Seal Type: Rubber, Configuration: 2-position, Dual Pressure, Number of Solenoids: Single, Voltage: 24VDC, Pilot: -, Subplate: -, Option: -

Seal Type: S (Metal), Configuration: YZ (2-position, Dual Pressure), Number of Solenoids: D (Double), Voltage: 1Z (100VAC/50Hz, 115VAC/60HZ), Pilot: V1 (External Individual Pilot Exhaust)

Seal Type: S (Metal), Configuration: YZ (2-position, Dual Pressure), Number of Solenoids: D (Double), Voltage: 1Z (100VAC/50Hz, 115VAC/60HZ), Pilot: V1 (External Individual Pilot Exhaust)

Seal Type: R (Rubber), Configuration: YZ (2-position, Dual Pressure), Number of Solenoids: S (Single), Voltage: 1Z (100VAC/50Hz, 115VAC/60HZ), Pilot: V1 (External Individual Pilot Exhaust)

Table of Contents

FG-S-A02 VQ7-8-FG-S-A03 VQ7-6-FG-S-A03 VQ7-8-FG-S-A04 VQ7-6-FG-S-RA02 VQ7-8-FG-S-RA03 VQ7-6-FG-S-RA03 VQ7-8-FG-S-RA04 3-10-5 6 For details about certified products conforming to international standards, visit us at www.smcworld.com.

VFS

: E/EZ Conduit terminal: T/TZ DIN terminal: D/DZ/Y/YZ Applicable heavy-duty code O.D. 6 to 8 (Y: 4.7 to 7) Applicable heavy-duty code O.D. 6 to 8 Lead wire O.D.

Modular Design with Uniform Body Style

) AC30B-V1-D AC20B-V1-D F N A J M F N A J M S S R R C B B C V1 V2 Q1 Q1 V1 V2 Q2 Q1 Q1 K K OUT IN OUT IN 2 x P1 (Port size) 2 x P1 (Port size) U EXH U EXH P3 (Port size) P2 G Clearance for maintenance (Pressure gauge port size) Drain P3 (Port size) P2 (Pressure gauge port size) E G Clearance for maintenance Drain AC40B-V1-D to AC40B-06-V1-D A N F M J S R C B V2 V1 Q2 Q1 Q1 IN OUT 2 x P1 (

VQ7-6/7-8

VQ7-6-FG-DVQ7-6-FG-D-R FHG FJG FIG FHG FJG FIG VQ7-6-DVQ7-6-D-R VQ7-6-FPG-DValve replacement parts FHG FJG FIG FHG FJG FIG Description Material VQ7-6-FG-SVQ7-6-FG-DVQ7-6-FPG-DVQ7-6-FG-S-R VQ7-6-FG-D-R VQ7-6-D-R VQ7-6-DNo.

VQ7-6/7-8

FG-S-A02 VQ7-8-FG-S-A03 VQ7-6-FG-S-A03 VQ7-8-FG-S-A04 VQ7-6-FG-S-RA02 VQ7-8-FG-S-RA03 VQ7-6-FG-S-RA03 VQ7-8-FG-S-RA04 3-10-5 6 For details about certified products conforming to international standards, visit us at www.smcworld.com.

CATALOG

1.5 67.3 12 92.8 13.5 19 21.9 6 RB2015 RBC2015 6 18.2 18 4 18 18 62.2 88.2 M20 x 1.5 73.2 18 105.2 17 27 31.2 6 RB2725 RBC2725 8 25.2 25 5 25 25 86 124 M27 x 1.5 99 25 147 23 36 41.6 6 D I M E N S I O N S C A P D I M E N S I O N S S T O P P E R N U T Dimensions Dimensions Parts No.

V

O.D size d D1 D2 D3 L1 L2 L3 M1 Weight AQ240F-04-00 4 9.5 8.9 10 39.3 5 14.1 13 4.2 B O D Y S I Z E AQ240F-06-00 6 11.5 11 10 43.9 6 15.2 14 5.2 AQ340F-06-00 6 11.5 11 11.8 45.2 6.3 20 14 10.4 2 M5 3 18 T U B E C O N N E C T I O N F Built-in One Touch Tube Connection OD S I Z E D I M E N S I O N S S E R I E S AQ240F/340F W I T H E X H A U S T TA K E O F F Metric 04 4mm 06 6mm Imperial 07

2

A 3.2 7.2 12 19.1 26.2 19.1 30.6 29.2 27.5 26.1 13.3 9 (9) AS221F-01-04(S)A 4 8.2 AS221F-01-06(S)A 6 10.4 10 (9) AS221F-01-08(S)A 8 13.2 22.4 29.5 14.2 11 (10) AS221F-01-10(S)A 10 15.9 25.3 32.4 15.6 12 (11) AS221F-02-23(S)A 3.2 1/8 13 (12.7) 7.2 20.9 30.2 (30.3) 22.6 36.6 35 31.1 29.5 13.3 18 (19) AS221F-02-04(S)A 4 8.2 AS221F-02-06(S)A 6 10.4 23.4 32.7 (32.8) AS221F-02-08(S)A 8 13.2 23.9

VFR

How to Order Sub-plate Assembly System Components System Solenoid valve Speed controller Silencer Tube bore x Length Pilot type Nil R External pilot Internal pilot AS2000-01 (S = 2.5 mm2) AN110-01 (S = 35 mm2) AS3000-02 (S = 12 mm2) AN110-01 (S = 35 mm2) AS3000-02 (S = 12 mm2) AN110-01 (S = 35 mm2) AS4000-02 (S = 21 mm2) AN110-01 (S = 35 mm2) AS4000-02 (S = 21 mm2) AN110-01 (S = 35 mm2) T0425

HRX-OM-X084

Option . 6-1 6.1 Option DMElectric conductivity control function , DI water (pure water) piping . 6-1 6.1.1 Option DMElectric conductivity control function , DI water (pure water) piping . 6-1 HRR Series HRX-OM-X084 Contents 6.2 Option MDI water (Pure water) piping . 6-2 6.2.1 Option MDI water (Pure water) piping . 6-2 6.3 Option T1Inverter pump . 6-2 6.3.1 Option T1Inverter pump . 6-2 6.4

3 Port Solenoid Valve, VQZ Series, Base Mounted and Body Ported

Descrption Subplate Note VQZ100-S-01T 1 Body VQZ100 1/8" Aluminum die cast Metal seal VQZ200-S-01T Spool/Sleeve VQZ200 1/8" Stainless steel 2 Rubber seal VQZ200-S-02T Spool valve VQZ200 1/4" Aluminum/NBR 3 VQZ300-S-02T Piston VQZ300 1/4" Resin 4 VQZ300-S-03T Pilot valve VQZ300 3/8" 26 Base Mounted Type Series VQZ Dimensions: VQZ100 Dimensions: VQZ100 (mm) Valve Scale: 45% Grommet (G): VQZ115

Booster Regulator/Air Tank

VBAT10A1 S Note) A safety valve port is provided only when option R or S is selected.

VQZ1000/2000/3000

One-touch fitting assembly for 4 (22.5) 0.5 2n-C3, C4, C6, M5 C3: One-touch fitting assembly for 3.2 C4: One-touch fitting assembly for 4 C6: One-touch fitting assembly for 6 C6: One-touch fitting assembly for 6 45.5 2.5 M5: M5 thread M5: M5 thread 10.5 (5) Dimensions Formula L1 = 11n + 20 n: Station (Maximum 24 stations) 21.5 L n 1 2 7.5 3 4 5 6 7 8 11 9 10 12 29 18 31 42 53 64 75 86 97

Seal Type: Rubber, Configuration: 3-Position, Dual Pressure Center, Number of Solenoids: Double, Voltage: 24VDC, Pilot: External Individual Pilot Exhaust, Subplate: -, Option: -

Seal Type: Rubber, Configuration: 3-Position, Pressure Center, Number of Solenoids: Double, Voltage: 24VDC, Pilot: External Individual Pilot Exhaust, Subplate: -, Option: -

Seal Type: Rubber, Configuration: 3-Position, Exhaust Center, Number of Solenoids: Double, Voltage: 24VDC, Pilot: External Individual Pilot Exhaust, Subplate: -, Option: -