Smooth Cylinder/Low Speed Cylinder + 40 (n 4) 2 (n = 4, 8, 12, 16) Note 2) 85 + 40 (n 4) 2 90 + 40 (n 4) 2 (n = 4, 8, 12, 16) Note 2) 15 + 40 n (n = 2, 4, 6, 8) Note 1) (n = 4, 8, 12, 16) Note 2) 2 (Different surfaces and same surface) With 1 55 60 65 10 50 D-A9V (n 2) 2 50 + 30 (n 4) 2 (n = 4, 8, 12, 16) Note 2) 55 + 30 (n 4) 2 (n = 4, 8, 12, 16) Note 2) 60 + 30 (n 4) 2 65 + 30 (n 4) 2 (n = 4, 8, 12, 16) Note 2)
B A C B A C B A C B A C B A C B A C B A C kit 98.6 (Double, Dual 3 port valve) P 94.1 (Single) 107.6 (3 position) 9 kit 5.5 67.9 35 J 47.1 34.3 kit 28.1 12.7 T kit 2 x M4 DIN rail clamp screw EXH outlet 49.4 L U side D side Stations n 8 7 6 5 4 3 2 1 kit One-touch fitting 9 60 [3(R), 1(P) port] Applicable tubing O.D.: 8 For top ported S kit 4 4 4 4 4 4 4 4 3 R (49.4) 2 P 1 2 2 2 2 2 2 2 37
) Note 2) 65 + 30 (n 4) 2 (n = 4, 8, 12, 16) Note 2) 70 + 30 (n 4) 2 (n = 4, 8, 12, 16) Note 2) 75 + 30 (n 4) 2 (n = 4, 8, 12, 16) Note 2) 2 (Different surfaces, same surface) 1 70 75 80 85 95 D-A9l n 70 + 40 (n 4) 2 (n = 4, 8, 12, 16) Note 2) 75 + 40 (n 4) 2 (n = 4, 8, 12, 16) Note 2) 80 + 40 (n 4) 2 (n = 4, 8, 12, 16) Note 2) 85 + 40 (n 4) 2 (n = 4, 8, 12, 16) Note 2) 95 + 40 (n
M3 4/2.5 4/2.5 Applicable Tube Dia* OD/ID (mm) M5 4/2.5 6/4 4/2.5 6/4 4/2.5, 6/4 18 Max Operating Pressure 1MPa / 145PSI 0.8MPa / 116PSI 0.5MPa / 73PSI Port Size M3, M5, 18 Thread JIS B0209 class 2 (Metric coarse thread), JIS B0203 (Taper pipe thread) *Dimensions to BS5409 Part 1 H O W T O O R D E R M I N I AT U R E F I T T I N G S P R O D U C T S E L E C T O R M P R O D U C T S E L E C
@3, @4, #2, #3, $1, $2 Seal kit includes @1 to @4, #2, #3, $1, $2.
OPTIONS AND PERIPHERAL EQUIPMENT (3) Dimensions (a) EMC filter HF3010A-UN [Unit: mm] 4-5.5 7 3-M4 3-M4 M4 32 2 110 4 85 2 IN Approx. 41 258 4 65 4 273 2 288 4 300 5 HF3030A-UN/HF-3040A-UN [Unit: mm] 6-K 3-L 3-L G 1 E 1 D 2 F 2 M J 2 C 1 C 1 B 2 H 2 A 5 Model Dimensions [mm] A B C D E F G H J K L M HF3030A-UN 260 210 85 155 140 125 44 140 70 R3.25 length: 8 M5 M4 HF3040A-UN
OPTIONS AND AUXILIARY EQUIPMENT (3) Outline drawing (a) EMC filter HF3010A-UN [Unit: mm] 3-M4 4-5.5 7 3-M4 M4 32 2 110 4 85 2 IN Approx.41 258 4 65 4 273 2 288 4 300 5 HF3030A-UN HF-3040A-UN 6-K 3-L 3-L G 1 F 2 E 1 D 2 M J 2 C 1 C 1 H 2 B 2 A 5 Dimensions [mm] Model A B C D E F G H J K L M HF3030A-UN 260 210 85 155 140 125 44 140 70 R3.25, M5 M4 length 8 HF3040A-UN 260 210 85 155 140 125
(With 2 input blocks) With external pilot specification 46.5 (Pitch) 15.8 9.5 16.5 20.5 17.5 P = 16 M3 M12 11.9 9.2 17.7 25.2 30.6 3 3 4 A 4 A 4 A 4 A 4 A 3 3 3/5 E PWR 49.9 42.7 4 A 4 A 4 A 4 A 4 A E 3/5 3/5 E PWR 2 2 E 3/5 63.5 2 2 2 B 2 B 2 B 2 B 2 B 2 B 2 B 2 B 2 B 2 B 1 1 1 1 1 P P 1 BUS 0 P 1 1 P BUS 0 0 0 X PE PE x One-touch fitting [4(A), 2(B) port] Applicable tubing O.D.: 4, N3 6
Series VQ1000 Plug Lead Plug-in Cassette P. 2-4-12 P. 2-4-14 P/J kit Series VQ0 P R SMC P. 2-4-38 P. 2-4-42 P. 2-4-46 P kit Series VQ1000 P. 2-4-38 P. 2-4-42 P. 2-4-46 P kit Series VQ2000 P. 2-4-38 P. 2-4-42 P. 2-4-46 P kit Series VQ1000 P. 2-4-76 P. 2-4-78 P. 2-4-80 P kit 2-4-4 Manifold Variations C S L Port size kit kit SUP EXH port Cylinder port Lead wire Serial transmission unit VQC P
4, 6, 8 Hexagon width across flats 6 4/2.5 (Barb fitting) Elliptic e c a d b Elliptic Flat Thin Flat/Thin Flat with Ribs a e Y b c d Model A B C Y Model Model A B C Y ZPT02U-4-A8 ZPT2004U 2 1.2 0.3 4 2.6 4.6 2 2.6 1.2 ZPT10UT 10 11 1 ZPT04U-4-A8 ZPT3507U 3.5 1.8 0.5 7 4.3 7.8 4 4.8 1.6 0.8 ZPT13UT 13 14 1.5 ZPT06U-4-A8 ZPT4010U 4 2 0.8 10 5 11 6 7 ZPT16UT 16 17 2.5 2.5 ZPT08U-4-A8 ZPT10CT
4 +0.030 0 6H9 ( ) depth 4 14.5 12.5 A 12 11 6.6 A 7 NN x M8 x 1.25 thread depth 12 HB GB Cross-sectional view A-A Dimensions [mm] Model F G GB H HB I J M N NN Z ZZ MXQ20B-10Z 55 18 7 55 80 30 36 131.5 4 2 95 118 MXQ20B-20Z 46 18 7 55 80 30 36 141.5 4 2 95 118 MXQ20B-30Z 55 28 17 55 80 34 42 151.5 4 2 105 128 MXQ20B-40Z 65 28 17 65 90 34 52 161.5 4 2 115 138 MXQ20B-50Z 75 36 20 80 110 47
Tightening sequence 2) Tightening sequence 1) 2) 1) 3) 1) 2) 3) 4) 1) 4) 2) For moter and encoder connectors For lock connector (2) Tighten the screws evenly. Tightening torques are as indicated below.
6 C !9 u C i y @5 q #1 @4 !1 !4 o !8 @6 !3 !2 @0 @1 !7 !5 !0 t @3 Component Parts No.
Scale: 25% For external pilot specification (Pitch) P = 24 24.3 22.2 11 18.3 18.8 39.3 18.8 3/5 R 3/5 R A 4 A 4 A 4 A 4 18 A 4 A 4 3/5 R 3/5 R A 4 A 4 A 4 A 4 39.3 40.1 A 4 A 4 63.3 79.8 1 P 1 P B 2 B 2 B 2 B 2 B 2 B 2 2-Plug [1 (P), 3/5 (R) port] 1 P 1 P B 2 B 2 B 2 B 2 B 2 B 2 2-One-touch fitting [1 (P), 3/5 (R) port] Applicable tube O.D.: 12 2n1-One-touch fitting [4 (A), 2 (B) port] Applicable
Applicable Model Applicable Model Model AF20-A AF30-A AF40-A AF40-06-A AF50-A AF60-A Port size 1/8, 1/4 1/4, 3/8 1/4, 3/8, 1/2 3/4 3/4, 1 1 Model AF30-A AF40-A AF40-06-A AF50-A AF60-A Port size 1/4, 3/8 1/4, 3/8, 1/2 3/4 3/4, 1 1 30 AF A X425 2 03 B 30 AF A 2 03 B X430 q w t y e r For high pressure q w y e r t Semi-standard: Select one each for a to c.
-2-34 to 14-2-39 ITV Mist separator Series AFM AFM20 1/8, 1/4 IC Bracket AFM30 1/4, 3/8 VBA 0.3 Float type auto-drain AFM40 1/4, 3/8, 1/2 VE VY1 AFM40-06 3/4 Pages 14-2-40 to 14-2-42 G Micro mist separator Series AFD AFD20 1/8, 1/4 PPA Bracket AFD30 1/4, 3/8 AL 0.01 Float type auto-drain AFD40 1/4, 3/8, 1/2 3/4 AFD40-06 Pages 14-2-43 to 14-2-45 14-2-33 34 Air Filter Series AF10 to 60 How
2.5 R 1 R 2 2 1.2 6 8 2 6.7 8.8 3 Applicable pad B06MU/B08MU/B10MU/B15MU ZP2-B10MU ZP2-B15MU 9 8 6 6 4 4 R 4 2 2 1.2 2 2 2 8 R 7 2 2 4 2 2 6 15 10 Note) R part has to be smooth with no corners.
-6 U4 For 4 soft tubing M-5AU-4 U6 For 6 soft tubing M-5AU-6 H Model A B C D 2 E F G H J K Vacuum inlet direction q Pad dia.
Flow Characteristics Flow characteristics Port size 1 4/2 (P A/B) 4/2 5/3 (A/B R) Manifold C [dm3/(sbar)] b Cv C [dm3/(sbar)] b Cv 1(P), 5/3(R) Port 2(B), 4(A) Port Type SS5YJ7-21P-01 1/4 1/4 1/4 2.1 1.4 1.8 0.36 0.32 0.37 0.55 0.36 0.50 2.3 2.1 2.1 0.26 0.24 0.20 0.54 0.50 0.50 1/8 C6 C8 Body ported Type SS5YJ7-21P-C6 SYJ723 for internal pilot Type SS5YJ7-21P-C8 Note) Value at manifold