Rotary Actuator Rack & Pinion Style Series CRA1 Size: 30, 50, 63, 80, 100 1

LB LC LD LE LF LH LT Model LA F H MM U FD FT FX FY ZX ZY Model M 6 x 1.0 depth 12 200 (233) 224 (257) CRA1L50 CRA1F50 41 62 9 4 39 44 108 4.5 114 9 13 90 50 110 81 M 6 x 1.0 depth 12 235 (273.5) 263 (301.5) CRA1L63 CRA1F63 48 76 11 5 45 55 127 5 136 11.5 15 105 59 130 101 M8 x 1.25 depth 16 274 (318) 316 (360) CRA1L80 CRA1F80 58 92 13 5 55 67 154 6 165 13.5 18 130 76 160 119 M10 x 1.5 depth

ZP

63 103 154 3.5 Model ZPX63HJ25-B01-A18 ZPX63HJ50-B01-A18 ZPX63HJ75-B01-A18 ZPX80HJ25-B01-A18 ZPX80HJ50-B01-A18 ZPX80HJ75-B01-A18 63 65 14.5 26 41 63 136 189 3.5 40 ZPX40HJ75-B01-A18 42 171 222 63 65 14.5 26 41 63 172 225 3.5 50 ZPX50HJ25-B01-A18 52 100 151 80 82 16.5 28 43 65 105 156 4.5 50 ZPX50HJ50-B01-A18 52 135 186 80 82 16.5 28 43 65 138 191 4.5 50 ZPX50HJ75-B01-A18 52 171 222 80 82

Rotary Actuator Rack & Pinion Style Series CRA1 Size: 30, 50, 63, 80, 100 1

LB LC LD LE LF LH LT Model LA MM U FD FT FX FY ZX ZY F H Model M 6 x 1.0 depth 12 200 (233) 224 (257) CRA1L50 CRA1F50 41 62 9 44 4 39 108 4.5 114 9 13 90 50 110 81 M 6 x 1.0 depth 12 235 (273.5) 263 (301.5) CRA1L63 CRA1F63 48 76 11 55 5 45 127 5 136 11.5 15 105 59 130 101 M8 x 1.25 depth 16 274 (318) 316 (360) CRA1L80 CRA1F80 58 92 13 67 5 55 154 6 165 13.5 18 130 76 160 119 M10 x 1.5 depth

Best Pneumatics Vol. 14

35 14 7 71 28.5 0 7 4 64 194 153 38 80 167 55 57 41 35 14 7 7 4 71 66 30.5 3.5 194 153 38 80 167 72.5 75 50 40 18 9 9 4 88 74 35 3.5 226 187 40 110 220 77.5 80 50 40 18 9 88 35 3 9 4.6 74 226 187 38 110 235 93 96 70 50 20 11 115 44.5 3.3 11 6.4 84 303 264 43 110 282 98 96 70 50 20 11 11 6.4 117.5 84 44.5 3.3 318 279 45 110 292 98 101 70 50 20 11 11 6.4 117.5 84 44.5 3.3 318 280 46

Series SYJ300/500/700 3 Port Solenoid Valve Rubber Seal

R Port Rc (PT)1/8 40/41 Type How to Order SS3YJ7-40 -05 --01 Applicable solenoid valve SYJ714-l SYJ714M-l SYJ724-l SYJ724M-l R Port Rc (PT)1/8 R Port Rc (PT)1/4 Valve model P Port Rc (PT)1/8 01 Rc (PT)1/8 A port side P Port Rc (PT)1/4 Stations 40 Type 40 Applicable blank plate ass'y SYJ700-10-2A 2 stations 02 41 Type 41 .. ..

Compact Guide Cylinder

mm stroke or more 100 mm stroke or less 101 mm stroke or more 100 mm stroke or less 101 mm stroke or more 100 mm stroke or less 101 mm stroke or more 100 mm stroke or less 101 mm stroke or more 100 mm stroke or less 101 mm stroke or more Bore size 12 7.5 7.5 10 19.5 22 4.5 2 3.5 3.5 6 23.5 26 1 16 9 7.5 10.5 19.5 22.5 4.5 1.5 5 3.5 6.5 23.5 26.5 1 20 13.5 13.5 15 25.5 27 9.5 9.5 11 29.5

High Vacuum Angle Valve

Valve size 16 25 40 50 63 80 Bellows assembly u XL1A16-2-101 XL1A25-2-101 XL1A40-2-101 XL1A50-2-101 XL1A63-2-101 XL1A80-2-101 Nut assembly o XL1A16-10-1 XL1A25-10-1 XL1A40-10-1 XL1A50-10-1 XL1A80-10-1 Bellows assembly * Bellows assembly includes the valve seal 1 (Standard material: FKM).

Direct Operated Pilot Operated 2-Port Solenoid Valve Refer to pages 7, 9, 11, 25, 35, and 39 for details.

75.7 51.9 77.2 58.3 70 77.2 34.3 76 44.1 80 40A 71.6 31.1 77.3 41 78.9 51.9 80.4 58.3 70 80.4 34.3 79.2 44.1 90 50A 77.1 31.1 82.8 41 84.4 51.9 85.9 58.3 70 85.9 34.3 84.7 44.1 34 Zero Differential Pressure Type Pilot Operated 2-Port Solenoid Valve JSXZ Series Differs depending on the voltage and electrical entry.

ZP

Form w 1 Material e Vacuum inlet r Mounting Bracket Assembly Flat, Ball Joint Type Thin Flat Type with Ribs Deep Type Connection M5 x 0.8 thread B 10 B5 41 25 2.5 M5 x 0.8 5 16 42 26 25 48 30 3.5 10 N S U F GN GS N4 N6 U4 U6 41 25 2.5 M6 x 1 6 16 42 26 25 48 30 3.5 40 57 39 6 25 B8 48 30 3.5 M8 x 1.25 8 40 57 39 6 ZP Y D C2 B6 Construction p. 117 Adapter Assembly p. 123 Dimensions Per Vacuum

CQS

MU Theoretical Output (N) OUT IN DAllowable Kinetic Energy (J) Operating pressure (MPa) Rod size (mm) Operating direction Piston area (mm 2) Bore size (mm) 12 16 20 25 Bore size (mm) 0.3 0.5 0.7 -X Standard 0.022 0.038 0.055 0.09 84.8 IN 25 42 59 12 6 With rubber bumper 0.043 0.075 0.11 0.18 20113 OUT 34 57 79 151 IN 45 75 106 16 8 Data Minimum Operating Pressure (MPa) 201 OUT 60 101 141

15

[mm] Size Stroke range [mm] MA MC MD MH ML MO MR XA XB 15 to 39 24 32 50 M5 x 0.8 6.5 4 5 40 to 100 42 41 101 to 124 75 125 to 200 59 49.5 201 to 400 76 58 25 20 29 20 to 39 22 36 50 M6 x 1 8.5 5 6 40 to 100 36 43 101 to 124 80 125 to 200 53 51.5 201 to 500 70 60 32 25 30 50 to 70 24 50 44 65 M8 x 1.25 10 6 7 75 to 120 45 60.5 125 to 200 58 67 205 to 500 86 81 100 505 to 800 135 63 38 857

VCW

, 3/8 VCW31 30 50 86 36.5 13.5 15 32 25 23 M5 8 24 59 46 57 60 54.5 48.5 101 57 68 104 1/2 22 45 90 41 11 17 36 22.5 23 M5 8 26 64.5 48 62.5 62 60 50.5 103 62.5 70 107 1/4, 3/8 VCW41 30 50 94 41 13.5 17 36 25 23 M5 8 26 66.5 48 64.5 62 62 50.5 103 64.5 70 111.5 1/2 35 60 102 41 17.5 17 36 30 28.2 M5 8 26 70 48 68 62 65.5 50.5 103 68 70 119 3/4 17-2-55 8 Series VCW Dimensions (N.O.)

Series SYJ500 Rubber seal 3 Port Pilot Solenoid Valve

-M5 SYJ54 1/8 Type SS3YJ5-41-01 Type SS3YJ5-41-C4 Type SS3YJ5-41-C6 C6 1/8 M5 x 0.8 1/8 M5 x 0.8 1/8 1/8 Body ported for external pilot SYJ52R Type SS3YJ5-21R Type SS3YJ5-40R-M5 Type SS3YJ5-40R-01 1/8 1/8 1/8 1/8 1/8 Base mounted for external pilot Type SS3YJ5-41R-M5 M5 x 0.8 1/8 SYJ54R Type SS3YJ5-41R-01 Type SS3YJ5-41R-C4 C4 C6 Type SS3YJ5-41R-C6 Note) Value at manifold base mounted, 2

SMC

G H 5.5 11 11 5.5 B A 3.2 6.5 7 7 12 1 4 NN-M4 x 0.7 thread depth 8 B A 3H9 depth 2.5 +0.025 0 3H9 depth 2.5 +0.025 0 HA GA Section AA Section BB (mm) Model F 20 30 20 28 38 ZZ 64 74 84 106 122 M 42 52 62 84 100 Z 41.5 51.5 61.5 83.5 99.5 K 22.5 32.5 42.5 52.5 62.5 J 17 27 40 50 60 I 10 10 7 19 25 NN 2 2 3 3 4 H 25 35 20 30 24 G 6 6 11 13 17 HA 20 20 20 30 48 N 4 4 6 6 6 GA 11 21 31 43 41

Series 10-SYJ3000/5000/7000 Rubber Seal 4/5 Port Solenoid Valve

P R S P R R port 1/8 R port 1/8 A, B port size Nil Rc A B B A A, B port M5 x 0.8, C4 P port 1/8 P port 1/8 M5 F G M5 x 0.8 A, B port M5 x 0.8, C4 N C4 NPT 4 One-touch fitting T NPTF N3 5/32" One-touch fitting Type 41 (5 port/Base mounted) How to Order 10 SS5YJ3 41 05 C4 Type 41 Type S41 ( ) Single solenoid pilot valve is on same side as the A, B port.

0.4

23 C10 [1(P) SUP port] C10: 10 One-touch fitting 1 L n Dimensions Formula L1 = 16n + 53, L2 = 16n + 101 n: Station (Maximum 16 stations) 2 3 4 5 6 7 8 9 10 11 12 13 14 15 16 L1 L2 L3 L4 69 85 101 117 133 149 165 181 197 213 229 245 261 277 293 309 117 133 149 165 181 197 213 229 245 261 277 293 309 325 341 357 137.5 162.5 175 187.5 212.5 225 237.5 250 275 287.5 300 312.5 337.5 350 362.5

44

51 37 41 50 41 45 57 42 43 53 72 78 KA 4 2.5 1.8 1.6 10 8 13.5 5 4 3 KQG2 2.3 2.6 Applicable tubing L1 M 6 4 6 10 10 15 5.8 3.3 KG H1 12 d 8 6 KFG2 KFG2 5.3 12 14 17.4 6.6 16 22.2 A L2 23 H2 MS 25.6 10 7.5 6.8 26 Connection thread 27.5 15 17 20.9 7.6 KKA 27 25.6 10 8 7.3 30 KP 27.5 27 25.6 12 9 8 LQ 35 27.5 16 17 23.5 8.5 34 MQR 25.6 12 10 9 44 27.5 31 32.9 T 16 13 79 12 21 22 26.2 9.3 IDK

Table of Contents

Slide screw 12 10 20 12 10 20 20 20 40 LJ1H10 LJ1H20 LJ1H30 LJ1H10 LJ1H20 LJ1H30 LJ1H10 LJ1H20 LJ1H30 LJ1H10 LJ1H20 LJ1H30 2 Horizontal 8 25 25 18 Standard motor 8 12 8 12 24 5 10 5 10 Vertical 32 10 12 10 20 10 12 10 20 40 High rigidity direct acting guide LJ1H 20 20 40 44 Horizontal 50 25 25 60 Non-standard motor 8 12 8 12 66 5 10 5 10 Vertical 74 10 10 82 Options Page 100 Made to Order 101

SYJ3000/5000/7000

For SYJ5000, refer to page 1-5-41, and for SYJ7000, refer to page 1-5-64.

ZR

Display LCD LCD with backlight LED Pressure setting range 101 to 10 kPa 101 to 0 kPa Maximum operating pressure 200 KPa Operation indicator light (Lights up when ON) Green OUT1: Green OUT2: Red Response frequency 200 Hz (5 ms) Hysteresis mode Variable (3 digits or more) Variable (can be set from 0) Hysteresis Window comparator mode Fixed (3 digits) Fluid Air, Non-corrosive gas Temperature