VQ4000

thread Rc 1/4: Rc 1/4 thread 2 4 VQZ B A B A 7 SMC SMC SMC SMC SMC SMC B A 2 4 B A B A 6 B A VQD 2 4 B A B A 5 D side B A 6.5 L1 2 4 B A B A 4 B A 2 4 Manual override B A B A 3 B A 4 2 B A A 2 A 4 2 B A A 1 SMC Indicator light A 2 4 R4.5 Stations 12 X 16.5 (External pilot port) Rc 1/8 9 9 106 10 163 43.5 96.5 1(P), 5(R1), 3(R2) port 3-Rc 1/2 SMC (Pilot EXH port) Rc 1/8 1 P 5 3 R2 R1 42 17.5

Flow Control Equipment

Controller / 1 4 / 3 8 / 1 2 With One-touch Fittings/Universal / 1 8 20 to 32 20 to 40 40 to 63 63 to 100 AS23l 1FE-01 AS23l 1FE-02 AS33l 1FE-03 AS43l 1FE-04 / 1 4 / 3 8 / 1 2 Port size on piping side Standard/In-line (Metal Body) M3 M5 / 1 8 / 3 4 1 2 1 1 / 1 4 / 1 4 / 1 2 / 3 8 / 1 2 AS2000E-01 AS2000E-02 AS3000E-02 AS3000E-03 AS4000E-02 AS4000E-03 AS4000E-04 20 to 32 20 to 40 32 to 63

5 Port Solenoid Valve SY Series

x 1 m AS4001F-10 SY7120-02 SY7140-03 AS3001F-06 AS4001F-10 AS3001F-06 AN110-01 AN200-02 T0604 x 1 m T1075 x 1 m T1209 x 1 m T0604 x 1 m T1075 x 1 m T1209 x 1 m AS3001F-06 AS4001F-10 AS4001F-12 SY9120-03 SY9140-04 AS3001F-06 AS4001F-10 AS4001F-12 AN202-02 AN200-02 AN200-02 Conditions [When using SGP (steel pipe)] Conditions [When using SGP (steel pipe)] Body ported Base mounted Series CS1

Modular Type Filter Regulator Series AW

Symbol Note 1) Drain guide is NPT1/4 (applicable to AW30 to 40) Note 2) Drain guide is G1/4 (applicable to AW30 to 40). 20 30 40 30 40 01 02 03 04 06 1/8 1/4 3/8 1/2 3/4 02 03 04 06 1/4 3/8 1/2 3/4 Option Note 3) Option Note 3) Description With bracket Applicable model AW30, 40 AW30, 40 AW30, 40 Symbol Nil B G Note 4) H Description With bracket Applicable model AW20 to 40 AW20 to 40 AW20

SYJ300/500/700

Cable length (L) + B A 300 mm V100-49-1-1 VS V100-49-1-2 500 mm 1000 mm 2000 mm 5000 mm Interface V100-49-1-3 V100-49-1-4 V100-49-1-7 VFN Pilot valve (SY114) Adapter plate 22 33.9 14 4-4-61

V

8, 1/4 Port Size 01: 25mm2 02: 27.5mm2 Effective Area Model Port Size NPT A B C NAK2000-N01, 02 18, 14 50 25 22 NAK4000-N02, 03, 04 14, 38, 12 67 36 36 NAK6000-N06, 10 34, 1 95 50 50 H O W T O O R D E R ( N ) A K 2 0 0 0 S E R I E S 000 (N)AK P O R T S I Z E M O D E L 01 1/8 02 1/4 03 3/8 04 1/2 06 3/4 10 1 P O R T T H R E A D 2 1/4 4 1/2 6 1 Nil Rc(PT)* N NPT F G(PF)* * Remove N when ordering

F

-02 M14x1 17 17 31.5 15 15 17 13.1 3/8 3/8 KQE11-36 1/8-14 25.4 25.4 35.5 14.5 23 21 7 6 38 KQE06-03 M14x1 19 17 33.5 17 15 17 13.1 1/2 3/8 KQE13-36 1-12 28.57 28.57 36.5 14.5 26 22 9.6 8 14 KQE08-02 M16x1 17 19 33 12 17 18.5 26.1/18 1/2 1/2 KQE13-37 1-12 28.57 28.57 40.5 18.5 26 22 9.6 8 38 KQE08-03 M16x1 19 19 35 15 17 18.5 26.1/18 10 14 KEQ10-02 M20x1 22 24 35 12 21 21 41.5/29.5 10 38

reduces flow setting time

-01-07 (S) 1/4 11.2 10.2 16.4 29.1 20.2 38.7 15 AS231FS1-01-09 (S) 5/16 13.2 30.1 21.5 40 14.2 16 AS231FS1-02-03 (S) 5/32 7.2 9.6 12 1/8 13 (12.7) 24 AS231FS1-02-07 (S) 1/4 11.2 19 33.8 21.4 43.9 26 AS231FS1-02-09 (S) 5/16 13.2 34.9 23.5 46 14.2 27 AS231FS1-02-11 (S) 3/8 15.9 20.9 38.1 24.7 47.3 15.6 28 AS331FS1-02-07 (S) 1/4 3/8 19 11.2 12.9 16.6 20.2 36 21.4 57.8 63.1 61.7 57.9 56.5 13.3

AS-FG/ASD-FG

AS221FG-02-10 AS221FG-N02-07 36 21 33.9 43.2 18.5 10 13.2 1/4" 40.4 35.4 34.4 29.4 18.5 34 18.5 27.2 36.4 AS321FG-02-06 AS221FG-N02-09 60 17 27.8 39.3 12.8 6 15.2 5/16" 20 21 36 33.9 43.2 AS321FG-02-08 AS221FG-N02-11 63 18.5 29.5 41 15.2 8 17.9 3/8" R(PT) 1/4 23 43.8 48.8 21.8 19 42.8 37.8 27.8 39.3 AS321FG-02-10 AS321FG-N02-07 67 21 31.8 43.3 18.5 10 13.2 1/4" 17 60 NPT 1/4 19 21.8 29.5

IIIIIII

, 0.17 in. (4.4 mm) TJ 0.08 in. i2 0 mm) 0.25 in (6.4 mm) '75 PSIG (5 Kgt/cm2) '75 PSIG (5 Kgf/cm2) @ll -=hl'o Panel Mounting A B c E F u H J K M N o 6 1 9 1 5 7 r ) 532 135 1 1 5 7 t40) o87 t22l 0 0 6 {t 5I o 1 2 {31 0 8 0 20 4\ 1 5 7 (40) 0 9 6 1 2 6 (32) 1 4 2 (36) 1 2 0 (6) A B o E F H J K M N o 6 0 1 152 6l 5,32 1 3 5 ' t 1 5 7 a40l 0 6 9 1 7 5 006 {1 5l o 1 2 f3l 0 8 0 20 1l 1 5 7 440

Mechanical Valves Series NVM, NVFM, NVZNI

, 0.17 in. (4.4 mm) TJ 0.08 in. i2 0 mm) 0.25 in (6.4 mm) '75 PSIG (5 Kgt/cm2) '75 PSIG (5 Kgf/cm2) @ll -=hl'o Panel Mounting A B c E F u H J K M N o 6 1 9 1 5 7 r ) 532 135 1 1 5 7 t40) o87 t22l 0 0 6 {t 5I o 1 2 {31 0 8 0 20 4\ 1 5 7 (40) 0 9 6 1 2 6 (32) 1 4 2 (36) 1 2 0 (6) A B o E F H J K M N o 6 0 1 152 6l 5,32 1 3 5 ' t 1 5 7 a40l 0 6 9 1 7 5 006 {1 5l o 1 2 f3l 0 8 0 20 1l 1 5 7 440

Speed Controller with Indicator Stainless Steel Type Elbow Type/Universal Type AS-FSG Series

5/32 8.2 13.9 25.1 AS231FSG1-01-07 (S) 1/4 11.2 10.2 16.4 29.1 20.2 38.7 15 AS231FSG1-01-09 (S) 5/16 13.2 30.1 21.5 40 14.2 16 AS231FSG1-02-03 (S) 5/32 7.2 9.6 12 1/8 13 (12.7) 24 AS231FSG1-02-07 (S) 1/4 11.2 19 33.8 21.4 43.9 26 AS231FSG1-02-09 (S) 5/16 13.2 34.9 23.5 46 14.2 27 AS231FSG1-02-11 (S) 3/8 15.9 20.9 38.1 24.7 47.3 15.6 28 AS331FSG1-02-07 (S) 1/4 3/8 19 11.2 12.9 16.6 20.2 36

Booster Regulator/Air Tank

Booster regulator Air tank VBA20A/22A VBA10A/11A VBA43A VBA40A/42A VBAT05A(1) VBAT05S(1) VBAT10A(1) VBAT10S(1) VBAT20A(1) VBAT20S(1) VBAT38A(1) VBAT38S(1) VBA42A-04 VBA43A-04 1010 Booster Regulator VBA Series Standard Specifications VBA10A-02 VBA20A-03 VBA40A-04 VBA22A-03 VBA42A-04 VBA11A-02 VBA43A-04 Model Fluid Compressed air 2 to 4 times Note 4) Pressure increase ratio Twice Knob-operated

IR1000/2000/3000

x 1.5 NBR O-ring JIS B 2401 P3 JIS B 2401 P4 JIS B 2401 P5 NBR O-ring (1) (1) (1) P36203015 NBR Seal (A) P36203016 NBR Seal (B) KT-IRV1000 KT-IRV2000 KT-IRV3000 Repair kit no.

Process Pump

B Control unit Diaphragm B Diaphragm A 1.

5 Port Solenoid Valve/Body Ported, Cassette Type Manifold, Series SZ3000

2 B 2 B 2 B 2 B 2 R 3 B 2 B 2 B 2 B 2 PE R 3 B 2 R 3 R 3 A 4 A 4 A 4 A 4 A 4 P 1 P 1 A 4 A 4 A 4 A 4 X P 1 P 1 A 4 2n2-One-touch fitting 2-One-touch fitting 2n1-M5 x 0.8 (A, B ports) (A, B ports) Applicable tube O.D.: 4 6 (X, PE ports) Applicable tube O.D.: 6 (L4) L3 Applicable connector: D-SUB equivalent { } JIS-X-5101 MIL-C-24308 Connector case attachment lever (both sides) (3.2) 101.2

125

AS4000-02 AN20-02 10 x 1 m B 12 x 1 m C VEX33 42-03 04 AS420-03 AN30-03 12 x 1 m D AS420-04 AN40-04 SGP15A x 1 m 1723 3 Port 3 Position Valve Body Ported VEX3 Series How to Order Air operated Pilot solenoid VEX3 B 12 0 01 1 Air operated VEX3 D B 5 1 12 2 01 Pilot solenoid Operation type Option 1 External pilot solenoid 2 Internal pilot solenoid Nil None Thread type Nil Rc F G N NPT T NPTF

Speed Controller with One-touch Fitting Stainless Steel Type Elbow Type/Universal Type AS-FG Series Push-lock type

AS22l1FG-02-03(S)A 5/32" 8.2 AS22l1FG-02-07(S)A 1/4" 11.2 23.4 32.7 (32.8) 18 (18) AS22l1FG-02-09(S)A 5/16" 13.2 23.9 33.2 (33.3) 14.2 18 (19) AS22l1FG-02-11(S)A 3/8" 15.5 26.4 35.7 (35.8) 15.6 19 (20) AS32l1FG-02-07(S)A 1/4" 1/4 19 11.2 16.6 21.8 32.1 36.4 50 48.4 44.5 42.9 13.3 40 (40) AS32l1FG-02-09(S)A 5/16" 13.2 22.7 33 14.2 41 (41) AS32l1FG-02-11(S)A 3/8" 15.5 26.7 37 35.9 15.6 AS32l1FG

VZ100/300/500

01 02 01 02 DIN terminal (D) VZ54-DVFN Applicable cable O.D.: 3.5 to 7 (Lead wire length) 300 300 (Lead wire length) : With light/surge voltage suppressor 4-6-33 34 Series VZ500 Manifold Specifications Flow Characteristics Flow characteristics Port size 1 2 (P A) 2 3 (A R) C [dm3/(sbar)] C [dm3/(sbar)] b Cv b Cv Manifold 1(P), 3(R) port 2(A) port VV3Z5-20-1 VV3Z5-21-1 VV3Z5-40-2 VV3Z5

NCQ8

Snap rings (2) PC-01 PC-02 PC-03 PC-03 PC-05 Snap rings (2) PC-01 PC-02 PC-03 PC-03 PC-05 Clevis (1) RCS-015 RCS-02 RCS-03 RCS-04 RCS-05 Pin (1) PS-015 PS-02 PS-03 PS-03 PS-05 Clevis (1) RCD-015 RCD-02 RCD-03 RCD-04 RCD-05 Pin (1) PS-015 PS-02 PS-03 PS-03 PS-05 056 (9/16") 075 (3/4") 106 (1-1/16") 150 (1-1/2") 200 (2"), 250 (2-1/2") 056 (9/16") 075 (3/4") 106 (1-1/16") 150 (1-1/2") 200 (2