ZX

Function ZL Solenoid valve/Air operated valve Operation ZY 3, 5, 6, 12, 24 VDC, 100, 110 VAC (50/60 Hz) Power supply voltage Vacuum pressure switch unit Series ZS ZQ Vacuum switch Adsorption confirmation switch Adsorption confirmation switch Series Vacuum switch ZF Set pressure range 0 to 101 kPa 20 kPa to 101 kPa 0 to 101 kPa 20 kPa to 101 kPa 3% or less 0.5 kPa Hysteresis ZP 2 to 25 0.3

Combination Cylinder

69 69 76 73.5 0.033 83.5 64.5 0.033 0 0.033 0 0.033 26 83.5 64.5 70 100.5 90.5 32 Boss cut (mm) ZZ 181 195 197 233 Bore 20 25 32 40 GL 6 9 9 11 GQ 4 7 7 8 GR 4 7 7 7 H 41 45 45 50 H1 5 6 6 8 H2 8 8 8 10 I 28 K 5 5.5 5.5 7 MM N 15 15 15 NA 24 30 NN PG 22 27 27 29 PH 19.5 24 24 24 PL 20 24 24 24 PW 38 41 41 41 S 127 137 139 167 Z 37 41 41 45 Bore ZZ 168 182 184 217 P 20 25 32 40 1/8 1/8 1/8

Vacuum Pad

41 41 43 43 43 154 189 225 156 191 227 103 103 103 103 128 128 128 128 63 63 63 65 65 65 115 151 191 226 115 151 191 226 186 222 262 297 186 222 262 297 01 01 01 01 01 01 01 01 01 01 01 01 01 01 01 01 01 01 01 01 57 Series ZP Heavy-duty Pad Dimensions: With Buffer 40 50 01 ZPX HB -A18 01 ZPX HB -A18 63 80 01 ZPX HB -A22 100 125 Width across flat 17 (Hexagon) 1/8 (Rc, NPT, NPTF) 50 21 M22

Vacuum Pad

41 41 43 43 43 154 189 225 156 191 227 103 103 103 103 128 128 128 128 63 63 63 65 65 65 115 151 191 226 115 151 191 226 186 222 262 297 186 222 262 297 01 01 01 01 01 01 01 01 01 01 01 01 01 01 01 01 01 01 01 01 57 Series ZP Heavy-duty Pad Dimensions: With Buffer 40 50 01 ZPX HB -A18 01 ZPX HB -A18 63 80 01 ZPX HB -A22 100 125 Width across flat 17 (Hexagon) 1/8 (Rc, NPT, NPTF) 50 21 M22

Vacuum Pad

41 41 43 43 43 154 189 225 156 191 227 103 103 103 103 128 128 128 128 63 63 63 65 65 65 115 151 191 226 115 151 191 226 186 222 262 297 186 222 262 297 01 01 01 01 01 01 01 01 01 01 01 01 01 01 01 01 01 01 01 01 57 Series ZP Heavy-duty Pad Dimensions: With Buffer 40 50 01 ZPX HB -A18 01 ZPX HB -A18 63 80 01 ZPX HB -A22 100 125 Width across flat 17 (Hexagon) 1/8 (Rc, NPT, NPTF) 50 21 M22

Vacuum Pad

41 41 43 43 43 154 189 225 156 191 227 103 103 103 103 128 128 128 128 63 63 63 65 65 65 115 151 191 226 115 151 191 226 186 222 262 297 186 222 262 297 01 01 01 01 01 01 01 01 01 01 01 01 01 01 01 01 01 01 01 01 57 Series ZP Heavy-duty Pad Dimensions: With Buffer 40 50 01 ZPX HB -A18 01 ZPX HB -A18 63 80 01 ZPX HB -A22 100 125 Width across flat 17 (Hexagon) 1/8 (Rc, NPT, NPTF) 50 21 M22

Vacuum Module Series ZX

ZH Operation Solenoid valve/Air operated valve ZU Power supply voltage 3, 5, 6, 12, 24 VDC, 100, 110 VAC (50/60 Hz) ZL Vacuum pressure switch unit Series ZS Adsorption confirmation switch Vacuum switch Adsorption confirmation switch Vacuum switch Series ZY Set pressure range 0 to 101 kPa 20 kPa to 101 kPa 0 to 101 kPa 20 kPa to 101 kPa ZF 3% or less 0.5 kPa Hysteresis 2 to 25 0.3 to 1.2 2

Modular/F.R.L. Units Series AC

AD48 AD47 AD38 AD37 Y300 AKM3000-(01) 02 IS1000M-30 Y310-(01) 02 Float type auto drain Y400 AKM4000-(02) 03 IS1000M-40 Y410-(02) 03 02 VHS40-03 04 02 E400-03 04 06 02 IS1000E-4003 04 06 Y44-02 03 Y500 Y600 Spacer Check valve Note 6) Note 7) Pressure switch Note 7) IS1000M-60 IS1000M-50 Y510-(02) 03 Y610-03 (04) Y610-(03) 04 T-interface Note 6) Note 7) Y110-M5 VHS50-06 10 VHS20-01 02 VHS30

VM

plunger VM220-02-05 VM230-02-05 Polyacetal roller Hard steel roller Roller plunger VM220-02-06 VM220-02-06S VM230-02-06 VM230-02-06S Cross roller plunger VM220-02-07 VM220-02-07S VM230-02-07 VM230-02-07S Polyacetal roller Hard steel roller Toggle lever VM220-02-08 VM230-02-08 VM230-02-30R VM230-02-30B VM230-02-30G VM230-02-30Y VM220-02-30R VM-30AR Red Push button (Mushroom) VM-30AB Black

Series CQS Compact Cylinder Compact Type ø12, ø16, ø20, ø25

A A1 MM U1 L1 RR1 A1 L1 E1 MM RR1 U1 0.4 0.2 + 0.2 + 0 0.2 0.4 0.2 0.4 10 12 16 20 +0.002 0 5 6.4 8 10 0.2 0.4 0.1 0.3 0.2 0.4 0.2 0.4 +0.002 0 5 6.5 8 10 #8-32UNC 10 12 16 20 12 16 20 25 10 12 16 20 14.6 16.6 21 25.6 RCS-01 RCS-015 RCS-02 RCS-025 RCD-01 RCD-015 RCD-02 RCD-025 21.5 32 34 41 6 6 6 8 16 25 25 30 #8-32UNC #8-32UNC #10-32UNF 1/4-28UNF 6.3 12 10.3 18 7 14 11.5 14

3-Screen Display High-Precision Digital Pressure Switch ∗1 ® New New The ∗1  Excluding the Z/ISE20B-L compatible type has been added to the 20B series.

kPa 100 kPa 100 kPa 100 kPa 101 kPa 100 kPa 100 kPa 100 kPa 500 kPa 500 kPa 1.5 MPa 500 kPa 500 kPa 2 MPa 4 MPa 2 outputs (NPN/PNP)/IO-Link4 2 outputs (NPN/PNP) Analog (Voltage/Current)5 Analog (Voltage/Current) IP65 IP65 M5 female thread, R1/8, NPT1/8 R1/41, NPT1/41, G1/41, Rc1/8, URJ1/42, TSJ1/43 Copy function5, Auto-shift function5 Copy function, Auto-shift function 1 M5 female threaded

Table of Contents

Driver Non-standard motor electric actuator Standard motor electric actuator Controller How to Order How to Order B LG1 02 1 Compatible model 1 G LG1 05 Cable length G R Y Matsushita Electric Industrial Co., Ltd. Mitsubishi Electric Corporation Yaskawa Electric Corporation 02 03 04 05 05 5m Cable length 2m 3m 4m 5m Applicable cables Model Manufacturer part no.

CL

168 25 M26 x 1.5 5.5 24 M10 x 1.25 15 30 24 27 137 195 41 25 182 32 M26 x 1.5 5.5 24 M10 x 1.25 15 34.5 24 27 139 197 41 32 184 40 M32 x 2 7 24 M14 x 1.5 21.5 42.5 24 29 167 233 41 40 217 With Rod Boot h l Bore size (mm) e f 1 to 50 1 to 50 51 to 100 101 to 150 151 to 200 201 to 300 301 to 400 401 to 500 51 to 100 101 to 150 151 to 200 201 to 300 301 to 400 401 to 500 12.5 68 81 93 106 131

4/5 Port Air Operated Valve Series SYJA3000

ARBYJ5000-00-P How to Order Type 41 (5 Port/Base mounted) SS5YJ5 41 05 M5 Stations 02 2 stations P, R port thread type -+ -+ R port 1/8 : : R P Nil F N T Rc G NPT NPTF 20 20 stations A, B port M5 x 0.8 M5 M5 x 0.8 A, B port size P port 1/8 Applicable solenoid valve SYJ540SYJ543SYJ550SYJ553Type 42 (5 Port/Base mounted) How to Order SS5YJ5 42 05 C6 Stations Applicable blanking plate assembly

CL

168 25 M26 x 1.5 5.5 24 M10 x 1.25 15 30 24 27 137 195 41 25 182 32 M26 x 1.5 5.5 24 M10 x 1.25 15 34.5 24 27 139 197 41 32 184 40 M32 x 2 7 24 M14 x 1.5 21.5 42.5 24 29 167 233 41 40 217 With Rod Boot h l Bore size (mm) e f 1 to 50 1 to 50 51 to 100 101 to 150 151 to 200 201 to 300 301 to 400 401 to 500 51 to 100 101 to 150 151 to 200 201 to 300 301 to 400 401 to 500 12.5 68 81 93 106 131

Electric Actuators

Performance/Specifications General specifications LC5-1-T1-02 Part no.

CATALOG VC10

PSI PSI 10 10 5 01 01 02 02 05 05 1 2 5 WATER FLOW-GPM SERIES 58 FLOW CHARTS 97 SOLENOID VALVES . . .

KP/KPQ/KPG

KPQU12-04 KPGU04-M5 KPGU04-01 KPGU04-02 KPGU06-M5 KPGU06-01 KPGU06-02 KPGU08-01 KPGU08-02 KPGU10-02 KPGU10-03 KPGU12-03 KPGU12-04 41.7 44.2 48.2 44.9 47.4 51.4 55.5 60.6 63.8 61.3 67 71.4 38 38 42 41.5 41.5 45.5 49.5 54.5 58 55 60.5 63.5 10 11 20 12 11 21 15 23 30 40 40 65 D 11 4 4 4 18 10.4 10.4 14 13 M 6 10 10 19.5 12.8 12.8 14 8 A L 4.2 8 17 15.2 18 26 21.5 15.2 (R) 10 19 18.5 29 41 24

VCA

A 2 02 02 Enter the mounting valve and option part numbers under the manifold base part number.

VCA

36 44 53 55.5 Q 63 66 69 69 R 35 42 51 53.5 S 51 54 57 57 Q 27 30 32 32 R 40 48 56 58.5 41 50 60 68 64 76 86 91 18 24 30 35 28 34 40 40 11.5 14 15 17.5 15 17 20 20 20.5 25 30 34 12.8 19 23 23 M4 M5 M5 M5 VCA21 VCA31 1/4 1/4, 3/8 3/8, 1/2 3/4 VCA41 4 Series VCA How to Order Manifolds (VCA20) VV2C A 2 02 02 How to Order Manifold Assemblies (Example) Enter the valve and option models to be mounted