MHZ

20 25 32 40 6 10 16 20 25 32 40 6 10 16 20 25 32 40 32, 40 Double acting Normally closed Normally open Single acting 3.7 13 38 57 83 161 267 JIS Symbol Double acting Note 1) Values based on pressure of 0.5 MPa, gripping point L = 20 mm, at center of stroke.

MHZ

20 25 32 40 6 10 16 20 25 32 40 6 10 16 20 25 32 40 32, 40 Double acting Normally closed Normally open Single acting 3.7 13 38 57 83 161 267 JIS Symbol Double acting Note 1) Values based on pressure of 0.5 MPa, gripping point L = 20 mm, at center of stroke.

Series 10-SY3000/5000/7000/9000 5 Port Solenoid Valve

Fittings & Tubing Air Cylinders Rotary Actuators 97.3 [101.7] (Lead wire length) Approx. 300 (External pilot port) M5 x 0.8 8 15 28 (For mounting) 4 x 4.5 Manual override 73.3 [75.5] 88.8 [93.2] EB P EA X PE 16 14.7 16 A A A A A 24.6 16 19.4 32.6 55.8 1.8 6.7 51.1 B B B B B (P, EA, EB port) 1/8 (Pilot EXH port) M5 x 0.8 (Pitch) 18.5 4 P = 12.5 L2 L1

1

82 100 108 139 153 8 8 10 10 12 12 16 16 58 64 83 93 112 120 148 162 7.5 8 8.5 9 9 10 11 13.5 29 33 37 37.5 37.5 44 44 49 6 6 8 8 8 8 9 9 11 11 10.5 11.5 12.5 14 14 16.5 10, 20, 30, 40, 50, 75, 100, 125, 150, 175, 200, 250 20, 30, 40, 50, 75, 100, 125, 150, 175, 200, 250, 300, 350, 400 -X M5 x 0.8 M5 x 0.8 2-Rc 3/8 20M6 x 1.0 GC GA GB FA FB 6H7 depth XL 32 40 50 63 M8 x 1.25 PB 16 2-Rc 3/

AC

AL Model Port size A B C D M N P R B B E F G H J K L M5 X 0.8 38.5 50 70.5 70.5 88 88 108 108 108 16 23 26 26 33 36 40 40 40 105 147.5 4.5 5.5 7 7 9 9 12 12 12 50 80 80 80 105 105 105 105 105 91 140 181 181 238 253 300 310 315 5 5 7 7 7 7 10 10 10 7.5 8.5 11 11 13 13 16 16 16 25.5 38 38 38 41 40.5 48 48 48 84.5 124.5 153 153 188 189.5 268 282 282 26 56.8 60.8 60.8 65.5 69.5 75.5 75.5 78 25

Series SY 5 Port Rubber Seal Solenoid Valve High Capacity & Simple Choices

(G), (H): SY7 40(R)-Q 02 03 3 4 5 Scale: 35% G H SV SY SY SYJ SX VK VZ VF VFR VP7 VQC SQ VQ L type plug connector (L): SY7 40(R)-L-Q M type plug connector (M): SY7 40(R)-M-Q DIN terminal (D): SY7 40(R)-D-Q 02 03 3 4 5 3 4 5 02 03 02 03 3 4 5 VQ4 VQ5 Applicable cable O.D. 3.5 to 7 VQZ 91.5 VQD 84 172.4 Max. 10 72.7 VFS VS VS7 Pg.1.2-16 VQ7 20.5 20.5 174.2 33 60.6 11.5 26.5 1.2-41 Base Mounted

Series 10-SYJ3000/5000/7000 Rubber Seal 4/5 Port Solenoid Valve

F G N NPT Valve stations T NPTF Note Stations Symbol 04 4 stations A, B port size Double wiring Note 1) M5 M5 x 0.8 08 8 stations C4 4 One-touch fitting 04 4 stations N3 5/32 One-touch fitting Specified layout Note 2) (Up to 16 solenoids) Air Preparation Equipment Pressure Control Equipment Flow Control Equipment Pressure Switches/ Pressure Sensors 16 SI unit part no. 16 stations Includes

NCG/CG1

WH Rod End Lock: -R Head End Lock: -H Bore size (mm) Bore size (mm) WH W P WA WB WH W P WA WB 20 M5 x 0.8 16 15(16) 30 M5 x 0.8 16 16 30 23 23 20 25 M5 x 0.8 16 15(16) 30 30 M5 x 0.8 16 16 25 25 25 32 Rc 1/8 16 15(16) 25 Rc 1/8 16 16 25 28.5 28.5 32 40 20 Rc 1/8 16 15(16) Rc 1/8 16 16 20 33 33 40 50 20 Rc 1/4 18 17(18) 40.5 Rc 1/4 18 18 20 40.5 50 63 47.5 20 Rc 1/4 18 17(18) Rc 1/4 18 18

5

) 1 80 85 90 95 100 D-M9lA n 80 + 40 (n 4) 2 (n = 4, 8, 12, 16) Note 2) 85 + 40 (n 4) 2 (n = 4, 8, 12, 16) Note 2) 90 + 40 (n 4) 2 (n = 4, 8, 12, 16) Note 2) 95 + 40 (n 4) 2 (n = 4, 8, 12, 16) Note 2) 100 + 40 (n 4) 2 (n = 4, 8, 12, 16) Note 2) 2 (Different surfaces, same surface) 1 55 60 65 70 75 D-M9lAV n 55 + 30 (n 4) 2 (n = 4, 8, 12, 16) Note 2) 60 + 30 (n 4) 2 (n = 4, 8, 12, 16

SX

Port size M5 x 0.8 SX3000 SX3000-39-2A SX5000 SX5000-39-16 A SX7000 SX7000-39-16 A Series Assembly part no. Port size M5 x 0.8 SX3000 SX3000-38-2A SX5000 SX5000-38-16 A SX7000 SX7000-38-16 A Bolt and gasket part no. 1 8 1 4 Note) The SUP port may be either on the lead wire side or on the end plate side.

SYJ3000/5000/7000

rate: 50% Stroke 300 mm 6 10 16 20 25 32 40 Average speed (mm/s) Series 800 700 600 500 400 300 200 100 0 Perpendicular, upward actuation Horizontal actuation SYJ3140-M5 Cylinder is in extending.

ZP

Thread dia. 4, 6 Nylon tube, 4, 6 Urethane tube 4, 6 Nylon tube, 4, 6 Urethane tube 6 Nylon tube, 6 Urethane tube 2 x 4, 3.5 x 7, 4 x 10 Thin section series (10 to 16) 2 to 8 10 to 16 20 to 32 40 to 50 M5 x 0.8, M6 x 1 M4 x 0.7, M5 x 0.8 M5 x 0.8, M6 x 1 M5 x 0.8, M6 x 1 M6 x 1, M8 x 1 M6 x 1, M8 x 1 M5 x 0.8, M6 x 1, M8 x 1.25 M6 x 1, M8 x 1.25 Pad Type Pad form Flat with ribs Deep Bellows

CJ2

NTJ-010A 10 16 M4 x 0.7 7 8 3.2 4 8.1 9.2 NTJ-015A M5 x 0.8 Bore size (mm) 10 16 NA MM H GB GA ZZ Z D U CZ S CX C A CD (cd) NB R B M4 x 0.7 28 18 8 93 82 4 8 12 46 3.2 14 15 5 12 3.3 12.5 22.5 M5 x 0.8 28 23 8 99 85 5 10 18.3 47 6.5 20 15 8 18.3 5 12.5 27.5 T-bracket Dimensions TY TX TW TV TH TC Bore size (mm) 10 16 12 32 22 40 29 4.5 16 38 28 48 35 5.5 With Air Cushion/Dimensions other than

Air Slide Table Series MXQ

x 16 M6 x 20 M8 x 20 M2.5 x 6 M3 x 8 M4 x 12 M5 x 16 M6 x 16 M8 x 18 0.5 0.9 2.1 4.4 4.4 7.0 0.5 0.9 2.1 4.4 7.0 18.0 0.5 0.9 2.1 4.4 7.0 18.0 M2.5 x 6 M3 x 8 M4 x 10 M5 x 12 M5 x 14 M6 x 18 Individual -X 131 Series MXQ Specific Product Precautions 4 Be sure to read before handling.

Magnetically Coupled Rodless Cylinder

TF G 1/8 G 1/8 G 1/8 G 1/4 G 1/4 G 1/4 TN NPT 1/8 NPT 1/8 NPT 1/8 NPT 1/4 NPT 1/4 NPT 1/4 Nil M3 x 0.5 M5 x 0.8 M5 x 0.8 Rc 1/8 Rc 1/8 Rc 1/8 Rc 1/4 Rc 1/4 Rc 1/4 CY3B6 CY3B10 CY3B15 CY3B20 CY3B25 CY3B32 CY3B40 CY3B50 CY3B63 25 30 35 50 50 50 60 60 70 10 16 19 25 30 40 40 60 70 16 16 78 81 103 132 137 156 182 180 192 d b C H B d M6 x 1.0 M10 x 1.0 M20 x 1.5 M26 x 1.5 M32 x 2.0 H 4 4 8 8 10

Table of Contents

M5 (18) M5 (10) 5.5 (16.5) 0 0.043 0.005 0.014 8 16 50 40 13 22 5 2 8 12 1.0 43 M5 11-2-15 15 Series CRB2 Dimensions: 40 Single vane type/Double vane type CRB2BW40-S/D M5 x 0.8 depth 10 3-M5 x 0.8 depth 10 56 3-M5 x 0.8 depth 16 Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local

Air Slide Table Series MXS

(mm) Model F 35 35 35 40 30 55 65 70 N 4 4 4 4 6 6 6 8 G 16 16 16 16 21 26 39 19 H 40 40 40 50 30 35 35 35 NN 2 2 2 2 3 4 5 7 GA 16 16 16 16 51 61 109 159 HA 40 40 40 50 30 70 70 70 I 10 10 10 10 15 40 55 68 J 40 40 40 50 60 85 118 155 K 29 39 49 59 69 94 119 144 KA 125 173 223 NA 2 2 2 2 2 4 4 4 M 76 76 76 86 101 151 199 249 Z 75 75 75 85 100 150 198 248 ZZ 87 87 87 97 112 162 210 260 DMXS16L

Rotary Actuator Vane Style Series CRB2 Size: 10, 15, 20, 30, 40 1

M5 (18) M5 (10) 5.5 (16.5) 0.005 0.014 0 0.043 8 16 50 40 13 22 5 2 8 12 1.0 43 M5 11-2-15 15 Series CRB2 Dimensions: 40 Single vane type/Double vane type CRB2BW40-S/D M5 x 0.8 depth 10 3-M5 x 0.8 depth 10 56 3-M5 x 0.8 depth 16 25 25 M5 x 0.8 depth 16 5.5 depth A port B port 11.5 10 g6 -0.005 -0.014 2 20 0 -0.030 4 6.5 10 30 45 Body B (mm) (90) h Keyway

Rotary Actuator Vane Style Series CRB2 Size: 10, 15, 20, 30, 40 1

M5 (18) M5 (10) 5.5 (16.5) 0 0.043 0.005 0.014 8 16 50 40 13 22 5 2 8 12 1.0 43 M5 11-2-15 15 Series CRB2 Dimensions: 40 Single vane type/Double vane type CRB2BW40-S/D M5 x 0.8 depth 10 3-M5 x 0.8 depth 10 56 3-M5 x 0.8 depth 16 Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local

C85

30 4.5 22 26 11 12.8 25 3.2 16 12.8 4.5 23.8 35 3.2 5 10 13 38 26 4 20 6 40 30 4.5 22 26 11 12.8 25 3.2 16 12.8 4.5 23.8 35 3.2 5 12 18 58 38 6 25 8 52 40 5.5 30 33 14 18 32 4 20 18 5.5 32 42 4 6 16 18 58 38 6 25 8 52 40 5.5 30 33 14 18 32 4 20 18 5.5 32 42 4 6 20 20 66 46 6 32 8 66 50 6.6 40 42 17 19 40 5 25 19 6.6 36 54 5 8 25 24 66 46 6 32 8 66 50 6.6 40 42 17 23 40 5 25 23 6.6 40 54