Micro Mechanical Valve Series VM1000

VM230U-02-08A VM-08A 110 g Red VM220-02-30RA VM230-02-30RA VM220U-02-30RA VM230U-02-30RA VM-30AR 58 g Black VM220-02-30BA VM230-02-30BA VM220U-02-30BA VM230U-02-30BA VM-30AB Green VM220-02-30GA VM230-02-30GA VM220U-02-30GA VM230U-02-30GA VM-30AG Yellow VM220-02-30YA VM230-02-30YA VM220U-02-30YA VM230U-02-30YA VM-30AY Push button (Mushroom) Red VM220-02-32RA VM230-02-32RA VM220U-02-32RA VM230U

Table of Contents

(mm) Proper tightening torque (Nm) Cylinder stroke (mm) Model 5 10 15 20 25 30 40 50 6, 10 16 20, 25 32 M3 M4 M5 M6 1.08 10% 2.45 10% 5.10 10% 8.04 10% 22 (27) 25 (35) 28 (38) 31 (41) 34 (44) 37 (47) C(D)U6-D 36 (41) 40 (50) 44 (54) 48 (58) 52 (62) 56 (66) C(D)U10-D 50 (75) 56 (86) 62 (92) 68 (98) 74 (104) 80 (110) C(D)U16-D 95 (128) 106 (143) 117 (154) 128 (165) 139 (176) 150 (187)

Table of Contents

Load factor: ((Load weight x 9.8)/Theoretical force) x 100% Conditions Body ported Series CJ2 Series CM2 Series MB, CA1 T0425 x 1 m Tube bore x Length VQ0149-C4 Speed controller AS2001F-04 AN103-X233 Silencer Tube bore x Length T0604 x 1 m 30 41 VQ11 -C6 Speed controller AS3001F-06 Silencer AN103-X233 T0806 x 1 m Tube bore x Length VQ2149-C8 Speed controller AS3001F-08 Silencer AN200-KM8

2/3 Port Valve

8 10 12 55 63 74 1 4 1 2 1 1 2 VND50D-32A VND60D-40A VND70D-50A Flange/32F, 40F, 50F Port size VX VN VQ Model Pilot port Rc(PT) Applicable flange A B C D E F G H J 8 10 12 50 40 32 1 8 1 4 1 4 130 150 180 211.5 227 251 135 140 155 135 147 163.5 20 24 24 100 105 120 36 42 54 12 12 14 VND50D-32F VND60D-40F VND70D-50F 4.2-41 VND Precautions Be sure to read before handling.

3 Port Solenoid Valve Series VQ100 1

Stations U side D side 2 stations 02 VVQ1000-10A-2 Stations4321 20 stations 20 Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com Port size and thread M5, Rc 1/8 NPT 1/8 NPTF 1/8 PF 1/8 Nil 01N 01T 01F Only thread port size 1/8 type, (Type 2U, P/E port) has choice

5 Port Solenoid Valve Metal Seal/Rubber Seal Series SQ1000/2000 1

Load factor: ((Load weight x 9.8) /Theoretical force) x 100% Note) 2 position single, 4/2 5/3 (A/B R1/R2) Conditions Base mounted Series CJ2 Series CM2 Series MB/CA1 TO604 x 1 m Tube x Length SQ1000 Speed controller AS3001F-06 Silencer AN110-01 Tube x Length T0604 x 1 m T1075 x 1 m T1209 x 1 m Speed controller AS4001F-10 AS3001F-06 SQ2000 Silencer AN200-02 2-3-1 2 Series SQ1000/2000 Precautions

VQ

Stations Stasions 3 2 1 Dside Uside 02 2 stations VVQ1000-10A-2 20 20 stations Port size and thread 01N 01T 01F M5, Rc(PT)1/8 NPT1/8 NPTF1/8 G(PF)1/8 Only thread port size 1/8 style (2U type, P/E port) has choice of thread.

Made to Order

39 st 41 to 99 st 101 to 249 st 11 to 39 st 41 to 99 st 101 to 249 st 12 43 55 84.5 1 13 42.5 16 49 65 94.5 3 19 48.5 Bore size (mm) A E 21 to 74 st 76 to 199 st 201 to 399 st 21 to 74 st 76 to 199 st 201 to 399 st 20 53 77.5 110 0 24.5 57 25 53.5 77.5 109.5 0 24 56 Bore size (mm) A E 21 to 39 st 41 to 124 st 126 to 199 st 201 to 399 st 21 to 39 st 41 to 124 st 126 to 199 st 201 to 399 st

1

WA WB Bore size (mm) Stroke range (mm) 26 to 39 st 41 to 124 st 124 124 124 128 128 148 126 to 199 st 200 200 200 200 200 220 201 to 299 st 300 300 300 300 300 320 301 to 399 st 26 to 39 st 41 to 124 st 126 to 199 st 201 to 299 st 171 172 174 174 178 171 301 to 399 st CP95 32 40 50 63 80 100 121 122 124 124 128 121 83 84 86 88 92 85 45 46 48 50 54 47 48 48 48 52 52 72 33 34 36 38 42 35 24

MGP

171 50st or less 21.5 15 21 16 Over 200st 80.5 74 89 84 A E HT Bore size (mm) 32 40 50 63 110 118 146 160 Over 50st to 200st 94.5 95 112 112 128 128 152 172 Over 50st to 200st 31.5 31.5 42.5 36 46 41 45.5 46 Over 200st 132 132 150 150 171 171 203 213 Over 200st 69 68.5 80.5 74 89 84 96.5 87 XC4 80 93 113 121 153 167 205 244 XC35 80 93 110 118 146 160 200 238 50st or less 63 63.5 97 97 106.5

4-channel Flow Monitor ( compatible)

output style 16 Line name (left side 4 digits, right side 5 digits) 17 Display channel 18 CH1 measurement display value 19 CH2 measurement display value 20 CH3 measurement display value 21 CH4 measurement display value 22 Display OFF (No display) : Settable : Not settable (negative acknowledge) -87No.PF-OMA1011-A [Line name communication data] Value (16 Hex number) 00 01 02

VND

External pilot air LVC Lubrication Temperature Not required (Use turbine oil Class 1 ISO VG32, if lubricated.) 5 to 60C LVA No freezing LVH LVD Graph (1) VND 02 D Pilot Pressure (N.O. type) JIS Symbol Valve type Valve size N.C. N.O. Normally closed Normally open LVQ 0.7 12 (P1) 10 (P2) Pilot pressure should be within the range of A against the operating pressure.

Drain Separator for Vacuum Series AMJ 1

16 53 14 169 (171) 53 1/4, 3/8 AMJ3000 194 (195) 2.3 70 10.5 8.5 26 54 50 17 70 18 205 (206) 70 3/8, 1/2 AMJ4000 273 (274) 3.2 90 13 11 35 66 70 23 90 24 284 (285) 90 3/4, 1 AMJ5000 Note) ( ) is the case for metal bowl. 13-13-5

High Vacuum Angle Valve

G G Heater A A [mm] Series Valve size A B C D E Fn G H J K 25 50 121 48 27 12 40 26 44 21 40 65 171 66 39 11 55 41 67 29 50 70 185 79 31 11 75 52 76 29 9 XLC XLG 19 Heat-resistant 2-Color Indicator Solid State Auto Switch: Direct Mounting Type D-M9NJ/D-M9PJ RoHS Refer to the SMC website for details on products that are compliant with international standards.

MGP

Contents Contents 20 25 32 40 50 63 80 100 MGP63-B-PS MGP80-B-PS MGP100-B-PS MGP20-B-PS MGP25-B-PS MGP32-B-PS MGP40-B-PS MGP50-B-PS Kits include items 21, 22, 23, 24, 32, 33, 41 and 42 from the table above. Kits include items 21, 22, 23, 24, 32, 33, 41 and 42 from the table above. Items 32 and 33 are not included for bores sizes 80 and 100.

Battery-less

To SI To MOT Provided by the customer To PWR Power supply for controller 24 VDC Step data input type JXC51/61 Communication cable (3 m) p. 171 Power supply plug p. 171 p. 165 (Accessory) Options VCommunication cable for controller setting VConversion cable*2 VTeaching box p. 171 p. 171 p. 171 P5062-5 (0.3 m) Communication cable : JXC-W2A-C USB cable : LEC-W2-U (With 3 m cable) LEC-T1-3mGm

ISO Cylinder

Weights [g] Bore size [mm] 8 10 12 16 20 25 C85KN 39 41 82 95 189 257 C85KE 41 43 86 98 194 262 Without magnet C85KF 37 39 77 85 174 240 C85KY 37 39 77 85 175 241 Basic weight CD85KN 39 41 83 95 193 261 CD85KE 41 43 86 99 198 266 With magnet CD85KF 37 39 77 85 178 244 CD85KY 37 39 78 85 178 245 Additional weight per 10 mm of stroke 2.3 2.5 4.5 5.5 8.7 12.2 Foot (1 pc.)

IDU/IDF

B 171 217 284 171 217 284 171 217 284 171 217 284 171 217 284 199 217 284 171 217 284 171 217 284 171 217 284 171 217 284 199 217 284 G H Weight (kg) 33 37 46 30 34 43 39 44 53 39 44 53 54 59 68 60 66 78 38 43 52 50 55 64 54 59 68 66 71 80 76 82 94 IDF-TR500-1 IDF-TR500-2 IDF-TR500-3.4 IDF-TR500-1 IDF-TR500-2 IDF-TR500-3.4 IDF-TR500-1 IDF-TR500-2 IDF-TR500-3.4 IDF-TR500-1 IDF-TR500-2 IDF-TR500

High Vacuum Angle Valve

G G Heater A A [mm] Series Valve size A B C D E Fn G H J K 25 50 121 48 27 12 40 26 44 21 40 65 171 66 39 11 55 41 67 29 50 70 185 79 31 11 75 52 76 29 9 XLC XLG 19 Heat-resistant 2-Color Indicator Solid State Auto Switch: Direct Mounting Type D-M9NJ/D-M9PJ RoHS Refer to the SMC website for details on products that are compliant with international standards.

10

47.3 39 NT-12M 125 M27 x 2 16 41 47.3 39 CJ2 JCM Note 1) Split pins and flat washers are included.