0007 0.0005 0 . 2 0 . 3 0 5 0 . 7 I 2 3 5 7 1 0 Length of Tube L (m) 0 5 1 0 1 5 m 0 1 2 3 4 5 6 Suclion Flow Rals \ !

Vacuum

(mm) 0 2 o 2 0 4 a 4 0 6 0 6 0 8 0 8 1 0 0 1 0 13 s13 1 6 s 1 6 20 s2O 25 o25 92 o32 40 s4O 50 o50 S Silicone rubber U Urethane rubber F Fluorine rubber GN Conductive NBF (o2-o16) GS Qonductive Silicone (o2-o 16) Vacuum thread dia.)

HRX-OM-Q026

Set temperature 40.0 oC 5.0 to 55.0 oC (104.0 oF) (41.0 to 131.0 oF) (-)2 Circulating fluid Monitoring method AL03 discharge temp. 0 0 to 3 rise Monitoring start timer ---(0)3 0 to 600 minutes Range over detection timer 5 5 to 999 seconds 1: Values in F are displayed when SE12 is set to F. 2: Default value when AS03 is set OFF. 3: Default value when AS21 is set to either 2 or 3. 5.22 Alarm

I

E R I E S P S 1 0 0 0 / 1 1 0 0 L PS 00 L Grommet and Lead Wire 3m W I R I N G M E T H O D P I P I N G M E T H O D RO6 6 Reducer R07 1/4 Reducer S W I T C H S P E C I F I C AT I O N 10 2-Wire System (for Positive Pressure) 11 2-Wire System (for Vacuum and Residual Pressure) D I M E N S I O N S PS1000/1100 S W I T C H O U T P U T F U N C T I O N Courtesy of Steven Engineering, Inc. !

VZS

0 Refer to How to Order Light Cover Assembly on page 3-7-8.

Modular Type Filter Regulator Series AW

Refer to Features 1 for details. 57 Filter Regulator AW10 to 40 Flow Characteristics (Representative values) Condition: Inlet pressure 0.7MPa AW10 AW30 Rc 3/8 AW40-06 Rc 3/4 M5 0.6 0.6 0.6 0.5 0.5 0.5 Outlet pressure MPa Outlet pressure MPa Outlet pressure MPa 0.4 0.4 0.4 0.3 0.3 0.3 0.2 0.2 0.2 0.1 0.1 0.1 0 150 125 100 75 50 25 0 1000 0 3000 4000 1000 2000 Flow rate L/min (ANR) 0 0 0 500

VPA4

VPA4154-00 3 pcs. VPA4254-00 2 pcs. XT038N-4A 1 pc.

Air Pilot Operated Series NVSA

f .c, 0.51 02.9t 0./(!3 fl0.91 o.12 (10.7) 0.31 a.s, Mlmelers In Pargnlheseg A I c D E F o H 1.75 (44.4) 1.25 (31.7t 0.gi e5.3) 1.11 {28.9) 0.75 (1s.1)0.6t1 (16.

VY511, VYU5

SW RESET RUN2 RUN1 OV INPUT 6 7 5 8 4 + 9 3 SET UP A 2 B 1 0 C D 1 E F 0 to 10V V R 1 OUTPUT SET UP BALANCE CONTROLLER VYU5-D 2 V R 2 OV ERR.

Ozone Resistant

40 30 20 10 0 Initial value Measuring point 6 4.

TM

6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com 8 TMA-08 KQL08-00 KQT08-00 KQH08-00 KEA10 KEB10 KEA12 KEB12 KEC-03 6 TMA-10 KQL10-00 KQT10-00 KQH10-00 6 TMA-12 KQL12-00 KQT12-00 KQH12-00 Dimensions: Multi-holder M4 round head screw (Pitch) N-holding part Cutting groove for separation Applicable tubing O.D.

Clean One-touch Fittings For Driving Air Piping KPQ/KPG Series

-00 KPQL10-00 18.5 16 25 35 23 6.8 28.4 M L 8 12 KPGL12-00 KPQL12-00 20.9 20 40 50 24 7.5 30.4 Note 1) D indicates the maximum diameter.